CN111262547A - 体声波谐振器、mems器件、滤波器和电子设备 - Google Patents
体声波谐振器、mems器件、滤波器和电子设备 Download PDFInfo
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- CN111262547A CN111262547A CN201911419038.1A CN201911419038A CN111262547A CN 111262547 A CN111262547 A CN 111262547A CN 201911419038 A CN201911419038 A CN 201911419038A CN 111262547 A CN111262547 A CN 111262547A
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- resonator
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
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- 229920005591 polysilicon Polymers 0.000 description 1
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- 229910052761 rare earth metal Inorganic materials 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
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- 230000007704 transition Effects 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
- H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (25)
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CN201911419038.1A CN111262547B (zh) | 2019-12-31 | 2019-12-31 | 体声波谐振器、mems器件、滤波器和电子设备 |
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CN111262547A true CN111262547A (zh) | 2020-06-09 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022083712A1 (zh) * | 2020-10-23 | 2022-04-28 | 诺思(天津)微系统有限责任公司 | 体声波谐振器及组件、滤波器、电子设备 |
WO2022161142A1 (zh) * | 2021-02-01 | 2022-08-04 | 诺思(天津)微系统有限责任公司 | 体声波谐振器、滤波器及电子设备 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07212171A (ja) * | 1994-01-24 | 1995-08-11 | Meidensha Corp | 厚みすべり水晶振動子 |
CN1450719A (zh) * | 2002-04-11 | 2003-10-22 | 三星电机株式会社 | 薄膜体声波谐振器及其制造方法 |
CN103095243A (zh) * | 2011-11-02 | 2013-05-08 | 日本电波工业株式会社 | 压电振动片以及压电元件 |
CN103166596A (zh) * | 2013-04-11 | 2013-06-19 | 天津大学 | 谐振器和滤波器 |
CN103607178A (zh) * | 2013-09-17 | 2014-02-26 | 诺思(天津)微系统有限公司 | 薄膜体波谐振器及提高其品质因数的方法 |
CN108900173A (zh) * | 2018-07-04 | 2018-11-27 | 杭州左蓝微电子技术有限公司 | 一种以硅为牺牲层的薄膜体声波谐振器制备方法 |
CN110289823A (zh) * | 2019-05-31 | 2019-09-27 | 武汉大学 | 一种微机械谐振器 |
-
2019
- 2019-12-31 CN CN201911419038.1A patent/CN111262547B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07212171A (ja) * | 1994-01-24 | 1995-08-11 | Meidensha Corp | 厚みすべり水晶振動子 |
CN1450719A (zh) * | 2002-04-11 | 2003-10-22 | 三星电机株式会社 | 薄膜体声波谐振器及其制造方法 |
CN103095243A (zh) * | 2011-11-02 | 2013-05-08 | 日本电波工业株式会社 | 压电振动片以及压电元件 |
CN103166596A (zh) * | 2013-04-11 | 2013-06-19 | 天津大学 | 谐振器和滤波器 |
CN103607178A (zh) * | 2013-09-17 | 2014-02-26 | 诺思(天津)微系统有限公司 | 薄膜体波谐振器及提高其品质因数的方法 |
CN108900173A (zh) * | 2018-07-04 | 2018-11-27 | 杭州左蓝微电子技术有限公司 | 一种以硅为牺牲层的薄膜体声波谐振器制备方法 |
CN110289823A (zh) * | 2019-05-31 | 2019-09-27 | 武汉大学 | 一种微机械谐振器 |
Non-Patent Citations (1)
Title |
---|
田文超、娄利飞: "《微机电技术》", 31 August 2014, 西安电子科技大学出版社 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022083712A1 (zh) * | 2020-10-23 | 2022-04-28 | 诺思(天津)微系统有限责任公司 | 体声波谐振器及组件、滤波器、电子设备 |
WO2022161142A1 (zh) * | 2021-02-01 | 2022-08-04 | 诺思(天津)微系统有限责任公司 | 体声波谐振器、滤波器及电子设备 |
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Denomination of invention: Bulk acoustic wave resonators, MEMS devices, filters and electronic equipment Effective date of registration: 20210908 Granted publication date: 20210810 Pledgee: Tianjin TEDA Haihe intelligent manufacturing industry development fund partnership (L.P.) Pledgor: ROFS MICROSYSTEM(TIANJIN) Co.,Ltd. Registration number: Y2021980009034 |
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