CN111065884A - 借助于共焦传感器进行光学的表面测量的方法和设备 - Google Patents

借助于共焦传感器进行光学的表面测量的方法和设备 Download PDF

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Publication number
CN111065884A
CN111065884A CN201880057005.4A CN201880057005A CN111065884A CN 111065884 A CN111065884 A CN 111065884A CN 201880057005 A CN201880057005 A CN 201880057005A CN 111065884 A CN111065884 A CN 111065884A
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CN
China
Prior art keywords
signal
optical system
light
sensor
confocal sensor
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Pending
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CN201880057005.4A
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English (en)
Chinese (zh)
Inventor
J·弗兰克
G·雅各布
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NanoFocus AG
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NanoFocus AG
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Publication of CN111065884A publication Critical patent/CN111065884A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
CN201880057005.4A 2017-07-27 2018-07-27 借助于共焦传感器进行光学的表面测量的方法和设备 Pending CN111065884A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102017116993 2017-07-27
DE102017116993.8 2017-07-27
DE102017130211.5A DE102017130211A1 (de) 2017-07-27 2017-12-15 Verfahren und Vorrichtung zur optischen Oberflächenmessung mit Hilfe eines konfokalen Sensors
DE102017130211.5 2017-12-15
PCT/EP2018/070439 WO2019020800A1 (de) 2017-07-27 2018-07-27 Verfahren und vorrichtung zur optischen oberflächenmessung mit hilfe eines konfokalen sensors

Publications (1)

Publication Number Publication Date
CN111065884A true CN111065884A (zh) 2020-04-24

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CN201880057005.4A Pending CN111065884A (zh) 2017-07-27 2018-07-27 借助于共焦传感器进行光学的表面测量的方法和设备

Country Status (4)

Country Link
EP (1) EP3658850A1 (de)
CN (1) CN111065884A (de)
DE (1) DE102017130211A1 (de)
WO (1) WO2019020800A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112797937A (zh) * 2021-03-31 2021-05-14 苏州天准科技股份有限公司 一种非接触式测量设备
CN113108696A (zh) * 2021-04-06 2021-07-13 合肥埃科光电科技有限公司 一种光源波长扫描光谱共焦传感器

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020221859A1 (de) 2019-05-02 2020-11-05 Inproq Optical Measurement Gmbh Oberflächenprüfverfahren und -einrichtung
WO2020221818A1 (de) 2019-05-02 2020-11-05 Inproq Optical Measurement Gmbh Zahnradprüfverfahren und -einrichtung
CN110715617A (zh) * 2019-11-25 2020-01-21 宁波五维检测科技有限公司 微观3d形貌多通道测量装置及方法
DE102021117116B4 (de) * 2021-07-02 2023-10-26 Stiftung für Lasertechnologien in der Medizin und Meßtechnik an der Universität Ulm ILM, Körperschaft des öffentlichen Rechts Messvorrichtung, Verfahren und medizintechnisches Messgerät zur optischen Vermessung eines Objekts

Citations (5)

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CN1269517A (zh) * 2000-04-26 2000-10-11 西安交通大学 光纤面板共焦显微镜测量三维面形的方法和装置
CN102589851A (zh) * 2012-01-16 2012-07-18 北京理工大学 反射式共焦透镜焦距测量方法
CN104236463A (zh) * 2013-06-13 2014-12-24 株式会社三丰 机器视觉检查系统和进行高速对焦高度测量操作的方法
CN104407436A (zh) * 2014-09-05 2015-03-11 北京大学 一种基于轴向超高速扫描的三轴数字扫描光片显微镜
CN106794052A (zh) * 2014-07-03 2017-05-31 阿莱恩技术有限公司 用于光学测量表面形貌的装置和方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016100261A1 (de) 2016-01-08 2017-07-13 Nanofocus Ag Verfahren zur elektronischen Analyse eines zeitlichen veränderlichen Signals

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1269517A (zh) * 2000-04-26 2000-10-11 西安交通大学 光纤面板共焦显微镜测量三维面形的方法和装置
CN102589851A (zh) * 2012-01-16 2012-07-18 北京理工大学 反射式共焦透镜焦距测量方法
CN104236463A (zh) * 2013-06-13 2014-12-24 株式会社三丰 机器视觉检查系统和进行高速对焦高度测量操作的方法
CN106794052A (zh) * 2014-07-03 2017-05-31 阿莱恩技术有限公司 用于光学测量表面形貌的装置和方法
CN104407436A (zh) * 2014-09-05 2015-03-11 北京大学 一种基于轴向超高速扫描的三轴数字扫描光片显微镜

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ALEXANDRE MERMILLOD-BLONDIN等: "High-speed varifocal imaging with a tunable acoustic gradient index of refraction lens", 《OPTICS LETTERS》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112797937A (zh) * 2021-03-31 2021-05-14 苏州天准科技股份有限公司 一种非接触式测量设备
CN113108696A (zh) * 2021-04-06 2021-07-13 合肥埃科光电科技有限公司 一种光源波长扫描光谱共焦传感器

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Publication number Publication date
EP3658850A1 (de) 2020-06-03
DE102017130211A1 (de) 2019-01-31
WO2019020800A1 (de) 2019-01-31

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Application publication date: 20200424