CN111077743B - 对准信号数字化同步解调方法及装置 - Google Patents
对准信号数字化同步解调方法及装置 Download PDFInfo
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- CN111077743B CN111077743B CN201911212041.6A CN201911212041A CN111077743B CN 111077743 B CN111077743 B CN 111077743B CN 201911212041 A CN201911212041 A CN 201911212041A CN 111077743 B CN111077743 B CN 111077743B
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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Abstract
Description
序号 | 参数名 | 参数值 | 单位 |
1 | 波长 | 632.8 | nm |
2 | 对准标记长度 | 80 | um |
3 | 光栅周期 | 16 | um |
4 | 采样频率 | 500 | kHz |
5 | 调制频率 | 50 | kHz |
6 | 调制频偏1 | 1 | % |
7 | 调制频偏2 | 6 | % |
8 | 调制信号初相位 | 0.25π | 弧度 |
9 | 本振信号初相位 | 0.3π | 弧度 |
10 | 对准信号信噪比 | 40 | dB |
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CN114061451A (zh) * | 2021-11-04 | 2022-02-18 | 中国科学院微电子研究所 | 超精密位置探测光电信号数据拟合方法及其装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001284233A (ja) * | 2000-03-31 | 2001-10-12 | Nec Corp | 縮小投影露光装置及び縮小投影露光方法 |
CN101246314A (zh) * | 2008-03-25 | 2008-08-20 | 上海微电子装备有限公司 | 硅片对准信号采集与处理系统及使用该系统的处理方法 |
CN101349869A (zh) * | 2008-08-07 | 2009-01-21 | 上海微电子装备有限公司 | 一种使用信号处理的方法进行硅片对准的对准系统及方法 |
CN101912277A (zh) * | 2010-08-06 | 2010-12-15 | 深圳市蓝韵实业有限公司 | 一种基于流水线设计的实时数字正交解调的方法与装置 |
CN102236261A (zh) * | 2010-04-29 | 2011-11-09 | 上海微电子装备有限公司 | 一种基于正交化模型的离轴信号处理方法、装置及系统 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001284233A (ja) * | 2000-03-31 | 2001-10-12 | Nec Corp | 縮小投影露光装置及び縮小投影露光方法 |
CN101246314A (zh) * | 2008-03-25 | 2008-08-20 | 上海微电子装备有限公司 | 硅片对准信号采集与处理系统及使用该系统的处理方法 |
CN101349869A (zh) * | 2008-08-07 | 2009-01-21 | 上海微电子装备有限公司 | 一种使用信号处理的方法进行硅片对准的对准系统及方法 |
CN102236261A (zh) * | 2010-04-29 | 2011-11-09 | 上海微电子装备有限公司 | 一种基于正交化模型的离轴信号处理方法、装置及系统 |
CN101912277A (zh) * | 2010-08-06 | 2010-12-15 | 深圳市蓝韵实业有限公司 | 一种基于流水线设计的实时数字正交解调的方法与装置 |
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