CN111112110A - Detection machine for polycrystalline silicon wafer - Google Patents

Detection machine for polycrystalline silicon wafer Download PDF

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Publication number
CN111112110A
CN111112110A CN201911407573.5A CN201911407573A CN111112110A CN 111112110 A CN111112110 A CN 111112110A CN 201911407573 A CN201911407573 A CN 201911407573A CN 111112110 A CN111112110 A CN 111112110A
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CN
China
Prior art keywords
fixed
box body
rod
lead screw
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201911407573.5A
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Chinese (zh)
Inventor
钱其峰
张秋涛
褚玲芳
熊磊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHEJIANG SUNOLOGY CO Ltd
Original Assignee
ZHEJIANG SUNOLOGY CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZHEJIANG SUNOLOGY CO Ltd filed Critical ZHEJIANG SUNOLOGY CO Ltd
Priority to CN201911407573.5A priority Critical patent/CN111112110A/en
Publication of CN111112110A publication Critical patent/CN111112110A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/344Sorting according to other particular properties according to electric or electromagnetic properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • B07C5/362Separating or distributor mechanisms

Abstract

The invention provides a detection machine for a polycrystalline silicon wafer, and belongs to the technical field of machinery. The silicon wafer damage detection device solves the technical problems that an existing silicon wafer damage detection device is low in working efficiency and the like. The detection machine for the polycrystalline silicon wafers comprises a base and is characterized in that a feeding and discharging mechanism and a test box body are arranged on the base, a first lead screw and a second lead screw are vertically and rotatably arranged on the test box body, the first lead screw is parallel to the second lead screw, the first lead screw is connected with an output shaft of a rotating motor, the rotating motor is fixed on the test box body, a driving gear is fixed on one end of the first lead screw, the other end of the first lead screw is in threaded connection with a first thread block, the first thread block is connected with one end of an upper mounting frame, and the upper mounting frame is provided with an upper probe row structure; one end of the second screw rod is fixed with a driven gear, the driving gear is meshed with the driven gear, the other end of the second screw rod is in threaded connection with a second threaded block, and a lower probe row structure is arranged on the lower mounting frame. The invention has the advantage of high working efficiency.

Description

Detection machine for polycrystalline silicon wafer
Technical Field
The invention belongs to the technical field of machinery, relates to a detector, and particularly relates to a detector for a polycrystalline silicon wafer.
Background
Through retrieval, for example, chinese patent literature discloses a silicon wafer breakage detection apparatus and a detection method [ application No.: 201510837987.7, respectively; publication No.: CN105301006A ]. The silicon wafer breakage detection apparatus is characterized by comprising: the silicon wafer conveying device comprises a rack, a first conveying unit, a second conveying unit, a third conveying unit, a damage detection unit, a damage collection box and a central controller, wherein the first conveying unit, the second conveying unit and the third conveying unit are used for conveying silicon wafers backwards in sequence; the damage detection unit is matched with the first conveying unit in position, the rear end of the second conveying unit can rotate in a downward inclined mode, and the damage collection box is arranged below the rear end of the second conveying unit; and the central controller receives the detection result of the breakage detection unit and controls whether the rear end of the second conveying unit inclines downwards or not.
Although the silicon wafer breakage detection device disclosed in the patent can automatically detect the silicon wafer, the device has low working efficiency, and therefore, it is necessary to design a detection machine for detecting the polycrystalline silicon wafer.
Disclosure of Invention
The invention aims to solve the problems in the prior art, and provides a polycrystalline silicon wafer detector which has the advantage of high working efficiency.
The purpose of the invention can be realized by the following technical scheme: a detector for polycrystalline silicon wafers comprises a base and is characterized in that a feeding and discharging mechanism and a test box body are arranged on the base, a first lead screw and a second lead screw are vertically and rotatably arranged on the test box body, the first lead screw is parallel to the second lead screw, the first lead screw is connected with an output shaft of a rotating motor, the rotating motor is fixed on the test box body, a driving gear is fixed at one end of the first lead screw, the other end of the first lead screw is in threaded connection with a first threaded block, the first threaded block is connected with one end of an upper mounting frame, the upper mounting frame is provided with an upper probe row structure, a guide pillar is also vertically fixed on the test box body, a third slide block and a second slide block are movably arranged on the guide pillar, and the; a driven gear is fixed at one end of the second screw rod, the driving gear is meshed with the driven gear, a second threaded block is connected to the other end of the second screw rod in a threaded mode and is connected with one end of a lower mounting frame, a lower probe row structure is arranged on the lower mounting frame, and the other end of the lower mounting frame is connected with a second sliding block; the feeding and discharging mechanism comprises a feeding structure I, a feeding structure II and two conveying structures, the feeding structure I and the feeding structure II are respectively positioned on two sides of the box body of the test box, two feeding conveyor belts and two discharging conveyor belts used for conveying objects to be detected are arranged on the base, and a purging structure used for purging polycrystalline silicon wafers on the feeding conveyor belts is further arranged on the base.
By adopting the structure, the polycrystalline silicon wafer to be detected is conveyed below the conveying structure through the feeding conveying belt, the conveying structure conveys the silicon wafer to be detected into the first feeding structure and the second feeding structure, the first feeding structure conveys the silicon wafer to be detected into the box body of the test box, at the moment, the rotating motor rotates to drive the first screw rod to rotate, the upper mounting frame moves downwards under the action of the first screw thread block and the third slide block, the first screw rod is fixedly provided with the driving gear, the second screw rod is fixedly provided with the driven gear, the driven gear and the second screw rod realize reverse rotation under the driving of the driving gear, the lower mounting frame synchronously moves upwards under the action of the second screw thread block and the second slide block, so that the upper probe row structure and the lower probe row structure realize detection of the battery piece, the first feeding structure resets after the detection is finished, the conveying structure conveys the silicon wafer to be detected to the blanking conveying, and the feeding structure II feeds the silicon wafer to be detected into the test box body, so that the feeding structure I and the feeding structure II work alternately.
The blowing structure comprises a blowing box body, a cleaning brush, a fan, an air supply pipe and a spray head, the blowing box body is fixed on the base, the feeding conveyor belt penetrates through the blowing box body, a second air cylinder is fixed on the blowing box body, a piston rod of the second air cylinder is vertically arranged, the cleaning brush is fixed on the piston rod of the second air cylinder, brush bristles are further arranged on the cleaning brush, the fan is fixed outside the blowing box body, the air supply pipe penetrates through the wall of the blowing box body and is communicated with the fan, and the spray head is fixed on the air supply.
By adopting the structure, when the silicon wafer to be detected passes through the blowing box body on the feeding conveying belt, the bristles on the cleaning brush scrub the silicon wafer, and the nozzle blows the silicon wafer.
Go up probe row structure and include that two go up fixed strip and a plurality of test probe row, go up the fixed strip and fix on last mounting bracket, go up the fixed strip and can dismantle on the fixed strip and be connected with a plurality of mounting bars, go up and be fixed with a plurality of installation pieces on the mounting bar, go up test probe row and pass through the bolt fastening on last installation piece, go up and be fixed with a plurality of probes that go up on the test probe row.
By adopting the structure, the upper mounting strip and the upper fixing strip can be detachably connected, the probe row structure can be conveniently detached and maintained, the upper detection probe row is fixed on the upper mounting block through the bolt, and the upper detection probe row can be conveniently detached and replaced.
The lower probe row structure comprises two lower fixing strips and a plurality of lower detection probe rows, the lower fixing strips are fixed on the lower mounting frame, the lower fixing strips are detachably connected with a plurality of lower mounting strips, a plurality of lower mounting blocks are fixed on the lower mounting strips, the lower detection probe rows are fixed on the lower mounting blocks through bolts, and a plurality of lower probes are fixed on the lower detection probe rows.
By adopting the structure, the lower mounting strip and the lower fixing strip can be detachably connected, the lower probe row structure can be conveniently detached and maintained, the lower detection probe row is fixed on the lower mounting block through the bolts, and the lower detection probe row can be conveniently detached and replaced.
Conveying structure includes lead screw three, step motor, the slide bar, slider one, sucking disc and a plurality of support, the support is fixed on the base, step motor fixes on the support, step motor's output shaft level sets up, the one end of lead screw three and step motor's output shaft are connected, the other end of lead screw three rotates and sets up on the support, the slide bar is fixed on the support, the slide bar is parallel to each other with the lead screw, the slider is one set and is established on the slide bar, slider one is through nut and lead screw three-phase cooperation, still be fixed with cylinder one on the slider one, the vertical setting of piston rod of cylinder one, the sucking disc is fixed on the piston rod of cylinder one, it is provided with the suction nozzle still to slide on the sucking disc, the suction nozzle is connected.
By adopting the structure, the stepping motor drives the screw rod to rotate, the first sliding block moves back and forth under the action force of the nut and the sliding rod, and the cylinder drives the sucker to move up and down, so that the silicon wafers are sucked and conveyed.
The feeding structure I comprises a first mounting seat, a first push rod motor, a first push plate and a plurality of first object placing rods, the first mounting seat is fixed on the base, the first push rod motor is fixed on the first mounting seat, the push rod of the first push rod motor is horizontally arranged, the first push plate is fixed on the push rod of the first push rod motor, and the first object placing rods are fixed on the first push plate.
By adopting the structure, the push plate I is driven by the push rod motor to move and the object placing rod I moves, so that the feeding function is realized.
The feeding mechanism II comprises a mounting seat II, a push rod motor II, a push plate II and a plurality of object placing rods II, the mounting seat II is fixed on the base, the push rod motor II is fixed on the mounting seat II, the push rod of the push rod motor II is horizontally arranged, the push plate II is fixed on the push rod of the push rod motor II, and the object placing rods II are fixed on the push plate II.
By adopting the structure, the second push plate and the second object placing rod are driven by the second push rod motor to move, so that the feeding function is realized.
And a plurality of sliding strips used for sliding the push plate are further arranged on the first mounting seat and the second mounting seat.
And the first article placing rod and the second article placing rod are both provided with article placing grooves convenient to position.
Compared with the prior art, the invention has the following advantages:
1. the polycrystalline silicon wafer to be detected is conveyed to the lower part of the conveying structure through the feeding conveying belt, the conveying structure conveys the silicon wafer to be detected into a first feeding structure and a second feeding structure, the first feeding structure conveys the silicon wafer to be detected into the box body of the testing box, at the moment, the rotating motor rotates to drive the first screw rod to rotate, the upper mounting frame moves downwards under the action of the first screw thread block and the third slide block, the first screw rod is fixedly provided with a driving gear, the second screw rod is fixedly provided with a driven gear, the driven gear and the second screw rod rotate reversely under the drive of the driving gear, the lower mounting frame synchronously moves upwards under the action of the second screw thread block and the second slide block, so that the upper probe row structure and the lower probe row structure detect the battery pieces, the first feeding structure resets after detection is completed, the conveying structure conveys the silicon wafer to be detected to the blanking conveying belt, the second feeding structure conveys the silicon, therefore, the alternative work of the first feeding structure and the second feeding structure is realized, and the automatic feeding device has the advantage of high working efficiency.
2. The upper mounting strip is detachably connected with the upper fixing strip, so that the upper probe row structure is convenient to dismount and maintain, and the upper detection probe row is fixed on the upper mounting block through a bolt, so that the upper detection probe row is convenient to dismount and replace; the connection can be dismantled with lower fixed strip to lower mounting strip, and the maintenance is dismantled to probe row structure down to the convenience, and lower test probe row passes through the bolt fastening under on the installation piece, and the change is dismantled to lower test probe row to the convenience, has convenient to use's advantage.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic plan view of the present invention.
Fig. 3 is a schematic plan view of the present invention.
Fig. 4 is a schematic perspective view of the present invention with portions broken away.
Fig. 5 is a schematic perspective view of the present invention with portions broken away.
Fig. 6 is a schematic cross-sectional structure of the purge structure of the present invention.
Fig. 7 is a schematic cross-sectional view of the suction cup of the present invention.
In the figure, 1, a base; 2. a test box body; 3. a feeding conveyor belt; 4. a blanking conveyor belt; 5. a first mounting seat; 6. a push rod motor I; 7. pushing a first plate; 8. a first object placing rod; 9. a second mounting seat; 10. a push rod motor II; 11. a second push plate; 12. a second object placing rod; 13. a third screw rod; 14. a stepping motor; 15. a slide bar; 16. a first sliding block; 17. a suction cup; 18. a support; 19. a suction nozzle; 20. a spring; 21. a storage groove; 22. a first cylinder; 23. a first screw rod; 24. a second screw rod; 25. rotating the motor; 26. a driving gear; 27. a first thread block; 28. mounting a frame; 29. a guide post; 30. a driven gear; 31. a second thread block; 32. a lower mounting frame; 33. a second sliding block; 34. an upper fixing strip; 35. detecting a probe row; 36. mounting a strip; 37. an upper mounting block; 38. an upper probe; 39. a lower fixing strip; 40. detecting a probe row at the lower part; 41. a lower mounting bar; 42. a lower mounting block; 43. a lower probe; 44. purging the box body; 45. a cleaning brush; 46. a fan; 47. an air supply pipe; 48. a spray head; 49. a second air cylinder; 50. brushing; 51. a slide bar; 52. and a third sliding block.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.
As shown in fig. 1-7, the detecting machine for polycrystalline silicon wafers comprises a base 1, in this embodiment, a loading and unloading mechanism and a testing box body 2 are arranged on the base 1, a first lead screw 23 and a second lead screw 24 are vertically and rotatably arranged on the testing box body 2, the first lead screw 23 is parallel to the second lead screw 24, the first lead screw 23 is connected with an output shaft of a rotating motor 25, the rotating motor 25 is fixed on the testing box body 2, a driving gear 26 is fixed on one end of the first lead screw 23, a first thread block 27 is in threaded connection with the other end of the first lead screw 23, the first thread block 27 is connected with one end of an upper mounting frame 28, the upper mounting frame 28 is provided with an upper probe 38 row structure, a guide pillar 29 is also vertically fixed on the testing box body, a third slider 52 and a second slider 33 are movably arranged on the guide pillar 29; a driven gear 30 is fixed at one end of the second screw rod 24, the driving gear 26 is meshed with the driven gear 30, a second threaded block 31 is connected to the other end of the second screw rod 24 in a threaded manner, the second threaded block 31 is connected with one end of a lower mounting frame 32, a 43-row structure of lower probes is arranged on the lower mounting frame 32, and the other end of the lower mounting frame 32 is connected with a second sliding block 33; the feeding and discharging mechanism comprises a feeding structure I, a feeding structure II and two conveying structures, the feeding structure I and the feeding structure II are respectively positioned on two sides of the box body 2 of the test box, two feeding conveyor belts 3 and two discharging conveyor belts 4 used for conveying objects to be detected are arranged on the base 1, and a purging structure used for purging polycrystalline silicon wafers on the feeding conveyor belts 3 is further arranged on the base 1.
By adopting the structure, the polycrystalline silicon wafer to be detected is conveyed below the conveying structure through the feeding conveyor belt 3, the conveying structure conveys the silicon wafer to be detected into the first feeding structure and the second feeding structure, the first feeding structure conveys the silicon wafer to be detected into the box body 2 of the test box, at the moment, the rotating motor 25 rotates to drive the first screw rod 23 to rotate, the upper mounting frame 28 moves downwards under the action of the first screw block 27 and the third slide block 52, the driving gear 26 is fixed on the upper portion of the first screw rod 23, the driven gear 30 is fixed on the second screw rod 24, the driven gear 30 and the second screw rod 24 rotate reversely under the drive of the driving gear 26, the lower mounting frame 32 synchronously moves upwards under the action of the second screw block 31 and the second slide block 33, so that the upper probe 38 row structure and the lower probe 43 row structure realize the detection of the battery piece, the first feeding structure resets after the detection is completed, the conveying structure conveys the silicon wafer to be detected to the feeding conveyor belt, and the feeding structure II feeds the silicon wafer to be detected into the test box body 2, so that the feeding structure I and the feeding structure II work alternately.
The blowing structure comprises a blowing box body 44, a cleaning brush 45, a fan 46, an air supply pipe 47 and a spray head 48, the blowing box body 44 is fixed on the base 1, the feeding conveyor belt 3 penetrates through the blowing box body 44, a second cylinder 49 is fixed on the blowing box body 44, a piston rod of the second cylinder 49 is vertically arranged, the cleaning brush 45 is fixed on a piston rod of the second cylinder 49, bristles 50 are further arranged on the cleaning brush 45, the fan 46 is fixed outside the blowing box body 44, the air supply pipe 47 penetrates through the wall of the blowing box body 44 and is communicated with the fan 46, and the spray head 48 is fixed on the air supply pipe 47.
By adopting the structure, when the silicon wafer to be detected passes through the blowing box 44 on the feeding conveyor belt 3, the brush bristles 50 on the cleaning brush 45 brush the silicon wafer, and the nozzle 48 blows the silicon wafer.
Go up 38 row of probe structure and include two and go up fixed strip 34 and a plurality of last test probe and arrange 35, in this embodiment, the quantity of going up test probe and arranging 35 is five, it fixes on last mounting bracket 28 to go up fixed strip 34, it is connected with a plurality of mounting bars 36 to go up to dismantle on the fixed strip 34, in this embodiment, the quantity of going up mounting bar 36 is five, it is fixed with a plurality of installation pieces 37 on to go up the mounting bar 36, in this embodiment, the quantity of going up installation pieces 37 is two, it passes through the bolt fastening on last installation pieces 37 to go up test probe and arrange 35, it is fixed with a plurality of last probes 38 on detecting probe and arranging 35, in this embodiment, the quantity of going up probes 38 is ten.
By adopting the structure, the upper mounting strip 36 and the upper fixing strip 34 can be detachably connected, the upper probe 38 row structure can be conveniently detached and maintained, the upper detection probe row 35 is fixed on the upper mounting block 37 through bolts, and the upper detection probe row 35 can be conveniently detached and replaced.
Lower probe 43 row structure includes two lower fixed strips 39 and a plurality of lower detection probe rows 40, in this embodiment, the quantity of lower detection probe rows 40 is five, lower fixed strip 39 is fixed on mounting bracket 32 down, can dismantle on the lower fixed strip 39 and be connected with a plurality of lower mounting strips 41, in this embodiment, the quantity of lower mounting strips 41 is five, be fixed with a plurality of lower installation pieces 42 on the lower mounting strip 41, in this embodiment, the quantity of lower installation pieces 42 is two, lower detection probe rows 40 passes through the bolt fastening on lower installation pieces 42, be fixed with a plurality of lower probes 43 on lower detection probe rows 40, in this embodiment, the quantity of lower probes 43 is ten.
By adopting the structure, the lower mounting bar 41 and the lower fixing bar 39 can be detachably connected, the lower probe 43 row structure can be conveniently detached and maintained, the lower detection probe row 40 is fixed on the lower mounting block 42 through bolts, and the lower detection probe row 40 can be conveniently detached and replaced.
In this embodiment, the upper detection mechanism and the lower detection mechanism are connected to the display through cables, and the cables and the display are commercially available products, and the connection and installation manner thereof is well known to those skilled in the art.
The conveying structure comprises a third screw rod 13, a stepping motor 14, a slide rod 15, a first slide block 16, a suction cup 17 and a plurality of brackets 18, in the embodiment, the number of the brackets 18 is two, the brackets 18 are fixed on the base 1, the stepping motor 14 is fixed on the brackets 18, an output shaft of the stepping motor 14 is horizontally arranged, one end of the third screw rod 13 is connected with the output shaft of the stepping motor 14, the other end of the third screw rod 13 is rotatably arranged on the brackets 18, the slide rod 15 is fixed on the brackets 18, the slide rod 15 is parallel to the screw rod, the first slide block 16 is sleeved on the slide rod 15, the first slide block 16 is matched with the third screw rod 13 through a nut, a first air cylinder 22 is further fixed on the first slide block 16, a piston rod of the first air cylinder 22 is vertically arranged, the suction cup 17 is fixed on a piston rod of the first air cylinder 22, a suction nozzle 19, the number of springs 20 is two and the suction cup 17 is also in communication with a negative pressure fan 46.
By adopting the structure, the stepping motor 14 drives the screw rod to rotate, the first sliding block 16 moves back and forth under the action of the nut and the sliding rod 15, and the air cylinder drives the sucking disc 17 to move up and down, so that the silicon wafers are sucked and conveyed.
One pay-off structure includes mount pad one 5, push rod motor one 6, push pedal one 7 and a plurality of thing pole one 8 of putting, in this embodiment, puts the quantity of thing pole one 8 and be two, and mount pad one 5 is fixed on base 1, and push rod motor one 6 is fixed on mount pad one 5, and push rod motor one 6's push rod level sets up, and push pedal one 7 is fixed on push rod motor one 6's push rod, puts thing pole one 8 and fixes on push pedal one 7.
By adopting the structure, the first push rod motor 6 drives the first push plate 7 and the first object placing rod 8 to move, so that the feeding function is realized.
The second feeding mechanism comprises a second mounting seat 9, a second push rod motor 10, a second push plate 11 and a plurality of second object placing rods 12, in the embodiment, the number of the second object placing rods 12 is two, the second mounting seat 9 is fixed on the base 1, the second push rod motor 10 is fixed on the second mounting seat 9, the push rods of the second push rod motor 10 are horizontally arranged, the second push plate 11 is fixed on the push rods of the second push rod motor 10, and the second object placing rods 12 are fixed on the second push plate 11.
By adopting the structure, the second push rod motor 10 drives the second push plate 11 and the second object placing rod 12 to move, so that the feeding function is realized.
The first mounting seat 5 and the second mounting seat 9 are further provided with a plurality of sliding strips 51 for sliding the push plate, and in the embodiment, the number of the sliding strips 51 is two.
The first storage rod 8 and the second storage rod 12 are both provided with storage grooves 21 convenient to position.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.

Claims (9)

1. A detector for polycrystalline silicon wafers comprises a base and is characterized in that a feeding and discharging mechanism and a test box body are arranged on the base, a first lead screw and a second lead screw are vertically and rotatably arranged on the test box body, the first lead screw is parallel to the second lead screw, the first lead screw is connected with an output shaft of a rotating motor, the rotating motor is fixed on the test box body, a driving gear is fixed at one end of the first lead screw, the other end of the first lead screw is in threaded connection with a first threaded block, the first threaded block is connected with one end of an upper mounting frame, the upper mounting frame is provided with an upper probe row structure, a guide pillar is also vertically fixed on the test box body, a third slide block and a second slide block are movably arranged on the guide pillar, and the; a driven gear is fixed at one end of the second screw rod, the driving gear is meshed with the driven gear, a second threaded block is connected to the other end of the second screw rod in a threaded mode and is connected with one end of a lower mounting frame, a lower probe row structure is arranged on the lower mounting frame, and the other end of the lower mounting frame is connected with a second sliding block; the feeding and discharging mechanism comprises a feeding structure I, a feeding structure II and two conveying structures, the feeding structure I and the feeding structure II are respectively positioned on two sides of the box body of the test box, two feeding conveyor belts and two discharging conveyor belts used for conveying objects to be detected are arranged on the base, and a purging structure used for purging polycrystalline silicon wafers on the feeding conveyor belts is further arranged on the base.
2. The detecting machine for the polycrystalline silicon wafers as claimed in claim 1, wherein the purging structure comprises a purging box body, a cleaning brush, a fan, an air supply pipe and a spray head, the purging box body is fixed on the base, the feeding conveyor belt penetrates through the purging box body, a second air cylinder is fixed on the purging box body, a piston rod of the second air cylinder is vertically arranged, the cleaning brush is fixed on the piston rod of the second air cylinder, bristles are further arranged on the cleaning brush, the fan is fixed outside the purging box body, the air supply pipe penetrates through the wall of the purging box body and is communicated with the fan, and the spray head is fixed on the air supply pipe.
3. The detecting machine for detecting the polycrystalline silicon wafer according to claim 1, wherein the upper probe row structure comprises two upper fixing strips and a plurality of upper detecting probe rows, the upper fixing strips are fixed on the upper mounting frame, the upper fixing strips are detachably connected with a plurality of upper mounting strips, a plurality of upper mounting blocks are fixed on the upper mounting strips, the upper detecting probe rows are fixed on the upper mounting blocks through bolts, and a plurality of upper probes are fixed on the upper detecting probe rows.
4. The detecting machine for detecting the polycrystalline silicon wafer according to claim 1, wherein the lower probe bank structure comprises two lower fixing strips and a plurality of lower detecting probe banks, the lower fixing strips are fixed on the lower mounting frame, the lower fixing strips are detachably connected with a plurality of lower mounting strips, a plurality of lower mounting blocks are fixed on the lower mounting strips, the lower detecting probe banks are fixed on the lower mounting blocks through bolts, and a plurality of lower probes are fixed on the lower detecting probe banks.
5. The detecting machine for the polycrystalline silicon wafer according to claim 1, wherein the conveying structure comprises a third screw rod, a stepping motor, a sliding rod, a first slide block, a sucking disc and a plurality of supports, the supports are fixed on the base, the stepping motor is fixed on the supports, an output shaft of the stepping motor is horizontally arranged, one end of the third screw rod is connected with an output shaft of the stepping motor, the other end of the third screw rod is rotatably arranged on the supports, the sliding rod is fixed on the supports and is parallel to the screw rod, the sliding block is sleeved on the sliding rod, the first slide block is matched with the screw rod through a nut, the first slide block is further fixed with a first air cylinder, a piston rod of the first air cylinder is vertically arranged, the sucking disc is fixed on a piston rod of the first air cylinder, the sucking disc is further provided with a sucking nozzle in a sliding manner.
6. The detecting machine for detecting the polycrystalline silicon wafers as claimed in claim 1, wherein the first feeding structure comprises a first mounting seat, a first push rod motor, a first push plate and a plurality of first object placing rods, the first mounting seat is fixed on the base, the first push rod motor is fixed on the first mounting seat, a push rod of the first push rod motor is horizontally arranged, the first push plate is fixed on a push rod of the first push rod motor, and the first object placing rods are fixed on the first push plate.
7. The detecting machine for detecting the polycrystalline silicon wafer according to claim 1, wherein the second feeding mechanism comprises a second mounting seat, a second push rod motor, a second push plate and a plurality of second object placing rods, the second mounting seat is fixed on the base, the second push rod motor is fixed on the second mounting seat, a push rod of the second push rod motor is horizontally arranged, the second push plate is fixed on a push rod of the second push rod motor, and the second object placing rods are fixed on the second push plate.
8. The detecting machine for the polycrystalline silicon wafers according to claim 6 or 7, wherein a plurality of sliding strips used for sliding the push plate are further arranged on the first mounting seat and the second mounting seat.
9. The detecting machine for the polycrystalline silicon wafers as set forth in claim 6 or 7, wherein the first holding rod and the second holding rod are both provided with holding grooves for facilitating positioning.
CN201911407573.5A 2019-12-27 2019-12-27 Detection machine for polycrystalline silicon wafer Pending CN111112110A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911407573.5A CN111112110A (en) 2019-12-27 2019-12-27 Detection machine for polycrystalline silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911407573.5A CN111112110A (en) 2019-12-27 2019-12-27 Detection machine for polycrystalline silicon wafer

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Publication Number Publication Date
CN111112110A true CN111112110A (en) 2020-05-08

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CN202583253U (en) * 2012-04-19 2012-12-05 百力达太阳能股份有限公司 Test probe clamp for solar-cell electrical properties
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CN104925522A (en) * 2015-06-17 2015-09-23 深圳市宝德自动化精密设备有限公司 Automatic material collection and distribution machine
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