CN111122519B - Closed-loop flow control system and control method for atomic fluorescence instrument - Google Patents
Closed-loop flow control system and control method for atomic fluorescence instrument Download PDFInfo
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- CN111122519B CN111122519B CN201811277773.9A CN201811277773A CN111122519B CN 111122519 B CN111122519 B CN 111122519B CN 201811277773 A CN201811277773 A CN 201811277773A CN 111122519 B CN111122519 B CN 111122519B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6402—Atomic fluorescence; Laser induced fluorescence
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Abstract
The invention provides a closed-loop flow control system and a control method for an atomic fluorescence meter, wherein the system comprises a proportional electromagnetic valve, a flow sensor and a control main board, wherein the proportional electromagnetic valve and the flow sensor are arranged on a gas pipeline, a processor, a plurality of analog-to-digital conversion circuits and a digital-to-analog conversion circuit are integrated on the control main board, the proportional electromagnetic valve is connected to the processor through the digital-to-analog conversion circuit, and the flow sensor is connected to the processor through the analog-to-digital conversion circuit; the system adopts an incomplete differential incremental PID control algorithm to control the gas flow of the gas pipeline. The closed-loop flow control system adopting the digital control mode can provide reliable and stable flow, and is not easily influenced by factors such as gas pressure, temperature change and the like; the incomplete differential incremental PID control algorithm is adopted, so that the calculation influence of the calculation accuracy temperature on the control quantity is small; along with the decrease of the flow regulation increment, the coefficient of the differential link is increased, the convergence rate is accelerated, the dynamic stability of the system is increased, and the flow regulation is prevented from oscillation.
Description
Technical Field
The invention relates to a flow control system in the technical field of atomic spectrum analysis, in particular to a closed-loop flow control system for an atomic fluorescence meter and a control method.
Background
At present, an atomic fluorescence analyzer is a commonly used spectrum analyzer, and the working principle of the atomic fluorescence analyzer is that an excitation light source is used for irradiating atomic vapor containing an element to be detected with a certain concentration, so that a ground state atom is transited to an excited state to emit atomic fluorescence, and the content of the element in a sample to be detected can be calculated by measuring the intensity of the atomic fluorescence.
When the atomic fluorescence instrument works, argon (Ar) is required to be introduced into a reaction furnace as carrier gas, the Ar carrier gas carries hydride or sample steam generated by reaction to enter a quartz furnace, and researches show that the flow rate and the components of the carrier gas have great influence on the fluorescence intensity, the too high carrier gas can dilute the concentration of atoms, the too low flow rate is difficult to quickly bring the hydride or the sample steam into the quartz furnace, and the flow rate is generally controlled to be 400ml-600ml by using pure Ar as the carrier gas. Meanwhile, ar gas is also introduced into the quartz furnace as auxiliary gas, so that ambient air can be prevented from entering flame to generate fluorescence quenching, higher and stable fluorescence efficiency is ensured, the influence of the flow of Ar auxiliary gas on fluorescence intensity is not very obvious, and the flow is generally 600ml/min-1000ml/min.
Early rotameters which generally used needle valves to control gas flow generally used knobs to adjust flow, scales to show flow values, and scales were observed to control knob rotation. The rough flow regulation mode is inconvenient to operate, low in control precision and unstable in flow, and cannot meet the current digital requirements.
At present, a plurality of digital flow control methods are used, namely a plurality of different needle valves are adopted to fix the different flow values to form a plurality of discontinuous gears, and a plurality of electromagnetic valves are combined to control the opening and closing of the needle valves with different gear flow, so that the flow of different gears is automatically controlled. However, the mode can only realize the control of a limited number of flow gears, can not continuously adjust the flow, and has limited application range; in particular, when the gas pressure, the temperature change is large or the needle valve is loose, the gas flow rate is easily changed, and the instability of the gas flow rate adversely affects the accuracy of the fluorescence detection result.
Disclosure of Invention
In order to solve the above problems, the present invention provides a closed-loop flow control system for an atomic fluorescence meter, which can provide a reliable and stable flow rate and is not easily affected by factors such as gas pressure and temperature changes.
The above object of the present invention is achieved by the following technical solutions:
a closed-loop flow control system for an atomic fluorescence meter is used for supplying gas to a reaction furnace (05) and a quartz furnace (06) of the atomic fluorescence meter, and comprises a proportional electromagnetic valve (03) arranged on a gas pipeline and used for controlling the gas flow in the gas pipeline, a flow sensor (04) and a control main board (01), wherein the control main board (01) is integrated with a processor (010), a plurality of analog-to-digital conversion circuits (011) and a digital-to-analog conversion circuit (012), the proportional electromagnetic valve (03) is connected to the processor (010) through the digital-to-analog conversion circuit (012), and the flow sensor (04) is connected to the processor (010) through the analog-to-digital conversion circuit (011).
In the closed-loop flow control system for the atomic fluorescence instrument, the control main board (01) is also integrated with a voltage stabilizing circuit (013) which is used for switching on and switching off the switching power supply (02) after voltage stabilizing modulation.
In the closed-loop flow control system for the atomic fluorescence instrument, the gas pipeline is arranged into two paths, argon in the argon bottle (07) is processed by the two-stage pressure reducing and stabilizing valve and then is introduced into the gas pipeline, one path of the gas pipeline is connected with the reaction furnace (05) of the atomic fluorescence instrument, and the other path of the gas pipeline is connected with the quartz furnace (06) of the atomic fluorescence instrument.
In the closed-loop flow control system for an atomic fluorescence meter, the proportional solenoid valve (03) is a small micro-flow proportional solenoid valve, and the flow rate of gas passing through the proportional solenoid valve (03) is positively correlated with the control voltage thereof.
In the closed-loop flow control system for an atomic fluorescence spectrometer, the flow sensor (04) is a MEME micro-flow sensor with a temperature compensation and calibration function, and is any one of CAFS, F1012 and DFC10 series.
The invention also provides a closed-loop flow control method, which is based on the closed-loop flow control system for the atomic fluorescence instrument, and controls the gas flow in the gas pipeline by adopting an incomplete differential incremental PID controller, and comprises the following steps:
step one, acquiring a coefficient p of a proportional link of a PID controller offline 0 And coefficient p of integral link 1 ；
Converting a gas flow value detected by a flow sensor (04) of a gas pipeline into a digital signal serving as a gas flow actual measurement value through an analog-to-digital conversion circuit (011); and the difference is made with the target gas flow value of the gas pipeline to obtain a current error value e (k), namely an error value at the kth sampling moment, and e (-1) =e (-2) =0;
step three, obtaining the coefficient of a differential link of the PID controller, namely setting A as 10% of a target gas flow value of a carrier gas pipeline, B as 10% of a target flow value of an auxiliary gas pipeline, wherein when the current error value is not more than A, the coefficient of the differential link is 1, when the current error value is not less than A+B, the coefficient of the differential link is 0, and when the current error value is between A and A+B, the coefficient of the differential link is the ratio of the difference value of the absolute value of A+B and the current error to the A value; that is to say,
step four, the gas flow rate increment value deltau (k) of the gas pipe is obtained according to the following formula, namely,
u(k)＝p 0 [e(k)-e(k-1)]+p 1 e(k)+f(e(k))[e(k)-2e(k-1)+e(k-2)]
converting the obtained gas flow increment value into a boost value of control voltage of the proportional solenoid valve (03), and outputting the boost value to the proportional solenoid valve (03) through a DAC;
and step five, waiting for the next sampling moment, wherein k=k+1, returning to the step two, and repeating the steps.
In the closed-loop flow control method, the gas flow of two paths of gas pipelines of the closed-loop flow control system is alternately controlled by a processor (010) in a time-sharing way through an incomplete differential incremental PID controller.
In the above closed-loop flow control method, the sampling period of the controller is not more than 12 seconds.
By adopting the technical means, the invention has the following technical effects: the proportional electromagnetic valve and the flow sensor are arranged on the gas pipeline, and the closed-loop flow control system adopting the digital control mode can provide reliable and stable flow and is not easily influenced by factors such as gas pressure, temperature change and the like; the incomplete differential increment PID control algorithm is adopted, accumulation processing is not needed, the determination of the control voltage increment is only related to the last gas error sampling value, and the calculation error or calculation accuracy temperature has small calculation influence on the control quantity (control voltage of the proportional electromagnetic valve); the proportional solenoid valve only outputs the change part of the control voltage, and the misoperation influence is small; along with the decrease of the flow regulation increment, the coefficient of the differential link is increased, the convergence rate is accelerated, the dynamic stability of the system is increased, and the flow regulation is prevented from oscillation.
Drawings
FIG. 1 is a block diagram of the closed loop flow control system of the present invention;
FIG. 2 is a flow chart of a control method of the present invention.
The reference numerals in the drawings are as follows:
01: a control main board;
010: processor (MCU), 011: analog-to-digital conversion circuit (ADC), 012: digital-to-analog conversion circuit (DAC), 013: a voltage stabilizing circuit;
02: a switching power supply;
03: a proportional solenoid valve;
04: a flow sensor;
05: a reaction furnace;
06: a quartz furnace;
07: argon bottle.
Detailed Description
The closed-loop flow control system and the control method for the atomic fluorescence meter according to the present invention will be described in detail with reference to the accompanying drawings and specific examples.
A block diagram of the closed loop flow control system of the present invention is shown in fig. 1, wherein the thick lines represent gas path connections and the thin lines represent electrical connections. The reaction furnace 05 of the atomic fluorescence analyzer needs to be filled with carrier gas to bring hydride or atomic vapor generated by the reaction into the quartz furnace 06 of the atomizer, and in addition, the inner tube of the quartz furnace needs to be filled with auxiliary gas to prevent surrounding air from affecting flame combustion and create a reduction atmosphere for fluorescence detection; the carrier gas and the auxiliary gas are generally argon, the flow of the carrier gas and the auxiliary gas needs to be controlled stably, and the fluorescence detection is easy to be adversely affected due to the fact that the flow is too large in change.
As shown in fig. 1, the closed-loop flow control system of the invention provides two paths of gas pipelines for controlling the flow rate of carrier gas introduced into the reaction furnace 05 and auxiliary gas introduced into the quartz furnace 06 respectively, and comprises a proportional electromagnetic valve 03, a flow sensor 04 and a control main board 01 which are arranged on the two paths of gas pipelines, wherein argon is provided by an argon bottle 07 to enter the gas pipelines and is connected into the reaction furnace 05 or the quartz furnace 06 through the gas pipelines, the proportional electromagnetic valve 03 is arranged in the gas pipelines and used for controlling the on-off and flow rate of the gas pipelines, and the flow sensor 04 is arranged at the outlet of the gas pipelines and used for measuring the gas flow rate in the gas pipelines; the control main board 01 is integrated with a processor (MCU) 010, a voltage stabilizing circuit 013 and a plurality of analog-to-digital conversion circuits (ADC) 011 and digital-to-analog conversion circuits (DAC) 012 which are respectively and electrically connected with the MCU, and the switching power supply 02 is connected into the control main board 01 through the voltage stabilizing circuit 013 to supply power for the MCU and peripheral circuits thereof on the control main board 01.
In one embodiment, the argon bottle 07 filled with argon is a steel bottle, the steel bottle is provided with a two-stage pressure reducing and stabilizing valve, the pressure of compressed gas in the steel bottle is reduced to 0.4MPa after the primary pressure reducing and stabilizing valve acts, the pressure of the compressed gas is reduced to 0.3MPa after the secondary pressure reducing and stabilizing valve acts, and the depressurized gas is introduced into a gas pipeline, and the flow of the depressurized gas is controlled by the proportional electromagnetic valve 03. The selected proportional solenoid valve 03 is a small micro-flow proportional solenoid valve MODEL 3030, the maximum withstand voltage is 0.98MPa (the requirement is larger than the argon pressure output by the argon bottle 07), the maximum flow is about 2700ml/min (larger than the flow control target range) under the pressure of 0.3MPa, and the control voltage range is 3.5VDC-12VDC.
The positive correlation between the passing flow rate of the proportional solenoid valve 03 and the control voltage is obtained by fitting experimental data for a plurality of times, and in one embodiment, the fitting result of the selected proportional solenoid valve is as follows:
y＝2.6662x+7223.9 (1)
wherein x is the gas flow rate, and the unit ml/min; y is the control voltage in mV.
The correlation coefficient of the fitting formula (1) is 0.9995, and the two are in linear positive correlation.
The processor (MCU) 010 calculates the control voltage of the proportional solenoid valve 03 based on equation (1) and the set flow control target. The MCU sends a control command to the proportional solenoid valve 03 through the calculated control voltage, and the flow of the gas pipeline can be stably controlled by stabilizing the control voltage of the proportional solenoid valve 03 at the calculated target value. However, in practice, the flow rate of the gas pipe is controlled by controlling the control voltage of the proportional solenoid valve 03 only due to the influence of factors such as the gas pressure and the ambient temperature, and the gas flow rate is unstable.
By adding the flow sensor 04 on the gas pipeline, the gas flow on the gas pipeline is detected in real time, and the difference value between the detected flow value and the flow target value is fed back to the proportional solenoid valve 03 as a control increment, so that the proportional solenoid valve 03 is controlled to adjust the flow, and the control increment tends to zero. The control strategy is an incremental PID control algorithm which has functions of variable integration, trapezoidal integration and anti-integral saturation, and because the gas flow control target is flow stability in a certain range, the control precision requirement is not high, and therefore, the incomplete differential incremental PID control algorithm is suitable for gas flow control under the situation.
In one embodiment, the flow sensor 04 is a MEME micro-flow sensor, such as CAFS, F1012, DFC10 and other series flow sensors, and is embedded with a temperature sensor, so that the temperature compensation calibration function is realized, the linear analog voltage output is realized, and meanwhile, the precision and the repeatability are good. The analog voltage output by the flow sensor 04 is connected into an ADC through an analog interface of a control main board after being regulated by a potentiometer, the ADC converts the analog voltage into a digital signal and sends the digital signal to an MCU, the MCU compares a gas flow measurement value with a flow set value to obtain a difference value of the two, the difference value is converted into an increment value of a control voltage of the proportional solenoid valve 03, the increment value is converted into an analog signal through a DAC and connected to a control object (the proportional solenoid valve 03), the control voltage of the proportional solenoid valve 03 is controlled to change, and then the gas flow of the proportional solenoid valve 03 tends to a target flow set value.
Because the flow stability requirements on the carrier gas and the auxiliary gas are relatively high and the accuracy requirements on the gas flow are not high during the detection of the atomic fluorescence meter, the invention adopts an incomplete differential incremental PID controller to control the two paths of gas flows in a time-sharing manner as shown in figure 2, and the control strategy is described in detail below.
The control object is the control voltage of the proportional electromagnetic valve, and the control gas flow is realized by controlling the control voltage, so the control quantity sent by the MCU each time is the increment of the control voltage, namely:
e(k)＝r(k)-y(k) (2)
wherein e (k) is the difference between the set gas flow target value r (k) and the actual gas flow value y (k) detected by the flow sensor 04; deltau (k) is the incremental value of the gas flow; p is p 0 And p 1 The coefficients of the proportional link and the integral link are obtained through off-line calculation; f (e (k)) is an incomplete differentiation coefficient.
Wherein A is 10% of the gas target flow value of the auxiliary gas, the range is 60ml/min-100ml/min, B is 10% of the gas target flow value of the carrier gas, and the range is 40ml/min-60ml/min.
The incomplete differential incremental PID control algorithm provided by the invention comprises the following steps:
step one: acquiring coefficient p of proportional link of PID controller in (4) offline 0 And coefficient p of integral link 1 . The parameter setting can be performed by a trial and error method.
Step two: converting a gas flow value detected by a flow sensor 04 of the gas pipeline into a digital signal through an ADC (analog-to-digital converter) and giving y (k); and comparing with the target gas flow value r (k) (a or B) of the gas pipeline, the current error e (k), namely the error value of the kth sampling time is calculated according to the formula (2), and e (-1) =e (-2) =0.
Step three: judging the absolute value of e (k), and calculating the value of f (e (k)) according to a formula (5);
step four: the gas flow rate increase value deltau (k) of the gas pipe is obtained according to the formula (4), and the obtained gas flow rate increase value is converted into an increase value of the control voltage of the proportional solenoid valve 03 according to the formula (1), and is outputted to the proportional solenoid valve 03 through the DAC.
Step five: waiting for the next sampling moment, wherein k=k+1, returning to the second step, and repeating the steps.
The gas flow control time constant is smaller, the load change is not large, and the gas flow of the two paths of gas pipelines of the closed-loop flow control system is alternately controlled by the processor 010 in a time-sharing way through an incomplete differential incremental PID controller.
The incomplete differential increment PID control algorithm does not need accumulation processing, the determination of the control voltage increment is only related to the last gas error sampling value, and the calculation error or calculation accuracy temperature has little influence on the calculation of the control quantity (the control voltage of the proportional solenoid valve 03); the proportional solenoid valve 03 only outputs a change part of the control voltage, and the malfunction influence is small. In addition, an incomplete differential algorithm is adopted, and the coefficient of a differential link is increased along with the reduction of a flow regulation increment, so that the dynamic stability of the system is improved, and the flow regulation is prevented from vibrating.
The control performance of the closed loop flow control system of the present invention is verified by setting different control flow targets as follows.
TABLE 1 test results (gas flow Unit: ml/min)
| Group 1 | Group 2 | Group 3 | Group 4 | Group 5 | Group 6 | Group 7 | |
| Setting value | 1200 | 1100 | 1000 | 900 | 800 | 700 | 600 |
| Actual measured value | 1196 | 1102 | 1003 | 901 | 810 | 710 | 604 |
| Relative error | -0.04％ | 0.16％ | 0.5％ | 0.1％ | 1.25％ | 1.42％ | 0.67％ |
The test results show that the flow control accuracy of the closed-loop flow control system for the carrier gas and the auxiliary device is limited to be below 2%, and the working requirements of the atomic fluorescence spectrometer are met.
The results of observing the change in the gas flow rate for a period of time arbitrarily selected to be 2 minutes after the gas flow rate was regulated to be 750ml/min are shown in table 2.
TABLE 2 test results (gas flow Unit: ml/min)
| Target gas flow rate | Measured flow rate at 1 minute | Measured flow rate at 2 minutes |
| 750 | 748 | 749 |
As can be seen from table 2, the maximum relative change in gas flow rate: -0.27%.
In this test example, the longest period for the controller to control the gas flow is 12 seconds. Therefore, the change of the gas flow in the control period is small, and the control requirement can be met.
The invention adopts a closed-loop flow control strategy, namely, a control main board 01 receives the gas flow measured by a flow sensor 04 by arranging a proportional electromagnetic valve 03 and the flow sensor 04 on a gas pipeline, compares a gas flow actual measurement value with a gas flow set value, converts the difference value of the gas flow actual measurement value and the gas flow set value into a control voltage of the proportional electromagnetic valve 03, and then sends the control voltage to the proportional electromagnetic valve 03 to control the gas flow, and adopts the proportional electromagnetic valve 03 to carry out digital control; the incomplete differential increment PID control algorithm is adopted, accumulation processing is not needed, the determination of the control voltage increment is only related to the last gas error sampling value, and the calculation error or calculation accuracy temperature has small calculation influence on the control quantity (the control voltage of the proportional solenoid valve 03); the proportional solenoid valve 03 only outputs the change part of the control voltage, and the misoperation influence is small; along with the decrease of the flow regulation increment, the coefficient of the differential link is increased, the dynamic stability of the system is increased, the convergence speed of regulation is accelerated, and the flow regulation is prevented from oscillation.
It will be appreciated by persons skilled in the art that these examples are given solely for the purpose of illustration and are not intended to limit the scope of the invention, as various equivalent variations and modifications of the invention will fall within the scope of the invention as defined in the appended claims.
Claims (10)
1. A closed-loop flow control method for controlling a closed-loop flow control system for an atomic fluorescence meter to control a gas flow in a gas pipeline by adopting an incomplete differential incremental PID controller, the method comprising the steps of:
step one, acquiring a coefficient p of a proportional link of a PID controller offline 0 And coefficient p of integral link 1 ；
Converting a gas flow value detected by a flow sensor (04) of a gas pipeline into a digital signal serving as a gas flow actual measurement value through an analog-to-digital conversion circuit (011); and the difference is made with the target gas flow value of the gas pipeline to obtain a current error value e (k), namely an error value at the kth sampling moment, and e (-1) =e (-2) =0;
step three, obtaining the coefficient of a differential link of the PID controller, namely setting A as 10% of a target gas flow value of an auxiliary gas pipeline, B as 10% of a target flow value of a carrier gas pipeline, wherein when the current error value is not more than A, the coefficient of the differential link is 1, when the current error value is not less than A+B, the coefficient of the differential link is 0, and when the current error value is between A and A+B, the coefficient of the differential link is the ratio of the difference value of the absolute value of A+B and the current error to the A value; that is to say,
step four, the gas flow rate increment value deltau (k) of the gas pipe is obtained according to the following formula, namely,
Δu(k)＝p 0 [e(k)-e(k-1)]+p 1 e(k)+f(e(k))[e(k)-2e(k-1)+e(k-2)]
the obtained gas flow increment value is converted into a boost value of control voltage of the proportional solenoid valve (03), and the boost value is output to the proportional solenoid valve (03) through a digital-to-analog conversion circuit (012);
and step five, waiting for the next sampling moment, wherein k=k+1, returning to the step two, and repeating the steps.
2. The closed loop flow control method of claim 1 wherein the gas flow of the two gas lines of the closed loop flow control system is alternately time-shared by the processor (010) via an incomplete differential incremental PID controller.
3. The closed loop flow control method of claim 1, wherein the controller has a sampling period of no more than 12 seconds.
4. A closed-loop flow control system for an atomic fluorescence meter for stabilizing a gas flow rate of a reaction furnace (05) and a quartz furnace (06) which are fed into the atomic fluorescence meter using the closed-loop flow control method according to any one of claims 1 to 3, characterized by comprising a proportional solenoid valve (03) for controlling a gas flow rate in the gas pipe and a flow sensor (04) for measuring a gas flow rate provided on the gas pipe, and a control main board (01), a processor (010), a plurality of analog-to-digital conversion circuits (011) and a digital-to-analog conversion circuit (012) being integrated on the control main board (01), the proportional solenoid valve (03) being connected to the processor (010) through the digital-to-analog conversion circuit (012), the flow sensor (04) being connected to the processor (010) through the analog-to-digital conversion circuit (011).
5. The closed-loop flow control system for the atomic fluorescence instrument according to claim 4, wherein the control main board (01) is further integrated with a voltage stabilizing circuit (013), and the switching power supply (02) is connected to the control main board (01) after being modulated by the voltage stabilizing circuit in a voltage stabilizing mode.
6. The closed-loop flow control system for an atomic fluorescence meter according to claim 4, wherein the gas pipelines are arranged in two paths, one gas pipeline is a carrier gas pipeline which is connected to a reaction furnace (05) of the atomic fluorescence meter, and the other gas pipeline is an auxiliary gas pipeline which is connected to a quartz furnace (06) of the atomic fluorescence meter.
7. The closed-loop flow control system for the atomic fluorescence instrument according to claim 6, wherein the inlets of the two gas pipelines are respectively connected with the outlet of an argon bottle (07), and a two-stage pressure reducing and stabilizing valve is arranged at the outlet of the argon bottle.
8. The closed-loop flow control system for atomic fluorescence meters according to claim 4, wherein the proportional solenoid valve (03) is a small micro-flow proportional solenoid valve, and the flow rate of the gas passing through the proportional solenoid valve (03) is positively correlated with the control voltage thereof.
9. The closed-loop flow control system for atomic fluorescence meters according to claim 8, wherein the proportional solenoid valve (03) is provided with a voltage control terminal having a positive correlation with the flow rate of gas through the proportional solenoid valve, the voltage control terminal being connected to the processor through a digital-to-analog conversion circuit (012).
10. The closed-loop flow control system for atomic fluorescence meters according to claim 4, wherein the flow sensor (04) is a MEMS micro-flow sensor having a temperature compensation calibration function, and is any one of CAFS, F1012, DFC10 series.
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| PCT/CN2019/084196 WO2020087891A1 (en) | 2018-10-29 | 2019-04-25 | Water-carrying atomic fluorescence analysis device and atomic fluorescence analysis method |
| PH12021550916A PH12021550916A1 (en) | 2018-10-29 | 2021-04-22 | Water-carrying atomic fluorescence analysis device and atomic fluorescence analysis method |
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| CN111752313A (en) * | 2020-07-10 | 2020-10-09 | 万华化学集团股份有限公司 | Flow cooperative control method and control system device for transformed gas and unvaryed gas of gasification furnace |
| CN112051251B (en) * | 2020-09-09 | 2024-02-09 | 北京北分瑞利分析仪器(集团)有限责任公司 | Gas circuit control system of atomic fluorescence spectrometer |
| CN113813803A (en) * | 2021-06-08 | 2021-12-21 | 福尼斯(南京)表面工程技术有限公司 | High-precision multi-component gas proportioning method for surfacing |
| CN114184724B (en) * | 2022-02-15 | 2022-05-17 | 华谱科仪(北京)科技有限公司 | Method and device for compensating carrier gas flow of chromatograph and storage medium thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009087126A (en) * | 2007-10-01 | 2009-04-23 | Hitachi Metals Ltd | Mass flow control device and real gas mass flow control method |
| JP2010146416A (en) * | 2008-12-19 | 2010-07-01 | Horiba Stec Co Ltd | Mass flow controller |
| KR101341600B1 (en) * | 2013-04-19 | 2013-12-13 | 김진택 | Intelligent control system and method for controlling fluid flow rate |
| RU2509334C1 (en) * | 2013-02-22 | 2014-03-10 | Общество с ограниченной ответственностью "Научно-производственная фирма "Мета-хром" | Gas flow controller |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3724485A (en) * | 1971-05-12 | 1973-04-03 | Servo Labs Inc | Flow controller |
| IT1264866B1 (en) * | 1993-06-22 | 1996-10-17 | Nuovo Pignone Spa | PERFECTED ELECTRO-PNEUMATIC CONVERTER WITH SOLENOID VALVE CONTROL |
| JP4204155B2 (en) * | 1999-11-30 | 2009-01-07 | 株式会社エー・シー・イー | Control method of proportional solenoid valve |
| AU2003254011A1 (en) * | 2002-07-19 | 2004-02-09 | Mykrolis Corporation | Fluid flow measuring and proportional fluid flow control device |
| JP4763031B2 (en) * | 2008-10-03 | 2011-08-31 | 株式会社堀場エステック | Mass flow controller |
| CN203405413U (en) * | 2013-08-06 | 2014-01-22 | 北京瑞利分析仪器有限公司 | Atomic fluorescent air supply system running by means of air |
| CN104571149B (en) * | 2014-06-12 | 2017-10-17 | 北京七星华创电子股份有限公司 | Mass flow control appts and control method for the integrated induction system of gas |
| US10754358B2 (en) * | 2015-09-28 | 2020-08-25 | Koninklijke Philips N.V. | Methods and systems for controlling gas flow using a proportional flow valve |
| CN106774468B (en) * | 2016-12-27 | 2019-11-08 | 中国航天空气动力技术研究院 | Flow rate controlling method |
| CN107014796B (en) * | 2017-05-10 | 2018-01-12 | 广东省计量科学研究院（华南国家计量测试中心） | A kind of system and method for the cutting efficiency of quick measurement sampler |
| CN107561049A (en) * | 2017-09-05 | 2018-01-09 | 重庆民泰香料化工有限责任公司 | A kind of AFS peak sample circuit and control method |
| JP7469089B2 (en) * | 2020-03-19 | 2024-04-16 | アズビル株式会社 | Mass flow controller and flow rate control method |
| CN113721672A (en) * | 2020-05-26 | 2021-11-30 | 阿自倍尔株式会社 | Mass flow controller and fluctuation suppression method |
-
2018
- 2018-10-30 CN CN201811277773.9A patent/CN111122519B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009087126A (en) * | 2007-10-01 | 2009-04-23 | Hitachi Metals Ltd | Mass flow control device and real gas mass flow control method |
| JP2010146416A (en) * | 2008-12-19 | 2010-07-01 | Horiba Stec Co Ltd | Mass flow controller |
| RU2509334C1 (en) * | 2013-02-22 | 2014-03-10 | Общество с ограниченной ответственностью "Научно-производственная фирма "Мета-хром" | Gas flow controller |
| KR101341600B1 (en) * | 2013-04-19 | 2013-12-13 | 김진택 | Intelligent control system and method for controlling fluid flow rate |
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