CN111129186A - Junction type photodetector of vanadium dioxide and two-dimensional semiconductor and preparation method thereof - Google Patents
Junction type photodetector of vanadium dioxide and two-dimensional semiconductor and preparation method thereof Download PDFInfo
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- GRUMUEUJTSXQOI-UHFFFAOYSA-N vanadium dioxide Chemical compound O=[V]=O GRUMUEUJTSXQOI-UHFFFAOYSA-N 0.000 title claims abstract description 64
- 229910021542 Vanadium(IV) oxide Inorganic materials 0.000 title claims abstract description 60
- 239000004065 semiconductor Substances 0.000 title claims abstract description 47
- 238000002360 preparation method Methods 0.000 title abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 29
- 239000002184 metal Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000005516 engineering process Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052786 argon Inorganic materials 0.000 claims abstract description 6
- 238000010894 electron beam technology Methods 0.000 claims abstract description 6
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 6
- 238000001020 plasma etching Methods 0.000 claims abstract description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 16
- -1 transition metal chalcogenide Chemical class 0.000 claims description 11
- 238000000233 ultraviolet lithography Methods 0.000 claims description 10
- 229910052720 vanadium Inorganic materials 0.000 claims description 10
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- 230000003746 surface roughness Effects 0.000 claims description 7
- 229910052723 transition metal Inorganic materials 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 238000002207 thermal evaporation Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 abstract description 20
- 239000000463 material Substances 0.000 abstract description 13
- 230000003287 optical effect Effects 0.000 abstract description 6
- 238000001228 spectrum Methods 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 238000001259 photo etching Methods 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 230000001276 controlling effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 11
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- HITXEXPSQXNMAN-UHFFFAOYSA-N bis(tellanylidene)molybdenum Chemical compound [Te]=[Mo]=[Te] HITXEXPSQXNMAN-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 4
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000023004 detection of visible light Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910018162 SeO2 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
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Abstract
The invention discloses a junction type photodetector of vanadium dioxide and a two-dimensional semiconductor and a preparation method thereof. The detector firstly grows a layer of uniform vanadium dioxide thin film on an alumina substrate through magnetron sputtering, then etches the vanadium dioxide thin film into an array by utilizing a photoetching mask and an argon plasma etching technology, then transfers a two-dimensional semiconductor to a vanadium dioxide material through dry transfer to form a heterojunction with a vertical structure, and then prepares metal electrodes on the vanadium dioxide and the two-dimensional semiconductor by utilizing an electron beam photoetching method and combining a stripping process to form the heterojunction type optical detection device with the vertical structure. The device structure comprises a substrate, vanadium dioxide, a two-dimensional semiconductor and a metal source drain electrode from bottom to top. By regulating and controlling bias voltage, the device can realize the conversion between a P-N junction and a Bolometer, thereby realizing the detection of spectrum from visible light to far infrared band, having low power consumption and high sensitivity, and being capable of working in high-temperature environment.
Description
Technical Field
The invention relates to a junction type optical detection device of vanadium dioxide and a two-dimensional semiconductor, belonging to the technical field of nano materials.
Background
In recent years, molybdenum disulfide (MoS) has been used2) Provides a chance for the development of the field of photoelectric detection for the appearance of the representative transition metal chalcogenide. Such transition metal chalcogenides [ Nature Nanotechnology 7,699(2012)]Has a forbidden band width of 1eV-2eV, and the effective mobility of the current carrier can reach several hundred cm2V-1s-1And large-area preparation can be realized by using a chemical vapor deposition method, and the excellent characteristics enable the material to be used for effective detection of visible light. In fact, photodetectors based on two-dimensional semiconductors have been studied and developed well, such as those based on molybdenum disulfide [ Nature Nanotechnology 8,497(2013)]Can realize high-sensitivity detection with detection rate as high as 880A W-1。
However, the transition metal chalcogenide is not sailing in the field of photodetection, for example, its forbidden band width limits its application in infrared photodetectors, because the bandgap of this type of semiconductor falls in the ultraviolet to visible rangeBands, although extended to the near infrared band by band engineering [ Advanced Materials 27,6575(2015)]But is difficult to extend any further. Although other two-dimensional semiconductors exist today, such as Bi2SeO2[NatureCommunications 9,3311(2018)]And BP [ Nature Nanotechnology 10,707(2015)]The forbidden band width of the materials can be adjusted, the band gap of the materials can be controlled to be 0.2-0.3eV through thickness control, and the materials can correspond to a medium-wave infrared region, but the development of the materials is inhibited by the preparation difficulty and the air stability of the materials. In addition, the thickness of the two-dimensional material also limits the absorption of light, resulting in low photoelectric conversion efficiency, and the thick two-dimensional material has large dark current and is difficult to completely suppress. Based on the above analysis, for the application of two-dimensional semiconductors in photodetectors, there is an urgent need to increase the absorption of light while reducing dark current and extend the detection wavelength through optimization of device structure and improvement of process.
Disclosure of Invention
In order to solve the problems, the invention provides a junction type light detection device of vanadium dioxide and a two-dimensional semiconductor. According to the method, vanadium dioxide and a thicker two-dimensional semiconductor which is stable in air and narrow in band gap are combined, and the dark current is reduced while light absorption is increased by constructing a vertical heterojunction type device. The device is a P-N junction type device under zero bias, and can detect light with the wavelength of 2 microns; under positive bias, the borometer characteristic of vanadium dioxide can be utilized to extend the detection wavelength to long-wave infrared, thus realizing the detection of ultra-wide spectrum; in extreme high temperature environment, the device can be converted into a Schottky type device, so that optical detection is realized, and the application field of the photoelectric detector is widened.
The invention relates to a junction type optical detection device of vanadium dioxide and a two-dimensional semiconductor and a preparation method thereof, which is characterized in that the device comprises the following components from bottom to top in sequence:
a substrate 1, vanadium dioxide 2, a two-dimensional semiconductor 3, a metal source 4, a metal drain 5,
wherein the substrate 1 is alumina with the thickness of 500 microns, and the surface roughness is 0.5 nanometer;
wherein the vanadium dioxide 2 is a vanadium dioxide film with the thickness of 22 nanometers, and the surface roughness is 1 nanometer;
wherein the two-dimensional semiconductor 3 is a transition metal chalcogenide with a thickness of 20-40 nm;
the metal source electrode 4 and the metal drain electrode 5 are platinum and gold electrodes, the thickness of the platinum is 15 nanometers, and the thickness of the gold is 65 nanometers.
The invention relates to a junction type optical detection device of vanadium dioxide and a two-dimensional semiconductor and a preparation method thereof, which is characterized in that the preparation method comprises the following steps:
1) preparing a layer of vanadium metal film on an alumina substrate by a magnetron sputtering method, and converting the vanadium metal film into a vanadium dioxide film by a thermal oxidation method;
2) manufacturing an array mask on the vanadium dioxide film by adopting an ultraviolet lithography technology, etching an exposure area by utilizing an argon plasma etching technology, and removing the mask to form a vanadium dioxide square array;
3) the two-dimensional semiconductor of the transition metal chalcogenide, such as molybdenum disulfide and molybdenum ditelluride, is stripped on the silicon wafer by a mechanical stripping method, and the thickness is 20-40 nanometers. And transferring the two-dimensional semiconductor to the etched vanadium dioxide surface by using Polydimethylsiloxane (PDMS) to form a staggered and stacked vertical heterojunction structure.
4) And respectively preparing metal electrodes, 15 nm of platinum and 65 nm of gold on the two-dimensional semiconductor and the vanadium dioxide by adopting an ultraviolet lithography technology or an electron beam exposure technology and combining a thermal evaporation and stripping process to form the heterojunction type device of the vanadium dioxide and the two-dimensional semiconductor.
The invention has the advantages that: the invention adopts vanadium dioxide and a two-dimensional semiconductor to form a vertical heterojunction structure device, combines three different optical detection modes, and realizes the detection of ultra-wide spectrum. Under zero bias, the device is represented as a P-N junction type device, can absorb light with the wavelength of below 2 microns, generates electron hole pairs and is separated by an electric field built in the P-N junction, and high-sensitivity photoelectric detection of visible light and near infrared is achieved. When the device is in forward bias, a built-in electric field is shielded, vanadium dioxide can absorb heat of short-wave to long-wave infrared light, the self resistance is reduced by using the bolometer effect, and the current is changed, so that the effective detection of ultra-wide spectrum is realized. When the ambient temperature of the device is raised to more than 70 ℃ from normal temperature, the vanadium dioxide is changed from a semiconductor to a metal, and the device is also changed into a Schottky junction type detector, so that effective light detection in a high-temperature working environment is realized.
Drawings
FIG. 1 is a schematic structural diagram of a prepared junction detector of vanadium dioxide and a two-dimensional semiconductor. In the figure: 1 is a substrate, 2 is vanadium dioxide, 3 is a two-dimensional semiconductor, 4 is a metal source electrode, and 5 is a metal drain electrode.
Fig. 2 is a schematic diagram of the detection principle of the device for detecting visible light to short-wave infrared light.
FIG. 3 is a schematic diagram of the detection principle of detecting mid-wavelength infrared light by the device.
Fig. 4 is a schematic diagram of the detection principle in the high-temperature operation mode.
Detailed Description
The technical solution of the invention will be described in detail with reference to the specific examples.
Example 1
1) Sputtering a layer of uniform vanadium metal film on an alumina substrate by a magnetron sputtering method, and converting the vanadium metal film into a vanadium dioxide film by a thermal oxidation method, wherein the thickness of the film is 22 nanometers, and the surface roughness is 1 nanometer;
2) manufacturing an array mask on the vanadium dioxide film in the step 1 by adopting an ultraviolet lithography technology, etching an exposure area by utilizing an argon plasma etching technology, and removing the mask to form a square array of the vanadium dioxide;
3) the two-dimensional semiconductor molybdenum ditelluride is stripped on the silicon chip by a mechanical stripping method, and the thickness is 20 nanometers. And (3) transferring the stripped two-dimensional semiconductor to the surface of the vanadium dioxide in the step (2) by using Polydimethylsiloxane (PDMS), and then removing the PDMS to form a vertical heterojunction structure in which the two-dimensional semiconductor material and the vanadium dioxide are stacked in a staggered mode.
4) And (3) respectively preparing metal electrodes, 15 nanometers of platinum and 65 nanometers of gold on the two-dimensional semiconductor and the vanadium dioxide in the step (3) by adopting an ultraviolet lithography technology or an electron beam exposure technology and combining a thermal evaporation and stripping process to form a complete heterojunction type device of the vanadium dioxide and the two-dimensional semiconductor.
Example 2
1) Sputtering a layer of uniform vanadium metal film on an alumina substrate by a magnetron sputtering method, and converting the vanadium metal film into a vanadium dioxide film by a thermal oxidation method, wherein the thickness of the film is 22 nanometers, and the surface roughness is 1 nanometer;
2) manufacturing an array mask on the vanadium dioxide film in the step 1 by adopting an ultraviolet lithography technology, etching an exposure area by utilizing an argon plasma etching technology, and removing the mask to form a square array of the vanadium dioxide;
3) the two-dimensional semiconductor molybdenum ditelluride is stripped on a silicon chip by a mechanical stripping method, and the thickness is 30 nanometers. And (3) transferring the stripped two-dimensional semiconductor to the surface of the vanadium dioxide in the step (2) by using Polydimethylsiloxane (PDMS), and then removing the PDMS to form a vertical heterojunction structure in which the two-dimensional semiconductor material and the vanadium dioxide are stacked in a staggered mode.
4) And (3) respectively preparing metal electrodes, 15 nanometers of platinum and 65 nanometers of gold on the two-dimensional semiconductor and the vanadium dioxide in the step (3) by adopting an ultraviolet lithography technology or an electron beam exposure technology and combining a thermal evaporation and stripping process to form a complete heterojunction type device of the vanadium dioxide and the two-dimensional semiconductor.
Example 3
1) Sputtering a layer of uniform vanadium metal film on an alumina substrate by a magnetron sputtering method, and converting the vanadium metal film into a vanadium dioxide film by a thermal oxidation method, wherein the thickness of the film is 22 nanometers, and the surface roughness is 1 nanometer;
2) manufacturing an array mask on the vanadium dioxide film in the step 1 by adopting an ultraviolet lithography technology, etching an exposure area by utilizing an argon plasma etching technology, and removing the mask to form a square array of the vanadium dioxide;
3) the two-dimensional semiconductor molybdenum ditelluride is stripped on the silicon chip by a mechanical stripping method, and the thickness is 40 nanometers. And (3) transferring the stripped two-dimensional semiconductor to the surface of the vanadium dioxide in the step (2) by using Polydimethylsiloxane (PDMS), and then removing the PDMS to form a vertical heterojunction structure in which the two-dimensional semiconductor material and the vanadium dioxide are stacked in a staggered mode.
4) And (3) respectively preparing metal electrodes, 15 nanometers of platinum and 65 nanometers of gold on the two-dimensional semiconductor and the vanadium dioxide in the step (3) by adopting an ultraviolet lithography technology or an electron beam exposure technology and combining a thermal evaporation and stripping process to form a complete heterojunction type device of the vanadium dioxide and the two-dimensional semiconductor.
Claims (2)
1. A junction type photodetector of vanadium dioxide and a two-dimensional semiconductor is characterized in that,
the junction type photodetector comprises the following components from bottom to top in sequence: substrate (1), vanadium dioxide (2), two-dimensional semiconductor (3), metal source (4), metal drain (5), wherein:
the substrate (1) is an alumina substrate, the thickness is 500 microns, and the surface roughness is 0.5 nm;
the vanadium dioxide (2) is a vanadium dioxide film with the thickness of 22 nanometers and the surface roughness of 1 nanometer;
the two-dimensional semiconductor (3) is a transition metal chalcogenide with the thickness of 20-40 nanometers;
the metal source electrode (4) and the metal drain electrode (5) are platinum and gold electrodes, the thickness of the platinum is 15 nanometers, and the thickness of the gold is 65 nanometers.
2. A method for preparing the vanadium dioxide and two-dimensional semiconductor junction photodetector of claim 1, comprising the following steps:
1) preparing a layer of vanadium metal film on a substrate (1) by a magnetron sputtering method, and converting the vanadium metal film into a vanadium dioxide (2) film by a thermal oxidation method;
2) manufacturing an array mask on the vanadium dioxide (2) by adopting an ultraviolet lithography technology, and etching the exposure area by utilizing an argon plasma etching technology to form a vanadium dioxide square array;
3) transferring the mechanically stripped transition metal chalcogenide two-dimensional semiconductor (3) to the surface of vanadium dioxide by using a dry transfer method to form a staggered and stacked vertical heterojunction structure;
4) and respectively preparing a metal source electrode (4) and a metal drain electrode (5) on the two-dimensional semiconductor (3) and the vanadium dioxide (2) by adopting an ultraviolet lithography technology or an electron beam exposure technology and combining a thermal evaporation and stripping technology to form the heterojunction type device of the vanadium dioxide and the two-dimensional semiconductor.
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| CN112259642A (en) * | 2020-12-23 | 2021-01-22 | 武汉敏芯半导体股份有限公司 | Preparation method of heterojunction optical detector and optical detector |
| CN112420852A (en) * | 2020-11-28 | 2021-02-26 | 郑州大学 | Two-dimensional material photodetector and preparation method thereof |
| CN114551626A (en) * | 2022-02-22 | 2022-05-27 | 吉林大学 | Deep ultraviolet photoelectric detector and preparation method and application thereof |
| CN114551632A (en) * | 2022-02-25 | 2022-05-27 | 北京科技大学 | PN junction type self-driven photoelectric detector of two-dimensional tellurium and transition metal sulfide and preparation method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112420852A (en) * | 2020-11-28 | 2021-02-26 | 郑州大学 | Two-dimensional material photodetector and preparation method thereof |
| CN112420852B (en) * | 2020-11-28 | 2022-07-01 | 郑州大学 | Two-dimensional material photodetector and preparation method thereof |
| CN112259642A (en) * | 2020-12-23 | 2021-01-22 | 武汉敏芯半导体股份有限公司 | Preparation method of heterojunction optical detector and optical detector |
| CN114551626A (en) * | 2022-02-22 | 2022-05-27 | 吉林大学 | Deep ultraviolet photoelectric detector and preparation method and application thereof |
| CN114551626B (en) * | 2022-02-22 | 2024-01-26 | 吉林大学 | Deep ultraviolet photoelectric detector and preparation method and application thereof |
| CN114551632A (en) * | 2022-02-25 | 2022-05-27 | 北京科技大学 | PN junction type self-driven photoelectric detector of two-dimensional tellurium and transition metal sulfide and preparation method thereof |
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