CN111069187A - Automatic laser cleaning equipment and method for OLED organic evaporation equipment - Google Patents
Automatic laser cleaning equipment and method for OLED organic evaporation equipment Download PDFInfo
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- CN111069187A CN111069187A CN201911375755.9A CN201911375755A CN111069187A CN 111069187 A CN111069187 A CN 111069187A CN 201911375755 A CN201911375755 A CN 201911375755A CN 111069187 A CN111069187 A CN 111069187A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 26
- 238000001704 evaporation Methods 0.000 title claims abstract description 14
- 230000008020 evaporation Effects 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000002485 combustion reaction Methods 0.000 claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 238000012545 processing Methods 0.000 claims abstract description 8
- 239000000835 fiber Substances 0.000 claims description 9
- 238000010521 absorption reaction Methods 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000003344 environmental pollutant Substances 0.000 abstract description 4
- 231100000719 pollutant Toxicity 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 239000002957 persistent organic pollutant Substances 0.000 abstract description 2
- 230000008646 thermal stress Effects 0.000 abstract description 2
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012496 blank sample Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002894 chemical waste Substances 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/007—Fume suction nozzles arranged on a closed or semi-closed surface, e.g. on a circular, ring-shaped or rectangular surface adjacent the area where fumes are produced
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
- G01N21/3518—Devices using gas filter correlation techniques; Devices using gas pressure modulation techniques
Abstract
The invention discloses an automatic laser cleaning method for OLED organic evaporation equipment, which comprises a main control device, a robot transmission device, a laser generating device, a combustion object processing device, a residual component analyzing device, a workbench and a clamp device, wherein the robot device is used for carrying out laser scanning and irradiation on organic pollutants on the surface of a protective plate, so that the pollutants are heated and expanded or ablated, thermal stress or thermal vibration is generated to peel or fall off the surfaces of the pollutants and an object to be cleaned, full-automatic cleaning is realized, and meanwhile, the cleaning effect is evaluated in real time and rapidly by the residual component analyzing device.
Description
Technical Field
The invention belongs to the technical field of cleaning and regeneration of OLED display equipment, and particularly relates to automatic laser cleaning equipment and method for OLED organic evaporation equipment.
Background
As a new solid display technology based on Organic Light Emitting Diode (OLED), the technology has the advantages of the previous technology, and has the advantages of unique self-luminescence, ultra-Light and thin, fast response, wide viewing angle, etc. the OLED display technology has been widely researched and produced. The organic light emitting layer in the OLED display is usually prepared by vacuum evaporation technology, i.e. in a vacuum chamber, the evaporation material in a crucible is heated to evaporate and deposit on the target substrate. The organic matter adsorbed on the surface is gradually accumulated to form particles after the anti-sticking plate is used for a period of time in the organic evaporation process, and the particles need to be detached and cleaned regularly.
The traditional cleaning method is to remove organic matters on the anti-sticking plate by soaking with an organic solvent, but the method has the problems of incomplete cleaning and difficult treatment of chemical waste liquid. The laser cleaning adopts laser beams as cleaning media, and can form extremely high temperature and thermal shock action on the surface of the material by utilizing the high energy density and pulse characteristics of the laser, so that dirt, attached film quality and the like on the surface of the material are instantly gasified or stripped, and the aim of quick and deep cleaning is fulfilled.
Disclosure of Invention
The invention aims to provide an automatic laser cleaning device and method for an OLED organic evaporation device, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: an automatic laser cleaning method for OLED organic evaporation equipment comprises a main control device, a robot transmission device, a laser generating device, a combustion object processing device, a residual component analyzing device, a workbench and a clamp device,
the master control device comprises: robot walking program control software for setting and controlling a laser walking program and laser parameter control software loaded at the tail end of the robot along various organic evaporation equipment, triggering the laser to act, controlling the output power of the laser and analyzing the residual components, and analyzing the residual gas in the pipe of the comburent treatment device;
the robot transmission device is a six-axis robot and comprises a fence pile fixing device, a mechanical arm, a port laser connector, a port vacuum absorption cover and a port vacuum absorption pipe connector, wherein the port is connected with a laser generator and a combustion object processing device, and the mechanical arm is connected with a main control device;
the laser generating device comprises a fiber laser, a cooling device, a laser cleaning head, a gain fiber, an output fiber grating, a laser transmission optical cable and a beam combiner, wherein the laser power is 500-800W (adjustable), a base frequency 1080m laser beam is output, and the instability degree of the laser power is less than or equal to 3%; the laser frequency is more than or equal to 5 kHz; the laser pulse width is 30-100 ns; the laser diameter of the laser source is less than or equal to 5 mm;
the comburent treatment device is provided with a vacuum cover, a vacuum suction pipe and a connecting pipeline, combustion products are recycled into the collector through the vacuum pump, and meanwhile, a bypass pipeline and a particle filter are connected with the infrared gas analyzer;
the residual component analysis device is an infrared gas analyzer and is used for carrying out component detection on residual gas in the bypass pipeline;
the workbench is provided with a clamp device and mainly comprises a working bracket, a rotary motor and various anti-sticking plate clamps.
Compared with the prior art, the invention has the beneficial effects that: the robot device is used for carrying out laser scanning and irradiation on organic pollutants on the surface of the anti-sticking plate, so that the pollutants are heated and expanded or ablated, thermal stress or thermal vibration is generated to peel off or fall off the pollutants and the surface of an object to be cleaned, full-automatic cleaning is realized, and meanwhile, real-time and quick evaluation is carried out on the cleaning effect through the residual component analysis device.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
In the figure: the system comprises a workbench and a clamp 1, a workpiece 2, a laser 3, a vacuum cover 4, a suction pipeline 5, a robot 6, a branch pipeline 7, a valve and a filter 8, a cleaning product collector 9, an infrared gas analyzer 10, a laser design device 11, a robot control device 12 and a main control device 13.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the present invention provides a technical solution: an automatic laser cleaning method and device for OLED organic evaporation equipment, the device comprises a main control device 13, a robot transmission device, a laser generating device, a combustion material processing device, a residual component analyzing device, a workbench and a clamp device 1,
the master control device comprises: robot walking program control software for setting and controlling a laser 3 walking program loaded at the tail end of the robot along various organic evaporation equipment, laser 3 parameter control software for triggering the laser 3 to act, controlling the output power of the laser 3 and residual component analysis software and analyzing residual gas in a pipe of the combustion product processing device;
the robot transmission device is a six-axis robot and comprises a fence pile fixing device, a mechanical arm, a port laser connector, a port vacuum absorption cover and a port vacuum absorption pipe connector, wherein the port is connected with a laser generator and a combustion object processing device, and the mechanical arm is connected with a main control device;
the laser generating device comprises a fiber laser, a cooling device, a laser cleaning head, a gain fiber, an output fiber grating, a laser transmission optical cable and a beam combiner, wherein the laser power is 500-800W (adjustable), a base frequency 1080m laser beam is output, and the instability degree of the laser power is less than or equal to 3%; the laser frequency is more than or equal to 5 kHz; the laser pulse width is 30-100 ns; the laser diameter of the laser source is less than or equal to 5 mm;
the comburent treatment device is provided with a vacuum cover 4, a vacuum suction pipe and a connecting pipeline, combustion products are recycled into the collector through a vacuum pump, and meanwhile, a bypass pipeline 7 and a particle filter are connected with an infrared gas analyzer;
the residual component analysis device is an infrared gas analyzer 10 and is used for carrying out component detection on the residual gas in the bypass pipeline 7;
the workbench is provided with a clamp device 1, and mainly comprises a working support, a rotary motor and various anti-sticking plate clamps.
The using method comprises the following steps:
1, connecting instruments of each component according to a structural block diagram of the automatic laser cleaning device based on the OLED organic evaporation equipment shown in the figure 1, turning on a laser power supply to preheat the laser device, turning on a robot device, a combustion material treatment device, a residual component analysis device and a waste material processor vacuumizing switch, placing the components on a workbench, loading a jig, and enabling each device to be in a standby working state.
2, setting the working parameters of the laser device: the wavelength is 1080nm, the pulse repetition rate is 50kHz, and the output power is 500W; and adjusting the robot arm to the position of the workpiece to be cleaned, and adjusting the beam shaping device to enable the emergent laser to enter the beam shaping device through the optical fiber to obtain a beam with the length of 5cm and the width of about 200 mu m.
3, setting working parameters of the robot, enabling the distance between a laser emitting port in the vacuum absorption cover and the cleaning surface of the anti-sticking plate to be 8cm, starting scanning by a mechanical arm from top to bottom, setting the scanning speed to be 5mm/s, rotating the workbench by 10 degrees after 3 times of scanning and cleaning, and repeating the scanning process.
And 4, recovering the combustion products into the collector by using a vacuum pump in the laser cleaning process to collect and treat waste materials, simultaneously opening a branch valve, collecting the combustion gas to an infrared gas analyzer for analysis, and judging that the organic matters on the surface are thoroughly removed, wherein the carbon element content data is consistent with that of the blank sample.
5. The whole device is closed, the ultraviolet lamp detects the components again, and bright spots are not found.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (1)
1. An automatic laser cleaning device and method for OLED organic evaporation equipment are characterized in that: the equipment comprises a main control device (13), a robot control device (12), a laser generating device (11), a combustion product processing device, a residual component analyzing device, a workbench and a clamp (1),
the master control device (13) comprises: robot walking program control software for setting and controlling a laser walking program and laser parameter control software loaded at the tail end of the robot along various organic evaporation equipment, triggering the laser to act, controlling the output power of the laser and analyzing the residual components, and analyzing the residual gas in the pipe of the comburent treatment device;
the robot control device (12) is a six-axis robot and comprises a fence pile fixing device, a mechanical arm, a port laser (3), a port vacuum absorption cover and a port vacuum absorption pipe connector, wherein the port is connected with the laser generator and the combustion object processing device, and the mechanical arm is connected with the main control device;
the laser generating device comprises a fiber laser, a cooling device, a laser cleaning head, a gain fiber, an output fiber grating, a laser transmission optical cable and a beam combiner, wherein the laser power is 500-800W (adjustable), a base frequency 1080m laser beam is output, and the instability degree of the laser power is less than or equal to 3%; the laser frequency is more than or equal to 5 kHz; the laser pulse width is 30-100 ns; the laser diameter of the laser source is less than or equal to 5 mm;
the comburent treatment device is provided with a vacuum cover (4), a vacuum suction pipe and a connecting pipeline, wherein a combustion product is recovered into a collector through a vacuum pump, and a bypass pipeline and a particle filter are connected with an infrared gas analyzer;
the residual component analysis device is an infrared gas analyzer and is used for carrying out component detection on residual gas in the bypass pipeline;
the workbench is provided with a clamp device and mainly comprises a working bracket, a rotary motor and various anti-sticking plate clamps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911375755.9A CN111069187A (en) | 2019-12-27 | 2019-12-27 | Automatic laser cleaning equipment and method for OLED organic evaporation equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911375755.9A CN111069187A (en) | 2019-12-27 | 2019-12-27 | Automatic laser cleaning equipment and method for OLED organic evaporation equipment |
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| Publication Number | Publication Date |
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| CN111069187A true CN111069187A (en) | 2020-04-28 |
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| CN201911375755.9A Pending CN111069187A (en) | 2019-12-27 | 2019-12-27 | Automatic laser cleaning equipment and method for OLED organic evaporation equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111790694A (en) * | 2020-07-10 | 2020-10-20 | 安徽富乐德科技发展股份有限公司 | Method for cleaning submicron pollution particles by laser |
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-
2019
- 2019-12-27 CN CN201911375755.9A patent/CN111069187A/en active Pending
Patent Citations (8)
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|---|---|---|---|---|
| JPH0599846A (en) * | 1991-04-18 | 1993-04-23 | Osaka Oxygen Ind Ltd | Washing method of reflection mirror of optical dew point instrument and optical dew-point instrument with washing device |
| EP0535680A1 (en) * | 1991-10-01 | 1993-04-07 | Hughes Aircraft Company | System and method for precision cleaning by jet spray |
| CN101143364A (en) * | 2007-10-08 | 2008-03-19 | 南开大学 | Ultrasonic detection narrow pulsewidth laser sludge remover and its sludge removing method |
| CN202803721U (en) * | 2012-07-17 | 2013-03-20 | 常政 | Monitoring and alarming collection unit for waste gas |
| CN105127150A (en) * | 2015-08-14 | 2015-12-09 | 四川大学 | Laser cleaning system based on robot control and cleaning method thereof |
| CN206854263U (en) * | 2017-05-31 | 2018-01-09 | 中国科学院上海应用物理研究所 | A kind of synchrotron radiation optical element carbon distribution cleaning device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111790694A (en) * | 2020-07-10 | 2020-10-20 | 安徽富乐德科技发展股份有限公司 | Method for cleaning submicron pollution particles by laser |
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