CN104483317A - High-throughput digital full-field metallographic in-situ statistic characterization analyzer and analysis method - Google Patents
High-throughput digital full-field metallographic in-situ statistic characterization analyzer and analysis method Download PDFInfo
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Abstract
The invention belongs to the technical field of material properties characterization, and particularly relates to a high-throughput digital full-field metallographic in-situ statistic characterization analyzer and analysis method. The analyzer comprises a high-throughput automatic sampling scanning system, a digital signal processing system and an intelligent analysis system, wherein the high-throughput automatic sampling scanning system comprises a sample table (1), an X-axis guiderail (2), a Y-axis guiderail (3) and a Z-axis guiderail (4); the digital signal processing system comprises a metallographic microscope (5), a CCD digital camera (6), an interface (7), an image processing device (8) and a lighting source (12). The analyzer is capable of realizing high-throughput data acquisition through obtaining a large amount of original digital signals of metallographic structures of samples in a large scale range (cm2 level), realizing the automatic identification, rating and evaluation of various metallographic structures through statistically analyzing a large amount of original digital signals and realizing the positioning of the metallographic structures on original positions through precise point-to-point corresponding of original digital signals and the surface of the samples.
Description
Technical field
The invention belongs to metal material performance characterization technical field, be specifically related to a kind of high flux numeral full filed metallographic original position statistics and characterize analyser and analytical approach.
Background technology
Physical state in alloy inside of the chemical composition of metal material (alloy such as steel, copper, aluminium, nickel) and various composition and chemical state are called metallographic structure.Materials microstructure directly affects and determines its physical and mechanical property, and the research of chemical composition, Technology for Heating Processing, cold and hot working technique and improvement are inherently the various performances such as hardness, toughness, wearing quality improving material by changing internal organizational structure.
Metallographic structure analysis is one of characterizing method commonly used during materials microstructure is analyzed, and it is divided into low power and high power metallographic two kinds of characterizing methods.Macrostructure characterizes and to refer to the naked eye or by the magnifier of less than 10 times, loose, the crackle, shrinkage cavity, segregation, defect etc. of metal material is organized to characterizing, belongs to macroscopic examination.High power metallographic structure characterizes the optical microscope referring to by about 50 ~ 1500 times, characterizes, belong to microexamination to the grain size of metal material inside, carbonide, snotter institutional framework equal to composition.Two kinds of methods are all the tissue signatures being described metal material by magnifier or microscopic examination qualitatively, or adopt the method compared with various normal pictures to evaluate metal structure, respectively have relative merits.Although macroscopic examination can exosyndrome material on a large scale in the obvious tissue such as segregation, defect, small institutional framework cannot be characterized, although microexamination can characterize the inherent attribute of some specific region, but due to the limitation (diameter of overview visual field be about 2mm ~ 100 μm about) of microcell visual field, when artificial selection visual field usually with subjectivity, randomness and contingency, the visual field that can observe is limited, the defective position of easy omission, lack the comprehensive investigation for material monolithic, its reappearance and accuracy are not high, and microstructure in metal material non-uniform Distribution, therefore the mensuration of any one parameter all can not only lean on human eye to measure one or several visual field under the microscope, a large amount of statistical works must be carried out, the reliability of guarantee measurement result, therefore its statistical representative in also there is doubt.In addition this traditional craft measures, and not only consistance is poor, and speed is slow, and workload is large, impacts the correct sign of properties of sample.
Summary of the invention
Object of the present invention, is obtain a kind of high flux numeral full filed metallographic original position statistics to characterize analyser and analytical approach, can realizes multiple sample (cm within the scope of large scale
2level) the magnanimity raw digital signal high flux data acquisition function of metallographic structure, by the mathematical statistics of magnanimity raw digital signal is resolved realize all kinds of metallographic structure in each sample automatic discriminating, automatic measure grading and Function of Evaluation, by the point-to-point accurate corresponding mapped location function realizing sample metallographic structure on original position of raw digital signal and sample surfaces, finally reach the original position statistic distribution analysis characterization research of sample metallographic structure.
For achieving the above object, technical scheme of the present invention is as follows:
A kind of high flux numeral full filed metallographic original position statistics characterizes analyser, and this analyser comprises high flux auto injection scanning system, digital information processing system, intelligent analysis system, wherein,
High flux auto injection scanning system comprises: sample stage 1, X-axis guide rail 2, Y-axis guide rail 3 and Z axis guide rail 4, wherein, sample stage 1 is fixed on X-axis guide rail 2 top, Y-axis guide rail 3 and Z axis guide rail 4 is arranged successively below X-axis guide rail 2, X-axis guide rail 2, Y-axis guide rail 3 are driven by X, Y-axis driver 10 respectively, the automatic sequence of Quality control platform 1 moves, and realizes the order automatic analysis of multiple sample; Z axis guide rail 4 is driven by Z axis driver 11, the mobile automatic focusing function realized in moving process, and the signal that the movement of Z axis is produced by CCD digital camera 6 is to control Z axis driver 11;
Digital information processing system comprises: metaloscope 5, CCD digital camera 6, interface 7, image processing apparatus 8 and lighting source 12, wherein, metaloscope 5 is connected by interface 7 with CCD digital camera 6, both are fixed on the top of sample stage 1, lighting source 12 is fixed on metaloscope 5, and image processing apparatus 8 is connected with CCD digital camera 6;
Intelligent analysis system 9 is connected with image processing apparatus 8, and the raw digital signal gathered is carried out to mathematical statistics parsing and automatically differentiated and cm metallographic structure
2level scope metallographic original position statistic distribution analysis characterizes, and also exports the metallographic structure image of sample within the scope of full filed by digital signal.
Described sample stage 1 comprises the sample storing place A ~ I holding 1 ~ 9 sample.
By X, Y-axis driver 10 control X-axis guide rail 2, Y-axis guide rail 3 thus further the automatic sequence of Quality control platform 1 move.
The electric signal produced by the phase differential of two pixels adjacent on CCD digital camera 6 controls Z axis driver 11 thus controls Z axis guide rail 4 and sample stage 1 further.
Described analyser can realize loose, the crackle of metal material full filed scope, shrinkage cavity, segregation, defect original position statistical distribution characterize, the large scale original position statistic distribution analysis of the characteristic such as type, quantity, size and shape of the equal various tissue of the grain size within the scope of metal material full filed, carbonide, snotter and composition characterizes, the space orientation analysis of metallographic structure maximum segregation and minimum segregation, the statistics of the apparent density of full filed is resolved, the parsing etc. of tissue statistics degree of conformity.
High flux numeral full filed metallographic original position statistics characterizes an analytical approach for analyser, comprises the steps:
A) sample is prepared processing by dimensional requirement;
B) sample after preparation processing is carried out roughly grinding, fine grinding, polishing, etch;
C) the multiple metallographic samples after polish attack are placed in order respectively the sample storing place A ~ I of sample stage 1, then sample stage 1 are placed on the platform above X-axis guide rail 2, observe metallographic visual field on computers by CCD digital camera 6;
D) open lighting source 12, regulate brightness to full visual field uniform illumination, visual field is clear;
E) select order, the step pitch of the enlargement factor of metaloscope 5, Sample Scan, focus manually or automatically, make clear picture;
F) determine the reference position of A Sample Scan, start scanning, successively full-field scanning is carried out to A ~ I sample;
G) automatically export the full filed metallographic digital signal of every block sample after the end of scan, and export full filed metallographic structure image by digital-signal intelligent;
H) intelligent analysis system 9 is started, full filed metallographic digital signal to be analyzed in steps for importing g, statistical study is carried out by the full filed metallographic digital signal of intelligent analysis system 9 pairs of all samples, provide point-to-point virgin state and the Changing Pattern of the metallographic structure of every block sample, complete the metallographic original position statistic distribution analysis of sample within the scope of full filed and characterize;
I) preserve or print analysis result.
In step f, in scanning process, X-axis guide rail 2 is by while the movement of setting step pitch, transmission is focused signal to Z axis driver 11 by CCD digital camera 6, make it control Z axis guide rail about 4 trace mobile to realize sample surfaces auto-focusing, CCD digital camera 6 successfully of focusing carries out digital photographing and is transferred to intelligent analysis system 9, and X-axis guide rail 2 continues to move by setting step pitch, then focus, take a picture, transmit, and so forth until the whole end of scan of a line of first sample; After this, Y-axis guide rail 3 moves by setting step pitch and enters a new line, repeat above scanning step again, until the whole scanning collection in whole surface of first sample, image processing apparatus 8 exports this sample full filed metallographic digital signal, and digital signal is directly converted to full filed metallic phase image, complete full filed metallographic structure signals collecting and the output of first sample; During processing digital signal, X-axis guide rail 2 and Y-axis guide rail 3 move to B sample and scan, and complete scanning and the digital signal acquiring of all samples on sample stage 1 by that analogy.
To cm
2in level material, the high flux of metallographic structure original position digital signal gathers automatically, resolves, carry out intelligent original position statistic distribution analysis sign by statistic analysis result to the tissue of sample to the special mathematical statistics of digital signal.
Beneficial effect of the present invention is:
When taking artificial selection to observe visual field for metallographic examination instrument in prior art, by subjectivity, randomness and contingency cause the problem of easily omitting visual field, defectiveness position, analyser provided by the invention is based on metaloscope, area array CCD digital camera and high-precision three-dimensional mobile platform carry out continuous sweep and metallographic structure digital signal acquiring to the complete surperficial metallographic structure of metal material, and mathematical statistics parsing is carried out to full filed raw digital signal, provide the point-to-point virtual condition of sample metallographic structure and Changing Pattern, can also map metallographic structure and performance in sample zonule, realize metallographic original position statistic distribution analysis to characterize.
Analyser of the present invention can Automatic continuous obtain maximum 9 samples full filed within the scope of magnanimity (1,000,000 ~ ten million) raw digital signal of metallographic structure, but not the one or several sheets metallurgical tissue picture of certain visual field in simple sample, multiple visual field or whole splicing view field, and each digital signal represents the raw information on the corresponding original position of sample.Therefore, special mathematical statistics can be carried out to these digital signals and resolve, thus realize metallographic structure sign that is more comprehensive, accurate, system, virtual condition and the Changing Pattern of sample metallographic structure can be provided; Further, digital signal and the point-to-point of sample original position map corresponding relation one by one, and the mapping that can realize metallographic structure and performance in sample zonule characterizes, thus the structural state providing optimal performance region and guides production technology to improve; In addition, export the full filed metallographic structure image of sample by the digital-signal intelligent gathered, seamless spliced without the need to multiple image, the error produced when reducing image mosaic, improves accuracy of analysis.
Wherein:
1) high flux of the present invention numeral full filed metallographic original position statistics characterizes analyser and to be coupled three-dimensional movement/positioning sample sample platform, can realize multiple sample automatically, continuously, high flux sample presentation and full filed metallographic structure digital signal acquiring.
2) high flux of the present invention numeral full filed metallographic original position statistics characterizes analyser and make use of the phase differential focusing principle of CCD camera pixel and Z axis high precision mobile platform combines, and realizes the function of synchronous automatic focusing in continuous sweep.
3) high flux numeral full filed metallographic original position statistics of the present invention characterizes analyser and develops the collection of metallographic structure raw digital signal and mathematical statistics analytic technique, the full filed metallographic structure original position statistic distribution analysis realizing sample characterizes, avoid the artificial problem selecting subjectivity, randomness and the contingency easily occurred during visual field, make the sign of metallographic structure more comprehensive, accurate.
4) high flux numeral full filed metallographic original position statistics of the present invention characterizes the intelligent analysis system that analyser develops digital full filed metallographic structure, the mathematical statistics parsing, automatically discriminating, automatic measure grading and the large scale metallographic structure original position statistic distribution analysis that realize metallographic structure characterize, and make the sign of metallographic structure more comprehensive, simple, quick, accurate.
Accompanying drawing explanation
Fig. 1 is that high flux of the present invention numeral full filed metallographic original position statistics characterizes analyser structural representation.
Fig. 2 is the sample stage structural representation of analyser in Fig. 1.
Metallographic structure raw digital signal within the scope of the sample full filed that Fig. 3 collects for employing analyser of the present invention.
Fig. 4 is the metallographic structure image adopting traditional metallographic examination instrument sample to be carried out to the analysis visual field that artificial subjectivity is selected.
Fig. 5 is the metallographic structure image with omission visual field adopting traditional metallographic examination instrument to obtain.
Fig. 6 is the metallographic structure image adopting analyser of the present invention to obtain.
Reference numeral
1 sample stage 2 X-axis guide rail
3 Y-axis guide rail 4 Z axis guide rails
5 metaloscope 6 CCD digital cameras
7 interface 8 image processing apparatus
9 intelligent analysis system 10 X, Y-axis driver
11 Z axis driver 12 lighting sources
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
As shown in Figure 1, high flux numeral full filed metallographic original position statistics sign analyser of the present invention comprises high flux auto injection scanning system, digital information processing system, intelligent analysis system.
High flux auto injection scanning system is used for Multi-example and sends into digital metallographic characterization system continuously and automatically and the motion of complete paired samples on three directions (x-y-z) in analytic process, comprise sample stage 1, X-axis guide rail 2, Y-axis guide rail 3 and Z axis guide rail 4, wherein, sample stage 1 comprises the sample storing place A ~ I holding 1 ~ 9 sample, sample stage 1 is fixed on X-axis guide rail 2 top, Y-axis guide rail 3 and Z axis guide rail 4 is arranged successively below X-axis guide rail 2, X-axis guide rail 2, Y-axis guide rail 3 respectively with X, Y-axis driver 10 is electrically connected, Z axis guide rail 4 is electrically connected with Z axis driver 11, pass through X, Y-axis driver 10 controls X-axis guide rail 2 and Y-axis guide rail 3 thus the automatic sequence of Quality control platform 1 moves further, realize the accurate location of each sample and continuous sample presentation, pass through X, Y-axis moves the motion scan and accurate location that realize each sample surfaces, Z axis driver 11 is electrically connected with CCD digital camera 6, the electric signal that the movement of Z axis is produced by the phase differential of two pixels adjacent on CCD digital camera 6 controls Z axis driver 11 thus controls Z axis guide rail 4 and sample stage 1 further, realizes the High Precision Automatic focus function in moving process.
The metallographic structure digital signal that digital information processing system is used for gathering processes, and comprises metaloscope 5, CCD digital camera 6, interface 7, image processing apparatus 8 and lighting source 12.Wherein, metaloscope 5 is connected by interface 7 with CCD digital camera 6, both are fixed on the top of sample stage 1, lighting source 12 is fixed on metaloscope 5 and carries out light filling to gather collection of illustrative plates clearly to sample surfaces, image processing apparatus 8 is electrically connected with CCD digital camera 6, the metallographic digital signal gathered by CCD digital camera 6 carries out processing and exporting, thus exports full filed metallographic digital signal and a high resolving power full filed metallographic structure collection of illustrative plates.
Intelligent analysis system 9 is for carrying out original position statistic distribution analysis sign to full filed metallographic digital signal, intelligent analysis system 9 is electrically connected with image processing apparatus 8, the full filed metallographic structure digital signal mainly gathered by image processing apparatus 8 carries out mathematical statistics parsing, and the automatic discriminating and the large scale metallographic original position statistic distribution analysis that realize metallographic structure characterize.
The analytical approach that high flux numeral full filed metallographic original position statistics of the present invention characterizes, comprises the steps:
A) sample is prepared processing by dimensional requirement;
B) sample after preparation processing is carried out roughly grinding, fine grinding, polishing, etch;
C) the multiple metallographic samples after polish attack are placed in order respectively the sample storing place A ~ I of sample stage 1, then sample stage 1 are placed on the platform above X-axis guide rail 2, observe metallographic visual field on computers by CCD digital camera 6;
D) open lighting source 12, regulate brightness to full visual field uniform illumination, visual field is clear;
E) select order, the step pitch of the enlargement factor of metaloscope 5, Sample Scan, focus manually or automatically, make clear picture;
F) reference position of A Sample Scan is determined, start scanning, successively full-field scanning is carried out to A ~ I sample, in scanning process, X-axis guide rail 2 is by while the movement of setting step pitch, transmission is focused signal to Z axis driver 11 by CCD digital camera 6, it is made to control Z axis guide rail about 4 trace mobile to realize sample surfaces auto-focusing, CCD digital camera 6 successfully of focusing carries out digital photographing and is transferred to intelligent analysis system 9, X-axis guide rail 2 continues to move by setting step pitch, then focus, take a picture, transmission, and so forth until the whole end of scan of a line of first sample, after this, Y-axis guide rail 3 moves by setting step pitch and enters a new line, repeat above scanning step again, until the whole scanning collection in whole surface of first sample, image processing apparatus 8 exports this sample full filed metallographic digital signal, and digital signal is directly converted to full filed metallic phase image, complete full filed metallographic structure signals collecting and the output of first sample, during processing digital signal, X-axis guide rail 2 and Y-axis guide rail 3 move to B sample and scan, and complete scanning and the digital signal acquiring of all samples on sample stage 1 by that analogy,
G) automatically export the full filed metallographic digital signal of every block sample after the end of scan, and export full filed metallographic structure image by digital-signal intelligent;
H) intelligent analysis system 9 is started, full filed metallographic digital signal to be analyzed in steps for importing g, statistical study is carried out by the full filed metallographic digital signal of intelligent analysis system 9 pairs of all samples, provide point-to-point virgin state and the Changing Pattern of the metallographic structure of every block sample, complete the metallographic original position statistic distribution analysis of sample within the scope of full filed and characterize;
I) preserve or print analysis result.
As shown in Figure 3, for scanning metallographic structure raw digital signal within the scope of full filed that one piece of sample collects, in array, each numeral is accurately corresponding one by one with sample original position.
As shown in Figure 4, for traditional metallographic examination instrument carries out to one piece of sample the analysis visual field that artificial subjectivity selects, the representativeness of its visual field has very large limitation.
As shown in Figure 5, for using traditional metallographic analysing method not have selected visual field, namely omitted visual field, illustrates that traditional analysis can not the metallographic structure of comprehensive characterizing sample.
As shown in Figure 6, be the full filed metallographic structure image exported by the raw digital signal gathered, carry out seamless spliced without the need to multiple image, the error produced when reducing image mosaic.
High flux numeral full filed metallographic original position statistics of the present invention characterizes analyser and possesses following function: the iron-enriched yeast of the continuous auto injection of multiple sample; The continuous sweep of sample full filed and metallographic structure digital signal acquiring; Synchronous automatic focusing function in material continuous sweep process; The full filed metallographic structure in-situ characterization that accurate coordinates (x, y) is located on sample surfaces; Metallographic digital signal is directly changed into full filed metallographic structure image; The original position statistic distribution analysis of loose, the crackle of material full filed scope, shrinkage cavity, segregation, defect characterizes; The large scale original position statistic distribution analysis of the characteristic such as type, quantity, size and shape of the equal various tissue of the grain size within the scope of material full filed, carbonide, snotter and composition characterizes; Organize the space orientation analysis of maximum segregation and minimum segregation; The statistics of the apparent density of full filed is resolved; The parsing etc. of tissue statistics degree of conformity.
This analyser can to realize in material (cm within the scope of large scale
2level), the automatic discriminating of various metallographic structure, automatic measure grading and original position statistic distribution analysis characterize; Meanwhile, the high flux that can be realized 1 ~ 9 sample metallographic structure by special sample stage is characterized automatically, and the metallographic structure in image accurately can be located on sample surfaces, thus realizes original position statistic distribution analysis mapping sign.
Claims (8)
1. high flux numeral full filed metallographic original position statistics characterizes an analyser, it is characterized in that:
This analyser comprises high flux auto injection scanning system, digital information processing system, intelligent analysis system, wherein,
High flux auto injection scanning system comprises: sample stage (1), X-axis guide rail (2), Y-axis guide rail (3) and Z axis guide rail (4), wherein, sample stage (1) is fixed on X-axis guide rail (2) top, Y-axis guide rail (3) and Z axis guide rail (4) are arranged successively in X-axis guide rail (2) below, X-axis guide rail (2), Y-axis guide rail (3) are driven by X, Y-axis driver (10) respectively, the automatic sequence of Quality control platform (1) moves, and realizes the order automatic analysis of multiple sample; Z axis guide rail (4) is driven by Z axis driver (11), the mobile automatic focusing function realized in moving process, and the signal that the movement of Z axis is produced by CCD digital camera (6) is to control Z axis driver (11);
Digital information processing system comprises: metaloscope (5), CCD digital camera (6), interface (7), image processing apparatus (8) and lighting source (12), wherein, metaloscope (5) is connected by interface (7) with CCD digital camera (6), both are fixed on the top of sample stage (1), lighting source (12) is fixed on metaloscope (5), and image processing apparatus (8) is connected with CCD digital camera (6);
Intelligent analysis system (9) is connected with image processing apparatus (8), and the raw digital signal gathered is carried out to mathematical statistics parsing and automatically differentiated and cm metallographic structure
2level scope metallographic original position statistic distribution analysis characterizes, and also exports the metallographic structure image of sample within the scope of full filed by digital signal.
2. high flux numeral full filed metallographic original position statistics as claimed in claim 1 characterizes analyser, it is characterized in that:
Described sample stage (1) comprises sample storing place (A) ~ (I) holding 1 ~ 9 sample.
3. high flux numeral full filed metallographic original position statistics as claimed in claim 1 characterizes analyser, it is characterized in that:
By X, Y-axis driver (10) control X-axis guide rail (2), Y-axis guide rail (3) thus further the automatic sequence of Quality control platform (1) move.
4. high flux numeral full filed metallographic original position statistics as claimed in claim 1 characterizes analyser, it is characterized in that:
The electric signal produced by the phase differential of upper adjacent two pixels of CCD digital camera (6) controls Z axis driver (11) thus controls Z axis guide rail (4) and sample stage (1) further.
5. high flux numeral full filed metallographic original position statistics as claimed in claim 1 characterizes analyser, it is characterized in that:
Described analyser can realize loose, the crackle of metal material full filed scope, shrinkage cavity, segregation, defect original position statistical distribution characterize, the large scale original position statistic distribution analysis of the characteristic such as type, quantity, size and shape of the equal various tissue of the grain size within the scope of metal material full filed, carbonide, snotter and composition characterizes, the space orientation analysis of metallographic structure maximum segregation and minimum segregation, the statistics of the apparent density of full filed is resolved, the parsing etc. of tissue statistics degree of conformity.
6. high flux numeral full filed metallographic original position statistics as claimed in claim 1 characterizes an analytical approach for analyser, it is characterized in that:
Comprise the steps:
A) sample is prepared processing by dimensional requirement;
B) sample after preparation processing is carried out roughly grinding, fine grinding, polishing, etch;
C) the multiple metallographic samples after polish attack are placed in order respectively sample storing place (A) ~ (I) of sample stage (1), then sample stage (1) is placed on the platform above X-axis guide rail (2), observes metallographic visual field on computers by CCD digital camera (6);
D) open lighting source (12), regulate brightness to full visual field uniform illumination, visual field is clear;
E) select order, the step pitch of the enlargement factor of metaloscope (5), Sample Scan, focus manually or automatically, make clear picture;
F) determine the reference position of A Sample Scan, start scanning, successively full-field scanning is carried out to A ~ I sample;
G) automatically export the full filed metallographic digital signal of every block sample after the end of scan, and export full filed metallographic structure image by digital-signal intelligent;
H) intelligent analysis system (9) is started, full filed metallographic digital signal to be analyzed in steps for importing g, statistical study is carried out by the full filed metallographic digital signal of intelligent analysis system (9) to all samples, provide point-to-point virgin state and the Changing Pattern of the metallographic structure of every block sample, complete the metallographic original position statistic distribution analysis of sample within the scope of full filed and characterize;
I) preserve or print analysis result.
7. the analytical approach of high flux numeral full filed metallographic original position statistics sign as claimed in claim 6, is characterized in that:
In step f, in scanning process, X-axis guide rail (2) is by while the movement of setting step pitch, transmission is focused signal to Z axis driver (11) by CCD digital camera (6), trace is mobile to realize sample surfaces auto-focusing up and down to make it control Z axis guide rail (4), CCD digital camera (6) successfully of focusing carries out digital photographing and is transferred to intelligent analysis system (9), X-axis guide rail (2) continues to move by setting step pitch, then focus, take a picture, transmit, and so forth until the whole end of scan of a line of first sample; After this, Y-axis guide rail (3) moves by setting step pitch and enters a new line, repeat above scanning step again, until the whole scanning collection in whole surface of first sample, image processing apparatus (8) exports this sample full filed metallographic digital signal, and digital signal is directly converted to full filed metallic phase image, complete full filed metallographic structure signals collecting and the output of first sample; During processing digital signal, X-axis guide rail (2) and Y-axis guide rail (3) move to B sample and scan, and complete scanning and the digital signal acquiring of the upper all samples of sample stage (1) by that analogy.
8. the analytical approach of high flux numeral full filed metallographic original position statistics sign as claimed in claim 6, is characterized in that:
To cm
2in level material, the high flux of metallographic structure original position digital signal gathers automatically, resolves, carry out intelligent original position statistic distribution analysis sign by statistic analysis result to the tissue of sample to the special mathematical statistics of digital signal.
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| CN113259591A (en) * | 2021-06-07 | 2021-08-13 | 上海聚跃检测技术有限公司 | Image acquisition method and system for chip failure analysis |
| CN113259591B (en) * | 2021-06-07 | 2021-11-05 | 上海聚跃检测技术有限公司 | Image acquisition method and system for chip failure analysis |
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Application publication date: 20150401 |