CN111261475B - Integrated multifunctional exhaust device for manufacturing photomultiplier and use method - Google Patents
Integrated multifunctional exhaust device for manufacturing photomultiplier and use method Download PDFInfo
- Publication number
- CN111261475B CN111261475B CN202010077410.1A CN202010077410A CN111261475B CN 111261475 B CN111261475 B CN 111261475B CN 202010077410 A CN202010077410 A CN 202010077410A CN 111261475 B CN111261475 B CN 111261475B
- Authority
- CN
- China
- Prior art keywords
- cathode
- glow discharge
- bell jar
- coating
- bottom plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/46—Machines having sequentially arranged operating stations
- H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
The invention relates to the technical field of photomultiplier tubes, and provides an integrated multifunctional exhaust device for manufacturing photomultiplier tubes and a using method thereof. The integrated multifunctional exhaust device can ensure that the photomultiplier from baking degassing to final sealing is finished in a high vacuum environment, and optical coating, glow oxidation, cathode manufacturing and electronic cleaning are all carried out in the high vacuum environment, thereby avoiding the exposure of parts and substrates to the atmosphere in the process, reducing the pollution in the manufacturing process and ensuring the optimal optical performance of the photomultiplier.
Description
Technical Field
The invention relates to the field of photomultiplier tubes, in particular to an integrated device for baking exhaust, optical coating, glow oxidation, photocathode manufacturing, tube core electronic cleaning and sealing in the manufacturing process of photomultiplier tubes.
Background
The photomultiplier is a vacuum tube, so that the cleanliness requirement on parts and substrates is high. When the photomultiplier is manufactured by the traditional technology, the baking degassing, the optical coating and the cathode manufacturing are respectively operated on different devices, and the glass spherical shell can expose the atmosphere and adsorb gas again in each process flow process, so that the cleanliness of the glass substrate during the optical coating and the cathode manufacturing is difficult to ensure, and the miscellaneous residual gas on the surface of the substrate influences the growth of the film layer, thereby influencing the optical performance of the film layer.
Disclosure of Invention
The invention aims to provide an integrated multifunctional exhaust device for manufacturing a photomultiplier, so that the photomultiplier is finished on one device in a high vacuum environment from baking degassing to final sealing, optical coating, glow oxidation, cathode manufacturing and electronic cleaning are all carried out in the high vacuum environment, exposure of parts and a substrate to the atmosphere in the process is avoided, pollution in the manufacturing process is reduced, and the optical performance of the photomultiplier is optimal.
In order to achieve the purpose, the integrated multifunctional exhaust device for manufacturing the photomultiplier provided by the invention comprises a bell jar, a bottom plate, a frame, an electronic cleaning system, a cathode system, a glow discharge system, a coating system, an optical fiber for reflectivity monitoring, an air release valve, a molecular pump, a dry pump and an electric control system.
In the exhaust device, the bell jar, the bottom plate, the cathode system, the electronic cleaning system, the glow discharge system, the coating system and the optical fiber for reflectivity monitoring form a sealed vacuum chamber, air is pumped by the molecular pump, and the backing pump of the molecular pump is a dry pump. The two sides of the bell jar are provided with bell jar jacking mechanisms which drive the bell jar to ascend and descend through the rotation of the screw rod. The inner wall of the bell jar is provided with an armored wire heater, and the temperature rise is controlled by an electric control system. The bottom plate is positioned below the bell jar, a fluorine rubber ring is used for sealing between the bottom plate and the bell jar, and the fluorine rubber ring is positioned at the edge position of the upper part of the bottom plate. The objective table is arranged on the upper part of the bottom plate and used for fixing the photomultiplier glass spherical shell. The objective table can rotate around the central shaft, and the rotation angle is controlled by the servo motor, so that the objective table can rotate back and forth above the film coating system, above the glow discharge system, above the cathode system and above the electronic cleaning system as required.
The cathode system, the glow discharge system, the coating system and the electronic cleaning system are respectively positioned below the bottom plate, are uniformly distributed and are fixed on the bottom plate through the cathode system flange.
The cathode system, the glow discharge system and the coating system are respectively provided with a lifting mechanism, a transmission screw is driven by a stepping motor to rotate to control the cathode component or the coating component to lift, the lifting stability is ensured by a guide rod, and the corrugated pipe is utilized for vacuum sealing. The electronic cleaning system is positioned below the bottom plate and fixed on the bottom plate through an electronic cleaning system flange, a tube core lifting mechanism and an electronic gun translation mechanism are arranged in the electronic cleaning system, the tube core lifting mechanism drives a transmission screw rod to control the tube core to lift through a servo motor, and the transmission screw rod is positioned in the electronic cleaning system and is sealed in vacuum through a magnetic fluid. And rotary baffles are arranged above the four system flanges. The glow discharge system, the coating system cathode system and the electronic cleaning system are distributed in a cross way below the bottom plate, are uniformly distributed and are mutually independent.
The exhaust device newly designed by the invention ensures that the photomultiplier is always in a high vacuum environment when being baked, degassed, optically coated, glow oxidized, manufactured by a photocathode, electronically brushed and sealed, and manufactured by tube core electronic cleaning, thereby avoiding the contact with the outside air, always keeping a clean substrate, avoiding the pollution caused by the exposure of materials and the substrate to the atmosphere due to the process flow and ensuring that the manufactured photomultiplier has better optical performance. Meanwhile, multiple processes are completed on one device, so that the personnel cost is reduced, and the working efficiency is improved.
Drawings
FIG. 1 is a block diagram of a multi-functional exhaust apparatus for photomultiplier tube fabrication according to the present invention.
Fig. 2 is a schematic view of the bottom plate structure.
FIG. 3 is a schematic view of the distribution structure of the cathode system flange and the electronic brush system flange under the bottom plate.
Fig. 4 is a schematic structural diagram of an electronic brushing system.
FIG. 5 is a schematic view of a cathode system and a coating system.
FIG. 6 is a schematic diagram of a glow discharge system.
FIG. 7 reflectance monitoring fiber
Figure 8 schematic view of a purge valve.
Detailed Description
In order to better understand the technical content of the present invention, specific embodiments are described below with reference to the accompanying drawings.
In this disclosure, aspects of the present invention are described with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to encompass all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in greater detail below, may be implemented in any of numerous ways, as the disclosed concepts and embodiments are not limited to any one implementation. In addition, some aspects of the present disclosure may be used alone, or in any suitable combination with other aspects of the present disclosure.
The multifunctional exhaust device for manufacturing the photomultiplier shown in fig. 1 comprises a bell jar 1, a bottom plate 3, a frame 4, a molecular pump 5, an electronic cleaning system 6, a cathode system 7, a glow discharge system 8, a coating system 9, a reflectivity monitoring optical fiber 10, a vent valve 11 and a dry pump 12, and further comprises an electric control system.
In the above exhaust apparatus, the bell jar 1, the base plate 3, the cathode system 7, and the electronic cleaning system 6 constitute a sealed vacuum chamber, and the exhaust is performed by the molecular pump 5, and the backing pump of the molecular pump 5 is the dry pump 12.
Two sides of the bell jar 1 are provided with bell jar jacking mechanisms 101, and the bell jar 1 is driven to ascend and descend by the rotation of the screw rod.
A heating device, such as an armored wire heater, is arranged on the inner wall of the bell jar 1, and the temperature rise is controlled through an electric control system.
The bottom plate 3 is positioned below the bell jar 1, and a fluorine rubber ring 302 is used for sealing between the bottom plate 3 and the bell jar 1.
The upper part of the bottom plate 3 is provided with an object stage 303 for fixing the photomultiplier tube glass spherical shell 2. The stage 303 can rotate around the central axis, and can rotate back and forth above the coating system 9, above the glow discharge system 8, above the cathode system 7, and above the electronic cleaning system 6 as required by controlling the rotation angle through a servo motor.
The cathode system 7 is located below the base plate 3 and has a cathode assembly lifting mechanism 703. The electronic cleaning system 6 is located below the bottom plate 3 and fixed on the bottom plate 3 through an electronic cleaning system flange 304, and the electronic cleaning system 6 is provided with a tube core lifting mechanism 603 and an electron gun translation mechanism 604. The glow discharge system 8, the coating system 9, the cathode system 7 and the electronic cleaning system 6 are distributed in a cross way under the bottom plate 3, are uniformly distributed and are mutually independent.
Fig. 2 is a schematic structural diagram of the base plate 3, which includes a rotating baffle 301, a fluoro-rubber ring 302, and a stage 303. The bottom plate 3 is positioned below the bell jar 1, a fluorine rubber ring 302 is used for sealing between the bottom plate 3 and the bell jar 1, and the fluorine rubber ring 302 is positioned at the upper edge position of the bottom plate 3.
The stage 303 is disposed above the bottom plate 3 for fixing the glass bulb 2 of the photomultiplier tube, and the present embodiment is illustrated in detail as an ellipsoidal glass bulb, but the present invention is not limited thereto.
The stage 303 can rotate around the central axis, and can rotate back and forth above the coating system 9, above the glow discharge system 8, above the cathode system 7, and above the electronic cleaning system 6 as required by controlling the rotation angle through a servo motor. The rotating baffles 301 are positioned above the four system flanges 304, respectively, and are rotatable to block and isolate the chambers from the bell jar.
Fig. 3 shows that the cathode system flange 305, the electronic cleaning system flange 304, the coating system flange 305, and the glow discharge system flange 305 are uniformly distributed below the base plate 3, and 4 molecular pump flanges 306 are uniformly distributed below the base plate 3 and connected with the molecular pump 5.
Fig. 4 is a schematic structural diagram of the electronic cleaning system 6, and the electronic cleaning system 6 is distributed below the bottom plate 3 and includes a tube core 601, a magnetic fluid 602, a tube core lifting mechanism 603, and an electron gun translation mechanism 604. The tube core lifting mechanism 603 drives a transmission screw rod to control the tube core 601 to lift through a servo motor, the transmission screw rod is positioned inside the electronic cleaning system 6, and vacuum sealing is carried out through the magnetic fluid 602. The electron brush system 6 controls the die 601 electron gun translation via the electron gun translation mechanism 604.
Fig. 5 is a schematic structural diagram of a cathode system 7, the cathode system 7 is disposed under the bottom plate 3, and includes a cathode assembly 705, a driving screw lever 701, a bellows 702, a cathode assembly lifting structure 703, and a guide rod 704, the cathode assembly lifting mechanism 703 drives the driving screw lever 701 to rotate through a stepping motor to control the cathode assembly 705 to lift, the lifting stability is ensured through the guide rod 704, and the bellows 702 is used for vacuum sealing.
FIG. 6 is a schematic view showing a glow discharge structure in which a glow discharge rod 801 is mounted on the top end of a driving screw 701.
Fig. 7 shows a schematic diagram of a reflectivity optical fiber 10, where the fiber 1002 is mounted on a flange 1003, and a threaded interface 1001 is provided at the top of the fiber for connection to a reflectivity monitoring system.
Figure 8 shows the bleed valve 11 with the gas regulator 1101 mounted on top of the flange 1102 and the gas connection 1103 connected to the nitrogen line.
With reference to the figures, the operation of the exhaust device proposed by the present invention is as follows:
the bell jar 1 is lifted by a lifting mechanism of the bell jar 1, the glass spherical shell 2 is arranged on an objective table 303, a tube core 601 is arranged in an electronic cleaning system 6, a cathode component 705 is arranged in a cathode system 7, a coating component 901 is arranged in a coating system 9, the objective table 303 is rotated, the glass spherical shell 2 is translated to the position above the coating system 7, the coating component 901 is lifted into the glass spherical shell 2, the cathode component 705 and the tube core 601 are lifted into the bell jar 1, the bell jar 1 is lowered, the bell jar 1, a glow discharge system 8, the cathode system 7, the coating system 9 and the electronic cleaning system 6 form a vacuum chamber, a dry pump 12 and a molecular pump 5 are started for vacuum pumping, when a certain vacuum degree is reached, a heating device in the bell jar 1 is started, and the glass spherical shell 2, the tube core 601, the cathode component 705 and the coating component 901 are baked and degassed.
And after baking and degassing, automatically cooling to room temperature. Lowering the cathode assembly 705 to a cathode system 7, lowering the tube core 601 to an electronic cleaning and brushing system 6, keeping the glow discharge system in the cavity of the glow discharge system, and closing the three cavity rotating baffles 301 respectively; and (6) coating.
After the coating is finished, the coating assembly 901 is lowered into the coating system 9, the rotary baffle 301 is closed, and the glass spherical shell 2 is moved to the position above the glow discharge system 8. The rotating shutter 301 above the glow discharge system is opened and the aluminum rod is extended into the interior of the envelope. Closing the bell jar molecular pump and the stop valve corresponding to the molecular pump, opening the air release valve at the top end of the bell jar 1, filling oxygen, observing that the vacuum degree reaches proper oxygen concentration, closing the air release valve, and performing glow discharge on the glass spherical shell 2.
After glow discharge is finished, the molecular pump and the stop valve are opened, vacuum pumping is carried out again, when a certain vacuum degree is reached, the aluminum bar is lowered into the glow discharge system, and the rotary baffle 301 above the glow discharge system is closed. The glass spherical shell 2 is moved to the position above the cathode system 7, the rotary baffle 301 above the cathode system is opened, the cathode assembly 705 is extended into the glass spherical shell 2, and the temperature is raised again to the proper temperature for cathode manufacture. When the temperature reaches, the electron gun is translated to the upper part of the tube core 601 through the electron gun translation mechanism 302, the electron cleaning is carried out, and meanwhile, a photocathode is evaporated in the glass spherical shell 2.
After cathode fabrication is complete, cathode assembly 705 is lowered into cathode system 7. After the electron brushing is completed, the electron gun is translated to the upper side of the die 601 by the electron gun translation mechanism 604. And opening the rotary baffle 301, rotating the object stage 303, rotating the glass spherical shell 2 from the upper part of the cathode system 7 to the upper part of the electronic cleaning system 6, lifting the tube core 601 into the glass spherical shell 2, and butting the tube core 601 with the glass spherical shell 2 to finish sealing.
It should be understood that all the above-mentioned links are all controlled by an electronic control system.
Although the invention has been described with reference to preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be determined by the appended claims.
Claims (3)
1. The utility model provides a multi-functional exhaust apparatus of integral type for making photomultiplier, its characterized in that includes bell jar [1], bottom plate [3], frame [4], electron system of brushing [6], cathode system [7], glow discharge system [8], coating system [9], reflectivity monitoring optical fiber [10], bleed valve [11], molecular pump [5], dry pump [12] and electrical control system, wherein:
a sealed vacuum chamber is formed by a bell jar [1], a bottom plate [3], a cathode system [7], an electronic cleaning system [6], a glow discharge system [8], a coating system [9] and a reflectivity monitoring optical fiber [10], air is pumped by a molecular pump [5], and a backing pump of the molecular pump [5] is a dry pump [12 ];
two sides of the bell jar (1) are provided with bell jar jacking mechanisms (101), and the bell jar (1) is driven to ascend and descend by the rotation of the screw rod; a heating device is arranged on the inner wall of the bell jar (1) and is used for heating and temperature rising control through an electric control system;
the bottom plate [3] is positioned below the bell jar [1], and the bottom plate [3] is sealed with the bell jar [1 ];
an object stage [303] is arranged on the upper part of the bottom plate [3], and the object stage [303] is used for fixing the photomultiplier glass spherical shell [2 ]; the objective table [303] is driven to rotate around the central shaft, the rotation angle is controlled by a servo motor, and the objective table is switched to rotate above the coating system [9], above the glow discharge system [8], above the cathode system [7] and above the electronic cleaning system [6] according to different procedures;
the cathode system [7], the glow discharge system [8], the coating system [9] and the electronic cleaning system [6] are respectively positioned below the bottom plate [3] and are uniformly distributed and fixed on the bottom plate [3] through a cathode system flange [305 ];
the bottom plate [3] comprises a rotary baffle [301], a fluorine rubber ring [302] and an object stage [303], the bottom plate [3] and the bell jar [1] are sealed by the fluorine rubber ring [302], and the fluorine rubber ring [302] is positioned at the edge of the upper part of the bottom plate [3 ]; an objective table (303) is arranged at the upper part of the bottom plate (3) and used for fixing the photomultiplier tube glass spherical shell (2); the rotary baffles [301] are respectively positioned above the four system flanges [304], are arranged to rotate and are used for shielding and isolating the chambers from the bell jar;
the electronic cleaning system [6] is fixed on the bottom plate [3] through an electronic cleaning system flange [304], the electronic cleaning system [6] is internally provided with a tube core lifting mechanism [603] and an electronic gun translation mechanism [604], the tube core lifting mechanism [603] drives a transmission screw rod to control the lifting of the tube core [601] through a servo motor, the transmission screw rod is positioned in the electronic cleaning system [6], and the vacuum sealing is carried out through a magnetic fluid [602 ];
the cathode system [7], the glow discharge system [8] and the coating system [9] are respectively provided with a lifting mechanism [703] which drives a transmission screw [701] to rotate through a stepping motor so as to control the cathode component [705] or the coating component [901] to lift;
the cathode system [7] comprises a cathode component [705], a transmission screw rod [701], a corrugated pipe [702], a cathode component lifting structure [703] and a guide rod [704], wherein the cathode component lifting mechanism [703] drives the transmission screw rod [701] to rotate through a stepping motor to control the cathode component [705] to lift, the lifting stability is ensured through the guide rod [704], and the corrugated pipe [702] is used for vacuum sealing;
the glow discharge structure is provided with a glow discharge rod [801] which is arranged at the top end of the transmission screw rod [701 ];
the integrated multifunctional exhaust device is arranged to realize baking degassing, optical coating, glow oxidation, photocathode manufacturing, tube core electronic cleaning and sealing manufacturing according to the following modes:
the glass spherical shell [2] is arranged on an object stage [303], a tube core [601] is arranged in an electronic cleaning system [6], a cathode component [705] is arranged in a cathode system [7], a coating component [901] is arranged in a coating system [9], the object stage [303] is rotated, the glass spherical shell [2] is translated to the position above the coating system [7], the coating component [901] is lifted into the glass spherical shell [2], the cathode component [705] and the tube core [601] are lifted into the bell jar [1], the bell jar [1] is lowered, at the moment, the bell jar [1] forms a vacuum chamber with a glow discharge system [8], the cathode system [7], the coating system [9] and the electronic cleaning system [6], a dry pump [12] and a molecular pump [5] are started for vacuum pumping, and when the set vacuum degree is reached, starting a heating device in the bell jar [1] to bake and degas the glass spherical shell [2], the tube core [601], the cathode component [705] and the coating component [901 ];
automatically cooling to room temperature after baking and degassing; the cathode assembly [705] is lowered into a cathode system [7], the tube core [601] is lowered into an electronic cleaning system [6], the glow discharge system is still in the cavity of the glow discharge system, and the three cavity rotating baffles [301] are respectively closed for coating;
after the film coating is finished, the film coating assembly [901] is lowered into a film coating system [9], the rotary baffle plate [301] is closed, and the glass spherical shell [2] is moved to the position above the glow discharge system [8 ]; opening a rotary baffle plate [301] above the glow discharge system, and extending an aluminum rod into the glass shell; closing the bell jar molecular pump and a stop valve corresponding to the molecular pump, opening a gas release valve at the top end of the bell jar [1], filling oxygen, observing that the vacuum degree reaches proper oxygen concentration, closing the gas release valve, and performing glow discharge on the glass spherical shell [2 ];
after glow discharge is finished, the molecular pump and the stop valve are opened, vacuum pumping is carried out again, when the set vacuum degree is reached, the aluminum bar is lowered into the glow discharge system, and the rotary baffle plate [301] above the glow discharge system is closed; moving the glass spherical shell [2] to the position above a cathode system [7], opening a rotating baffle [301] above the cathode system, extending a cathode assembly [705] into the glass spherical shell [2], and raising the temperature to the temperature for manufacturing the cathode again;
when the temperature reaches, the electron gun is translated to the position above the tube core [601] through the electron gun translation mechanism [302] to carry out electronic cleaning and brushing, and meanwhile, a photocathode is evaporated and coated in the glass spherical shell [2 ];
after the cathode is manufactured, the cathode assembly [705] is lowered into a cathode system [7 ];
after the electronic cleaning is finished, an electronic gun is translated to the upper side of the tube core [601] through an electronic gun translation mechanism [604 ]; and opening the rotary baffle plate [301], rotating the object stage [303], rotating the glass spherical shell [2] from the upper part of the cathode system [7] to the upper part of the electronic cleaning system [6], lifting the tube core [601] into the glass spherical shell [2], and butting the tube core [601] and the glass spherical shell [2] to finish sealing and sealing.
2. The integrated multifunctional exhaust device for manufacturing photomultiplier according to claim 1, wherein the glow discharge system [8], the coating system [9] and the cathode system [7] and the electronic cleaning system [6] are distributed crosswise below the base plate [3], uniformly distributed and independent of each other.
3. The integrated multifunctional exhaust device for photomultiplier according to claim 1, wherein the top end of the optical fiber [1002] is provided with a threaded interface [1001] for connection to a reflectivity monitoring system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010077410.1A CN111261475B (en) | 2020-01-29 | 2020-01-29 | Integrated multifunctional exhaust device for manufacturing photomultiplier and use method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010077410.1A CN111261475B (en) | 2020-01-29 | 2020-01-29 | Integrated multifunctional exhaust device for manufacturing photomultiplier and use method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111261475A CN111261475A (en) | 2020-06-09 |
| CN111261475B true CN111261475B (en) | 2022-07-08 |
Family
ID=70951038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010077410.1A Active CN111261475B (en) | 2020-01-29 | 2020-01-29 | Integrated multifunctional exhaust device for manufacturing photomultiplier and use method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111261475B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1207091A (en) * | 1968-03-15 | 1970-09-30 | Philips Electronic Associated | Method of manufacturing and electronic discharge tube including a photocathode |
| US6049168A (en) * | 1999-06-04 | 2000-04-11 | Litton Systems, Inc. | Method and system for manufacturing microchannel plates |
| CN103715034A (en) * | 2013-12-30 | 2014-04-09 | 中国科学院西安光学精密机械研究所 | Photoelectric detection device transfer manufacturing system and method |
| CN106298427A (en) * | 2016-09-28 | 2017-01-04 | 北方夜视技术股份有限公司 | High collection efficiency microchannel plate, microchannel template photomultiplier tube and preparation method thereof |
| WO2018058870A1 (en) * | 2016-09-28 | 2018-04-05 | 北方夜视技术股份有限公司 | High-quantum efficiency microchannel plate photomultiplier, and manufacturing device and method therefor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203871298U (en) * | 2014-05-26 | 2014-10-08 | 北方夜视技术股份有限公司 | Exhaust device structure for photomultiplier cathode making and sealing |
| CN106531593B (en) * | 2016-12-13 | 2018-03-13 | 北方夜视技术股份有限公司 | For manufacturing the exhaust apparatus and operating method of photomultiplier |
-
2020
- 2020-01-29 CN CN202010077410.1A patent/CN111261475B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1207091A (en) * | 1968-03-15 | 1970-09-30 | Philips Electronic Associated | Method of manufacturing and electronic discharge tube including a photocathode |
| US6049168A (en) * | 1999-06-04 | 2000-04-11 | Litton Systems, Inc. | Method and system for manufacturing microchannel plates |
| CN103715034A (en) * | 2013-12-30 | 2014-04-09 | 中国科学院西安光学精密机械研究所 | Photoelectric detection device transfer manufacturing system and method |
| CN106298427A (en) * | 2016-09-28 | 2017-01-04 | 北方夜视技术股份有限公司 | High collection efficiency microchannel plate, microchannel template photomultiplier tube and preparation method thereof |
| WO2018058870A1 (en) * | 2016-09-28 | 2018-04-05 | 北方夜视技术股份有限公司 | High-quantum efficiency microchannel plate photomultiplier, and manufacturing device and method therefor |
Non-Patent Citations (1)
| Title |
|---|
| 一种提高光电倍增器光电阴极量子效率的方法;党向瑜;《半导体光电》;20180415(第02期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111261475A (en) | 2020-06-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20100204810A1 (en) | Plasma processing apparatus, and maintenance method and assembling method of the same | |
| CN103715034B (en) | A kind of photoelectric detector transfer manufacturing system and making method | |
| JP6969923B2 (en) | Base material coating equipment | |
| CN1612288A (en) | Lining heating device and multi-chamber lining treatment system | |
| CN111261475B (en) | Integrated multifunctional exhaust device for manufacturing photomultiplier and use method | |
| CN101220468A (en) | Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell | |
| WO2018058870A1 (en) | High-quantum efficiency microchannel plate photomultiplier, and manufacturing device and method therefor | |
| CN111986976A (en) | Process chamber and semiconductor processing equipment | |
| CN106531593B (en) | For manufacturing the exhaust apparatus and operating method of photomultiplier | |
| JPH07302545A (en) | Manufacture of display device | |
| CN101469414A (en) | Reaction chamber structure of plate type plasma reinforced chemical vapor deposition apparatus | |
| CN213388868U (en) | Infrared optical film coating machine | |
| JP4838357B2 (en) | Vacuum transfer device | |
| CN100337311C (en) | Vertical heat treating equipment | |
| US5314363A (en) | Automated system and method for assembling image intensifier tubes | |
| CN116077996A (en) | Continuous vacuum defoaming machine and defoaming method | |
| CN110920271A (en) | Ink-jet printing equipment and use method thereof | |
| CN215625231U (en) | Device is put with drawing to optical lens piece | |
| CN112647062B (en) | Silicon carbide CVD process cavity device and using method | |
| JP6203566B2 (en) | SEALING DEVICE AND SEALING METHOD | |
| CN114650970B (en) | Apparatus and method for manufacturing glass cuvette | |
| JP4104784B2 (en) | Method for removing substrate of vacuum processing apparatus and vacuum processing apparatus | |
| CN113560122A (en) | TSV-oriented eccentric spin coating integrated device | |
| CN218827195U (en) | Uniform heating annealing device | |
| CN111584325B (en) | Nitrogen protection system for multi-station large-scale cathode transfer equipment and operation method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |