CN111200005B - Display panel and manufacturing method thereof - Google Patents

Display panel and manufacturing method thereof Download PDF

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Publication number
CN111200005B
CN111200005B CN202010165961.3A CN202010165961A CN111200005B CN 111200005 B CN111200005 B CN 111200005B CN 202010165961 A CN202010165961 A CN 202010165961A CN 111200005 B CN111200005 B CN 111200005B
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layer
wire layer
protective layer
display panel
protective
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CN111200005A (en
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曹祖强
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The application discloses a display panel and a manufacturing method thereof. The display panel comprises a display area and a non-display area positioned on the periphery of the display area, wherein the non-display area comprises a fan-out wiring area and a signal transmission area connecting the display area and the fan-out wiring area; the signal transmission area is internally provided with at least one data signal line, and the data signal line comprises a first protective layer, a wire layer positioned on the first protective layer and a second protective layer positioned on the wire layer; wherein, the second protective layer covers at least part of the side surface of the electric wire layer. This application is through carrying out patterning to the second protective layer, and after the electric wire layer was corroded, at least part the electric wire layer is covered by the second protective layer, reduces organic material in the manufacturing process and is corroded the residue of department at the electric wire layer, protection display area, extension display panel's life-span.

Description

Display panel and manufacturing method thereof
Technical Field
The application relates to the field of display, in particular to the field of display technology, and specifically relates to a display panel and a manufacturing method thereof.
Background
With the improvement of living standard, an OLED (Organic Light-Emitting semiconductor) display screen is popular among users due to its advantage of high color gamut.
In the manufacturing process of the conventional OLED display panel, the data signal line between the display region and the fan-out region is usually made of three layers of metal, such as ti-al-ti in the prior art, and the aluminum in the middle layer has poor acid and alkali resistance, so that the middle layer metal of the data signal line is etched by the subsequent etching process, and the side of the data signal line is recessed. In the subsequent organic layer forming process, organic materials may be accumulated in the recesses at the side edges of the data line signal lines, so that the organic layers in the display area are continuous with the organic layers in the fan-out area through the organic materials in the recesses, external water and oxygen invade the display area, the display panel is subjected to packaging failure, and the service life of the display panel is shortened.
Therefore, a display panel and a method for fabricating the same are needed to solve the above-mentioned problems.
Disclosure of Invention
The application provides a display panel and a manufacturing method thereof, and aims to solve the technical problems that in the prior art, an aluminum layer in a middle layer of a data signal line between a display area and a fan-out area is subjected to multi-degree etching in an etching process, organic materials can be accumulated in a recess of the side edge of the data signal line, so that an organic layer in the display area is continuous with an organic layer in the fan-out area through the organic materials in the recess, external water and oxygen invade the display area, the display panel is caused to be packaged and invalid, and the service life of the display panel is shortened.
In order to solve the above problems, the technical solution provided by the present application is as follows:
a display panel comprises a display area and a non-display area positioned at the periphery of the display area, wherein the non-display area comprises a fan-out wiring area and a signal transmission area connecting the display area and the fan-out wiring area;
the signal transmission area is internally provided with a substrate and at least one data signal line positioned on the substrate, and the data signal line comprises a first protective layer, a wire layer positioned on the first protective layer and a second protective layer positioned on the wire layer;
wherein at least a portion of the wire layer is covered by the second protective layer.
In the display panel of the present application, a boundary of the second protective layer exceeds a boundary of the first protective layer in a direction perpendicular to the data signal line, and the second protective layer overlaps the substrate.
In the display panel of the present application, the first protective layer includes a first groove, and the electric wire layer is located in the first groove;
the thickness of the wire layer is less than or equal to the depth of the first groove.
In the display panel of the present application, the second protection layer is filled in the first groove, and a sum of thicknesses of the second protection layer and the wire layer is greater than or equal to a depth of the first groove.
In the display panel of the present application, a boundary of the second protective layer exceeds a boundary of the electric wire layer in a direction perpendicular to the data signal wires, and the second protective layer overlaps the first protective layer.
In the display panel of the present application, the second protective layer overlaps on a side surface of the electric wire layer.
In the display panel of the present application, an orthographic projection of the second protective layer lapped on the side face of the electric wire layer is a plurality of trapezoids or a plurality of triangles.
A manufacturing method of a display panel, the display panel comprises a display area and a non-display area located at the periphery of the display area, the non-display area comprises a fan-out wiring area and a signal transmission area connecting the display area and the fan-out wiring area, and the manufacturing method of the display panel comprises the following steps:
forming a plurality of first protective layers on the substrate in the signal transmission area;
forming a wire layer on the first protective layer;
forming a second protective layer on the wire layer;
wherein at least a portion of the wire layer is covered by the second protective layer.
In the method for manufacturing a display panel of the present application, the steps of forming the first protective layer and the wire layer include:
forming a first protective film layer on the substrate in the signal transmission area;
the first protective film layer is subjected to first patterning treatment to form the first protective layer comprising a first groove;
forming the wire layer in the first groove;
wherein the thickness of the wire layer is less than or equal to the depth of the first groove.
In the method for manufacturing a display panel of the present application, the step of forming a second protective layer on the electric wire layer includes:
forming a second protective film layer on the wire layer;
the second protective film layer is subjected to second patterning treatment to form the second protective layer;
the second protective layer is overlapped on the side surface of the wire layer, and the orthographic projection of the second protective layer overlapped on the side surface of the wire layer is a plurality of trapezoids or a plurality of triangles.
Has the advantages that: this application is through carrying out patterning to the second protective layer, and after the electric wire layer was corroded, at least part the electric wire layer is covered by the second protective layer, reduces organic material in the manufacturing process and is corroded the residue of department at the electric wire layer, protection display area, extension display panel's life-span.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
FIG. 1 is a schematic top view of a display panel according to the present application;
FIG. 2 is a schematic structural diagram of a first structure of a display panel according to the present application;
FIG. 3 is a schematic structural diagram of a second structure of a display panel according to the present application;
FIG. 4 is a schematic structural diagram of a third structure of a display panel according to the present application;
FIG. 5 is a schematic structural diagram of a fourth structure of a display panel according to the present application;
FIG. 6 is a schematic structural diagram of a fifth structure of a display panel according to the present application;
FIG. 7 is a schematic top view of a portion of a display panel according to the present application;
fig. 8 is a schematic flow chart illustrating a manufacturing method of a display panel according to the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically, electrically or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
In the prior art, in the manufacturing process of the OLED display panel, the data signal line located between the display area and the fan-out area is usually made of three layers of metals, such as titanium-aluminum-titanium in the prior art, and due to poor acid and alkali resistance of aluminum located in the middle layer, the middle layer metal of the data signal line is etched by a subsequent etching process, so that a side edge of a data line signal is recessed. In the subsequent organic layer forming process, organic materials may be accumulated in the recesses at the side edges of the data line signal lines, so that the organic layers in the display area are continuous with the organic layers in the fan-out area through the organic materials in the recesses, external water and oxygen invade the display area, the display panel is subjected to packaging failure, and the service life of the display panel is shortened. Based on this, the application provides a display panel and a manufacturing method thereof.
Referring to fig. 1 to 7, the present application provides a display panel 100, where the display panel 100 includes a display area 70 and a non-display area 80 located at a periphery of the display area 70, the non-display area 80 includes a fan-out wiring area 81 and a signal transmission area 90 connecting the display area 70 and the fan-out wiring area 81;
a substrate 200 and at least one data signal line located on the substrate 200 are disposed in the signal transmission region 90, where the data signal line includes a first protection layer 300, a wire layer 400 located on the first protection layer 300, and a second protection layer 500 located on the wire layer 400;
wherein at least a portion of the wire layer 400 is covered by the second protective layer 500.
This application is through carrying out patterning to the second protective layer, and after the electric wire layer was corroded, at least part the electric wire layer is covered by the second protective layer, reduces organic material in the manufacturing process and is corroded the residue of department at the electric wire layer, protection display area, extension display panel's life-span.
The technical solution of the present application will now be described with reference to specific embodiments.
Referring to fig. 1 to 7, the display panel 100 includes a display area 70 and a non-display area 80 located at the periphery of the display area 70, where the non-display area 80 includes a fan-out wiring area 81 and a signal transmission area 90 connecting the display area 70 and the fan-out wiring area 81. The signal transmission region 90 is provided with a substrate 200 and at least one data signal line on the substrate 200, where the data signal line includes a first protection layer 300, an electrical wire layer 400 on the first protection layer 300, and a second protection layer 500 on the electrical wire layer 400. Wherein at least a portion of the wire layer 400 is covered by the second protective layer 500.
In this embodiment, the structural diagrams of fig. 2 to 6 are the viewing angles in the X-axis direction in fig. 1 or fig. 7, and are described herein.
In the present embodiment, in a direction perpendicular to the data signal lines, the boundary of the second passivation layer 500 exceeds the boundary of the first passivation layer 300, and the second passivation layer 500 is overlapped with the substrate 200, as shown in fig. 5. The second passivation layer 500 completely covers the first passivation layer 300 and the wire layer 400, so that the signal transmission region 90 does not have organic film residues in other processes, thereby protecting the signal transmission region 90 from water and oxygen, further protecting the display region 70, and prolonging the service life of the display panel 100.
In this embodiment, the first protection layer 300 includes a first groove, and the wire layer 400 is located in the first groove. The thickness of the wire layer 400 is less than or equal to the depth of the first groove, please refer to fig. 3. The wire layer 400 is located in the first groove, so the first protection layer 300 protects the wire layer 400, contact between organic films in other processes and the wire layer 400 is avoided, residue of organic materials in the signal transmission area 90 is reduced, water and oxygen are isolated from the signal transmission area 90, the display area 70 is protected, and the service life of the display panel 100 is prolonged.
In this embodiment, the second protection layer 500 is filled in the first groove, and the sum of the thicknesses of the second protection layer 500 and the wire layer 400 is greater than or equal to the depth of the first groove, as shown in fig. 3. The second protection film layer is also filled in the first groove to fully protect the wire layer 400 therein, and the second protection layer 500 "overflows" the first groove to further reduce the residue of the organic material in the signal transmission region 90, thereby protecting the water and oxygen insulation of the signal transmission region 90, further protecting the display region 70 and prolonging the service life of the display panel 100.
In this embodiment, in a direction perpendicular to the data signal lines, the boundary of the second passivation layer 500 exceeds the boundary of the electric line layer 400, and the second passivation layer 500 overlaps the first passivation layer 300, as shown in fig. 4. The second protection layer 500 completely covers the wire layer 400, so that in other processes, the signal transmission region 90 does not have the residue of an organic film layer, thereby protecting the signal transmission region 90 from water and oxygen, further protecting the display region 70, and prolonging the service life of the display panel 100.
In this embodiment, the second protection layer 500 is overlapped on the side surface of the wire layer 400, please refer to fig. 2 specifically. The second protection layer 500 covers a part of the side surface of the wire layer 400, and in the manufacturing process, the part of the second protection layer 500, which exceeds the wire layer 400, can be shortened as much as possible, so that the second protection layer 500 is easy to collapse to form the structure, the manufacturing difficulty is reduced, and the residue of organic materials in the signal transmission area 90 is reduced, thereby protecting the signal transmission area 90 from water and oxygen, further protecting the display area 70, and prolonging the service life of the display panel 100.
In this embodiment, the orthographic projection of the second protection layer 500 overlapping the side surface of the wire layer 400 on the side surface of the wire layer 400 is a plurality of trapezoids or a plurality of triangles, please refer to fig. 7 specifically. Due to the structure, the wire layer 400 is etched more easily when being etched in a corrosion mode, and the lower portion of the second protective layer 500 does not have enough supporting force, so that collapse is formed, organic materials of other manufacturing processes cannot be hidden in the middle of a sandwich of titanium-aluminum-titanium, organic material residues at a plurality of trapezoids or a plurality of triangles are reduced, a path for water vapor to invade is interrupted, and the situation that water vapor invades the display area 70 from the fan-out wiring area 81 along the organic optical material to cause packaging failure is avoided.
In this embodiment, a contact surface between the first protection layer 300 and the wire layer 400 is a concave surface, which is specifically referred to fig. 6. This structure can reduce the trompil technology, simultaneously because concave structure when electric wire layer 400 receives the sculpture for the side of electric wire layer 400 with the contained angle of second protective layer 500 reduces, reduces second protective layer 500 distance that collapses, is favorable to second protective layer 500 and electric wire layer 400 in close contact with, better reduces organic material's residue.
In this embodiment, the length of the intersection line of the orthographic projection of the second protective layer 500 covering the side surface of the wire layer 400 on the side surface of the wire layer 400 and the first cross section is less than 2 micrometers. Wherein the first cross section is parallel to the display panel 100. In a general manufacturing process, the corrosion depth of the wire layer 400 is not more than 2 microns, and by the structural design, when the wire layer 400 is etched, the second protection layer 500 can collapse more easily, so that a better protection effect is achieved on the wire layer 400, and the residue of organic materials is reduced.
In this embodiment, in the first cross section, the cross sectional area of the second protective layer 500 close to the display panel 100 covering the side of the wire layer 400 is smaller than the cross sectional area of the second protective layer 500 far from the display panel 100 covering the side of the wire layer 400. The first cross section is parallel to the display panel 100. When the wire layer 400 is etched, the faster the supporting force of the second protection layer 500 is reduced, the more easily the wire layer 400 is subjected to other forces in the manufacturing process, such as the jetting force of gas, and the like, so that the wire layer 400 is easily collapsed to the side surface of the wire layer 400, thereby protecting the wire layer 400, reducing the residue of organic materials in the signal transmission region 90, protecting the signal transmission region 90 from water and oxygen, further protecting the display region 70, and prolonging the service life of the display panel 100.
This application is through carrying out patterning to the second protective layer, and after the electric wire layer was corroded, at least part the electric wire layer is covered by the second protective layer, reduces organic material in the manufacturing process and is corroded the residue of department at the electric wire layer, protection display area, extension display panel's life-span.
Referring to fig. 1 to 8, the present application further provides a manufacturing method of a display panel 100, where the display panel 100 includes a display area 70 and a non-display area 80 located at a periphery of the display area 70, the non-display area 80 includes a fan-out routing area 81 and a signal transmission area 90 connecting the display area 70 and the fan-out routing area 81, and the manufacturing method of the display panel 100 includes:
s100, forming a plurality of first protection layers 300 on the substrate 200 in the signal transmission region 90;
s200, forming an electrical wire layer 400 on the first protective layer 300;
s300, forming a second protective layer 500 on the electric wire layer 400;
wherein at least a portion of the wire layer 400 is covered by the second protective layer 500.
This application is through carrying out patterning to the second protective layer, and after the electric wire layer was corroded, at least part the electric wire layer is covered by the second protective layer, reduces organic material in the manufacturing process and is corroded the residue of department at the electric wire layer, protection display area, extension display panel's life-span.
The technical solution of the present application will now be described with reference to specific embodiments.
Referring to fig. 1 to 8, the method for manufacturing the display panel 100 includes:
s100, forming a plurality of first protective layers 300 on the substrate 200 in the signal transmission region 90.
In this embodiment, the structural diagrams of fig. 2 to 6 are the viewing angles in the X-axis direction in fig. 1 or fig. 7, and are described herein.
In this embodiment, the first protection layer 300 is made of an inactive metal layer, which includes titanium.
In this embodiment, S100 includes:
s110, forming a first protection film layer on the substrate 200 in the signal transmission region 90.
S120, performing a first patterning process on the first protective film layer to form a plurality of first protective layers 300 with concave surfaces on the sides away from the display panel 100.
Referring to fig. 6, the structure can reduce the opening process, and meanwhile, due to the concave structure, when the wire layer 400 is etched, an included angle between the side surface of the wire layer 400 and the second protection layer 500 is reduced, so that the collapse distance of the second protection layer 500 is reduced, the second protection layer 500 is in close contact with the wire layer 400, and the residue of organic materials is better reduced.
S200, forming a wire layer 400 on the first protective layer 300.
In this embodiment, steps S100 and S200 include:
s110, forming a first protection film layer on the substrate 200 in the signal transmission region 90.
S120, forming a plurality of first protection layers 300 including a first groove on the first protection film layer through a first patterning process.
S210, forming the wire layer 400 in the first groove. Wherein the thickness of the wire layer 400 is less than or equal to the depth of the first groove.
In this embodiment, the material of the electric wire layer 400 is an active metal layer, which includes aluminum.
In this embodiment, the thickness of the wire layer 400 is less than or equal to the depth of the first groove, please refer to fig. 3 specifically. The wire layer 400 is located in the first groove, so the first protection layer 300 protects the wire layer 400, contact between organic films in other processes and the wire layer 400 is avoided, residue of organic materials in the signal transmission area 90 is reduced, water and oxygen are isolated from the signal transmission area 90, the display area 70 is protected, and the service life of the display panel 100 is prolonged.
And S300, forming a second protective layer 500 on the electric wire layer 400.
In this embodiment, step S300 includes:
s310, filling a second passivation layer into the first recess to form a second passivation layer 500. Wherein the sum of the thicknesses of the second protective layer 500 and the electric wire layer 400 is greater than or equal to the depth of the first groove.
Referring to fig. 3, the second protective film is also filled in the first groove to fully protect the wire layer 400 therein, and the second protective film 500 "overflows" the first groove to further reduce the residue of the organic material in the signal transmission region 90, thereby protecting the signal transmission region 90 from water and oxygen, further protecting the display region 70, and prolonging the service life of the display panel 100.
In this embodiment, step S300 includes:
and S310, forming a second protective film layer on the electric wire layer 400.
And S320, forming the second protective layer 500 by the second patterning treatment of the second protective film layer.
In this embodiment, the second protection layer 500 is overlapped on the side surface of the wire layer 400, please refer to fig. 2. The second protection layer 500 covers a part of the side surface of the wire layer 400, and in the manufacturing process, the part of the second protection layer 500, which exceeds the wire layer 400, can be shortened as much as possible, so that the second protection layer 500 is easy to collapse to form the structure, the manufacturing difficulty is reduced, and the residue of organic materials in the signal transmission area 90 is reduced, thereby protecting the signal transmission area 90 from water and oxygen, further protecting the display area 70, and prolonging the service life of the display panel 100.
In this embodiment, the orthographic projection of the second protection layer 500 overlapping the side surface of the wire layer 400 on the side surface of the wire layer 400 is a plurality of trapezoids or a plurality of triangles, please refer to fig. 7 specifically. Due to the structure, the wire layer 400 is etched more easily when being etched in a corrosion mode, and the lower portion of the second protective layer 500 does not have enough supporting force, so that collapse is formed, organic materials of other manufacturing processes cannot be hidden in the middle of a sandwich of titanium-aluminum-titanium, organic material residues at a plurality of trapezoids or a plurality of triangles are reduced, a path for water vapor to invade is interrupted, and the situation that water vapor invades the display area 70 from the fan-out wiring area 81 along the organic optical material to cause packaging failure is avoided.
In this embodiment, the length of the intersection line of the orthographic projection of the second protective layer 500 on the side surface of the electrical wire layer 400 and the first cross section, which covers the side surface of the electrical wire layer 400, is less than 2 micrometers. Wherein the first cross section is parallel to the display panel 100. In a general manufacturing process, the corrosion depth of the wire layer 400 is not more than 2 microns, and by the structural design, when the wire layer 400 is etched, the second protection layer 500 can collapse more easily, so that a better protection effect is achieved on the wire layer 400, and the residue of organic materials is reduced.
In this embodiment, in the first cross section, the cross sectional area of the second protective layer 500 close to the display panel 100 covering the side of the wire layer 400 is smaller than the cross sectional area of the second protective layer 500 far from the display panel 100 covering the side of the wire layer 400. The first cross section is parallel to the display panel 100. When the wire layer 400 is etched, the faster the supporting force of the second protection layer 500 is reduced, the more easily the wire layer 400 is subjected to other forces in the manufacturing process, such as the jet force of gas, and the like, so that the wire layer 400 is easily collapsed on the side surface of the wire layer 400, and the wire layer 400 is protected, and the residue of organic materials in the signal transmission region 90 is reduced, so that the water and oxygen insulation of the signal transmission region 90 is protected, and the display region 70 is protected, and the service life of the display panel 100 is prolonged.
In this embodiment, step S300 includes:
s310, forming a second protective film layer on the substrate 200 in the signal transmission region 90.
And S320, forming the second protective layer 500 by the second patterning treatment of the second protective film layer.
In the present embodiment, in a direction perpendicular to the data signal lines, the boundary of the second passivation layer 500 exceeds the boundary of the first passivation layer 300, and the second passivation layer 500 overlaps the substrate 200, as shown in fig. 5. The second passivation layer 500 completely covers the first passivation layer 300 and the wire layer 400, so that the signal transmission region 90 does not have organic film residues in other processes, thereby protecting the signal transmission region 90 from water and oxygen, further protecting the display region 70, and prolonging the service life of the display panel 100.
In this embodiment, in a direction perpendicular to the data signal lines, the boundary of the second passivation layer 500 exceeds the boundary of the electric line layer 400, and the second passivation layer 500 overlaps the first passivation layer 300, as shown in fig. 4. The second protection layer 500 completely covers the wire layer 400, so that in other processes, the signal transmission region 90 does not have organic film residues, thereby protecting the signal transmission region 90 from water and oxygen, further protecting the display region 70, and prolonging the service life of the display panel 100.
In this embodiment, a first protection film layer, an electrical wiring layer, and a second protection film layer are sequentially formed on the substrate 200 in the signal transmission region 90. The first protective layer 300, the wire layer 400, and the second protective layer 500 are formed at one time by a third patterning process, and after the wire layer is eroded, at least a portion of the wire layer is covered by the second protective layer, so as to form three layers at one time, thereby saving the process steps, and the specific structure is shown in fig. 2 and fig. 4.
This application is through carrying out patterning to the second protective layer, and after the electric wire layer was corroded, at least part the electric wire layer is by the second protective layer covers, reduces organic material in the manufacturing process and is corroded the residue of department at the electric wire layer, protection display area, extension display panel's life-span.
The application discloses a display panel and a manufacturing method thereof. The display panel comprises a display area and a non-display area positioned on the periphery of the display area, wherein the non-display area comprises a fan-out wiring area and a signal transmission area connecting the display area and the fan-out wiring area; the signal transmission area is internally provided with at least one data signal line, and the data signal line comprises a first protective layer, a wire layer positioned on the first protective layer and a second protective layer positioned on the wire layer; wherein, the second protective layer covers at least partial side of the electric wire layer. This application is through carrying out patterning to the second protective layer, and after the electric wire layer was corroded, at least part the electric wire layer is covered by the second protective layer, reduces organic material in the manufacturing process and is corroded the residue of department at the electric wire layer, protection display area, extension display panel's life-span.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to the related descriptions of other embodiments.
The above embodiments of the present application are described in detail, and specific examples are applied in the present application to explain the principles and implementations of the present application, and the description of the above embodiments is only used to help understand the technical solutions and core ideas of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.

Claims (7)

1. The display panel is characterized by comprising a display area and a non-display area positioned at the periphery of the display area, wherein the non-display area comprises a fan-out wiring area and a signal transmission area connecting the display area and the fan-out wiring area;
the signal transmission area is internally provided with a substrate and at least one data signal line positioned on the substrate, and the data signal line comprises a first protective layer, a wire layer positioned on the first protective layer and a second protective layer positioned on the wire layer;
wherein at least a part of the wire layer is covered by the second protective layer, the second protective layer overlaps the side surface of the wire layer, and the orthographic projection of the second protective layer overlapping the side surface of the wire layer on the side surface of the wire layer is a plurality of trapezoids or a plurality of triangles.
2. The display panel according to claim 1, wherein a boundary of the second protective layer exceeds a boundary of the first protective layer in a direction perpendicular to the data signal line, the second protective layer overlapping with the substrate.
3. The display panel according to claim 1, wherein the first protective layer comprises a first groove, and the wire layer is located in the first groove;
the thickness of the wire layer is less than or equal to the depth of the first groove.
4. The display panel according to claim 3, wherein the second protective layer is filled in the first groove, and a sum of thicknesses of the second protective layer and the wire layer is greater than or equal to a depth of the first groove.
5. The display panel according to claim 1, wherein a boundary of the second protective layer exceeds a boundary of the electric wire layer in a direction perpendicular to the data signal wires, the second protective layer overlapping with the first protective layer.
6. A manufacturing method of a display panel, the display panel comprises a display area and a non-display area positioned at the periphery of the display area, the non-display area comprises a fan-out wiring area and a signal transmission area connecting the display area and the fan-out wiring area, and the manufacturing method of the display panel is characterized by comprising the following steps:
forming a plurality of first protective layers on the substrate in the signal transmission area;
forming a wire layer on the first protective layer;
forming a second protective layer on the wire layer;
wherein the step of forming a second protective layer on the electric wire layer includes:
forming a second protective film layer on the wire layer;
the second protective film layer is subjected to second patterning treatment to form the second protective layer;
wherein at least a part of the wire layer is covered by the second protective layer, the second protective layer is overlapped on the side surface of the wire layer, and the orthographic projection of the second protective layer overlapped on the side surface of the wire layer is a plurality of trapezoids or a plurality of triangles.
7. The method according to claim 6, wherein the step of forming the plurality of first protective layers and the wire layer comprises:
forming a first protective film layer on the substrate in the signal transmission area;
the first protective film layer is subjected to first patterning treatment to form a plurality of first protective layers comprising first grooves;
forming the wire layer in the first groove;
wherein the thickness of the wire layer is less than or equal to the depth of the first groove.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107946342A (en) * 2017-11-14 2018-04-20 京东方科技集团股份有限公司 Flexible display substrates and preparation method thereof, display device
CN110164312A (en) * 2019-05-30 2019-08-23 京东方科技集团股份有限公司 The preparation method and display device of a kind of display panel, display panel

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130020574A1 (en) * 2011-07-19 2013-01-24 Panasonic Corporation Display device and method of manufacturing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107946342A (en) * 2017-11-14 2018-04-20 京东方科技集团股份有限公司 Flexible display substrates and preparation method thereof, display device
CN110164312A (en) * 2019-05-30 2019-08-23 京东方科技集团股份有限公司 The preparation method and display device of a kind of display panel, display panel

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