CN111061070A - Multifunctional array element based on super-surface structure and multifunctional realization method - Google Patents
Multifunctional array element based on super-surface structure and multifunctional realization method Download PDFInfo
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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Abstract
The invention discloses a multifunctional array element based on a super-surface structure, which consists of an optical transparent substrate, a first reflecting layer, a first super-surface structure layer, a second reflecting layer and a second super-surface structure layer; the first super-surface structure layer and the second super-surface structure layer have the same height, the first super-surface structure layer is an equivalent dielectric layer, and the second super-surface layer is a phase regulation layer. According to the multifunctional array element based on the super-surface structure and the multifunctional realization method provided by the embodiment of the invention, the first super-surface structure layer with equal height is adopted to replace medium layers with different cavity length heights in the traditional FP filter array, and the second super-surface structure array with a flexible phase regulation function is adopted, so that the functions of multi-wavelength filtering, flexible focusing, other phase regulation and the like of each array unit are realized, and the multifunctional array element has the advantages of relatively simple manufacturing process, compatibility with a CMOS (complementary metal oxide semiconductor) process and easiness in integration with an imaging detector.
Description
Technical Field
The invention relates to the technical field of optical imaging, in particular to a multifunctional array element based on a super-surface structure and a multifunctional realization method.
Background
Integrating a filter array and a microlens array on an imaging detector is a common technique for constructing color imaging detectors as well as multi/hyperspectral imaging detectors. The commonly used micro narrow-band filter array is an FP cavity resonance structure array which is composed of two high-reflection layers and a dielectric layer sandwiched between the two high-reflection layers. Different narrow-band transmission wavelength spectrums can be obtained by adjusting the thickness (cavity length) of the dielectric layer, so that the filter array containing the dielectric layers with different heights can simultaneously realize multi-channel narrow-band spectrum transmission in space. The multi-height dielectric layer is generally manufactured by adopting a multi-deposition or etching process, and the manufacturing process is complex because of the need of multi-alignment and multi-etching. In addition, the imaging detector composed of a large number of pixels has low filling factor of the pixels and low utilization rate of light energy due to the reading circuit, and generally, a micro-lens array is integrated on the pixels, so that the filling factor is improved, and the collection capacity of the light energy is increased. The existing microlens array technology mainly adopts a hot melting forming technology to manufacture a refraction microlens array, or adopts a binary optical technology to manufacture a multi-step diffraction microlens array, the optical efficiency of the refraction microlens array is high, but the surface shape is difficult to control, the multi-step diffraction microlens also needs to be repeatedly etched, the manufacturing process is complex, and the optical efficiency is greatly influenced by the alignment precision. In addition, high-flux 3D imaging is increasingly used in imaging of biological tissues, i.e. tissue structures at different depths are imaged at the same time, which requires that the detection pixels of the detector have the capability of detecting focal planes at different depths at the same time, which is difficult to achieve by the existing focal plane imaging detectors. It is therefore necessary to integrate a multi-functional array optical element that is easy to manufacture on a wide-spectrum imaging detector.
Disclosure of Invention
In view of the defects of the prior art, the invention aims to provide a multifunctional array element based on a super-surface structure and a multifunctional implementation method thereof, and solves the technical problems that the array element in the prior art is complex in manufacturing process, single in function and not easy to integrate.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a multifunctional array element based on a super-surface structure, which consists of an optical transparent substrate, a first reflecting layer, a first super-surface structure layer, a second reflecting layer and a second super-surface structure layer;
the first super-surface structure layer and the second super-surface structure layer have the same height, the first super-surface structure layer is an equivalent dielectric layer, and the second super-surface layer is a phase regulation layer.
Preferably, the first reflecting layer and the second reflecting layer are formed by alternately plating a plurality of groups of high-refractive-index medium materials and low-refractive-index medium materials.
Preferably, the high refractive index dielectric material is TiO2The low-refractive-index dielectric material is MgF2。
Preferably, the first super-surface structure layer includes, but is not limited to, a nano-cylinder/nanowire/nanocone array with a periodic arrangement composed of a dielectric material with a refractive index greater than 2.
Preferably, the first super-surface structure layer further comprises a filling medium material with a refractive index smaller than 2 and located around the periodically arranged nano-cylinders/nano-wires/nano-cones.
Preferably, the second super surface structure layer includes, but is not limited to, a nanocylinder/nanowire/nanocone array with focusing function, which is composed of a refractive index medium material greater than 2.
In order to achieve the above object, the present invention further provides a method for implementing multiple functions of a multi-function array element based on a super-surface structure, where the multiple functions include at least filtering and phase modulation, and the method for implementing filtering includes:
enabling the first super-surface structure layer to form a first sub-wavelength dielectric grating;
calculating the effective refractive index of the first sub-wavelength dielectric grating;
and adjusting the effective refractive index of the first sub-wavelength dielectric grating to change between the maximum value and the minimum value, thereby realizing filtering.
Preferably, the calculating the effective refractive index of the first sub-wavelength dielectric grating and adjusting the effective refractive index of the first sub-wavelength dielectric grating to change between a maximum value and a minimum value to implement filtering specifically includes:
calculating the second-order effective refractive index of the first sub-wavelength dielectric grating in TE and TM polarization modes
wherein n issAnd niRefractive indexes of the filling medium between the sub-wavelength grating medium and the grating medium are respectively, P is a grating period, lambda is a light source wavelength, f is w/P represents a filling factor, and w represents a grating width;
calculating the first-order effective refractive index of the first sub-wavelength dielectric grating in TE and TM polarization modes
And adjusting the width w and the wavelength lambda of the grating, so that the effective refractive index of the first sub-wavelength dielectric grating is changed between the maximum value and the minimum value, thereby realizing filtering.
Preferably, the phase adjustment comprises:
enabling the second super-surface structure layer to form a second sub-wavelength dielectric grating;
establishing a corresponding relation between the grating width and the phase of the second sub-wavelength dielectric grating;
and selecting the sub-wavelength grating widths corresponding to the required phases on different spatial points according to the corresponding relation between the grating width and the phase, so that the required phase distribution can be obtained, and further the phase regulation and control can be carried out according to the phase distribution.
Preferably, the corresponding relationship between the grating width and the phase of the second sub-wavelength dielectric grating is as follows:
where k is the focal length of the lens, x represents the distance from the center point of the lens, and m (0, ± 1, ± 2 …) represents the number of zones.
Compared with the prior art, the multifunctional array element based on the super-surface structure and the multifunctional implementation method provided by the embodiment of the invention have the advantages that the first super-surface structure layer with equal height is adopted to replace medium layers with different cavity length heights in the traditional FP filter array, and the second super-surface structure array with a flexible phase regulation function is adopted, so that the functions of multi-wavelength filtering, flexible focusing, other phase regulation and the like of each array unit are realized, the manufacturing process is relatively simple, the CMOS process is compatible, and the integration with an imaging detector is easy.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a multi-functional array element based on a super-surface structure according to the present invention;
FIG. 2(a) is a schematic diagram of a first sub-wavelength dielectric grating structure;
FIG. 2(b) is a graph of the effective refractive index of a first sub-wavelength dielectric grating at a specific wavelength;
FIG. 2(c) is a graph showing the effective refractive index variation at a wavelength of 0.551 μm for first sub-wavelength gratings with different widths;
FIG. 2(d) is a graph of the transmittance of a first sub-wavelength grating of specific period, length and width over a specific wavelength range;
FIG. 2(e) is a graph of the transmittance of another embodiment of a first sub-wavelength grating of a specific period, length and width over a specific wavelength range;
FIG. 2(f) is a graph of the phase change of a first sub-wavelength grating of a particular period, length and width over a particular wavelength range;
FIG. 3(a) is a diagram showing the distribution of the width of the grating array along the x-direction;
FIG. 3(b) is a phase distribution diagram of an ideal continuous type and an actual discrete type along the x-direction;
fig. 4(a) is a transmission spectrum of the first super-surface structure layer;
FIG. 4(b) is a diagram showing an electric field density distribution of an electromagnetic wave;
FIG. 5 is a graph of intensity distribution of an outgoing electromagnetic wave for an array element having 6 filter wavelengths;
FIG. 6 is a schematic diagram of a spectrally integrated detector formed by integrating a multifunctional array element based on a super-surface structure and a detector array unit provided by the invention;
FIG. 7 is a scanning electron micrograph of a multifunctional array element comprising three super-surface structure-based structures according to the present invention;
FIG. 8 is a graph showing the energy density distribution at different distances for a multifunctional array element comprising three super-surface structure-based structures provided by the present invention.
Detailed Description
The invention provides a multifunctional array element based on a super-surface structure and a multifunctional realization method, and in order to make the purposes, technical schemes and effects of the invention clearer and clearer, the invention is further described in detail by referring to the attached drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
Please refer to fig. 1, which is a schematic structural diagram of a multifunctional array device based on a super-surface structure according to an embodiment of the present invention.
In this embodiment, the multifunctional array element based on the super-surface structure provided by the invention is an iso-focal array. The multifunctional array element based on the super surface structure is composed of an optical transparent substrate 1, a first reflecting layer 2, a first super surface structure layer 3, a second reflecting layer 4 and a second super surface structure layer 5. The first super-surface structure layer 3 and the second super-surface structure layer 5 have the same height, the first super-surface structure layer 3 is an equivalent dielectric layer, and the second super-surface layer 5 is a phase control layer.
In a preferred embodiment, the first reflective layer 2 may be a first bragg reflector (DBR), and the second reflective layer 4 may be a second bragg reflector (DBR), that is, the first reflective layer 2 is a DBR formed by alternately coating a plurality of sets of high refractive index dielectric materials 21 and low refractive index dielectric materials 22, the second reflective layer 4 is also a DBR formed by alternately coating a plurality of sets of high refractive index dielectric materials 21 and low refractive index dielectric materials 22, and generally, the high refractive index dielectric materials 21 are TiO2The low refractive index dielectric material 22 is MgF2，MgF2And TiO2The thickness of the layer is h10.1 μm and h20.056 μm, is based on the design formula h of the high-reflectivity multilayer film1,2＝λc/4n1,2Is calculated to obtain, whereinc0.55 μm is the designed center wavelength, n11.38 and n22.436 are each MgF2And TiO2Refractive index at the center wavelength.
As a preferred embodiment, the first bragg reflective layer (DBR) and the second bragg reflective layer (DBR) are formed by alternately arranging high refractive index material layers and low refractive index material layers, and 4 sets of the alternately arranged layers are selected as shown in fig. 1, that is, the first bragg reflective layer and the second bragg reflective layer are formed by alternately arranging 4 sets of the high refractive index material and the low refractive index material. Of course, the first bragg reflective layer (DBR) and the second bragg reflective layer (DBR) may be alternatively arranged by selecting other number of groups of high and low refractive index material layers so as to generate different reflectivities and thus different filter bandwidths. This is not repeated herein.
As a preferred embodiment, the first super-surface structure layer 3 includes, but is not limited to, a nano-cylinder/nanowire/nano-cone array with a periodic arrangement composed of a dielectric material with a refractive index greater than 2, and in addition, the first super-surface structure layer 3 further includes a filling dielectric material with a refractive index less than 2 and located around the nano-cylinder/nanowire/nano-cone array with the periodic arrangement.
As a preferred embodiment, the second super-surface structure layer 5 includes, but is not limited to, a nanocylinder/nanowire/nanocone array with focusing function composed of a refractive index medium material greater than 2.
For further explaining the functions of each layer block of the multifunctional array element based on the super-surface structure provided in this embodiment, and how the multifunctional array element realizes multiple functions such as filtering, phase adjustment, and the like, please refer to fig. 2 to 8.
Specifically, fig. 2(a) is a schematic diagram of a first sub-wavelength dielectric grating structure. Specifically, the first super-surface structure layer 3 and the second super-surface structure layer 5 are both composed of the first sub-wavelength grating array shown in fig. 2 (a). Wherein the TiO is2The material is MgF as high-refractive-index dielectric grating material2And air as a filling medium for the first and second super-surface- structure layers 3 and 5, respectively. In this embodiment, the first surface structure layer 3 is equivalent to an equivalent dielectric layer, and a fabry-perot structure (FP cavity) can be formed by combining the upper and lower DBR reflecting layers (i.e., the first reflecting layer 2 and the second reflecting layer 4), so as to realize the selection of the wavelength of the incident electromagnetic wave, and the second super surface structure layer 5 is designed as a phase modulator, which can effectively modulate the wavefront of the emergent electromagnetic wave.
FIG. 2(b) shows that when the grating structure parameter is period P10.2 μm, height L10.15 μm, width range w 10 to 0.2 μm and MgF2When the dielectric material is used, the effective refractive index of the dielectric grating is within the wavelength range of 0.5-0.65 mu m. As can be seen from the figure, the grating width w1And the wavelength lambda is an important influence factor of the effective refractive index, and the effective refractive index can be changed within the range of 1.38-2.48 under the conditions of different grating widths and wavelengths.
Fig. 2(c) shows the effective refractive index profile of the sub-wavelength grating with different widths when the wavelength is 0.551 μm at a single wavelength λ. The effective refractive index is increased along with the increase of the width of the grating, and the positive correlation characteristic is presented. Therefore, under the condition that other structural parameters are not changed, the larger effective refractive index can be obtained only by increasing the width of the grating.
For the second surfaceFor the super-surface structure 5, through simulation calculation, FIG. 2(d) (e) shows the grating structure parameter is period P20.45 μm, height L20.5 μm, width range w2A transmittance pattern and a phase profile of the dielectric grating in a wavelength range of 0.5 to 0.65 μm when air is used as a dielectric material at 0.08 to 0.3 μm. Although having a lower transmittance due to resonance at certain specific wavelengths and widths, the average transmittance thereof may reach a higher value. And the phase changes rapidly as the width increases. The phase variation can reach 2 pi not only at a single wavelength but within a wavelength range of 0.5-0.619 mu m, which means that the wave front of the electromagnetic wave within the spectral range can be completely controlled by arranging grating arrays with different widths.
Fig. 2(f) specifically shows transmittance and phase distribution curves corresponding to gratings with different widths when the wavelength is 0.551 μm, which is the single wavelength λ. It can be found that each grating width corresponds to a phase and as the grating width increases from 0.08 μm to 0.3 μm, the phase also increases from 0 to 2 π. Albeit at a grating width w20.11 μm and w2At 0.195 μm, the transmittance curve shows a sharp drop due to the occurrence of resonance, but the overall transmittance can still be as high as 94%. Therefore, the designed medium grating structure unit has better phase regulation and transmittance characteristics.
The width distribution of the designed grating array is shown in fig. 3(a), which contains 45 sub-wavelength gratings with different widths. Fig. 3(b) shows an ideal continuous phase distribution diagram for realizing a focusing lens with a focal length k of 20 μm and an operating wavelength λ of 0.551 μm, but in practice, a discrete phase distribution is obtained by arranging a grating array having a specific width in the x direction.
Fig. 3(b) plots the phase distribution corresponding to the 45 sub-wavelength gratings. It was found that the designed discrete phase profile fits well to the ideal continuous phase profile, and therefore the grating array structure is designed to achieve the desired phase profile for the focusing lens.
When the electromagnetic wave enters the array element, most of the incident electromagnetic wave in the DBR reflection spectrum band is reflected, and only the electromagnetic wave with a specific wavelength meeting the FP cavity resonance condition can smoothly pass through the designed structure. And the outgoing electromagnetic wave will also be modulated by the second super-surface structure layer 5 so as to obtain a specific phase distribution. And simulating the designed structure by adopting a finite difference time domain method.
As a preferred embodiment, first, the first super surface layer structure parameter is set to the period P10.2 μm long and L1＝0.15μm、w1Fig. 4(a) plots the transmission spectrum under this structural parameter condition, at 0.1 μm. In the wavelength range of 0.5-0.65 μm, the resonance transmission peak of the FP cavity in the Lorentz line type appears at the wavelength of 0.551 μm, and the full width at half maximum is only 2.7 nm. And as can be seen from the electric field density distribution diagram 4(b) of the electromagnetic waves, the outgoing electromagnetic waves are effectively focused together, forming a high electric field density spot 20.75 μm from the center of the intermediate super surface layer. And the focal spot diameter is close to the diffraction limit (d is 1.22 lambda/NA, and the numerical aperture NA is 0.45), and the diffraction efficiency can reach 82.7%.
In order to realize array elements with the same focal length, the first super-surface layer and the second super-surface layer must be constructed simultaneously so that the operating wavelength of the first super-surface layer and the resonance wavelength of the second super-surface layer coincide. According to this idea, an array element having 6 resonance wavelengths of 0.51 μm, 0.521 μm, 0.54 μm, 0.562 μm, 0.585 μm and 0.617 μm, respectively, was designed. Fig. 5 shows the intensity profile of the emerging electromagnetic wave from the array, from which it can be seen that each array element has the same focal length, which means that electromagnetic waves of different wavelengths can be focused to the same focal plane, with their energy maximally received by the detector.
The integration of the optical filter array and the detector array is an effective way to realize a miniaturized and low-cost spectrometer, and the spectrum information can be effectively acquired by analyzing the energy of the electromagnetic waves detected by the detector array. Compared with the traditional non-focusing filter detector array, the designed super-surface structure has the dual functions of narrow-band filtering and focusing, can collect more electromagnetic wave energy on the basis of realizing filtering, improves the detection sensitivity, and can be used for constructing a high-sensitivity and high-resolution spectrometer. Fig. 6 shows a schematic diagram of a spectral detection system constructed by a super-surface-filter focusing lens array. When the polychromatic electromagnetic waves are incident to the super-surface filtering focusing lens array, different super-surface filtering focusing lenses can only allow the electromagnetic waves with specific wavelengths to pass through, so that the polychromatic light is decomposed into discrete monochromatic light. The transmitted electromagnetic waves will then be focused onto the detector plane, enabling high sensitivity energy detection. The final spectral information of the incident electromagnetic wave can be calculated from the energy information detected by each detection unit.
Example 2
The multifunctional array element based on a super-surface structure provided in this embodiment is an unequal focal length array, and the multifunctional array element based on a super-surface structure is basically the same as that in embodiment 1, and is not described herein again, where the differences mainly lie in:
the focal length of each lens in the array microlens is controlled, the curvature radius of each refractive microlens is required to be controlled in the traditional refractive microlens array, the control is difficult to realize in a one-step process, but the focal length of each microlens can be regulated and controlled through the design of a surface grating structure in the super-surface lens array.
Fig. 7 shows a scanning electron microscope image of a multifunctional array element fabricated on a glass substrate, wherein the second super-surface structure of the multifunctional array element is composed of three sub-wavelength grating arrays (array 1, array 2 and array 3), which are respectively designed to correspond to super-surface lenses with a central wavelength of 0.617 μm and focal lengths of 500 μm, 700 μm and 900 μm (i.e. unequal focal lengths).
The optical characteristic test system based on an optical microscope and a CCD image detector is adopted to test the element, so that the light intensity distribution of the visible light source at three distances from the surface of the element after being focused by the sub-wavelength grating array 1, the array 2 and the array 3 is obtained, as shown in figure 8. It can be seen that the energy density distribution of the electromagnetic wave is different on different focal planes, which indicates that the constructed sub-wavelength grating array can realize the effect of focusing the electromagnetic wave on the designed focal plane.
The above embodiments of the present invention illustrate that the second super-surface can achieve the iso-focal focusing and the iso-focal focusing, and actually, through the phase adjustment, other functions, such as focusing off the central axis or deflecting of the outgoing light beam, can also be achieved. In addition, the method and structure of the present invention can be extended to infrared and THz bands in addition to visible light bands.
Example 3
The invention also provides a multifunctional realization method of the multifunctional array element based on the super-surface structure, wherein the multifunctional at least comprises filtering and phase regulation, and the method for realizing the filtering comprises the following steps:
enabling the first super-surface structure layer to form a first sub-wavelength dielectric grating;
calculating the effective refractive index of the first sub-wavelength dielectric grating;
and adjusting the effective refractive index of the first sub-wavelength dielectric grating to change between the maximum value and the minimum value, thereby realizing filtering.
Preferably, the calculating the effective refractive index of the first sub-wavelength dielectric grating and adjusting the effective refractive index of the first sub-wavelength dielectric grating to change between a maximum value and a minimum value to implement filtering specifically includes:
calculating the second-order effective refractive index of the first sub-wavelength dielectric grating in TE and TM polarization modes
wherein n issAnd niRefractive indexes of the filling medium between the sub-wavelength grating medium and the grating medium are respectively, P is a grating period, lambda is a light source wavelength, f is w/P represents a filling factor, and w represents a grating width;
calculating the first-order effective refractive index of the first sub-wavelength dielectric grating in TE and TM polarization modes
And adjusting the width w and the wavelength lambda of the grating, so that the effective refractive index of the first sub-wavelength dielectric grating is changed between the maximum value and the minimum value, thereby realizing filtering.
Preferably, the phase adjustment comprises:
enabling the second super-surface structure layer to form a second sub-wavelength dielectric grating;
establishing a corresponding relation between the grating width and the phase of the second sub-wavelength dielectric grating;
and selecting the sub-wavelength grating widths corresponding to the required phases at different spatial points according to the corresponding relation between the grating widths and the phases, so that the required phase distribution can be obtained, and further, the phases are regulated and controlled according to the phase distribution.
Preferably, the corresponding relationship between the grating width and the phase of the second sub-wavelength dielectric grating is as follows:
where k is the focal length of the lens, x represents the distance from the center point of the lens, and m (0, ± 1, ± 2 …) represents the number of zones.
According to the multifunctional array element based on the super-surface structure and the multifunctional realization method provided by the embodiment of the invention, the first super-surface structure layer with equal height is adopted to replace medium layers with different cavity length heights in the traditional FP filter array, and the second super-surface structure array with a flexible phase regulation function is adopted, so that the functions of multi-wavelength filtering, flexible focusing, other phase regulation and the like of each array unit are realized, and the multifunctional array element has the advantages of relatively simple manufacturing process, compatibility with a CMOS (complementary metal oxide semiconductor) process and easiness in integration with an imaging detector.
It should be understood that equivalents and modifications of the technical solution and inventive concept thereof may occur to those skilled in the art, and all such modifications and alterations should fall within the scope of the appended claims.
Claims (10)
1. A multifunctional array element based on a super-surface structure is characterized in that the multifunctional array element is composed of an optical transparent substrate, a first reflecting layer, a first super-surface structure layer, a second reflecting layer and a second super-surface structure layer;
the first super-surface structure layer and the second super-surface structure layer have the same height, the first super-surface structure layer is an equivalent dielectric layer, and the second super-surface layer is a phase regulation layer.
2. The multi-functional array element based on super surface structures of claim 1, characterized in that:
the first reflecting layer and the second reflecting layer are formed by alternately plating a plurality of groups of high-refractive-index dielectric materials and low-refractive-index dielectric materials.
3. The multi-functional array element based on super surface structures of claim 2, characterized in that:
the high-refractive-index dielectric material is TiO2The low-refractive-index dielectric material is MgF2。
4. The multi-functional array element based on super surface structures of claim 1, characterized in that:
the first super-surface structure layer includes, but is not limited to, a nano-cylinder/nanowire/nanocone array with a periodic arrangement composed of a dielectric material with a refractive index greater than 2.
5. The multi-functional array element based on super surface structures of claim 4, characterized in that:
the first super-surface structure layer further comprises a filling medium material with the refractive index smaller than 2 and positioned around the periodically arranged nano cylinders/nano wires/nano cones.
6. The multi-functional array element based on super surface structures of claim 1, characterized in that:
the second super-surface structure layer comprises but is not limited to a nano-cylinder/nanowire/nano-cone array with a focusing function, and the nano-cylinder/nanowire/nano-cone array is made of a medium material with a refractive index larger than 2.
7. A method for realizing multiple functions of a multi-function array element based on super-surface structures according to any one of claims 1-6, wherein the multiple functions at least comprise filtering and phase modulation, and the method for realizing filtering comprises:
enabling the first super-surface structure layer to form a first sub-wavelength dielectric grating;
calculating the effective refractive index of the first sub-wavelength dielectric grating;
and adjusting the effective refractive index of the first sub-wavelength dielectric grating to change between the maximum value and the minimum value, thereby realizing filtering.
8. The multifunctional realization method of the multifunctional array element based on the super-surface structure as claimed in claim 7, wherein the calculating the effective refractive index of the first sub-wavelength dielectric grating adjusts the effective refractive index of the first sub-wavelength dielectric grating to change between a maximum value and a minimum value, thereby realizing the filtering, specifically comprises:
calculating the second-order effective refractive index of the first sub-wavelength dielectric grating in TE and TM polarization modes
Wherein n issAnd niRefractive indexes of the filling medium between the sub-wavelength grating medium and the grating medium are respectively, P is a grating period, lambda is a light source wavelength, f is w/P represents a filling factor, and w represents a grating width;
calculating the first-order effective refractive index of the first sub-wavelength dielectric grating in TE and TM polarization modes
And
and adjusting the width w and the wavelength lambda of the grating, so that the effective refractive index of the first sub-wavelength dielectric grating is changed between the maximum value and the minimum value, thereby realizing filtering.
9. The method of claim 7, wherein the phase modulation comprises:
enabling the second super-surface structure layer to form a second sub-wavelength dielectric grating;
establishing a corresponding relation between the grating width and the phase of the second sub-wavelength dielectric grating;
and selecting the sub-wavelength grating widths corresponding to the required phases on different spatial points according to the corresponding relation between the grating width and the phase, so that the required phase distribution can be obtained, and further the phase regulation and control can be carried out according to the phase distribution.
10. The method for realizing multiple functions of a multifunctional array element based on a super-surface structure according to claim 9, wherein the corresponding relationship between the grating width and the phase of the second sub-wavelength dielectric grating is as follows:
where k is the focal length of the lens, x represents the distance from the center point of the lens, and m (0, ± 1, ± 2 …) represents the number of zones.
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| CN112117640A (en) * | 2020-11-02 | 2020-12-22 | 北京工业大学 | VCSEL (vertical cavity surface emitting laser) light splitting structure of substrate type diffractive optical element and preparation method |
| CN113866859A (en) * | 2021-09-13 | 2021-12-31 | 中国人民解放军战略支援部队航天工程大学 | Optical synthetic aperture lens based on super surface |
| CN113866857A (en) * | 2021-09-13 | 2021-12-31 | 中国人民解放军战略支援部队航天工程大学 | Lightweight infrared guidance camera lens based on amorphous silicon super structure surface |
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| CN112117640A (en) * | 2020-11-02 | 2020-12-22 | 北京工业大学 | VCSEL (vertical cavity surface emitting laser) light splitting structure of substrate type diffractive optical element and preparation method |
| WO2022170669A1 (en) * | 2021-02-10 | 2022-08-18 | 武汉精测电子集团股份有限公司 | Micro led color uniformity detection system |
| CN113866859A (en) * | 2021-09-13 | 2021-12-31 | 中国人民解放军战略支援部队航天工程大学 | Optical synthetic aperture lens based on super surface |
| CN113866857A (en) * | 2021-09-13 | 2021-12-31 | 中国人民解放军战略支援部队航天工程大学 | Lightweight infrared guidance camera lens based on amorphous silicon super structure surface |
| TWI791366B (en) * | 2021-12-09 | 2023-02-01 | 瑞儀光電股份有限公司 | Optical component, light source module and display device |
| CN114325885A (en) * | 2022-01-24 | 2022-04-12 | 天津山河光电科技有限公司 | Super-surface optical device, optical equipment and method for manufacturing super-surface optical device |
| CN114545620A (en) * | 2022-02-10 | 2022-05-27 | 中国科学院上海技术物理研究所 | Compensation design method for preparing dielectric super surface by non-ideal etching process |
| CN114545620B (en) * | 2022-02-10 | 2023-09-12 | 中国科学院上海技术物理研究所 | Compensation design method for preparing dielectric super-surface by non-ideal etching process |
| WO2023230802A1 (en) * | 2022-05-31 | 2023-12-07 | 京东方科技集团股份有限公司 | Display panel and preparation method therefor, and display apparatus |
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