CN111146109B - Detection system - Google Patents
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- CN111146109B CN111146109B CN202010094790.XA CN202010094790A CN111146109B CN 111146109 B CN111146109 B CN 111146109B CN 202010094790 A CN202010094790 A CN 202010094790A CN 111146109 B CN111146109 B CN 111146109B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Abstract
The detection system comprises an array type optical image capturing device, an image processing and detecting device, a positioning linear sliding table device, an image data backup device, a human-computer interface device and the like, is suitable for online automatic optical testing of the CIGS thin-film solar panel, carries out a series of subsequent steps after P3 mechanical scribing manufacturing, can carry out digital processing on each solar panel on production line, rapidly and accurately completes related detection analysis, can control the total operation time within 60 seconds, completely meets the detection speed requirement of the production line, reduces the number of secondary products and defective products, and greatly improves the manufacturing qualified rate.
Description
Technical Field
The invention relates to the field of detection, in particular to a detection system applied to a CIGS thin-film solar cell.
Background
With the development of economic society, the demand of people on energy is increasing day by day, and because the reserves of conventional fossil energy such as coal, petroleum and natural gas are limited, and a large amount of greenhouse gas is generated in the using process to pollute the environment, the development and utilization of new clean energy becomes a main way for solving the problems of conventional energy lack and environmental pollution.
As is well known, solar energy is an inexhaustible clean energy source, and is one of the essential and critical energy sources in the development process of the present day and the future. The solar energy is inexhaustible, clean and pollution-free, and is the most ideal and sustainable renewable energy source in the future. The solar energy utilization mainly comprises two aspects of photo-thermal conversion and photoelectric conversion at present, the photoelectric conversion is to directly convert the photo-energy into the electric energy by using a solar cell, the daily application of people can be greatly facilitated, and in addition, the solar cell also has the advantages of safety, no pollution, no region limitation, convenience in maintenance, long service life and the like, and is widely applied to various fields of aerospace, communication, military, traffic and the like.
Solar cells are important basic components for photoelectric energy conversion, and photoelectric conversion efficiency and manufacturing cost are two most important key factors. The CIGS thin-film solar cell can save a large amount of raw materials, has the flexibility, has a wide absorption spectrum range and photoelectric conversion efficiency of more than 18 percent, and is considered to have good development potential. The CIGS thin-film solar cell is subjected to 3 scribing manufacturing procedures in production and manufacturing, including laser scribing and mechanical scribing, but undesirable phenomena such as variation of scribing line width or line distance, scribing distortion, insufficient scribing depth or cracking and the like can occur. The traditional sampling off-line inspection can not meet the current mass production requirements, and an online full inspection system capable of being combined with production line manufacturing is urgently needed, so that the invention of the optical image capturing device and the detection system is very necessary to be used as an online full inspection automatic optical detection system in the processing process of the CIGS thin-film solar cell.
Disclosure of Invention
Accordingly, in view of the disadvantages in the related art, examples of the present invention are provided to substantially solve one or more problems due to limitations and disadvantages of the related art, to substantially improve safety and reliability, and to effectively protect equipment.
According to the technical scheme provided by the invention, the detection system disclosed by the invention comprises an array type optical image capturing device, an image processing and detecting device, a positioning linear sliding table device, an image data backup device and a human-computer interface device; the array type optical image capturing device is used for acquiring a resolution image of the CIGS thin-film solar panel and comprises a plurality of groups of optical image capturing modules; the image processing and detecting device comprises a plurality of industrial computers, the number of the industrial computers is the same as that of the optical image capturing modules, the industrial computers correspond to the optical image capturing modules one by one, and the optical image capturing modules are connected with the corresponding industrial computers through transmission lines; the positioning linear sliding table device is used for positioning and reciprocating the CIGS thin-film solar panel; the image data backup device is connected with the image processing and detecting device through a transmission line and comprises a disk array storage device, and the disk array storage device is used for backing up data stored by the industrial computer; the human-computer interface device provides a graphical system operation interface and displays the final detection and analysis results of the CIGS thin-film solar panel.
Furthermore, the optical image capturing module comprises a linear monochromatic camera, a lens barrel and a focusing ring, a plurality of influence sections can be cut into the long-strip image acquired by each optical image capturing module, an adjusting sliding table is further arranged on the optical image capturing module, and the adjusting sliding table can finely adjust the position of the optical image capturing module.
Furthermore, the array type optical image capturing device also comprises linear LED light sources, the number of the linear LED light sources is the same as that of the optical image capturing modules and corresponds to the number of the optical image capturing modules one by one, the outer parts of the linear LED light sources are of a coaxial light source framework, a glass prism is arranged in the linear LED light sources, the linear LED light sources are provided with coating films, and the refraction and reflection coefficients of the coating films are 50.
Further, array optics is got for instance device and is still included the supporter, and the supporter includes main structure support and back support, and main structure support has upper plate and hypoplastron, and wherein the upper plate is used for fixed optics to get for instance the module, and the hypoplastron is used for fixed linear LED light source, through 2 aluminium alloy fixed connection between upper plate and the hypoplastron, main structure support links to each other with back support through a plurality of L type corner fittings.
Furthermore, array optical image capturing device can carry out the adjustment of position under electric drive motor's effect, and electric drive motor includes Y axle drive motor and Z axle drive motor.
Furthermore, each industrial computer is internally provided with an image acquisition card, and the image acquisition cards are connected with the corresponding optical image acquisition modules through transmission lines.
Further, the detection system further comprises a mechanical arm, and the vacuum adsorption clamp is arranged on the mechanical arm.
The invention also discloses an automatic optical detection method of the CIGS thin-film solar cell.
The testing system comprises an array type optical image capturing device, an image processing and detecting device, a positioning linear sliding table device, an image data backup device, a human-computer interface device and the like, is suitable for online automatic optical testing of the CIGS thin-film solar panel, carries out a series of subsequent steps after P3 mechanical scribing manufacturing, can carry out digital processing on each solar panel produced on line, quickly and accurately completes related detection and analysis, can control the total operation time within 60 seconds, completely meets the detection speed requirement of the production line, reduces the number of secondary products and defective products, and greatly improves the manufacturing qualified rate.
Drawings
Fig. 1 is a schematic view of the structure of a CIGS thin-film solar cell according to the present invention.
Fig. 2 is a schematic view of a CIGS thin-film solar cell manufacturing process according to the present invention.
FIG. 3 is a schematic view of the detection system of the present invention.
FIG. 4 is a schematic diagram of the operation of the detection system of the present invention.
FIG. 5 is a schematic view of an optical image capturing module according to the present invention.
Figure 6 is a schematic view of the main structural support of the present invention.
FIG. 7 is a schematic diagram of a battery testing process according to the present invention.
Fig. 8-11 are schematic diagrams of solar panel inspection images according to the present invention.
Detailed Description
The present invention will be further described with reference to the following specific examples.
The present invention will be described in detail below with reference to specific embodiments shown in the drawings. These embodiments are not intended to limit the present invention, and structural, methodological, or functional changes made by those skilled in the art according to these embodiments are included in the scope of the present invention. The application of the principles of the present invention will be further described with reference to the accompanying drawings and specific embodiments.
Early solar energy development was dominated by single crystal silicon, which was later expanded to polycrystalline silicon, amorphous silicon, compound semiconductors, and the like. The thin film solar cell is considered to have a great development potential because it can save a lot of raw materials and has a flexible characteristic. The CIGS thin film has an absorption spectrum (larger than a silicon material absorption spectrum range) in a wide range of 350-1200 nm and a high light absorption coefficient, so that the CIGS thin film has good absorption rate only by being thin by one micron, is very suitable for being used as an absorption layer in a thin film solar cell, and has the photoelectric conversion efficiency of more than 18%. The structure of the CIGS thin-film solar cell is shown in figure 1, and the CIGS thin-film solar cell comprises a substrate, a metal molybdenum (Mo) back electrode, a CIGS absorption layer, a buffer layer and a transparent conductive thin film from bottom to top. The manufacturing process of the CIGS thin film solar cell is shown in figure 2, firstly, glass is used as a substrate, a layer of molybdenum is plated, then, a laser line is used for cutting the molybdenum layer, then, the CIGS absorption layer and the CIGS buffer layer are sequentially deposited, then, the absorption layer and the CIGS buffer layer are cut in a mechanical marking mode, then, a transparent conductive thin film is deposited, the CIGS cell is cut in a mechanical marking mode, and finally, packaging and connecting a positive electrode and a negative electrode are carried out, so that the CIGS cell can be manufactured. In the manufacturing process, 3 scribing procedures, a first laser scribing procedure (abbreviated as P1), a second mechanical scribing procedure (abbreviated as P2) and a third mechanical scribing procedure (abbreviated as P3) are carried out. When the mechanical scribing program is carried out on line in the actual production process, the conditions such as gradually widening or narrowing of scribing intervals, uneven scribing line width, too deep or insufficient scribing depth, distorted scribing lines, cracked scribing edges and the like easily occur. The manual sampling method for off-line local microscopic detection leads to long detection time and insufficient sampling representativeness, and a large solar panel can only be locally observed and cannot be inspected for the whole appearance. Since the scribing error or defect caused by the solar panel manufacturing cannot be known in real time, the corresponding measures cannot be taken immediately to perform manufacturing adjustment or improvement, the number of secondary products or defective products cannot be reduced efficiently, and parameter adjustment cannot be performed in advance to prevent the impending error. Therefore, a technique capable of fast, accurate and comprehensive detection is urgently needed to be combined with a production line to assist quality monitoring of the solar panel.
The automatic optical detection system has the characteristics of high speed, high reproducibility, low error rate and the like, and can be introduced into the production process of the CIGS thin-film solar cell.
Specifically, the on-line automatic optical inspection system for CIGS thin-film solar cells according to the present invention mainly comprises an array type optical image capturing device, an image processing and inspection device, a positioning linear sliding table device, an image data backup device, a human-computer interface device, and the like, and the system is shown in fig. 3, in which the main functions of each device are described below.
Array type optical image capturing device
The device can be used for rapidly acquiring high-resolution images of the CIGS solar panel, and is one of key devices and cores of the whole detection system. The device comprises 4 groups of optical image capturing modules which are arranged in the same way, wherein each optical image capturing module comprises a 16K high-pixel linear monochromatic camera, a high-resolution industrial lens, a lens cone and a focusing ring. The long-strip images acquired by each group of optical image capturing modules can be divided into a plurality of image files according to the hardware specification and the image processing speed requirement, and the long-strip images are divided into 4 image files to facilitate subsequent calculation and processing. The detection system of the invention requires that the image acquisition operation of the single solar panel is completed within 20 seconds.
When the array type optical image capturing device is produced on line, the whole device is in a running state all the time, and the stability and the use efficiency of the whole device are very important. The array type optical image capturing device also comprises linear LED light sources, the number of the linear LED light sources is the same as that of the optical image capturing modules and corresponds to the number of the optical image capturing modules one by one, and the linear LED light sources and the optical image capturing modules need to be arranged separately due to factors such as size, weight and the like. The linear LED light source is constructed by adopting an outer coaxial light source, a glass prism is arranged in the linear LED light source, and a coating on the prism has a refraction and reflection coefficient of 50-50. Each optical image capturing module is also provided with an adjusting sliding table, and the adjusting sliding table can finely adjust the position of the optical image capturing module. Because maximum illumination is desired, the linear light source is positioned directly above the solar panel because the illumination of the subject is inversely proportional to the square of the distance from the light source. The array type optical image capturing device can adjust the position under the action of the electric driving motor, the electric driving motor comprises a Y-axis driving motor and a Z-axis driving motor, namely, the array type optical image capturing device can perform rough adjustment of Y-Z axes, the Y-axis adjustment is used as an image capturing module above the Y-axis adjustment, and the Z-axis adjustment is used for changing the distance between the Y-axis adjustment and the solar panel. Array optics is got for instance device still includes the supporter, the supporter includes main structure support piece and back support piece, it has similar I shape structure to get main structure support piece, as shown in fig. 6, main structure support piece has upper plate and hypoplastron, wherein the upper plate is used for fixed optics to get for instance the module, the hypoplastron is used for fixed linear LED light source, not only conveniently do the adjustment in the equipment, reach the purpose that lightens weight simultaneously, through 2 aluminium alloy fixed connection between upper plate and the hypoplastron, main structure support piece links to each other with back support piece through a plurality of L type corner fittings, this back support piece positive central top is left the breach and is used for Y axle driving motor and Z axle driving motor maintenance.
It should be noted that the solar panel is placed on the linear positioning sliding table device after being grasped by the robot arm, the linear motor drives the linear positioning sliding table device to perform reciprocating motion and optical scanning simultaneously, and then the linear positioning sliding table device is moved out of the sliding table after being grasped by the robot arm, so that the solar panel can be planned to perform 2 times of scanning by the same linear scanning camera by utilizing the characteristic that the solar panel reciprocates back and forth once along with the linear positioning sliding table device, the cost of the related hardware for image taking can be halved, the cost of the hardware is greatly reduced, the optical image taking module is planned as shown in fig. 5, the numbers # 1 to #4 represent 4 groups of optical image taking modules, and the numbers # 1 to #4' represent 4 groups of optical image taking modules to move to a new position for performing 2 times of scanning of the same solar panel.
Image processing and detecting device
The image processing and detecting device comprises a plurality of industrial computers (IPC), the number of the industrial computers is the same as that of the optical image capturing modules and corresponds to the optical image capturing modules one by one, the optical image capturing modules are connected with the industrial computers through transmission lines, an image acquisition card is arranged in each industrial computer, the high-resolution digital images acquired by each group of optical image capturing modules are firstly stored in the memory of the corresponding industrial computer through the image acquisition card, for example, the optical image capturing module numbered 1 has the IPC numbered 1 corresponding to the data storage, the numbers are 2, 3, 4 and the like in sequence, the number is 4 IPC, and then the image data is further stored in a magnetic disk device in the IPC. 4 IPCs simultaneously perform image processing and detection operations, and each IPC is provided with a multi-core dual CPU and a large-capacity RAM so as to meet the multi-task processing program. The main functions of the detection and analysis software in the image processing and detection device are to read the segmented banner images temporarily stored in the RAM of each IPC, and to analyze and identify by a detection algorithm according to the defined detection items, such as the information of line width size or flaw size and position, etc., and to store the information in each IPC and then to transmit the information to the human-computer interface device.
Positioning linear sliding table device
The positioning linear sliding table device is used for positioning the CIGS thin-film solar panel in reciprocating motion, functions of vacuum adsorption, precise linear reciprocating motion and the like, and precise double-axial (Y-Z axis) linear motion of the array type optical image capturing device, and the motion stroke range of the positioning linear sliding table device at least needs to cover the range of digital images of the whole solar panel.
Image data backup device
The image data backup device is provided with a group of disk array storage equipment with high storage capacity, the capacity can reach more than 80TB, 4 IPC data can be backed up to the disk array in a manual or timing automatic mode, and hard disk data in the original IPC is cleared at regular time, so that a hard disk space is left out to store subsequent digital image data of the solar panel.
Human-machine interface device
The main function of the human-computer interface device (Host-IPC) is to provide a graphical system operation interface, which is convenient for operators to perform system management, parameter setting, flow control, monitoring, data display, abnormal condition processing and the like. And displaying the analysis result of the final solar panel by Host-IPC, such as a line width value, a line distance value, a flaw area and grade classification, a flaw position mark and the like.
The automatic optical detection method of the CIGS thin-film solar cell comprises the following steps:
A) assembling the array-type optical image capturing device: firstly fixing transmission shafts of a Y-axis driving motor and a Z-axis driving motor on a back support, fixing a main structure support on the back support through a plurality of L-shaped corner pieces, then respectively installing 4 optical image capturing modules on an upper plate of the main structure support in sequence, and then installing 4 linear LED light sources on a lower plate of the main structure support in sequence;
B) calibrating the optical image capturing module: placing a correction sheet on a platform pushed by a linear screw, erecting a single optical image-taking module above the platform, moving the correction sheet at a constant speed to pass below a lens after adjusting the time of an electronic shutter, selecting the distance between 10 dots near the center of the obtained image, comparing the measured data with the specification numerical value on the correction sheet to calculate the magnification, adjusting the numerical value of a focusing ring if the magnification value does not accord with the reality, and repeating the operation until the magnification value accords with the reality;
C) adjusting the position of the optical image capturing module: driving the array type optical image capturing device by a Z-axis driving motor, adjusting the first group of lenses to a specified working distance, performing image capturing analysis, if the image is unclear, operating the Z-axis driving motor to enable the array type optical image capturing device to slightly move up and down, and repeating the image capturing analysis until the image is clear; then adjusting a second group of lenses, wherein the Z-axis driving motor is fixed, operating the adjusting sliding table to finely adjust the position of the second group of lenses, and taking the obtained images as analysis judgment until the images are clear; according to the method, the third group of lenses and the fourth group of lenses are adjusted in sequence; finally, taking images of the four groups of lenses in a linkage mode, determining the depth of field range of each group of lenses, and finally enabling the linkage image taking of the four groups of lenses to eliminate errors of external factors so as to obtain a full-range clear image;
D) starting the vacuum adsorption fixture, adsorbing the solar panel on the mechanical arm, operating the mechanical arm to drive the solar panel, and placing the solar panel into the positioning linear sliding table device;
E) starting the positioning linear sliding table device to drive the solar panel to move towards the array type optical image capturing device;
F) the movement of the positioning linear sliding table device triggers the array type optical image capturing device, so that the array type optical image capturing device starts to acquire the image data of the solar panel;
G) transmitting the image data of the solar panel acquired by the array type optical image capturing device to an image acquisition card of an image processing and detecting device, carrying out image processing and measurement identification by detection software of the image processing and detecting device, analyzing data and storing, and displaying the data by a human-computer interface device;
H) after the detection is finished, the mechanical arm is operated to reach the designated position, the solar panel is adsorbed on the vacuum adsorption clamp, and the mechanical arm is operated to move out the solar panel.
The digital image data of the thin-film solar panel acquired by the array type optical image capturing device of the invention is mainly subjected to detection and analysis items after digital image processing, such as the line width of a mechanical scribing line P2 and a P3, the line distance of P2 and P3, the total width of the P3 and an adjacent P2, and the defect identification of film coating and the mechanical scribing.
Flaw identification of coating film manufacturing
The defects in the coating process are mainly coating peeling or particle adhesion, which are very similar in appearance on the automatic optical detection image, and in the main battery block, the irregular-shaped bright small block is suddenly displayed. Since the scribing of the CIGS cell is regular, the non-scribed region can be easily defined as the ROI for image analysis, and the brighter pixel point set can be found by threshold and linked to define the area and center of gravity of each defect, as shown in fig. 8(a) and (b). In addition, the position of the coating defect is displayed on the screen of the human-computer interface device, as shown in fig. 9, a large rectangular block represents the area of the whole solar panel, the origin of the XY axis of the coordinate is defined at the upper left corner position of the solar panel, and the coating defect after image analysis is marked on the solar panel by small blocks, so that the quality state of the coating area can be known in operation.
Defect identification for mechanical scribing
When P3 mechanical scribing is performed, if the positions of the P3 line and the P2 line are very close, a crack phenomenon is easily generated, and bright bands of irregular blocks are easily generated on two sides of the P3 line, especially on one side close to the P2 line, which is called as P3 scribing crack, as shown in the left original digital images of fig. 10 and 11. Similarly, the image analysis is used to identify, for example, the block in the right image of fig. 10 and 11 represents the ROI, the indication part shows the location of the crack, and the information of the area, the center of gravity position and the number of the crack defect is calculated at the same time.
Measurement analysis
The measurement and analysis items mainly include line widths of P2 and P3, line distances of P2 and P3, total widths of P2 and adjacent P3 and the like, and are expressed by means of the average value +/-standard deviation. And displaying the area beyond the range value in a remarkable font on a screen of the human-computer interface device.
After the mechanical scribing process P3 is completed, the solar cell panel is loaded on the precision positioning linear sliding table device by a mechanical arm, and digital image capture and image analysis are performed on the solar cell panel at high speed by using the optical image capture device. Because the automatic optical detection processing speed is fast, the system can be matched with a production line flow, each solar panel on the production line is recorded with a unique production number, detection information (such as line width, line distance, coating defects and the like) after the automatic optical detection processing is stored in a disk array, can be displayed on a screen of a man-machine interface device through man-machine interface software at any time, and can also be set to give an alarm when an automatic optical detection system detects a major error or a defect, so that related personnel are reminded to carry out corresponding processing measures, and the quality and the production rate of the CIGS thin-film solar cell are effectively improved.
The system is suitable for the online automatic optical test of the CIGS thin-film solar panel, a series of subsequent steps are carried out after P3 mechanical scribing is manufactured, each solar panel on the production line can be digitally processed, related detection analysis is rapidly and accurately completed, the total operation time can be controlled within 60 seconds, the detection speed requirement of the production line is completely met, and the quality of a film coating area and scribing in the manufacturing process can be continuously monitored due to abundant digital information. When a major abnormal quality warning is found, relevant personnel can immediately adopt proper treatment, or adjust parameters in the process, or replace necessary tools or carry out necessary maintenance and the like, so that the number of secondary products and defective products is reduced, and the manufacturing yield is greatly improved.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. A detection system comprises an array type optical image capturing device, an image processing and detecting device, a positioning linear sliding table device, an image data backup device and a human-computer interface device; the CIGS thin-film solar panel array optical image capturing device is characterized by being used for acquiring a resolution image of the CIGS thin-film solar panel and comprising a plurality of groups of optical image capturing modules; the image processing and detecting device comprises a plurality of industrial computers, the number of the industrial computers is the same as that of the optical image capturing modules, the industrial computers correspond to the optical image capturing modules one by one, and the optical image capturing modules are connected with the corresponding industrial computers through transmission lines; the positioning linear sliding table device is used for positioning and reciprocating the CIGS thin-film solar panel; the image data backup device is connected with the image processing and detecting device through a transmission line and comprises a disk array storage device, and the disk array storage device is used for backing up data stored by the industrial computer; the human-computer interface device provides a graphical system operation interface and displays the final detection and analysis result of the CIGS thin-film solar panel; the array type optical image capturing device further comprises linear LED light sources, the number of the linear LED light sources is the same as that of the optical image capturing modules, the linear LED light sources correspond to the optical image capturing modules one by one, the array type optical image capturing device further comprises a supporting body, the supporting body comprises a main structure supporting piece and a back supporting piece, the main structure supporting piece is provided with an upper plate and a lower plate, the upper plate is used for fixing the optical image capturing modules, the lower plate is used for fixing the linear LED light sources, the upper plate and the lower plate are fixedly connected through 2 aluminum profiles, and the main structure supporting piece is connected with the back supporting piece through a plurality of L-shaped angle pieces.
2. The detecting system according to claim 1, wherein the optical image capturing module comprises a linear monochrome camera, a lens barrel and a focusing ring, each group of the optical image capturing module can divide a long-strip image obtained by the optical image capturing module into a plurality of image sections, the optical image capturing module is further provided with an adjusting sliding table, and the adjusting sliding table can finely adjust the position of the optical image capturing module.
3. The inspection system of claim 2, wherein the linear LED light source is configured as a coaxial light source, and a glass prism is disposed inside the linear LED light source, the glass prism having a coating thereon, and the coating having a refractive index and a reflective index of 50.
4. A detecting system according to claim 3, wherein the image capturing device array is capable of performing position adjustment by electric driving motors, the electric driving motors include a Y-axis driving motor and a Z-axis driving motor.
5. The inspection system of claim 4, wherein each of said industrial computers has an image capture card connected to the corresponding optical image capture module via a transmission line.
6. A test system according to claim 5, further comprising a robotic arm, said robotic arm having a vacuum chuck.
7. An automatic optical inspection method for a CIGS thin-film solar cell, which is performed by the inspection system of claim 6, wherein the automatic optical inspection method for a CIGS thin-film solar cell comprises the steps of:
A) assembling the array-type optical image capturing device: firstly fixing transmission shafts of a Y-axis driving motor and a Z-axis driving motor on a back support, fixing a main structure support on the back support through a plurality of L-shaped corner pieces, then respectively installing 4 optical image capturing modules on an upper plate of the main structure support in sequence, and then installing 4 linear LED light sources on a lower plate of the main structure support in sequence;
B) calibrating the optical image capturing module: placing a correction sheet on a platform pushed by a linear screw, erecting a single optical image-taking module above the platform, moving the correction sheet at a constant speed to pass below a lens after adjusting the time of an electronic shutter, selecting the distance between 10 dots near the center of the obtained image, measuring data, comparing the measured data with the specification numerical value on the correction sheet, calculating the magnification, if the magnification value is not in accordance with the reality, adjusting the numerical value of a focusing ring, and repeating the operation until the magnification value is in accordance with the reality;
C) adjusting the position of the optical image capturing module: driving the array type optical image capturing device by a Z-axis driving motor, adjusting the first group of lenses to a specified working distance, performing image capturing analysis, if the image is unclear, operating the Z-axis driving motor to enable the array type optical image capturing device to slightly move up and down, and repeating the image capturing analysis until the image is clear; then adjusting a second group of lenses, wherein the Z-axis driving motor is fixed, operating the adjusting sliding table to finely adjust the position of the second group of lenses, and taking the obtained images as analysis judgment until the images are clear; according to the method, the third group of lenses and the fourth group of lenses are adjusted in sequence; finally, taking images of the four groups of lenses in a linkage mode, determining the depth of field range of each group of lenses, and finally enabling the linkage image taking of the four groups of lenses to eliminate errors of external factors so as to obtain a full-range clear image;
D) starting the vacuum adsorption fixture, adsorbing the solar panel on the mechanical arm, operating the mechanical arm to drive the solar panel, and placing the solar panel into the positioning linear sliding table device;
E) starting the positioning linear sliding table device to drive the solar panel to move towards the array type optical image capturing device;
F) the movement of the positioning linear sliding table device triggers the array type optical image capturing device, so that the array type optical image capturing device starts to acquire the image data of the solar panel;
G) transmitting the image data of the solar panel acquired by the array type optical image capturing device to an image acquisition card of an image processing and detecting device, carrying out image processing and measurement identification by detection software of the image processing and detecting device, analyzing data and storing, and displaying the data by a human-computer interface device;
H) after the detection is finished, the mechanical arm is operated to reach the designated position, the solar panel is adsorbed on the vacuum adsorption clamp, and the mechanical arm is operated to move out the solar panel.
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| US7705978B2 (en) * | 2006-02-06 | 2010-04-27 | Northrop Grumman Corporation | Method and apparatus for inspection of multi-junction solar cells |
| TW200901490A (en) * | 2007-06-21 | 2009-01-01 | Brobri Vision Corp | Inspection method for solar cell and wafer, and system thereof |
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