CN111081865B - Method for preparing multi-layer piezoelectric actuator of micro-motor system - Google Patents
Method for preparing multi-layer piezoelectric actuator of micro-motor system Download PDFInfo
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- 238000000034 method Methods 0.000 title description 13
- 239000000919 ceramic Substances 0.000 claims abstract description 47
- 239000000843 powder Substances 0.000 claims abstract description 29
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000002156 mixing Methods 0.000 claims abstract description 20
- 238000000498 ball milling Methods 0.000 claims abstract description 16
- 238000005245 sintering Methods 0.000 claims abstract description 16
- 239000002002 slurry Substances 0.000 claims abstract description 16
- 230000010287 polarization Effects 0.000 claims abstract description 13
- 238000001035 drying Methods 0.000 claims abstract description 12
- 238000007873 sieving Methods 0.000 claims abstract description 12
- 229910052573 porcelain Inorganic materials 0.000 claims abstract description 11
- 239000011267 electrode slurry Substances 0.000 claims abstract description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000012528 membrane Substances 0.000 claims abstract description 8
- 238000005266 casting Methods 0.000 claims abstract description 7
- 238000001816 cooling Methods 0.000 claims abstract description 7
- 238000005520 cutting process Methods 0.000 claims abstract description 7
- 239000004014 plasticizer Substances 0.000 claims abstract description 7
- 239000000853 adhesive Substances 0.000 claims abstract description 5
- 230000001070 adhesive effect Effects 0.000 claims abstract description 5
- 238000002360 preparation method Methods 0.000 claims abstract description 5
- 239000002994 raw material Substances 0.000 claims abstract description 5
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims abstract description 4
- 229910010413 TiO 2 Inorganic materials 0.000 claims abstract description 4
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 239000003292 glue Substances 0.000 claims abstract description 4
- 238000003825 pressing Methods 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 10
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical group CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 claims description 6
- 238000000227 grinding Methods 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- CBECDWUDYQOTSW-UHFFFAOYSA-N 2-ethylbut-3-enal Chemical compound CCC(C=C)C=O CBECDWUDYQOTSW-UHFFFAOYSA-N 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- JTHNLKXLWOXOQK-UHFFFAOYSA-N n-propyl vinyl ketone Natural products CCCC(=O)C=C JTHNLKXLWOXOQK-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 12
- 230000007547 defect Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
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- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/057—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by stacking bulk piezoelectric or electrostrictive bodies and electrodes
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Abstract
The invention discloses a preparation method of a multilayer piezoelectric actuator of a micro-motor system, belonging to a preparation method of piezoelectric ceramics. The preparation method comprises the following steps: raw material powder Pb 3 O 4 、ZrO 2 、TiO 2 、Sb 2 O 3 、Nb 2 O 5 、NiO、Bi 2 O 3 、MgO、Li 2 CO 3 Mixing, mixing with absolute ethyl alcohol, ball milling for 4 hours, drying and sieving to obtain raw porcelain powder; sintering the porcelain powder for 2 hours, cooling and sieving to obtain the porcelain powder; mixing the porcelain powder with absolute ethyl alcohol, ball milling for 4 hours, drying and sieving; mixing the porcelain powder with butanone solution, ball milling for 12 hours, mixing with adhesive and plasticizer, and continuing ball milling for 12 hours to obtain slurry; casting the film forming sheet at a speed of 8-15 mm/s; printing an inner electrode slurry on the surface of the membrane to form an inner electrode; cutting the membrane into piezoelectric ceramic green sheets, stacking, pressing and forming, and forming a multilayer piezoelectric ceramic green body; then discharging glue and sintering, and forming a multilayer piezoelectric ceramic; printing external electrode slurry on two end surfaces of the multilayer piezoelectric ceramic, and drying; and carrying out polarization treatment on the multilayer piezoelectric ceramics.
Description
Technical Field
The present invention relates to a method for manufacturing a multilayer piezoelectric actuator, and more particularly, to a method for manufacturing a multilayer piezoelectric actuator for a micro-motor system.
Background
The micro-motor system is a kind of motor with small volume and capacity, output power below hundreds of watts and special requirements for application, performance and environmental conditions. In control system or transmission mechanical load, the method is commonly used for realizing electromechanical signal or energy detection, analysis operation, amplification, execution or conversion and the like, and is widely applied to the related fields of aerospace, medical equipment, national defense and military industry, automatic control and the like.
Piezoelectric ceramic actuators, which are a type of force-to-electrical conversion device, have gradually replaced conventional large-sized electromagnetic devices due to their low cost, small size, low power consumption, high reliability, and the like, and have become a core component of microelectromechanical systems (MEMS). The actuators can be classified into single-layer chip actuators, stacked chip actuators, co-fired stack actuators. Compared with a single-layer chip actuator, the laminated chip actuator can generate larger force under lower working voltage due to larger cross-sectional area, and a plurality of single-layer displacement amounts are overlapped to generate larger stroke.
Currently, laminated chip actuators have the disadvantages of small stroke (1.8 μm/100V), high sintering temperature (1270-1300 ℃), low pressure resistance (200V), and the like.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide a preparation method of a multi-layer piezoelectric actuator of a micro-motor system, and the piezoelectric actuator prepared by the method has the characteristics of large stroke, low sintering temperature and the like.
In order to achieve the above object, the technical scheme of the method of the present invention comprises the following steps:
1) Primary grinding: the following raw material powder Pb in parts by weight 3 O 4 203.91、ZrO 2 48.04、TiO 2 32.41、Sb 2 O 3 1.013、Nb 2 O 5 11.236、NiO 2.33、Bi 2 O 3 1.5、MgO 0.44、Li 2 CO 3 Mixing 0.621, mixing with absolute ethyl alcohol and zirconium balls according to the weight ratio of 2:1:1, ball milling for 4 hours, drying, sieving with a 40-mesh sieve to obtain raw porcelain powder;
2) Presintering: sintering the raw ceramic powder for 2 hours at 1000 ℃, cooling and sieving the ceramic powder with a 40-mesh sieve to obtain ceramic powder;
3) Secondary grinding material: mixing the porcelain powder with absolute ethyl alcohol and zirconium balls according to the weight ratio of 2:1:1, ball milling for 4 hours, and then drying and sieving with a 40-mesh sieve;
4) Preparing slurry: mixing the ball-milled ceramic powder with butanone solution according to the weight ratio of 3:1, ball-milling for 12 hours, mixing the ball-milled ceramic powder with an adhesive and a plasticizer according to the weight ratio of 300:20:1, and continuing ball milling for 12 hours to obtain slurry; the butanone solution is prepared from butanone and deionized water according to a weight ratio of 3:7, wherein the binder is basal vinyl butyral, and the plasticizer is dibutyl phthalate;
5) And (3) casting and film making: removing bubbles in the slurry, adjusting the viscosity of the slurry to 60CPS, and casting into a 100 mu m thick film at the speed of 8-15 mm/s;
6) Printing an inner electrode: dividing a plurality of rectangular areas on the surface of the membrane, printing inner electrode slurry in each rectangular area to form inner electrodes, and ensuring the dislocation distribution of the inner electrodes in adjacent rectangular areas;
7) Cutting and laminating: cutting the membrane into piezoelectric ceramic green sheets according to the rectangular area, stacking a plurality of piezoelectric ceramic green sheets to be 3 mm thick in an interdigital mode, and then pressing and forming to obtain a multilayer piezoelectric ceramic green body with the pressure of 50Mpa;
8) Sintering: placing the piezoelectric ceramic green body in a sintering furnace, firstly heating to 120 ℃, preserving heat for 5 hours, then heating to 600 ℃, discharging glue for 2 hours, finally heating to 960 ℃, preserving heat for 4 hours, and cooling to room temperature along with the furnace to obtain a multilayer piezoelectric ceramic;
9) Printing an external electrode: printing external electrode slurry on two end surfaces of the multilayer piezoelectric ceramic, and drying;
10 Polarization): and (3) placing the dried multilayer piezoelectric ceramic in a polarization device at 60 ℃ for polarization treatment, wherein the polarization voltage is 3kV.
Compared with the prior art, the invention adopts the technical proposal that Bi is added in the raw material formula 2 O 3 Therefore, after sintering, a glass phase with uniform and compact crystal grains can be formed. The method of the invention can reduce sintering temperature (960 ℃), and the interface between the piezoelectric layer and the electrode layer is tightly connected without defects such as holes, cracks and the like, so that the actuator can not be influenced by the failure of the inner electrode when working under a high electric field. Experiments prove that the displacement of the multi-layer piezoelectric actuator of the micro-motor system prepared by the method can reach 2.4 mu m/100V, and the micro-motor system can still operate for about 3 hours under the working voltage of 500V.
Drawings
FIG. 1 is a process diagram of printing an internal electrode on the surface of a cast film;
FIG. 2 is a schematic perspective view of a multi-layer piezoelectric actuator of a micro-electromechanical system;
FIG. 3 is an SEM image of a cross section of a multi-layer piezoelectric ceramic of a microelectromechanical system made by the method of the invention;
fig. 4 is an SEM image of the interface between the internal electrode and the dielectric layer of the mems multilayer piezoelectric ceramic prepared by the method of the present invention.
In the figure: the piezoelectric ceramic comprises a diaphragm 1, a piezoelectric ceramic green sheet 2, an inner electrode 3, a multilayer piezoelectric ceramic 4 and an outer electrode 5.
Detailed Description
The process according to the invention is further described below with reference to the accompanying drawings and to specific examples:
1) Primary grinding: the following raw material powder Pb in parts by weight 3 O 4 203.91、ZrO 2 48.04、TiO 2 32.41、Sb 2 O 3 1.013、Nb 2 O 5 11.236、NiO 2.33、Bi 2 O 3 1.5、MgO 0.44、Li 2 CO 3 Mixing 0.621, mixing with absolute ethyl alcohol and zirconium balls according to the weight ratio of 2:1:1, ball milling for 4 hours, drying, sieving with a 40-mesh sieve to obtain raw porcelain powder; the rotating speed of the ball mill is 300rd/min;
2) Presintering: placing the raw ceramic powder into a sintering furnace, heating to 1000 ℃ at a speed of 3 ℃/min, sintering for 2 hours, cooling, and sieving with a 40-mesh sieve to obtain ceramic powder;
3) Secondary grinding material: mixing the porcelain powder with absolute ethyl alcohol and zirconium balls according to the weight ratio of 2:1:1, ball milling for 4 hours, and then drying and sieving with a 40-mesh sieve;
4) Preparing slurry: mixing the ball-milled ceramic powder with butanone solution according to the weight ratio of 3:1, ball-milling for 12 hours, mixing the ball-milled ceramic powder with adhesive and plasticizer according to the weight ratio of 300:20:1, and continuing ball-milling for 12 hours to obtain slurry; the butanone solution is prepared from butanone and deionized water according to a weight ratio of 3:7, wherein the binder is basal vinyl butyral, and the plasticizer is dibutyl phthalate;
5) And (3) casting and film making: removing bubbles in the slurry, adjusting the viscosity of the slurry to 60CPS, and casting the slurry into a 100-mu m thick film 1 (see figure 1) at a speed of 8-15 mm/s; the height of the knife edge is controlled to be 100-200 mu m;
6) Printing an inner electrode: dividing a plurality of rectangular areas on the surface of the membrane 1 (see figure 1), printing inner electrode slurry in each rectangular area to form inner electrodes 3 (see figure 1), and ensuring the dislocation distribution of the inner electrodes 3 in adjacent rectangular areas 2; the internal electrode slurry is Ag-Pd slurry;
7) Cutting and laminating: cutting the membrane into piezoelectric ceramic green sheets 2 according to the rectangular area (see figure 1), stacking a plurality of piezoelectric ceramic green sheets 2 to be 3 mm thick in an interdigital or finger joint mode, and then pressing and forming (see figure 2), wherein the pressure of the multilayer piezoelectric ceramic green body is 50Mpa;
8) Sintering: placing the piezoelectric ceramic green body in a sintering furnace, firstly heating to 120 ℃, preserving heat for 5 hours, then heating to 600 ℃, discharging glue for 2 hours, finally heating to 960 ℃, preserving heat for 4 hours, and cooling to room temperature along with the furnace to obtain a multilayer piezoelectric ceramic 4 (see figure 2);
9) Printing an external electrode: printing external electrode slurry on two end surfaces of the multilayer piezoelectric ceramic to form external electrodes 5 (see fig. 2), and drying for 2 hours in the environment of 70 ℃; the external electrode slurry is Ag slurry;
10 Polarization): and (3) placing the dried multilayer piezoelectric ceramic in a polarization device at 60 ℃ for polarization treatment, wherein the polarization voltage is 3kV.
As can be seen from fig. 3: the thickness of each piezoelectric layer is uniform, no cracking phenomenon occurs, and the thickness of each inner electrode layer is relatively uniform, so that no penetration phenomenon occurs.
As can be seen from fig. 4: the grain structure is compact, no air holes are generated, and the actuator is well sintered at 960 ℃; the interface between the piezoelectric layer and the electrode layer is tightly connected, and the defects of holes, cracks and the like are avoided, so that the actuator cannot be influenced by the failure of the inner electrode when working under a high electric field.
Claims (1)
1. The preparation method of the multilayer piezoelectric actuator of the micro-motor system is characterized by comprising the following steps of:
1) Primary grinding: the following raw material powder Pb in parts by weight 3 O 4 203.91、ZrO 2 48.04、TiO 2 32.41、Sb 2 O 3 1.013、Nb 2 O 5 11.236、NiO 2.33、Bi 2 O 3 1.5、MgO 0.44、Li 2 CO 3 Mixing 0.621, mixing with absolute ethyl alcohol and zirconium balls according to the weight ratio of 2:1:1, ball milling for 4 hours, drying, sieving with a 40-mesh sieve to obtain raw porcelain powder;
2) Presintering: sintering the raw ceramic powder for 2 hours at 1000 ℃, cooling and sieving the ceramic powder with a 40-mesh sieve to obtain ceramic powder;
3) Secondary grinding material: mixing the porcelain powder with absolute ethyl alcohol and zirconium balls according to the weight ratio of 2:1:1, ball milling for 4 hours, and then drying and sieving with a 40-mesh sieve;
4) Preparing slurry: mixing the ball-milled ceramic powder with butanone solution according to the weight ratio of 3:1, ball-milling for 12 hours, mixing the ball-milled ceramic powder with an adhesive and a plasticizer according to the weight ratio of 300:20:1, and continuing ball milling for 12 hours to obtain slurry; the butanone solution is prepared from butanone and deionized water according to the weight ratio of 3:7, wherein the adhesive is basal vinyl butyral, and the plasticizer is dibutyl phthalate;
5) And (3) casting and film making: removing bubbles in the slurry, adjusting the viscosity of the slurry to 60CPS, and casting into a 100 mu m thick film at the speed of 8-15 mm/s;
6) Printing an inner electrode: dividing a plurality of rectangular areas on the surface of the membrane, printing inner electrode slurry in each rectangular area to form inner electrodes, and ensuring the dislocation distribution of the inner electrodes in adjacent rectangular areas;
7) Cutting and laminating: cutting the membrane into piezoelectric ceramic green sheets according to the rectangular area, stacking a plurality of piezoelectric ceramic green sheets to be 3 mm thick in an interdigital mode, and then pressing and forming to obtain a multilayer piezoelectric ceramic green body with the pressure of 50Mpa;
8) Sintering: placing the piezoelectric ceramic green body in a sintering furnace, firstly heating to 120 ℃, preserving heat for 5 hours, then heating to 600 ℃, discharging glue for 2 hours, finally heating to 960 ℃, preserving heat for 4 hours, and cooling to room temperature along with the furnace to obtain a multilayer piezoelectric ceramic;
9) Printing an external electrode: printing external electrode slurry on two end surfaces of the multilayer piezoelectric ceramic, and drying;
10 Polarization): and (3) placing the dried multilayer piezoelectric ceramic in a polarization device at 60 ℃ for polarization treatment, wherein the polarization voltage is 3kV.
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| CN111682103A (en) * | 2020-05-29 | 2020-09-18 | 深圳振华富电子有限公司 | Preparation method of piezoelectric driver stack with electrode plates |
| CN111682102A (en) * | 2020-05-29 | 2020-09-18 | 深圳振华富电子有限公司 | Preparation method of piezoelectric driver stack |
| CN113707802B (en) * | 2021-08-27 | 2022-10-21 | 成都汇通西电电子有限公司 | Matrix actuator structure and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005150548A (en) * | 2003-11-18 | 2005-06-09 | Kyocera Corp | Laminated piezoelectric element and spraying device using the same |
| CN105622097A (en) * | 2015-12-21 | 2016-06-01 | 贵州振华红云电子有限公司 | High-temperature-resistant piezoelectric ceramic and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005150548A (en) * | 2003-11-18 | 2005-06-09 | Kyocera Corp | Laminated piezoelectric element and spraying device using the same |
| CN105622097A (en) * | 2015-12-21 | 2016-06-01 | 贵州振华红云电子有限公司 | High-temperature-resistant piezoelectric ceramic and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 《Effects of Bi2O3–Li2CO3 additions on dielectric and pyroelectric properties of Mn doped Pb(Zr0.9Ti0.1)O3 thick films》;Yike Zeng, et al.;《Ceramics International》;20121022;第39卷;3709-3714 * |
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