CN111168179A - Brazing method for tungsten titanium target and copper back plate - Google Patents
Brazing method for tungsten titanium target and copper back plate Download PDFInfo
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- CN111168179A CN111168179A CN202010086052.0A CN202010086052A CN111168179A CN 111168179 A CN111168179 A CN 111168179A CN 202010086052 A CN202010086052 A CN 202010086052A CN 111168179 A CN111168179 A CN 111168179A
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- nickel plating
- back plate
- tungsten
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
- B23K1/206—Cleaning
Abstract
The invention provides a brazing method of a tungsten titanium target and a copper back plate, which comprises the following steps: (1) the welding surfaces of the tungsten titanium target and the copper back plate are subjected to surface sand blasting independently; (2) respectively and independently carrying out nickel plating treatment on the welding surfaces of the tungsten-titanium target and the copper back plate after sand blasting treatment; (3) and (4) connecting the tungsten-titanium target material subjected to nickel plating treatment with the copper back plate by brazing, and completing the brazing welding of the tungsten-titanium target material and the copper back plate. According to the invention, the roughness of the welding surface is improved through sand blasting, and the tungsten titanium target material and the copper back plate are effectively combined through nickel plating, so that the welding effect of the tungsten titanium target material and the copper back plate is improved.
Description
Technical Field
The invention belongs to the technical field of semiconductor manufacturing, relates to a welding method of a target and a back plate, and particularly relates to a welding method of a tungsten titanium target and a copper back plate.
Background
Sputtering coating is a common process in semiconductor production, and in the sputtering coating process, a target material for sputtering is usually fixed by using a back plate, that is, the target material is connected to the back plate by welding, bolting and the like for fixing.
The type of solder and the welding conditions used in welding are different depending on the material of the target. The technological environment of sputtering coating is severe, the target assembly is in a strong electric field and a strong magnetic field, and the target assembly is bombarded by various high-speed particles in the magnetron sputtering process, so that the temperature of the target assembly is high. Therefore, the welding strength requirement on the target assembly is high, if the welding strength cannot meet the requirement, adverse conditions such as target deformation, cracking of a joint of the target and the back plate and the like are easy to occur, and the target and the back plate fall off in eyes, so that the quality of magnetron sputtering is influenced.
CN 107971620 a discloses a tungsten target diffusion welding method and a target assembly, which are used to solve the problems that cracks are likely to occur when a tungsten target is directly welded with a copper alloy backing plate, and the diffusion welding between the target and an aluminum intermediate layer and between the aluminum intermediate layer and the copper alloy is not easy. The method comprises the steps of firstly plating a layer of titanium metal film on the welding surface of a tungsten target to plate the tungsten-titanium target in a stroke mode, plating a titanium metal film stroke titanium-aluminum intermediate layer on the upper welding surface and the lower welding surface of an aluminum intermediate layer, and plating a layer of titanium metal film stroke titanium-copper alloy backboard on the welding surface of a copper alloy backboard. Because the titanium metal film is easy to diffuse with copper alloy, pure aluminum and the like, the copper alloy backboard is effectively connected with the aluminum intermediate layer through the titanium metal film, and the stress of tungsten and copper alloy is effectively released in the welding process, so that the target assembly is not easy to deform and crack.
CN 108149203 a discloses a method for manufacturing a target assembly, which comprises performing surface sand blasting treatment on a welding surface of a target blank, and coating solder on the welding surface after the sand blasting treatment; coating solder on the welding surface of the back plate; and (3) attaching the target blank and the back plate, and welding the target blank onto the back plate through a welding process to form the target assembly. Although this manufacturing method improves the roughness of the welded surface by the blasting treatment, the bonding strength of the welded surface is to be further improved.
Also, CN 103567583 a discloses a welding method of an aluminum target assembly, comprising: carrying out surface infiltration treatment on the welding surface of the aluminum target blank by using molten tin solder; carrying out surface wetting treatment on the welding surface of the back plate by using molten indium solder; the soldering surface of the aluminum target material and the soldering surface of the backing plate are soldered together by the tin solder and the indium solder, but the bonding strength of the soldering surfaces is yet to be further improved.
Therefore, the welding method for the target and the back plate, which is high in welding strength and welding bonding rate, is provided, and has important significance for improving the yield of magnetron sputtering.
Disclosure of Invention
The invention aims to provide a brazing method of a tungsten titanium target and a copper back plate, the brazing method improves the roughness of a welding surface through sand blasting, and the tungsten titanium target is effectively combined with the copper back plate through nickel plating, so that the welding effect of the tungsten titanium target and the copper back plate is improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a brazing method of a tungsten titanium target and a copper back plate, which comprises the following steps:
(1) the welding surfaces of the tungsten titanium target and the copper back plate are subjected to surface sand blasting independently;
(2) respectively and independently carrying out nickel plating treatment on the welding surfaces of the tungsten-titanium target and the copper back plate after sand blasting treatment;
(3) and (4) connecting the tungsten-titanium target material subjected to nickel plating treatment with the copper back plate by brazing, and completing the brazing welding of the tungsten-titanium target material and the copper back plate.
The roughness of the welding surface is improved through sand blasting treatment; then, the tungsten titanium target material is combined with the copper back plate through nickel plating treatment, and the nickel layer subjected to the nickel plating treatment can be better connected with the welding surface through the operation of sand blasting treatment, so that the combination effect of the tungsten titanium target material and the copper back plate is improved; and finally, arranging brazing solder between the welding surfaces of the tungsten-titanium target and the copper back plate, so that the tungsten-titanium target and the copper back plate are brazed.
Preferably, the welding method further comprises a pretreatment step of: a lug boss is arranged on the welding surface of the tungsten-titanium target, and a groove matched with the lug boss is arranged on the welding surface of the copper back plate.
According to the invention, the lug boss is embedded in the groove during welding through the arrangement of the lug boss and the groove, so that the bonding area of the tungsten titanium target and the copper back plate is increased. Moreover, the tungsten titanium target and the copper back plate have the property of easy deformation at high temperature, and the tungsten titanium target and the copper back plate can be combined more tightly by the high temperature generated under magnetron sputtering, so that the combination effect of the tungsten titanium target and the copper back plate is improved.
Preferably, the difference between the depth of the groove and the height of the land is 0.35-0.65mm, and may be, for example, 0.35mm, 0.4mm, 0.45mm, 0.5mm, 0.55mm, 0.6mm or 0.65mm, but is not limited to the values recited, and other values not recited within the range of values are equally applicable.
The difference value of the depth of the groove and the height of the boss is the sum of the depth of the groove and the height of the boss, and the depth of the groove is larger than the height of the boss, so that the brazing solder can better combine the tungsten-titanium target material with the through back plate, and the bonding strength of the tungsten-titanium target material and the copper back plate is improved.
Preferably, the equivalent circular diameter of the recess is at least 0.4mm greater than the equivalent circular diameter of the boss, and may be, for example, 0.4mm, 0.45mm, 0.5mm, 0.55mm, 0.6mm, 0.65mm, 0.7mm, 0.75mm or 0.8mm, but is not limited to the values recited, and values not recited in the numerical ranges are equally applicable.
According to the invention, the equivalent circle diameter of the groove is at least 0.4mm larger than that of the boss, so that the brazing solder can better combine the tungsten-titanium target material with the through back plate, and the bonding strength of the tungsten-titanium target material and the copper back plate is improved.
Preferably, the difference between the equivalent circular diameter of the groove and the equivalent circular diameter of the boss is 0.4-0.8mm, such as 0.4mm, 0.5mm, 0.6mm, 0.7mm or 0.8mm, but not limited to the values recited, and other values not recited in the range of values are equally applicable, the difference being the value of the equivalent circular diameter of the groove minus the value of the equivalent circular diameter of the boss.
The shape of the boss of the present invention includes a regular shape or an irregular shape, and the shape of the boss is preferably a regular shape from the viewpoint of easy processing. Further preferably, the boss is a circular boss.
The number of bosses is at least 1, and may be, for example, 1, 2, 3, 4 or 5, but is not limited to the recited values, and other values not recited in the numerical range are equally applicable. The technical personnel in the field can reasonably set according to the size of the tungsten-titanium target material, as long as the lug boss and the groove can be matched with each other.
The matching is to embed the lug boss into the groove and connect the lug boss with the groove through brazing solder.
Preferably, the sand blasting treatment in the step (1) is performed in a sand blasting machine, the sand grains used for the sand blasting treatment are 46 # white jade steel, the air pressure is in the range of 0.4-0.45MPa, for example, 0.4MPa, 0.41MPa, 0.42MPa, 0.43MPa, 0.44MPa or 0.45MPa, but the sand blasting treatment is not limited to the enumerated values, and other unrecited values in the numerical range are also applicable; the time of the sand blasting is 5-10min, such as 5min, 6min, 7min, 8min, 9min or 10min, but not limited to the values listed, and other values not listed in the numerical range are also applicable; the perpendicular distance between the blasting gun and the welding surface during the blasting is 150-200mm, for example 150mm, 160mm, 170mm, 180mm, 190mm or 200mm, but is not limited to the values listed, and other values not listed in the range of values are also applicable.
Preferably, in the sand blasting treatment in the step (1), the included angle between the sand blasting direction of the sand blasting gun and the welding surface is 0-180 degrees, and is not 0 degrees, 90 degrees and 180 degrees, such as 15 degrees, 30 degrees, 45 degrees, 60 degrees, 75 degrees, 100 degrees, 120 degrees, 135 degrees, 145 degrees, 160 degrees or 175 degrees, but is not limited to the enumerated values.
The included angle between the sand blasting direction of the sand blasting gun and the welding surface can be flexibly adjusted within the range of 0-180 degrees in the sand blasting process, so that the roughness distribution of each point of the welding surface is uniform, and a person skilled in the art can reasonably adjust the included angle according to the sand blasting condition in the sand blasting process.
The invention improves the roughness of the welding surface of the tungsten-titanium target and the copper back plate through the operation of sand blasting treatment, thereby improving the bonding strength of the nickel layer and the welding surface during the subsequent nickel plating treatment. Thereby improving the bonding strength of the tungsten titanium target, the nickel layer, the brazing solder and the copper back plate.
Preferably, the nickel plating treatment in the step (2) is chemical nickel plating, and comprises the following steps:
(a) activating the welding surface subjected to sand blasting;
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating;
(c) and cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 60-70 ℃, and drying to finish the chemical nickel plating.
The cleaning is performed by using deionized water, and a person skilled in the art can select a proper cleaning time and a proper cleaning method according to cleaning requirements.
The temperature of the deionized water soaking in the invention is 60-70 ℃, for example, 60 ℃, 62 ℃, 64 ℃, 65 ℃, 66 ℃, 68 ℃ or 70 ℃, but not limited to the listed temperature, and other temperatures not listed in the numerical range are also applicable.
Through the cleaning of deionized water at 60-70 ℃, impurities on the welding surface after nickel plating are further removed, and the impurity removal effect of the welding surface is improved.
Preferably, the activation treatment in step (a) is carried out in an activation solution for 45-75s, such as 45s, 50s, 55s, 60s, 65s, 70s or 75s, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the activating solution consists of hydrofluoric acid and water, the volume ratio of hydrofluoric acid to water is (0.5-2): (8-9.5), and may be, for example, 0.5:9.5, 0.8:9.2, 1:9, 1.5:8.5 or 2:8, but is not limited to the recited values, and other values not recited in the numerical range are also applicable.
Preferably, the nickel plating solution in step (b) is a mixed aqueous solution of SYC300A and SYC300B, and the concentration of nickel ions in the nickel plating solution is 5.6-6g/L, such as 5.6g/L, 5.7g/L, 5.8g/L, 5.9g/L or 6g/L, but not limited to the enumerated values, and other unrecited values in the numerical range are also applicable; the nickel plating temperature is 85-90 deg.C, such as 85 deg.C, 86 deg.C, 87 deg.C, 88 deg.C, 89 deg.C or 90 deg.C, but not limited to the values recited, and other values not recited in the range of values are also applicable; the nickel plating time is 20-30min, such as 20min, 22min, 25min, 27min, 28min or 30min, but not limited to the values listed, and other values not listed in the range of values are also applicable.
Preferably, the volume ratio of SYC300A to SYC300B is 1 (1-3), and may be, for example, 1:1, 1:2 or 1:3, but is not limited to the enumerated values, and other unrecited values within the numerical range are also applicable.
Preferably, the soaking time in step (c) is 12-18s, such as 12s, 13s, 14s, 15s, 16s, 17s or 18s, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the solder used for the soldering connection is an indium-containing solder.
As a preferable embodiment of the brazing method of the present invention, the brazing method includes the steps of:
(1) arranging a boss on the welding surface of the tungsten titanium target, arranging a groove matched with the boss on the welding surface of the copper back plate, and then performing surface sand blasting treatment on the welding surfaces of the tungsten titanium target and the copper back plate respectively and independently; the sand grains adopted by the sand blasting treatment are No. 46 white jade steel, and the air pressure range is 0.4-0.45 MPa; the sand blasting time is 5-10 min; the vertical distance between the sand-blasting gun and the welding surface is 150-200mm during sand blasting treatment; the included angle between the sand blasting direction of the sand blasting gun and the welding surface is 0-180 degrees and is not 0 degree, 90 degrees or 180 degrees;
(2) the method is characterized in that the chemical nickel plating is respectively and independently carried out on the welding surface of the tungsten-titanium target and the copper back plate after the sand blasting treatment, and comprises the following steps:
(a) carrying out activation treatment on the welding surface subjected to sand blasting in an activation solution for 45-75 s; the activating solution consists of hydrofluoric acid and water, and the volume ratio of the hydrofluoric acid to the water is (0.5-2) to (8-9.5);
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating; the nickel plating solution is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 5.6-6g/L, the nickel plating temperature is 85-90 ℃, and the nickel plating time is 20-30 min; the volume ratio of SYC300A to SYC300B is 1 (1-3);
(c) cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 60-70 ℃ for 12-18s in sequence, and drying to finish the chemical nickel plating;
(3) and brazing the tungsten-titanium target material and the copper back plate which are subjected to nickel plating treatment by using an indium-containing brazing filler metal to complete brazing welding of the tungsten-titanium target material and the copper back plate.
Compared with the prior art, the invention has the following beneficial effects:
(1) the roughness of the welding surface of the tungsten-titanium target and the copper back plate is improved through the operation of sand blasting treatment, so that the bonding strength of a nickel layer and the welding surface is improved during subsequent nickel plating treatment;
(2) according to the invention, the welding performance of the tungsten-titanium target and the copper back plate is improved through nickel plating treatment, so that the tungsten-titanium target and the copper back plate can be reliably combined, a target assembly formed by the tungsten-titanium target and the copper back plate has enough combination rate and combination strength, and the requirement of long-term stable use of the target assembly is met;
(3) according to the invention, the lug boss is arranged on the tungsten titanium target, the corresponding groove is arranged on the welding surface of the copper back plate, and the bonding strength of the tungsten titanium target and the copper back plate is improved by utilizing the characteristic of high-temperature deformation of the tungsten titanium target and the copper back plate, so that the requirement of long-term stable use of the target assembly is met.
Drawings
Fig. 1 is a schematic structural diagram of a target assembly obtained after welding by the brazing method provided by the invention.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments. It should be understood by those skilled in the art that the examples are only for the understanding of the present invention and should not be construed as the specific limitations of the present invention.
Example 1
The embodiment provides a brazing method for a tungsten-titanium target and a copper back plate, which comprises the following steps:
(1) arranging a boss on the welding surface of the tungsten titanium target, arranging a groove matched with the boss on the welding surface of the copper back plate, wherein the difference between the depth of the groove and the height of the boss is 0.55mm, and the equivalent circle diameter of the groove is 0.6mm larger than that of the boss; then, carrying out surface sand blasting treatment on the welding surfaces of the tungsten-titanium target and the copper back plate respectively and independently; the sand grains adopted by the sand blasting treatment are No. 46 white jade steel, and the air pressure range is 0.43 MPa; the time of sand blasting is 8 min; the vertical distance between the sand-blasting gun and the welding surface is 180mm during sand blasting treatment;
(2) the method is characterized in that the chemical nickel plating is respectively and independently carried out on the welding surface of the tungsten-titanium target and the copper back plate after the sand blasting treatment, and comprises the following steps:
(a) carrying out activation treatment on the welding surface subjected to sand blasting treatment in an activation solution for 60 s; the activating solution consists of hydrofluoric acid and water, and the volume ratio of the hydrofluoric acid to the water is 1.2: 8.8;
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating; the nickel plating solution is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 5.8g/L, the nickel plating temperature is 87 ℃, and the nickel plating time is 25 min; the volume ratio of SYC300A to SYC300B is 1: 2;
(c) cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 65 ℃ for 15s, and drying to finish the chemical nickel plating;
(3) and brazing the tungsten-titanium target material and the copper back plate which are subjected to nickel plating treatment by using an indium-containing brazing filler metal to complete brazing welding of the tungsten-titanium target material and the copper back plate.
The structural schematic diagram of the target assembly obtained after brazing is shown in fig. 1, and after brazing is completed, the tungsten-titanium target and the copper back plate are well combined.
Example 2
The embodiment provides a brazing method for a tungsten-titanium target and a copper back plate, which comprises the following steps:
(1) arranging a boss on the welding surface of the tungsten titanium target, arranging a groove matched with the boss on the welding surface of the copper back plate, wherein the difference between the depth of the groove and the height of the boss is 0.4mm, and the equivalent circle diameter of the groove is 0.5mm larger than that of the boss; then, carrying out surface sand blasting treatment on the welding surfaces of the tungsten-titanium target and the copper back plate respectively and independently; the sand grains adopted by the sand blasting treatment are No. 46 white jade steel, and the air pressure range is 0.42 MPa; the time of sand blasting is 9 min; the vertical distance between the sand-blasting gun and the welding surface is 160mm during sand blasting treatment;
(2) the method is characterized in that the chemical nickel plating is respectively and independently carried out on the welding surface of the tungsten-titanium target and the copper back plate after the sand blasting treatment, and comprises the following steps:
(a) carrying out activation treatment on the welding surface subjected to sand blasting in an activation solution for 55 s; the activating solution consists of hydrofluoric acid and water, and the volume ratio of the hydrofluoric acid to the water is 1: 9;
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating; the nickel plating solution is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 5.7g/L, the nickel plating temperature is 88 ℃, and the nickel plating time is 27 min; the volume ratio of SYC300A to SYC300B is 1: 2;
(c) cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 62 ℃ for 16s in sequence, and drying to finish the chemical nickel plating;
(3) and brazing the tungsten-titanium target material and the copper back plate which are subjected to nickel plating treatment by using an indium-containing brazing filler metal to complete brazing welding of the tungsten-titanium target material and the copper back plate.
After the brazing is finished, the tungsten titanium target and the copper back plate are well combined.
Example 3
The embodiment provides a brazing method for a tungsten-titanium target and a copper back plate, which comprises the following steps:
(1) arranging a boss on the welding surface of the tungsten titanium target, arranging a groove matched with the boss on the welding surface of the copper back plate, wherein the difference between the depth of the groove and the height of the boss is 0.6mm, and the equivalent circle diameter of the groove is 0.7mm larger than that of the boss; then, carrying out surface sand blasting treatment on the welding surfaces of the tungsten-titanium target and the copper back plate respectively and independently; the sand grains adopted by the sand blasting treatment are No. 46 white jade steel, and the air pressure range is 0.44 MPa; the time of sand blasting is 6 min; the vertical distance between the sand-blasting gun and the welding surface is 190mm during sand blasting treatment;
(2) the method is characterized in that the chemical nickel plating is respectively and independently carried out on the welding surface of the tungsten-titanium target and the copper back plate after the sand blasting treatment, and comprises the following steps:
(a) carrying out activation treatment on the welding surface subjected to sand blasting treatment in an activation solution for 65 s; the activating solution consists of hydrofluoric acid and water, and the volume ratio of the hydrofluoric acid to the water is 1.5: 8.5;
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating; the nickel plating solution is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 5.9g/L, the nickel plating temperature is 86 ℃, and the nickel plating time is 22 min; the volume ratio of SYC300A to SYC300B is 1: 2;
(c) cleaning the welding surface after nickel plating, soaking the welding surface for 14s in deionized water at 68 ℃, and drying to finish the chemical nickel plating;
(3) and brazing the tungsten-titanium target material and the copper back plate which are subjected to nickel plating treatment by using an indium-containing brazing filler metal to complete brazing welding of the tungsten-titanium target material and the copper back plate.
After the brazing is finished, the tungsten titanium target and the copper back plate are well combined.
Example 4
The embodiment provides a brazing method for a tungsten-titanium target and a copper back plate, which comprises the following steps:
(1) arranging a boss on the welding surface of the tungsten titanium target, arranging a groove matched with the boss on the welding surface of the copper back plate, wherein the difference between the depth of the groove and the height of the boss is 0.65mm, and the equivalent circle diameter of the groove is 0.4mm larger than that of the boss; then, carrying out surface sand blasting treatment on the welding surfaces of the tungsten-titanium target and the copper back plate respectively and independently; the sand grains adopted by the sand blasting treatment are No. 46 white jade steel, and the air pressure range is 0.45 MPa; the time of sand blasting is 5 min; the vertical distance between the sand-blasting gun and the welding surface is 200mm during sand blasting treatment;
(2) the method is characterized in that the chemical nickel plating is respectively and independently carried out on the welding surface of the tungsten-titanium target and the copper back plate after the sand blasting treatment, and comprises the following steps:
(a) carrying out activation treatment on the welding surface subjected to sand blasting in an activation solution for 45 s; the activating solution consists of hydrofluoric acid and water, and the volume ratio of the hydrofluoric acid to the water is 2: 8;
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating; the nickel plating solution is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 5.6g/L, the nickel plating temperature is 85 ℃, and the nickel plating time is 30 min; the volume ratio of SYC300A to SYC300B is 1: 1;
(c) cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 60 ℃ for 18s in sequence, and drying to finish the chemical nickel plating;
(3) and brazing the tungsten-titanium target material and the copper back plate which are subjected to nickel plating treatment by using an indium-containing brazing filler metal to complete brazing welding of the tungsten-titanium target material and the copper back plate.
After the brazing is finished, the tungsten titanium target and the copper back plate are well combined.
Example 5
The embodiment provides a brazing method for a tungsten-titanium target and a copper back plate, which comprises the following steps:
(1) arranging a boss on the welding surface of the tungsten titanium target, arranging a groove matched with the boss on the welding surface of the copper back plate, wherein the difference between the depth of the groove and the height of the boss is 0.35mm, and the equivalent circle diameter of the groove is 0.8mm larger than that of the boss; then, carrying out surface sand blasting treatment on the welding surfaces of the tungsten-titanium target and the copper back plate respectively and independently; the sand grains adopted by the sand blasting treatment are No. 46 white jade steel, and the air pressure range is 0.4 MPa; the time of sand blasting is 10 min; the vertical distance between the sand-blasting gun and the welding surface is 150mm during sand blasting treatment;
(2) the method is characterized in that the chemical nickel plating is respectively and independently carried out on the welding surface of the tungsten-titanium target and the copper back plate after the sand blasting treatment, and comprises the following steps:
(a) carrying out activation treatment on the welding surface subjected to sand blasting treatment in an activation solution for 75 s; the activating solution consists of hydrofluoric acid and water, and the volume ratio of the hydrofluoric acid to the water is 0.5: 9.5;
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating; the nickel plating solution is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 6g/L, the nickel plating temperature is 90 ℃, and the nickel plating time is 20 min; the volume ratio of SYC300A to SYC300B is 1: 3;
(c) cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 70 ℃ for 12s in sequence, and drying to finish the chemical nickel plating;
(3) and brazing the tungsten-titanium target material and the copper back plate which are subjected to nickel plating treatment by using an indium-containing brazing filler metal to complete brazing welding of the tungsten-titanium target material and the copper back plate.
After the brazing is finished, the tungsten titanium target and the copper back plate are well combined.
Comparative example 1
The comparative example provides a brazing method of a tungsten titanium target and a copper back plate, and the method is the same as that in example 1 except that the surface sand blasting treatment is not independently performed on the welding surfaces of the tungsten titanium target and the copper back plate.
After the brazing is finished, the tungsten titanium target and the copper back plate are poor in combination effect.
Comparative example 2
The comparative example provides a method for brazing a tungsten titanium target and a copper back plate, which is the same as that in example 1 except that nickel plating treatment is not independently performed on the welding surfaces of the tungsten titanium target and the copper back plate after sand blasting treatment.
After the brazing is finished, the tungsten titanium target and the copper back plate are poor in combination effect.
In conclusion, the roughness of the welding surface of the tungsten-titanium target and the copper back plate is improved through the operation of sand blasting treatment, so that the bonding strength of a nickel layer and the welding surface is improved during subsequent nickel plating treatment; according to the invention, the welding performance of the tungsten-titanium target and the copper back plate is improved through nickel plating treatment, so that the tungsten-titanium target and the copper back plate can be reliably combined, a target assembly formed by the tungsten-titanium target and the copper back plate has enough combination rate and combination strength, and the requirement of long-term stable use of the target assembly is met; according to the invention, the lug boss is arranged on the tungsten titanium target, the corresponding groove is arranged on the welding surface of the copper back plate, and the bonding strength of the tungsten titanium target and the copper back plate is improved by utilizing the characteristic of high-temperature deformation of the tungsten titanium target and the copper back plate, so that the requirement of long-term stable use of the target assembly is met.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (14)
1. A brazing method of a tungsten titanium target and a copper back plate is characterized by comprising the following steps:
(1) the welding surfaces of the tungsten titanium target and the copper back plate are subjected to surface sand blasting respectively and independently;
(2) respectively and independently carrying out nickel plating treatment on the welding surfaces of the tungsten-titanium target and the copper back plate after sand blasting treatment;
(3) and (4) connecting the tungsten-titanium target material subjected to nickel plating treatment with the copper back plate by brazing, and completing the brazing welding of the tungsten-titanium target material and the copper back plate.
2. The brazing method according to claim 1, wherein the welding method further comprises a pre-treatment step of: a lug boss is arranged on the welding surface of the tungsten-titanium target, and a groove matched with the lug boss is arranged on the welding surface of the copper back plate.
3. The brazing method according to claim 2, wherein the difference between the depth of the groove and the height of the boss is 0.35 to 0.65 mm.
4. The brazing method according to claim 2, wherein the equivalent circular diameter of the groove is at least 0.4mm larger than the equivalent circular diameter of the boss.
5. The brazing method according to claim 1, wherein the sand blasting of the step (1) is carried out in a sand blasting machine, the sand grains adopted in the sand blasting are No. 46 white jade steel, and the air pressure is in the range of 0.4-0.45 MPa; the sand blasting time is 5-10 min; the vertical distance between the sand-blasting gun and the welding surface is 150-200mm during sand blasting treatment.
6. The brazing method according to claim 5, wherein the angle between the blasting direction of the blasting gun and the welding surface is 0-180 degrees and is not 0 degrees, 90 degrees or 180 degrees in the blasting treatment of the step (1).
7. The brazing method according to any one of claims 1 to 6, wherein the nickel plating treatment of the step (2) is electroless nickel plating, and comprises the following steps:
(a) activating the welding surface subjected to sand blasting;
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating;
(c) and cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 60-70 ℃, and drying to finish the chemical nickel plating.
8. The brazing method according to claim 7, wherein the activation treatment of the step (a) is performed in an activation solution for 45-75 s.
9. The brazing method according to claim 8, wherein the activating liquid consists of hydrofluoric acid and water in a volume ratio of (0.5-2) to (8-9.5).
10. The brazing method according to claim 7, wherein the nickel plating solution in the step (b) is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 5.6-6g/L, the nickel plating temperature is 85-90 ℃, and the nickel plating time is 20-30 min.
11. The brazing method according to claim 10, wherein the volume ratio of SYC300A to SYC300B is 1 (1-3).
12. The brazing method according to claim 7, wherein the soaking time in the step (c) is 12-18 s.
13. The brazing method according to claim 1, wherein the brazing material used in the step (3) of brazing connection is an indium-containing brazing material.
14. Brazing method according to any one of claims 1 to 13, comprising the steps of:
(1) arranging a boss on the welding surface of the tungsten titanium target, arranging a groove matched with the boss on the welding surface of the copper back plate, and then performing surface sand blasting treatment on the welding surfaces of the tungsten titanium target and the copper back plate respectively and independently; the sand grains adopted by the sand blasting treatment are No. 46 white jade steel, and the air pressure range is 0.4-0.45 MPa; the sand blasting time is 5-10 min; the vertical distance between the sand-blasting gun and the welding surface is 150-200mm during sand blasting treatment; the included angle between the sand blasting direction of the sand blasting gun and the welding surface is 0-180 degrees and is not 0 degree, 90 degrees or 180 degrees;
(2) the method is characterized in that the chemical nickel plating is respectively and independently carried out on the welding surface of the tungsten-titanium target and the copper back plate after the sand blasting treatment, and comprises the following steps:
(a) carrying out activation treatment on the welding surface subjected to sand blasting in an activation solution for 45-75 s; the activating solution consists of hydrofluoric acid and water, and the volume ratio of the hydrofluoric acid to the water is (0.5-2) to (8-9.5);
(b) cleaning the welding surface after the activation treatment, and then putting the welding surface into nickel plating solution for nickel plating; the nickel plating solution is a mixed aqueous solution of SYC300A and SYC300B, the concentration of nickel ions in the nickel plating solution is 5.6-6g/L, the nickel plating temperature is 85-90 ℃, and the nickel plating time is 20-30 min; the volume ratio of SYC300A to SYC300B is 1 (1-3);
(c) cleaning the welding surface after nickel plating, soaking the welding surface in deionized water at 60-70 ℃ for 12-18s in sequence, and drying to finish the chemical nickel plating;
(3) and brazing the tungsten-titanium target material and the copper back plate which are subjected to nickel plating treatment by using an indium-containing brazing filler metal to complete brazing welding of the tungsten-titanium target material and the copper back plate.
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