CN111272236A - Gas flow calculation method of gas laminar flow meter and gas laminar flow meter - Google Patents

Gas flow calculation method of gas laminar flow meter and gas laminar flow meter Download PDF

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CN111272236A
CN111272236A CN202010118504.9A CN202010118504A CN111272236A CN 111272236 A CN111272236 A CN 111272236A CN 202010118504 A CN202010118504 A CN 202010118504A CN 111272236 A CN111272236 A CN 111272236A
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gas
laminar flow
unit
flow meter
meter
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CN111272236B (en
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王筱庐
陈玉春
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Northwestern Polytechnical University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure

Abstract

The invention relates to a gas laminar flow technology, in particular to a gas flow calculation method and a gas laminar flow meter. A method for calculating the gas flow of laminar flow meter includes choosing p as pressure valueaIs an auxiliary point a, an initial volume flow q through the auxiliary point aa1Calibrating the instrument coefficient K and calculating the actual gas flow by using the calibrated instrument coefficient K; a gas laminar flow meter using the calculation method is also provided. The method of the invention uses the volume flow q at the auxiliary point aaAnd the delta p is always in a linear relation, the compressibility of the gas is considered, the calculation of the instrument coefficient K is facilitated, the calibration precision of the instrument coefficient K is improved, and the problem of low precision of the conventional laminar flow meter is effectively solved.

Description

Gas flow calculation method of gas laminar flow meter and gas laminar flow meter
Technical Field
The invention relates to a gas laminar flow technology, in particular to a gas flow calculation method and a gas laminar flow meter.
Background
A gas laminar flow meter is a flow meter that performs gas flow measurement by converting gas from turbulent flow to laminar flow. When the gas is in a laminar state, the pressure loss generated by the gas flow is in direct proportion to the gas flow, namely Hagen Poiseuille's law. By measuring the pressure loss, the gas laminar flow meter can obtain the corresponding gas flow.
The gas laminar flow meter comprises a differential pressure sensor, a temperature sensor and a pressure sensor, and the volume flow of an outlet and the volume flow under a standard state are measured and output outwards. Gas laminar flow meters generally use the following calibration and flow measurement equations:
Figure BDA0002392229230000011
Figure BDA0002392229230000012
in the above formula:
q is the volume flow of the outlet of the gas laminar flow meter and is m3/s；
qNIs the volume flow in the standard state, and the unit is m3/s；
K is the meter coefficient of the gas laminar flow meter, is only related to the geometric structure of the gas laminar flow meter and has the unit of m-3；
μ is the kinetic viscosity of the gas, from TmDetermining the unit of Pa & s;
Δ p is the pressure loss generated by the gas laminar flow meter, measured by a differential pressure sensor, and has a unit of Pa;
pmthe outlet pressure of the gas laminar flow meter is measured by a pressure sensor in Pa under a working state;
Tmthe thermodynamic temperature of the outlet of the gas laminar flow meter in a working state is measured by a temperature sensor, and the unit is K;
pNpressure in Pa at standard conditions;
TNis the thermodynamic temperature in standard state, in K;
the gas laminar flow meter needs to be calibrated in a laboratory by adopting the formula to determine a K value, and then can be put into use. When in use, the calibrated K value is used for measuring the volume flow q of the outlet and the volume flow q under the standard stateN。
The current gas laminar flow meters all adopt the above formula, such as a laminar flow element disclosed in patent No. CN201220237073, an engine instantaneous flow measurement laminar flow meter disclosed in patent No. CN200820060508, and a laminar flow element disclosed in patent No. CN 201510610447. These patents all recognize that in a gas laminar flow meter, the pressure loss and the gas flow rate are in absolute proportion.
The above mentioned calibration and flow measurement methods do not take into account the compressibility of the gas and differ widely from reality. When gas flows through the laminar flow meter, the volume of the gas is increased due to pressure loss, and the linearity of the laminar flow meter is damaged, so that the pressure loss is not in direct proportion to the gas flow. The measurement error of the gas laminar flow meter manufactured by the calibration and calculation method is over 1 percent.
At present, researchers also correct the above formula, taking the compressibility of the gas into consideration, and the correction formula is as follows:
Figure BDA0002392229230000021
although the compressibility of the gas is considered in the formula, q becomes a quadratic function of Δ p, which brings trouble to numerical processing in the actual operation process, and similarly reduces the calculation accuracy of the meter coefficient K, and the measurement error of the gas laminar flow meter cannot be effectively reduced.
Generally, the existing methods used by the gas laminar flow meter have the problems of poor degree and low precision.
Disclosure of Invention
The invention aims to avoid the defects of the prior art and provides a method for solving the problems of poor linearity and low precision of the prior method.
In order to achieve the purpose, the invention adopts the technical scheme that: a method for calculating the gas flow of a gas laminar flow meter comprises the following steps:
1) the calibration step of the meter coefficient K of the gas laminar flow meter specifically comprises the following steps:
11) measurement and collection of initial data: mounting a gas laminar flow meter on a gas flow standard device;
measuring and collecting pressure value p at outlet of gas laminar flow meter by pressure sensor of gas laminar flow meterm，pmHas the unit of Pa;
measuring and collecting thermodynamic temperature value T at outlet of gas laminar flow meter by temperature sensor of gas laminar flow meterm，TmHas the unit of K;
measuring and acquiring a pressure loss value delta p by a differential pressure sensor of the gas laminar flow meter, wherein the unit of delta p is Pa;
from said temperature value TmDetermining the aerodynamic viscosity value mu, wherein the unit of mu is Pa.s;
volume flow q in standard state of flowing through the gas laminar flow meter provided by a gas flow standard devicesN，qsNHas the unit of m3/s；
Further comprising a pressure value p in the standard stateN，pNHas the unit of Pa;
thermodynamic temperature T at standard state of a gas laminar flow meterN，TNHas the unit of K;
the step 1) of calibrating the instrument coefficient K further comprises the following steps:
12) selecting a pressure value of paAre auxiliary points a, PaThe unit is the unit of Pa,
Figure BDA0002392229230000031
13) after the auxiliary point a is determined, the ideal gas state equation is used to convert the initial volume flow q of the auxiliary point a by the following formulaa1，qa1Has the unit of m3/s，
Figure BDA0002392229230000041
14) Initial volume flow q through the auxiliary point a using the following formulaa1Calibrating the meter coefficient K in m-3，
Figure BDA0002392229230000042
2) Calculating the actual gas flow by using the instrument coefficient K calibrated in the step 1), wherein the method specifically comprises the following steps:
21) the measurement of the flow of the gas laminar flow meter in actual use is as follows:
measuring and collecting pressure value p at outlet of gas laminar flow meter by pressure sensor actually collected by gas laminar flow meterm Shi，pm ShiHas the unit of Pa;
the thermodynamic temperature value T is actually measured and acquired by a temperature sensor of the gas laminar flow meterm Shi，Tm ShiHas the unit of K;
pressure loss value delta p actually measured and acquired by differential pressure sensor of gas laminar flow meterFruit of Chinese wolfberry，ΔpFruit of Chinese wolfberryHas the unit of Pa;
from said thermodynamic temperature value Tm ShiDetermination of aerodynamic viscosity μFruit of Chinese wolfberry，μFruit of Chinese wolfberryHas the unit of Pa · s;
then, air is used for calibration under normal temperature and normal pressure and conversion is carried out to obtain a scalar value under a standard state in actual use:
and, the pressure p in the known standard stateFruit of N，pFruit of NHas the unit of Pa;
thermodynamic temperature T in the standard stateFruit of N，TFruit of NHas the unit of K;
22) the actual volume flow q of the auxiliary point a is calculated by the following formulaa2，qa2Unit is m3/s；
Figure BDA0002392229230000043
Wherein K is the meter coefficient K of the gas laminar flow meter obtained in the step 1), and the unit of K is m-3；
23) Actual volume flow q of auxiliary point a obtained by step 22)a2Using ideal gasConverting gas flow by using a state equation, wherein the gas flow comprises volume flow q under an actual stateFruit of Chinese wolfberry，qFruit of Chinese wolfberryHas the unit of m3S and volume flow q in the standard stateFruit of N，qFruit of NHas the unit of m3And/s, the conversion formula is respectively as follows:
Figure BDA0002392229230000051
Figure BDA0002392229230000052
。
the invention also provides a gas laminar flow meter using the calculation method, which comprises a laminar flow element, wherein the auxiliary point a is the internal pressure value of the laminar flow element, in particular to the point of the average value of the inlet and outlet pressures of the laminar flow element; the laminar flow element is provided with a differential pressure sensor for measuring and collecting pressure loss, the outlet of the gas laminar flow of the laminar flow element is provided with a temperature sensor for measuring and collecting temperature and a pressure sensor for measuring and collecting pressure, the laminar flow element further comprises a secondary instrument, the secondary instrument is respectively electrically connected with the differential pressure sensor, the temperature sensor and the pressure sensor, the secondary instrument receives signals of differential pressure, temperature and pressure from the sensors, calculates a gas flow value by using the flow calculation method, and displays the gas flow value in a display screen of the secondary instrument.
To illustrate the scientificity of the present invention, the derivation of the formula used is shown below:
when a compressible fluid flows through a laminar gas flow meter, the volume of the gas increases due to pressure loss. The length of a laminar flow channel in the gas laminar flow meter is l, and the sectional area is A. Establishing an x-axis along the gas flow direction, assuming a volumetric flow rate of the incoming gas of q in a standard statesNTemperature TmThe pressure is measured by a temperature sensor arranged at the outlet of the gas laminar flow meter, and is p ═ p (x).
When x is 0, p is p1When x is equal to l, p is equal to p2The differential pressure sensor 4 measures the pressure loss Δ p ═ p1-p2。
The pressure sensor of a gas laminar flow meter is generally mounted at the outlet, i.e. pm＝p2. According to the Hagen Poiseue's law, the pressure change of the x point inside the gas laminar flow meter is:
Figure BDA0002392229230000061
in the formula:
u is the gas flow rate;
the negative sign indicates that as x increases, p decreases.
The velocity u at point x is obtained from the ideal gas state equation as:
Figure BDA0002392229230000062
in the formula:
ρsis the density of the gas in the standard state;
v is the gas specific volume at point x;
Rgis the gas constant.
Equation (2) is taken into equation (1) and then is integrated to obtain:
Figure BDA0002392229230000063
Figure BDA0002392229230000064
the formula (4) can be arranged:
Figure BDA0002392229230000065
suppose that an auxiliary point a exists inside the gas laminar flow meter, and the pressure value is
Figure BDA0002392229230000066
It should be noted that this point is not located at the geometric center point of the laminar gas flow meter 1, and the volume flow rate of the auxiliary point a is qa. At both ends of formula (5) are each divided by
Figure BDA0002392229230000067
The following can be obtained:
Figure BDA0002392229230000068
equation (6) shows that when the gas laminar flow meter 1 measures compressible fluid, an auxiliary point a always exists in the interior of the meter, where the volume flow q isaAnd Δ p are always linear.
The invention adopts a method for calibrating and measuring the flow of a gas laminar flow meter by exactly utilizing the volume flow q at an auxiliary point aaAnd the delta p is always in a linear relation, so that the problems of poor linearity and low precision of the existing method are solved.
The invention has the beneficial effects that: the gas laminar flow meter calibration and flow measurement method provided by the invention considers the compressibility of gas, is a strict linear model, facilitates the calculation of the instrument coefficient K, and can improve the calibration precision of the instrument coefficient K. The calibration and flow measurement method for the gas laminar flow meter can effectively solve the problem of low precision of the traditional laminar flow meter.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Example 1: a method for calculating the gas flow of a gas laminar flow meter comprises the following steps:
1) the calibration step of the meter coefficient K of the gas laminar flow meter specifically comprises the following steps:
11) measurement and collection of initial data: mounting a gas laminar flow meter on a gas flow standard device;
measuring and collecting pressure value p at outlet of gas laminar flow meter by pressure sensor of gas laminar flow meterm，pmHas the unit of Pa;
measuring and collecting thermodynamic temperature value T at outlet of gas laminar flow meter by temperature sensor of gas laminar flow meterm，TmHas the unit of K;
measuring and acquiring a pressure loss value delta p by a differential pressure sensor of the gas laminar flow meter, wherein the unit of delta p is Pa;
from said temperature value TmDetermining the aerodynamic viscosity value mu, wherein the unit of mu is Pa.s;
volume flow q in standard state of flowing through the gas laminar flow meter provided by a gas flow standard devicesN，qsNHas the unit of m3/s；
Further comprising a pressure value p in the standard stateN，pNHas the unit of Pa;
thermodynamic temperature T in the standard stateN，TNHas the unit of K;
the step 1) of calibrating the instrument coefficient K further comprises the following steps:
12) selecting a pressure value of paIs an auxiliary point a, paThe unit is the unit of Pa,
Figure BDA0002392229230000081
13) after the auxiliary point a is determined, the ideal gas state equation is used to convert the initial volume flow q of the auxiliary point a by the following formulaa1，qa1Has the unit of m3/s，
Figure BDA0002392229230000082
14) Initial volume flow q through the auxiliary point a using the following formulaa1Calibrating the meter coefficient K in m-3，
Figure BDA0002392229230000083
2) Calculating the actual gas flow by using the instrument coefficient K calibrated in the step 1), wherein the method specifically comprises the following steps:
21) the measurement of the flow of the gas laminar flow meter in actual use is as follows:
measuring and collecting pressure value p at outlet of gas laminar flow meter by pressure sensor actually collected by gas laminar flow meterm Shi，pm ShiHas the unit of Pa;
the thermodynamic temperature value T is actually measured and acquired by a temperature sensor of the gas laminar flow meterm Shi，Tm ShiHas the unit of K;
pressure loss value delta p actually measured and acquired by differential pressure sensor of gas laminar flow meterFruit of Chinese wolfberry，ΔpFruit of Chinese wolfberryHas the unit of Pa;
from said thermodynamic temperature value Tm ShiDetermination of aerodynamic viscosity μFruit of Chinese wolfberry，μFruit of Chinese wolfberryHas the unit of Pa · s;
also included is the pressure p at standard conditionsFruit of N，pFruit of NHas the unit of Pa;
thermodynamic temperature T in the standard stateFruit of N，TFruit of NHas the unit of K;
22) the actual volume flow q of the auxiliary point a is calculated by the following formulaa2，qa2Unit is m3/s；
Figure BDA0002392229230000091
Wherein K is the meter coefficient K of the gas laminar flow meter obtained in the step 1), and the unit of K is m-3；
23) Actual volume flow q of auxiliary point a obtained by step 22)a2Converting gas flow rate by using ideal gas state equation, wherein the gas flow rate comprises volume flow rate under actual stateqFruit of Chinese wolfberry，qFruit of Chinese wolfberryHas the unit of m3S and volume flow q in the standard stateFruit of N，qFruit of NHas the unit of m3And/s, the conversion formula is respectively as follows:
Figure BDA0002392229230000092
Figure BDA0002392229230000093
。
example 2: as shown in fig. 1, the same as in embodiment 1, except that a gas laminar flow meter 1 using the calculation method described in embodiment 1 is provided, the gas laminar flow meter includes a laminar flow element 2, and the auxiliary point a 3 is a pressure value inside the laminar flow element 2, specifically, a point of an average value of pressures at an inlet and an outlet of the laminar flow element 2; the laminar flow element 2 is provided with a differential pressure sensor 4 for measuring and collecting pressure loss, the outlet of the gas laminar flow of the laminar flow element 2 is provided with a temperature sensor 6 for measuring and collecting temperature and a pressure sensor 5 for measuring and collecting pressure, the laminar flow element further comprises a secondary instrument 7, the secondary instrument 7 is respectively electrically connected with the differential pressure sensor 4, the temperature sensor 6 and the pressure sensor 5, the secondary instrument 7 receives signals from the pressure difference, the temperature and the pressure of the sensors, the gas flow value is calculated by using the flow calculation method, and the gas flow value is displayed on a display screen of the secondary instrument 7.
Specific example 1: a laminar flow meter with a range of 0 to 500sccm is used as an example. The following shows how to use the invention to calculate the gas flow, reduce the measurement error of the gas laminar flow meter from 1% to below 0.5%, and can effectively solve the problem of low precision of the existing laminar flow meter.
As shown in FIG. 1, when the range of the gas laminar flow meter 1 in FIG. 1 is 0 to 500sccm, the volume flow q passing through the auxiliary point a 3a1The value of the meter coefficient K is calculated. The gas used for calibration was dry compressed air, the temperature during the test was 21.6 ℃ and the dynamic viscosity of the air, μ, was 18.18X 10-6 kg/(m.s). Flow ofVolume flow q of the inlet laminar flow meter 1 in the standard statesNProvided by the piston standard apparatus. Volume flow q of auxiliary point a 3a1The calculation formula of (2) is as follows:
Figure BDA0002392229230000101
the calculation formula of the instrument coefficient K is as follows:
Figure BDA0002392229230000102
the calibration data are recorded in table 1.
TABLE 1 calibration data
Figure BDA0002392229230000103
As can be seen from table 1, the values of the gauge factor K are averaged to give a value K of 2.073 × 10-14m-3。
In actual use, the gas laminar flow meter 1 measures flow, firstly calculates the volume flow of the auxiliary point a 3, and then converts the volume flow q of the outlet of the gas laminar flow meter and the volume flow q under the standard state through the volume flow of the auxiliary point a 3N. Volume flow q of auxiliary point a 3a2The calculation formula is as follows:
Figure BDA0002392229230000104
outlet volume flow q of the gas laminar flow meter 1 and volume flow q in a standard stateFruit of NThe calculation formula is as follows:
Figure BDA0002392229230000111
Figure BDA0002392229230000112
for the purpose of illustrating the applicability of the invention, toThe gas laminar flow meter 1 of the present invention is subjected to verification. The standard device adopted by the verification is a piston standard device, the verification data is recorded as table 2, and q is comparedNAnd q issN。
TABLE 2 verification data
Figure BDA0002392229230000113
As can be seen from the data in table 2, the maximum measurement error of the gas laminar flow meter 1 after the method of the present invention is 0.35%. If the gas laminar flow meter 1 adopts the existing method, the maximum error is generally not less than 1%.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (2)

1. A method for calculating the gas flow of a gas laminar flow meter comprises the following steps:
1) the calibration step of the meter coefficient K of the gas laminar flow meter specifically comprises the following steps:
11) measurement and collection of initial data: mounting a gas laminar flow meter on a gas flow standard device;
measuring and collecting pressure value p at outlet of gas laminar flow meter by pressure sensor of gas laminar flow meterm，pmHas the unit of Pa;
measuring and collecting thermodynamic temperature value T at outlet of gas laminar flow meter by temperature sensor of gas laminar flow meterm，TmHas the unit of K;
measuring and acquiring a pressure loss value delta p by a differential pressure sensor of the gas laminar flow meter, wherein the unit of delta p is Pa;
from said temperature value TmDetermining the aerodynamic viscosity value mu, wherein the unit of mu is Pa.s;
standard condition volumetric flow through said laminar gas flow meter provided by a gas flow calibration deviceQuantity qsN，qsNHas the unit of m3/s；
Further comprising a pressure value p in the standard stateN，pNHas the unit of Pa;
thermodynamic temperature T in the standard stateN，TNHas the unit of K;
2) calculating the actual gas flow by using the instrument coefficient K calibrated in the step 1);
it is characterized in that the preparation method is characterized in that,
the step 1) of calibrating the instrument coefficient K further comprises the following steps:
12) selecting a pressure value of paIs an auxiliary point a, paThe unit is the unit of Pa,
Figure FDA0002392229220000011
13) after the auxiliary point a is determined, the ideal gas state equation is used to convert the initial volume flow q of the auxiliary point a by the following formulaa1，qa1Has the unit of m3/s，
Figure FDA0002392229220000012
14) Initial volume flow q through the auxiliary point a using the following formulaa1Calibrating the meter coefficient K in m-3，
Figure FDA0002392229220000021
The step 2) of calculating the actual gas flow by using the instrument coefficient K calibrated in the step 1) specifically comprises the following steps:
21) the measurement of the flow of the gas laminar flow meter in actual use is as follows:
measuring and collecting pressure value p at outlet of gas laminar flow meter by pressure sensor actually collected by gas laminar flow meterm Shi，pm ShiHas the unit of Pa;
the thermodynamic temperature value T is actually measured and acquired by a temperature sensor of the gas laminar flow meterm Shi，Tm ShiHas the unit of K;
pressure loss value delta p actually measured and acquired by differential pressure sensor of gas laminar flow meterFruit of Chinese wolfberry，ΔpFruit of Chinese wolfberryHas the unit of Pa;
from said thermodynamic temperature value Tm ShiDetermination of aerodynamic viscosity μFruit of Chinese wolfberry，μFruit of Chinese wolfberryHas the unit of Pa · s;
and, a known pressure p under standard conditionsN，pNHas the unit of Pa;
thermodynamic temperature T in the standard stateN，TNHas the unit of K;
22) the actual volume flow q of the auxiliary point a is calculated by the following formulaa2，qa2Unit is m3/s；
Figure FDA0002392229220000022
Wherein K is the meter coefficient K of the gas laminar flow meter obtained in the step 1), and the unit of K is m-3；
23) Actual volume flow q of auxiliary point a obtained by step 22)a2Converting the gas flow rate by using an ideal gas state equation, wherein the gas flow rate comprises the volume flow rate q under the actual stateFruit of Chinese wolfberry，qFruit of Chinese wolfberryHas the unit of m3S and volume flow q in the standard stateFruit of N，qFruit of NHas the unit of m3And/s, the conversion formula is respectively as follows:
Figure FDA0002392229220000031
Figure FDA0002392229220000032
2. the gas laminar flow meter using the calculation method according to claim 1, characterized in that the gas laminar flow meter comprises a laminar flow element, and the auxiliary point a is a pressure value inside the laminar flow element, specifically a point of an average value of inlet and outlet pressures of the laminar flow element; the laminar flow element is provided with a differential pressure sensor for measuring and collecting pressure loss, the outlet of the gas laminar flow of the laminar flow element is provided with a temperature sensor for measuring and collecting temperature and a pressure sensor for measuring and collecting pressure, the laminar flow element further comprises a secondary instrument, the secondary instrument is respectively and electrically connected with the differential pressure sensor, the temperature sensor and the pressure sensor, the secondary instrument receives signals of differential pressure, temperature and pressure from the sensors, calculates the gas flow value by using the flow calculation method of claim 1, and displays the gas flow value on a display screen of the secondary instrument.
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