CN113866859A - Optical synthetic aperture lens based on super surface - Google Patents
Optical synthetic aperture lens based on super surface Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 25
- 238000003491 array Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 14
- 230000005540 biological transmission Effects 0.000 claims abstract description 7
- 238000002834 transmittance Methods 0.000 claims description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- SKJCKYVIQGBWTN-UHFFFAOYSA-N (4-hydroxyphenyl) methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=C(O)C=C1 SKJCKYVIQGBWTN-UHFFFAOYSA-N 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910002601 GaN Inorganic materials 0.000 claims description 3
- 229910005540 GaP Inorganic materials 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims description 3
- 229910001632 barium fluoride Inorganic materials 0.000 claims description 3
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000004408 titanium dioxide Substances 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 abstract description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000003331 infrared imaging Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
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- 238000002310 reflectometry Methods 0.000 description 2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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Abstract
The invention provides a super-surface-based optical synthetic aperture lens, which comprises: a substrate layer; the grating array is arranged on the surface of the substrate layer and comprises a plurality of columnar sub-wavelength gratings; the number of the grating arrays is at least two, the at least two grating arrays are arranged on the surface of the same side of the substrate layer, and a space is formed between every two adjacent grating arrays; the sub-wavelength grating is sized by a first method to enable the super-surface based optical synthetic aperture lens to impart a transmission phase to infrared light. The lens provided by the disclosure realizes optical synthetic aperture focusing imaging by utilizing the amorphous silicon super-surface.
Description
Technical Field
The invention relates to the field of optical remote sensing, in particular to an optical synthetic aperture lens based on a super surface.
Background
With the development of information science and the progress of optical processing and manufacturing technology, the high-resolution optical remote sensing imaging technology is more and more widely applied to the fields of military reconnaissance, target monitoring, topographic mapping, earth surface resource general survey, disaster monitoring and the like. To achieve the high resolution required for military reconnaissance, large aperture optical systems are required. The OSA (Optical Synthetic Aperture, OSA) technology is also called sparse Aperture technology, in which multiple small apertures are arranged in a certain manner, and multi-Aperture interference imaging is performed under a condition that a common phase is satisfied, so as to achieve a large-Aperture Optical system imaging performance similar to that of an externally-connected circular Aperture, which is a mature technical means for synthesizing a large Aperture at present.
The infrared imaging guidance technology is widely applied to the military and civil fields such as missiles, unmanned aerial vehicles and the like, has the characteristics of good concealment, all-weather work, cloud penetration, high guidance precision and the like, and has the limitation in the application of anti-tank missiles, helicopters or unmanned aerial vehicles with low cost and small calibers on weapons such as low-cost and small-caliber air-air missiles due to the fact that the current infrared imaging guidance system is complex in structure and high in cost, so that the light-weight, compact and low-cost infrared guidance system is urgently needed.
Disclosure of Invention
Accordingly, the present invention is directed to a super-surface based optical synthetic aperture lens that at least partially solves the problems of the prior art.
According to an aspect of the present disclosure, there is provided a super-surface based optical synthetic aperture lens, comprising:
a substrate layer;
the grating array is arranged on the surface of the substrate layer and comprises a plurality of columnar sub-wavelength gratings;
the number of the grating arrays is at least two, the at least two grating arrays are arranged on the surface of the same side of the substrate layer, and a space is formed between every two adjacent grating arrays;
the sub-wavelength grating is sized by a first method to enable the super-surface based optical synthetic aperture lens to impart a transmission phase to infrared light.
In an exemplary embodiment of the present disclosure, the first method includes the steps of:
constructing a phase base-grating size corresponding table;
determining the number of the sub-wavelength gratings and the coordinates of each sub-wavelength grating;
determining the corresponding optimal phase base of each sub-wavelength grating according to the requirements of the working wavelength lambda, the focal length f and the diameter D of the optical synthetic aperture lens and the coordinates of each sub-wavelength grating;
and determining the size of each sub-wavelength grating according to the optimal phase base and the phase base-grating size corresponding table.
In an exemplary embodiment of the disclosure, the constructing the phase basis-grating size correspondence table includes:
determining the modulation condition of the phase and transmittance of the incident light of a single sub-wavelength grating under the conditions of different heights, center distances, lengths and widths according to the working wavelength lambda, and storing the grating size meeting set conditions as a database;
equally dividing the phase by 0-360 degrees by using the linear phase of N orders, and corresponding the N phases to obtain N phase bases according to the geometric relationship;
and determining the phase base-grating size corresponding table according to the N phase bases, the database and the actual phases of the sub-wavelength gratings.
In an exemplary embodiment of the present disclosure, the storing the qualified grating sizes as a database includes:
under the condition that the center distance between two adjacent sub-wavelength gratings and the height of each sub-wavelength grating are kept unchanged, the following requirements are screened out: the transmittance of the incident light is close to 1, and the length and width ranges of all the sub-wavelength gratings under the condition that the phase modulation range of the incident light is [0,2 pi ] are stored as a database.
In an exemplary embodiment of the present disclosure, determining the phase basis-grating size correspondence table according to N actual phases of the phase basis, the database, and the sub-wavelength grating includes:
traversing each data in the database within a set error range of +/-360/N to search for the sub-wavelength grating size meeting the phase base requirement;
determining the size of the corresponding sub-wavelength grating according to the minimum variance of the actual phase of the sub-wavelength grating and the phase in the corresponding phase base to obtain a phase base-grating size corresponding table;
wherein N is a positive integer of 6-10.
In an exemplary embodiment of the disclosure, the determining the corresponding optimal phase basis of each sub-wavelength grating according to the operating wavelength λ, the focal length f, the diameter D requirement of the optical synthetic aperture lens and the coordinates of each sub-wavelength grating includes:
according to the requirements of the working wavelength lambda, the focal length f and the diameter D of the optical synthetic aperture lens, determining the intermediate infrared target phase of the sub-wavelength grating at any (x, y) coordinate within the diameter range of the optical synthetic aperture lens by using the following formula
：
Wherein x is more than or equal to-D/2 and less than or equal to-D/2 and y is more than or equal to-D/2 and less than or equal to-D/2;
will be provided with
Dividing the modulus converted into angle values by 360, and updating the values respectively
Updated according to the error range of +/-360/N
Converting the target phase into an N-order phase base;
and determining the optimal phase base corresponding to the coordinate of each sub-wavelength grating from the phase base-grating corresponding table according to the target phase corresponding to the coordinate of each sub-wavelength grating.
In an exemplary embodiment of the present disclosure, a distance between two adjacent grating arrays is 0 to 2R, where R is a radius of the grating arrays.
In an exemplary embodiment of the disclosure, in each grating array, the center distances of every two adjacent sub-wavelength gratings are equal, and the center distance is less than half of the working wavelength.
In an exemplary embodiment of the present disclosure, each of the sub-wavelength gratings has symmetry in a cross-section parallel to the substrate layer;
further, the cross section of each sub-wavelength grating parallel to the substrate layer is circular, and the radius of each sub-wavelength grating is 1/2-1/8 of the working wavelength lambda.
In an exemplary embodiment of the present disclosure, the grating array is made of a medium with a refractive index > 2;
further, the grating array is made of one of: silicon, silicon nitride, titanium dioxide, gallium phosphide, gallium nitride, and gallium arsenide;
the substrate layer is made of a middle infrared transparent material;
further, the substrate layer is made of one of: barium fluoride and zinc telluride.
The disclosure provides a super-surface-based optical synthetic aperture lens, wherein a plurality of grating arrays which are mutually spaced are arranged on a substrate layer, and each grating array comprises a plurality of columnar sub-wavelength gratings. And the size of each sub-wavelength grating is designed through a first method, so that the optical synthetic aperture lens based on the super surface is obtained. The lens can realize random phase modulation in the range of 0 to 2 pi of infrared light by the same unit structure, and keeps higher transmittance or reflectivity. The infrared light focusing imaging device realizes focusing imaging of infrared light at different positions by using one unit structure, is expected to overcome the theoretical threshold limit of focusing efficiency, enables a real-time, high-efficiency and integrated infrared guidance module to become possible, and is simple in structure.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a side view of a super-surface based optical synthetic aperture lens according to an embodiment of the present invention;
FIG. 2 is a top view of a super-surface based optical synthetic aperture lens according to an embodiment of the present invention;
fig. 3 is a schematic optical path diagram of an optical synthetic aperture lens based on a super-surface according to an embodiment of the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
It should be noted that, in the case of no conflict, the features in the following embodiments and examples may be combined with each other; moreover, all other embodiments that can be derived by one of ordinary skill in the art from the embodiments disclosed herein without making any creative effort fall within the scope of the present disclosure.
It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
Referring to fig. 1-3, the present embodiment provides a super-surface based optical synthetic aperture lens, including:
a substrate layer 102; the substrate layer 102 is a sheet-like structure and is made of a mid-infrared transparent material having a transmittance of greater than 80%. In particular to barium fluoride or zinc telluride. In actual implementation, the selection can be performed according to the actual requirements of the lens.
The grating array 101 is disposed on the surface of the substrate layer 102, and includes a plurality of columnar sub-wavelength gratings 1011. At least two grating arrays 101 are arranged, at least two grating arrays 101 are arranged on the same side surface of the substrate layer 102, and a space is formed between every two adjacent grating arrays 101. That is, each grating array 101 is independent, and different grating arrays 101 can work together to apply a transmission phase to the infrared light. The grating arrays 101 are arranged in a two-dimensional array, the directions parallel to the rows and columns of the grating arrays 101 are respectively used as an x axis and a y axis, a coordinate system xyz is established by the right-hand rule, and the sub-wavelength gratings 1011 are arranged along an xy plane. The sub-wavelength gratings 1011 may be configured in a cylindrical shape, and a space is provided between adjacent sub-wavelength gratings 1011, and a specific size of the space is different according to a size of each sub-wavelength grating 1011. The size of each of the sub-wavelength gratings 1011 is determined by a first method to enable the super-surface based optical synthetic aperture lens to impart a transmission phase to infrared light. The size of the sub-wavelength grating 1011 includes the grating height, the grating radius, and the like.
In this embodiment, the sub-wavelength grating 1011 is made of a medium with a refractive index > 2;
further, the sub-wavelength grating 1011 is made of one of: silicon, silicon nitride, titanium dioxide, gallium phosphide, gallium nitride, and gallium arsenide. In actual implementation, the selection can be performed according to the actual requirements of the lens.
The present disclosure provides a super-surface-based optical synthetic aperture lens, wherein a plurality of grating arrays 101 are arranged on a substrate layer 102, and each grating array 101 comprises a plurality of columnar sub-wavelength gratings 1011. And the size of each sub-wavelength grating 1011 is designed by a first method, so that the optical synthetic aperture lens based on the super surface is obtained. The lens can realize random phase modulation in the range of 0 to 2 pi of the mid-infrared ray in the same unit structure, and keeps higher transmittance or reflectivity. The infrared light focusing imaging device realizes focusing imaging of infrared light at different positions by using one unit structure, is expected to overcome the theoretical threshold limit of focusing efficiency, enables a real-time, high-efficiency and integrated infrared guidance module to become possible, and is simple in structure. The arrangement form of each sub-wavelength grating array 101 designed by the application can realize large numerical aperture focusing of infrared wavelength arbitrary polarized light.
In an exemplary embodiment of the present disclosure, a distance between two adjacent grating arrays 101 is 0 to 2R, where R is a radius of the grating arrays 101. Each grating array 101 is a synthetic aperture, and a plurality of synthetic apertures can cooperate with each other to work.
In an exemplary embodiment of the present disclosure, the height of each of the sub-wavelength gratings 1011 is equal, and the height of the sub-wavelength grating 1011 is 0.75-1.1 times the operating wavelength λ. Wherein, the working wavelength λ refers to the wavelength of the light wave that the super-surface based optical synthetic aperture lens provided by the present disclosure can focus on at the specified position, i.e. the mid-infrared light of 3um-5um wavelength. In this embodiment, the height of the sub-wavelength grating 1011 may be 1 times the operating wavelength λ.
In an exemplary embodiment of the present disclosure, in order to ensure that the light transmission effect of the super-surface based optical synthetic aperture lens can achieve the effect of a super lens, in addition to limiting the height and radius of the sub-wavelength grating 1011, the position, shape, and the like of the sub-wavelength grating 1011 need to be limited, specifically: the center distance between every two adjacent sub-wavelength gratings 1011 is equal, and the center distance is less than half of the working wavelength. Each of the sub-wavelength gratings 1011 has symmetry in a cross-section parallel to the substrate layer 102. Further, the cross-section of each of the sub-wavelength gratings 1011 parallel to the substrate layer 102 is circular, and the radius of each of the sub-wavelength gratings 1011 is 1/2-1/8 of the working wavelength λ.
In an exemplary embodiment of the present disclosure, a size design method (i.e., a first method) of the sub-wavelength grating 1011 is described in detail. The first method comprises the steps of:
constructing a phase base-grating size corresponding table;
determining the number of the sub-wavelength gratings 1011 and the coordinates of each of the sub-wavelength gratings 1011;
determining the corresponding optimal phase base of each sub-wavelength grating 1011 according to the requirements of the working wavelength lambda, the focal length f and the diameter D of the optical synthetic aperture lens and the coordinates of each sub-wavelength grating 1011;
and determining the size of each sub-wavelength grating 1011 according to the optimal phase base and the phase base-grating size corresponding table.
In an exemplary embodiment of the disclosure, the constructing the phase basis-grating size correspondence table includes:
according to the working wavelength lambda, the modulation condition of the phase and the transmittance of the incident light of the single sub-wavelength grating 1011 under the conditions of different heights, center distances, lengths and widths is determined by utilizing a finite difference time domain or strict coupled wave analysis method, and the grating size meeting the set conditions is stored as a database.
And equally dividing the phase by 0-360 degrees by using the linear phase of N orders, and corresponding the N phases to obtain N phase bases according to the geometrical relationship. The specific value of N can be selected according to different requirements, and N is a positive integer of 6-10. The value of N represents how many orders are set for the lens. For example, if N is 8, this means that the lens provided in the present embodiment can realize a transmission phase of 0 to 2 pi by 8 cells.
And determining the phase base-grating size corresponding table according to the N phase bases, the database and the actual phase of the sub-wavelength grating 1011. Where the actual phase of the current sub-wavelength grating 1011 is indicated.
In an exemplary embodiment of the present disclosure, the storing the qualified grating sizes as a database includes:
under the condition that the center distance between two adjacent sub-wavelength gratings 1011 and the height of each sub-wavelength grating 1011 are not changed, the following requirements are screened out: the transmittance of the incident light is close to 1, and the length and width ranges of all the sub-wavelength gratings 1011 under the condition that the phase modulation range of the incident light is [0,2 pi ] are stored as a database.
In an exemplary embodiment of the present disclosure, determining the phase basis-grating size correspondence table according to the N actual phases of the phase basis, the database, and the sub-wavelength grating 1011 includes:
traversing each data in the database within a set error range of +/-360/N to search for the size of the sub-wavelength grating 1011 meeting the phase base requirement;
determining the size of the corresponding sub-wavelength grating 1011 according to the minimum variance between the actual phase of the sub-wavelength grating 1011 and the phase in the corresponding phase base, and obtaining the phase base-grating size corresponding table;
wherein N is a positive integer of 6-10.
In an exemplary embodiment of the disclosure, the determining the corresponding optimal phase base of each sub-wavelength grating 1011 according to the operating wavelength λ, the focal length f, the diameter D requirement of the optical synthetic aperture lens and the coordinates of each sub-wavelength grating 1011 includes:
according to the requirements of the working wavelength lambda, the focal length f and the diameter D of the optical synthetic aperture lens, determining the intermediate infrared target phase of the sub-wavelength grating 1011 at any (x, y) coordinate within the diameter range of the optical synthetic aperture lens by using the following formula
：
Wherein x is more than or equal to-D/2 and less than or equal to-D/2 and y is more than or equal to-D/2 and less than or equal to-D/2;
will be provided with
Dividing the modulus converted into angle values by 360, and updating the values respectively
Error according to + -360/NDifference range to be updated
Converting the target phase into an N-order phase base;
and determining an optimal phase base corresponding to the coordinate of each sub-wavelength grating 1011 from the phase base-grating correspondence table according to the target phase corresponding to the coordinate of each sub-wavelength grating 1011. The optimal phase in the optimal phase base means that the phase achieved through discretization is the smallest at a target phase, that is, the theoretical error of the lens designed according to the method is the smallest when focusing light.
In an exemplary embodiment of the present disclosure, the number of the sub-wavelength gratings 1011 and the coordinates of each of the sub-wavelength gratings 1011 are determined; specifically, the array number and the array arrangement structure can be calculated by using an optical synthetic aperture theory and a matlab tool according to the target synthetic aperture numerical aperture NA and the processing cost requirement.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the equipment or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A super-surface based optical synthetic aperture lens, comprising:
a substrate layer;
the grating array is arranged on the surface of the substrate layer and comprises a plurality of columnar sub-wavelength gratings;
the number of the grating arrays is at least two, the at least two grating arrays are arranged on the surface of the same side of the substrate layer, and a space is formed between every two adjacent grating arrays;
the sub-wavelength grating is sized by a first method to enable the super-surface based optical synthetic aperture lens to impart a transmission phase to infrared light.
2. Optical synthetic aperture lens according to claim 1, characterized in that the first method comprises the steps of:
constructing a phase base-grating size corresponding table;
determining the number of the sub-wavelength gratings and the coordinates of each sub-wavelength grating;
determining the corresponding optimal phase base of each sub-wavelength grating according to the requirements of the working wavelength lambda, the focal length f and the diameter D of the optical synthetic aperture lens and the coordinates of each sub-wavelength grating;
and determining the size of each sub-wavelength grating according to the optimal phase base and the phase base-grating size corresponding table.
3. The optical synthetic aperture lens according to claim 2, wherein the constructing the phase basis-grating size correspondence table comprises:
determining the modulation condition of the phase and transmittance of the incident light of a single sub-wavelength grating under the conditions of different heights, center distances, lengths and widths according to the working wavelength lambda, and storing the grating size meeting set conditions as a database;
equally dividing the phase by 0-360 degrees by using the linear phase of N orders, and corresponding the N phases to obtain N phase bases according to the geometric relationship;
and determining the phase base-grating size corresponding table according to the N phase bases, the database and the actual phases of the sub-wavelength gratings.
4. The optical synthetic aperture lens according to claim 3, wherein the storing the qualified grating sizes as a database comprises:
under the condition that the center distance between two adjacent sub-wavelength gratings and the height of each sub-wavelength grating are kept unchanged, the following requirements are screened out: the transmittance of the incident light is close to 1, and the length and width ranges of all the sub-wavelength gratings under the condition that the phase modulation range of the incident light is [0,2 pi ] are stored as a database.
5. The optical synthetic aperture lens according to claim 3, wherein determining the phase basis-grating size correspondence table from the actual phases of the N phase bases, the database and the sub-wavelength grating comprises:
traversing each data in the database within a set error range of +/-360/N to search for the sub-wavelength grating size meeting the phase base requirement;
determining the size of the corresponding sub-wavelength grating according to the minimum variance of the actual phase of the sub-wavelength grating and the phase in the corresponding phase base to obtain a phase base-grating size corresponding table;
wherein N is a positive integer of 6-10.
6. The optical synthetic aperture lens of claim 2, wherein the determining the corresponding optimal phase basis for each of the sub-wavelength gratings according to the operating wavelength λ, the focal length f, the diameter D requirement of the optical synthetic aperture lens, and the coordinates of each of the sub-wavelength gratings comprises:
according to the requirements of the working wavelength lambda, the focal length f and the diameter D of the optical synthetic aperture lens, determining the intermediate infrared target phase of the sub-wavelength grating at any (x, y) coordinate within the diameter range of the optical synthetic aperture lens by using the following formula
Wherein x is more than or equal to-D/2 and less than or equal to-D/2 and y is more than or equal to-D/2 and less than or equal to-D/2;
will be provided with
Dividing the modulus converted into angle values by 360, and updating the values respectively
Will be updated according to the error range of +/-360/N
Converting the target phase into an N-order phase base;
and determining the optimal phase base corresponding to the coordinate of each sub-wavelength grating from the phase base-grating corresponding table according to the target phase corresponding to the coordinate of each sub-wavelength grating.
7. The optical synthetic aperture lens according to claim 1, wherein the distance between two adjacent grating arrays is 0-2R, where R is the radius of the grating arrays.
8. The optical synthetic aperture lens of claim 1, wherein the center distance of each adjacent two of the sub-wavelength gratings in each of the grating arrays is equal, and the center distance is less than half of the working wavelength.
9. The optical synthetic aperture lens of claim 1, wherein each of the sub-wavelength gratings has symmetry in a cross-section parallel to the substrate layer;
the cross section of each sub-wavelength grating parallel to the substrate layer is circular, and the radius of each sub-wavelength grating is 1/2-1/8 of the working wavelength lambda.
10. Optical synthetic aperture lens according to claim 1,
the grating array is made of a medium with the refractive index larger than 2;
the grating array is made of one of: silicon, silicon nitride, titanium dioxide, gallium phosphide, gallium nitride, and gallium arsenide;
the substrate layer is made of a middle infrared transparent material;
the substrate layer is made of one of: barium fluoride and zinc telluride.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180188553A1 (en) * | 2015-06-30 | 2018-07-05 | Ams Ag | Optical hybrid lens and method for producing an optical hybrid lens |
| CN111061070A (en) * | 2019-12-24 | 2020-04-24 | 华中科技大学鄂州工业技术研究院 | Multifunctional array element based on super-surface structure and multifunctional realization method |
| CN111367088A (en) * | 2020-02-22 | 2020-07-03 | 清华大学 | Orthogonal polarized light imaging diffraction optical device based on super-structured surface |
| CN112599984A (en) * | 2020-11-03 | 2021-04-02 | 浙江大学杭州国际科创中心 | Design method of broadband reflection super surface and broadband reflection super surface |
| CN112748484A (en) * | 2020-12-30 | 2021-05-04 | 西北工业大学 | Dual-functional super surface |
-
2021
- 2021-09-13 CN CN202111066614.6A patent/CN113866859B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180188553A1 (en) * | 2015-06-30 | 2018-07-05 | Ams Ag | Optical hybrid lens and method for producing an optical hybrid lens |
| CN111061070A (en) * | 2019-12-24 | 2020-04-24 | 华中科技大学鄂州工业技术研究院 | Multifunctional array element based on super-surface structure and multifunctional realization method |
| CN111367088A (en) * | 2020-02-22 | 2020-07-03 | 清华大学 | Orthogonal polarized light imaging diffraction optical device based on super-structured surface |
| CN112599984A (en) * | 2020-11-03 | 2021-04-02 | 浙江大学杭州国际科创中心 | Design method of broadband reflection super surface and broadband reflection super surface |
| CN112748484A (en) * | 2020-12-30 | 2021-05-04 | 西北工业大学 | Dual-functional super surface |
Non-Patent Citations (1)
| Title |
|---|
| FENG ZHAO 等: "Synthetic aperture metalens", PHOTONICS RESEARCH, vol. 9, no. 12, 15 November 2021 (2021-11-15) * |
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