CN111074207A - 一种宏观超滑的硝酸银复合碳基薄膜的制备方法 - Google Patents

一种宏观超滑的硝酸银复合碳基薄膜的制备方法 Download PDF

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CN111074207A
CN111074207A CN201911352116.0A CN201911352116A CN111074207A CN 111074207 A CN111074207 A CN 111074207A CN 201911352116 A CN201911352116 A CN 201911352116A CN 111074207 A CN111074207 A CN 111074207A
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张俊彦
贾倩
张斌
孙磊
高凯雄
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Lanzhou Institute of Chemical Physics LICP of CAS
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Abstract

本发明涉及一种宏观超滑的硝酸银复合碳基薄膜的制备方法,该方法是指:首先制备厚度为1微米且含氢量≤30%的类金刚石碳薄膜;然后对该类金刚石碳薄膜进行超声清洗;最后将质量浓度为0.5~1%的硝酸银溶液均匀地滴加或涂抹或喷涂或浸渍在所述类金刚石碳薄膜上,于25℃自然风干72h,即得厚度为50~100nm的负载硝酸银的碳基薄膜。本发明方法简单,而且效率高,所得的硝酸银复合碳基薄膜能够在稳定的大气环境下实现宏观超滑,为工程应用提供基础数据和思路。

Description

一种宏观超滑的硝酸银复合碳基薄膜的制备方法
技术领域
本发明涉及超滑和摩擦学领域,尤其涉及一种宏观超滑的硝酸银复合碳基薄膜的制备方法。
背景技术
润滑与摩擦有不可分割的关系,摩擦在生活中贯古穿今,古有铁杵磨针,摩擦取火,今有各类装备的运行都与摩擦有关。摩擦不仅关乎能源还制约高端设备的更新迭代与性能寿命的提升。摩擦消耗30%的一次性能源,磨损导致60%的机械部件失效,50%以上的机械装备恶性事故源于润滑失效或过度磨损。欧美发达国家每年因摩擦、磨损造成的经济损失约占其国民生产总值的2%~7%。作为制造大国,我国在生产与制造过程中,单位国内生产总值能耗约为日本的8倍,欧盟的4倍,世界平均水平的2.2倍
摩擦影响我国高端设备的更新迭代与性能寿命的提升,对于航空航天系统、深海站、加速器和核电等战略装备来说,关键运动系统都要求具备高灵敏、快速响应和长寿命高可靠服役,因摩擦磨损导致的设备运动系统失效、发生不可逆故障、甚至是提前终止服役严重影响了国家战略需求和重大装备安全稳定运行。机械部件的寿命提升与高可靠性的达成,都要求要克服摩擦,因此追求“零摩擦”的超滑领域成为如今的研究热点。
类金刚石薄膜(DLC)是目前研究最为广泛的宏观超滑的材料之一,在该种薄膜的基础之上,进一步修饰能够更好地得到实现超滑的材料。而微观尺度超滑难以实现工程应用,宏观材料存在局限性,对环境依赖大。
发明内容
本发明所要解决的技术问题是提供一种简单、高效的宏观超滑的硝酸银复合碳基薄膜的制备方法。
为解决上述问题,本发明所述的一种宏观超滑的硝酸银复合碳基薄膜的制备方法,其特征在于:首先制备厚度为1微米且含氢量≤30%的类金刚石碳薄膜;然后对该类金刚石碳薄膜进行超声清洗;最后将质量浓度为0.5~1%的硝酸银溶液均匀地滴加或涂抹或喷涂或浸渍在所述类金刚石碳薄膜上,于25℃自然风干72h,即得厚度为50~100nm的负载硝酸银的碳基薄膜。
所述含氢量≤30%的类金刚石碳薄膜采用电弧离子镀或者化学气相沉积方法制得。
所述超声清洗是指采用酒精超声清洗8~15min。
本发明与现有技术相比具有以下优点:
1、本发明通过等离子化学气相沉积或者磁控溅射方法制得含氢量≤30%的类金刚石碳薄膜,再通过均匀滴加或涂抹或喷涂或浸渍硝酸银溶液得到金属盐复合碳膜,不但方法简单,而且效率高。
2、本发明所得的硝酸银复合碳基薄膜,由于在摩擦过程中硝酸银与对偶球接触界面存在弱解离界面,而该界面的存在能够促使进一步在碳基表面复合生长薄膜,在界面形成非公度接触,从而为实现超滑提供基础条件,最终实现宏观上的超滑。
3、本发明所得的硝酸银复合碳基薄膜能够在稳定的大气环境下实现宏观超滑,为工程应用提供基础数据和思路。
将本发明所得的硝酸银复合碳基薄膜固定在钢片上,选择用酒精超声清洗30min后的直径为6mm的钢球作对偶球进行CSM摩擦测试。设定实验参数:摩擦载荷为5N,频率为5Hz,振幅为5mm,空气氛围,摩擦时间为30min,室温摩擦。在开始测试前,通入干燥空气,获得CSM摩擦曲线(参见图1)。在摩擦过程中,由于硝酸银在碳薄膜表面和摩擦配副表面的强粘附作用,在2个表面形成硝酸银区块晶体,另外由于硝酸银解离面的弱相互作用,本发明所得的硝酸银复合碳基薄膜可以达到稳定超滑,摩擦系数为0.002左右。
综上所述,在摩擦过程中,磨合期的摩擦系数较大,在摩擦界面又弱解离界面,能够进一步在碳基表面复合生长薄膜,促使该体系实现超滑。
附图说明
下面结合附图对本发明的具体实施方式作进一步详细的说明。
图1为本发明所制备的金属复合碳基薄膜的摩擦系数曲线。
具体实施方式
实施例1 一种宏观超滑的硝酸银复合碳基薄膜的制备方法:首先制备厚度为1微米且含氢量为0%的类金刚石碳薄膜;然后采用酒精对该类金刚石碳薄膜进行超声清洗8min;最后将质量浓度为1%的硝酸银溶液均匀地滴加或涂抹或喷涂或浸渍在类金刚石碳薄膜上,使其厚度至100nm,于25℃自然风干72h,即得厚度为100nm的负载硝酸银的碳基薄膜。
其中:含氢量为0%的类金刚石碳薄膜采用电弧离子镀方法制得。具体过程如下:
选择Ti靶,通入氩气,气压为1Pa,电弧电流为120A,偏压为300V,沉积15分钟。
关闭钛靶,打开石墨电弧靶,氩气保持不变,电弧电流为120A,偏压为200V,沉积75分钟,即得厚度为1微米且含氢量为0%的类金刚石碳薄膜。
实施例2 一种宏观超滑的硝酸银复合碳基薄膜的制备方法:首先制备厚度为1微米且含氢量为30%的类金刚石碳薄膜;然后采用酒精对该类金刚石碳薄膜进行超声清洗15min;最后将质量浓度为0.5%的硝酸银溶液均匀地滴加或涂抹或喷涂或浸渍在类金刚石碳薄膜上,使其厚度至50nm,于25℃自然风干72h,即得厚度为50nm的负载硝酸银的碳基薄膜。
其中:含氢量为30%的类金刚石碳薄膜采用等离子化学气相沉积方法制得。具体过程如下:
抽至真空度为0.001帕以下,开始镀膜。
通入氩气至20帕,偏压1200V,轰击30分钟,除去基底表面的污染物。
调整氩气至10帕,偏压800V,通入5Pa 的TiCl4气体,沉积时间30分钟,获得钛结合层。
保持上述条件不变,通入5Pa的甲烷,偏压800V,沉积时间50分钟,获得碳化钛承载层。
关闭TiCl4气体,调整甲烷至10帕,通入2倍于甲烷的氢气,偏压600V,沉积时间90分钟,即得厚度为1微米且含氢量为30%的类金刚石碳薄膜。
实施例3 一种宏观超滑的硝酸银复合碳基薄膜的制备方法:首先制备厚度为1微米且含氢量为20%的类金刚石碳薄膜;然后采用酒精对该类金刚石碳薄膜进行超声清洗10min;最后将质量浓度为0.7%的硝酸银溶液均匀地滴加或涂抹或喷涂或浸渍在类金刚石碳薄膜上,使其厚度至70nm,于25℃自然风干72h,即得厚度为70nm的负载硝酸银的碳基薄膜。
其中:含氢量为20%的类金刚石碳薄膜采用等离子化学气相沉积方法制得。具体过程如下:
采用等离子化学气相沉积方法制得。具体过程如下:
抽至真空度为0.001帕以下,开始镀膜。
通入氩气至20帕,偏压1200V,轰击30分钟,除去基底表面的污染物。
调整氩气至10帕,通入5Pa 的硅烷混合气(硅烷/氩气,10%),偏压800V,沉积时间30分钟,获得硅结合层。
保持上述条件不变,通入5Pa的甲烷,偏压800V,沉积时间50分钟,获得碳化硅承载层。
关闭硅烷混合气气体,调整甲烷至10帕,通入1倍于甲烷的氢气,偏压600V,沉积时间90分钟,即得厚度为1微米且含氢量为20%的类金刚石碳薄膜。
上述实施例1~3中的硝酸银溶液中的溶剂为水,溶质为干燥的硝酸银。硝酸银也可以采用与其具有相同性质的盐代替。

Claims (3)

1.一种宏观超滑的硝酸银复合碳基薄膜的制备方法,其特征在于:首先制备厚度为1微米且含氢量≤30%的类金刚石碳薄膜;然后对该类金刚石碳薄膜进行超声清洗;最后将质量浓度为0.5~1%的硝酸银溶液均匀地滴加或涂抹或喷涂或浸渍在所述类金刚石碳薄膜上,于25℃自然风干72h,即得厚度为50~100nm的负载硝酸银的碳基薄膜。
2.如权利要求1所述的一种宏观超滑的硝酸银复合碳基薄膜的制备方法,其特征在于:所述含氢量≤30%的类金刚石碳薄膜采用电弧离子镀或者化学气相沉积方法制得。
3.如权利要求1所述的一种宏观超滑的硝酸银复合碳基薄膜的制备方法,其特征在于:所述超声清洗是指采用酒精超声清洗8~15min。
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111876754A (zh) * 2020-08-04 2020-11-03 中国科学院兰州化学物理研究所 通过纳米金属镀膜钢球与含氢碳薄膜配副实现宏观超滑的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2451060A (en) * 2007-07-11 2009-01-21 Anthony Walter Anson Dual coatings applied to medical devices
US20100154673A1 (en) * 2007-06-05 2010-06-24 Dfhs, Llc Compositions and processes for deposition of metal ions onto surfaces of conductive substrates
CN102605319A (zh) * 2011-01-22 2012-07-25 南京理工大学 一种铝合金表面改性沉积类金刚石薄膜的方法
CN104583446A (zh) * 2012-07-05 2015-04-29 伯明翰大学 长效抗菌金属表面及其制备方法
CN106011794A (zh) * 2016-05-31 2016-10-12 中国科学院兰州化学物理研究所 大气环境下超滑纳米晶-非晶碳薄膜的制备方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100154673A1 (en) * 2007-06-05 2010-06-24 Dfhs, Llc Compositions and processes for deposition of metal ions onto surfaces of conductive substrates
GB2451060A (en) * 2007-07-11 2009-01-21 Anthony Walter Anson Dual coatings applied to medical devices
CN102605319A (zh) * 2011-01-22 2012-07-25 南京理工大学 一种铝合金表面改性沉积类金刚石薄膜的方法
CN104583446A (zh) * 2012-07-05 2015-04-29 伯明翰大学 长效抗菌金属表面及其制备方法
CN106011794A (zh) * 2016-05-31 2016-10-12 中国科学院兰州化学物理研究所 大气环境下超滑纳米晶-非晶碳薄膜的制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111876754A (zh) * 2020-08-04 2020-11-03 中国科学院兰州化学物理研究所 通过纳米金属镀膜钢球与含氢碳薄膜配副实现宏观超滑的方法

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