CN111060055A - Parallel contour data processing error-free reconstruction device and reconstruction method - Google Patents

Parallel contour data processing error-free reconstruction device and reconstruction method Download PDF

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CN111060055A
CN111060055A CN201911304434.XA CN201911304434A CN111060055A CN 111060055 A CN111060055 A CN 111060055A CN 201911304434 A CN201911304434 A CN 201911304434A CN 111060055 A CN111060055 A CN 111060055A
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displacement sensor
parallel
measured
reconstruction
measurement
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付鲁华
陈曦
刘常杰
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Tianjin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness

Abstract

A device and a method for reconstructing parallel outlines without data processing errors comprise a carrying platform which is arranged between two parallel outlines to be measured and can move along a linear guide rail, 4 displacement sensors are arranged on the carrying platform corresponding to the two parallel outlines to be measured, a first displacement sensor and a second displacement sensor are arranged on one side of the carrying platform side by side, a measuring head corresponds to the outline to be measured, a third displacement sensor and a fourth displacement sensor are arranged on the other side of the carrying platform side by side, and the measuring head corresponds to the outline to be measured. In the process of reconstructing the parallel profile, the method overcomes the influence of the error of the measuring reference on the measuring result, simultaneously eliminates the error of the algorithm on the premise of high-density sampling so as to obtain the high-precision profile reconstruction result, realizes the accurate reconstruction without data processing error under the condition that the stepping distance of the device is smaller than the distance between the sensors, and realizes the quick and accurate reconstruction of the precise parallel profile.

Description

Parallel contour data processing error-free reconstruction device and reconstruction method
Technical Field
The invention relates to a parallel profile reconstruction device. In particular to a parallel contour reconstruction device without data processing error and a reconstruction method.
Background
In many measuring instruments and processing devices, the guide rail is used as a reference for measurement and processing, and parameters such as straightness, parallelism and the like of the guide rail have great influence on the stability and service life of the instrument. Similarly, many mechanisms also have a structure similar to a parallel flat plate as a guide or a reference, and therefore, measurement of relevant parameters such as straightness and parallelism of such parallel profiles is very important in precision inspection.
One of the necessary steps for the straightness and parallelism measurement of a profile is the reconstruction of the measured profile. In the traditional contour reconstruction method, a displacement sensor is arranged on a sensor carrying guide rail through a moving platform, a measuring device moves along the measuring direction, and measuring points on a measured object are collected to obtain the space coordinates of each measuring point. This method is equivalent to using the motion trajectory of the measuring device as a reference for measurement, and the error of the motion trajectory affects the accuracy of the reconstruction result. At present, optical methods are used for reconstructing the image with high precision, but the methods need a relatively stable working environment and professional operation of workers, and are not suitable for many industrial fields. Therefore, the method of removing the carrier rail using the multi-sensor is also widely used in industry, and includes a successive two-point method (STP), a generalized two-point method (GTP), a combined two-point method (CTP), a successive three-point method (STRP), a generalized three-point method (GTRP), a combined three-point method (CTRP), and the like. The two-point method utilizes two displacement sensors which are arranged side by side to carry out measurement, so that the straightness error of a measurement reference can be eliminated, and the three-point method utilizes three sensors, so that the straightness error of the reference and the deflection error of a measuring device in the movement process can be eliminated. When the precision requirement is not high, the error caused by the deflection of the measuring device is very small and can be ignored, so that the current two-point method is still widely applied. In the STP method, the distance between the sensors is the same as the stepping distance of the measuring mechanism, no data processing error exists in an obtained reconstruction result, but the distance between the measuring points is limited by the distance between the sensors, so that the number of sampling points is small in many times, and more profile information is lost. The GTP method can solve the problem that the distance between the measuring points can be smaller than the installation distance of the sensors, but data processing errors can be introduced. The CTP combines STP and GTP methods, can realize reconstruction without calculation error under the condition of high sampling density, but needs a high-precision reference plane to adjust the relative position between a plurality of reconstruction curves, has high manufacturing cost and is difficult to realize under many conditions.
For the reconstruction of parallel profiles, some measuring devices including sensor groups placed in a back direction are designed, and in principle, measurement methods such as STP and CTP are used, so that there is a problem that high-density sampling and no algorithm error cannot be achieved. Therefore, in the current contour reconstruction process, a method capable of realizing high-density sampling and reconstruction without calculation error is very necessary.
Disclosure of Invention
The invention aims to solve the technical problem of providing a parallel contour data processing error-free reconstruction device and a parallel contour data processing error-free reconstruction method, which can realize the rapid and accurate reconstruction of a precise parallel contour.
The technical scheme adopted by the invention is as follows: the utility model provides a no data processing error reconsitution device of parallel profile, is including being used for setting up the carrying platform that can follow linear guide and remove between two parallel measured profiles, it is provided with 4 displacement sensor to correspond two parallel measured profiles on the carrying platform, wherein, first displacement sensor and second displacement sensor set up side by side one side of carrying platform, and the gauge head is corresponding to measured profile, and third displacement sensor and fourth displacement sensor set up side by side the opposite side of carrying platform, and the gauge head is corresponding to measured profile.
A reconstruction method of a parallel contour data processing error-free reconstruction device comprises the following steps:
1) installing a carrying platform on a linear guide rail between two parallel measured outlines and at the head ends of the two parallel measured outlines, and enabling measuring heads of first to fourth displacement sensors on the carrying platform to respectively correspond to the two parallel measured outlines;
2) moving the carrying platform along the linear guide rail to enable the first to fourth displacement sensors to move from the head ends of the two parallel measured profiles to the tail ends according to a set stepping distance, and acquiring measurement data once by the first to fourth displacement sensors every time of stepping, wherein the measurement data is the distance data from the measurement points of the first to fourth displacement sensors on the corresponding measured profiles to the measurement zero points corresponding to the first to fourth displacement sensors;
3) and processing the acquired measurement data to obtain a reconstruction result of two parallel measured profiles.
According to the parallel profile data processing error-free reconstruction device and the reconstruction method, in the process of reconstructing the parallel profile, the influence of the error of a measuring reference on a measuring result is overcome, meanwhile, the algorithm error is eliminated on the premise of high-density sampling, so that a high-precision profile reconstruction result is obtained, accurate reconstruction without data processing error is realized under the condition that the stepping distance of the device is smaller than the distance of the sensors, and quick and accurate reconstruction of the precise parallel profile is realized. The invention has the beneficial effects
1. The measurement efficiency is high: and the data acquisition of a group of parallel profiles can be completed by single scanning measurement. The data acquisition density is high, and the data is abundant. And the straightness error of the measuring reference is eliminated through calculation, and the error is calibrated and compensated without extra steps in the measuring process.
2. Measurement accuracy: according to the scheme, the straightness error of the measuring reference can be eliminated, the error calibration process of the carrying guide rail is not needed, and errors caused by calibration and compensation are avoided. According to the scheme, the sampling density of the measuring points is improved, and the characteristics of the measured profile can be better reflected by the reconstructed result; meanwhile, no data processing error is introduced in the process of processing the measured data, so that the accuracy of a reconstruction result is ensured.
3. Stronger universality: the displacement sensor can be commercialized, and the type and the parameter of sensor can be selected according to different user demands. For the measured objects with different specifications and different measurement requirements, the relative position between the sensors can be adjusted, so that the measured object can be correspondingly measured within the measurement range of the sensors.
4. Stronger stability: the scheme does not involve complicated light paths, and generally only needs to use the traditional contact type or non-contact type sensor, and the proper sensor can be selected according to different measuring environments so as to ensure the stability of measurement.
5. On-machine measurement can be realized: the measuring device is arranged on a main shaft of the machine tool, and the measuring device is carried by a motion executing mechanism of the machine tool to move, so that on-machine measurement can be realized.
Drawings
FIG. 1 is a schematic diagram of a parallel-profile data processing error-free reconstruction apparatus according to the present invention;
FIG. 2 is a schematic diagram of a parallel profile data processing error-free reconstruction apparatus according to the present invention;
FIG. 3 is a state diagram of a parallel-contour data processing error-free reconstruction apparatus according to the present invention.
1: the linear guide rail 2: carrying platform
3. 4: parallel measured profile 5: head end
6: end p1: first displacement sensor
p2: second displacement sensor p3: third displacement sensor
p4: fourth displacement sensor
Detailed Description
The following describes a parallel-profile data processing error-free reconstruction apparatus and reconstruction method according to the present invention in detail with reference to the accompanying drawings.
As shown in fig. 1, 2 and 3, the parallel profile non-data processing error reconstruction device of the present invention comprises a carrying platform 2 capable of moving along a linear guide 1 and arranged between two parallel measured profiles 3 and 4, wherein 4 displacement sensors are arranged on the carrying platform 2 corresponding to the two parallel measured profiles 3 and 4, wherein a first displacement sensor p is arranged1And a second displacement sensor p2Arranged side by side on one side of the carrying platform 2 and having a measuring head corresponding to the profile 3 to be measured, a third displacement sensor p3And a fourth displacement sensor p4Arranged side by side on the other side of the carrying platform 2 and the feeler corresponds to the profile 4 to be measured. On said carrying platform 2, said first displacement sensor p1And third displacement sensingDevice p3Are collinear.
Setting the first displacement sensor p1And a second displacement sensor p2Are spaced apart from each other by a distance d1Third displacement sensor p3And a fourth displacement sensor p4Are spaced apart from each other by a distance d2And, and:
d1-d2=s
wherein s is the step spacing of the carrying platform, d1And d2Is an integer multiple of s.
The reconstruction method of the parallel contour data processing error-free reconstruction device comprises the following steps:
1) as shown in FIGS. 2 and 3, a carrier platform 2 is mounted on a linear guide 1 between two parallel profiles 3, 4 to be measured, with a sensor spacing d1And d2Satisfy s ═ d1-d2Sensor p1And p3Placed back to back and located at the head ends 5 of the two parallel measured profiles 3, 4, and the first to fourth displacement sensors p on the carrying platform 21、p2、p3、p4The measuring heads respectively correspond to two parallel measured outlines 3 and 4;
2) moving the carrying platform 2 along the linear guide 1 to make the first to fourth displacement sensors p1、p2、p3、p4The first to the fourth displacement sensors p are moved from the head ends 5 of the two parallel measured profiles 3, 4 to the tail ends 6 according to the set stepping distance, and the first to the fourth displacement sensors p are moved every time when stepping once1、p2、p3、p4Respectively collecting once measurement data, wherein the measurement data are first to fourth displacement sensors p1、p2、p3、p4From the measuring point on the corresponding profile 3, 4 to the first to fourth displacement sensor p1、p2、p3、p4Distance data between corresponding measurement zeros;
3) and processing the acquired measurement data to obtain the reconstruction results of the two parallel measured outlines 3 and 4. The method comprises the following steps:
(1) respectively setting: first, theA displacement sensor p1And a second displacement sensor p2At a distance d from each other1Third displacement sensor p3And a fourth displacement sensor p4At a distance d from each other2(ii) a The step distance of the carrying platform is s, and s is d1-d2,d1And d2Is an integer multiple of s; setting the moving direction of the carrying platform 2 as the x-axis direction and the measuring direction of the displacement sensor as the y-axis direction;
(2) setting the first displacement sensor p after the ith step in the acquisition measurement1The x-axis coordinate of the corresponding measuring point is xiAt this time, the first to fourth displacement sensors p1、p2、p3、p4The acquired distance data corresponds to m1(xi)、m2(xi)、m3(xi)、m4(xi) (ii) a Acquiring stepping of the sensors for N times in measurement, wherein the number of data acquired by each sensor is N + 1;
(3) setting the reconstruction profiles of the two parallel measured profiles 3 and 4 as f and g respectively, wherein f is a first displacement sensor p in acquisition measurement1And a second displacement sensor p2The reconstructed contour of the corresponding measured contour g is the third displacement sensor p in the acquisition measurement3And a fourth displacement sensor p4A reconstructed contour of the corresponding measured contour; set f' (x)i+d2) And g' (x)i+d2) Respectively, the first displacement sensor p in the acquisition measurement1And a second displacement sensor p2Corresponding measured profile and third displacement sensor p in acquisition measurement3And a fourth displacement sensor p4The coordinate of the corresponding measured profile on the x axis is xi+d2The first derivative of (a) is calculated by a differential formula:
Figure BDA0002322705280000041
Figure BDA0002322705280000042
wherein m is1(xi+d1) And m1(xi+d2) For acquiring a first displacement sensor p in the measurement1The x-axis coordinate of the corresponding measuring point is xi+d1And xi+d2While the first displacement sensor p1Collected distance data; m is3(xi+d1) And m3(xi+d2) For acquiring a first displacement sensor p in the measurement1The x-axis coordinate of the corresponding measuring point is xi+d1And xi+d2While, the third displacement sensor p3Collected distance data;
(4) setting the first displacement sensor p in the acquisition measurement1And a second displacement sensor p2The x-axis coordinate on the reconstructed contour obtained by iteration of the corresponding measured contour is xiThe reconstruction value at the reconstruction point is f (x)i) Third displacement sensor p in acquisition measurement3And a fourth displacement sensor p4The x-axis coordinate on the reconstructed contour obtained by iteration of the corresponding measured contour is xiThe reconstruction value at the reconstruction point is g (x)i) F (x) is calculated by the following iterative formulai) And g (x)i):
f(xi)=f′(xi-1)·s+f(xi-1)
g(xi)=g′(xi-1)·s+g(xi-1)
Wherein, f (x)i-1) And g (x)i-1) Respectively, the first displacement sensor p in the acquisition measurement1And a second displacement sensor p2Corresponding measured profile and third displacement sensor p3And a fourth displacement sensor p4The x-axis coordinate on the reconstructed contour obtained by iteration of the corresponding measured contour is xi-1At the reconstructed value of the reconstructed point, f' (x)i-1) And g' (x)i-1) Respectively, the first displacement sensor p in the acquisition measurement1And a second displacement sensor p2Corresponding measured profile and third displacement sensor p in acquisition measurement3And a fourth displacement sensor p4The coordinate of the corresponding measured profile on the x axis is xi-1The first derivative of (c).
The measuring method can remove the straightness error of the measuring reference and realize that the distance between the reconstructed points is smaller than the distance between the sensors (s is less than d)1、s<d2) And (4) reconstructing without data processing errors. And calculating and solving related parameters such as contour straightness, parallelism and the like by using the reconstruction results f and g.
The invention adopts a commercialized displacement sensor as an information acquisition source, and the displacement sensor is a contact displacement sensor shown in the figure, and non-contact displacement sensors with different measurement principles can be selected according to the requirement in actual operation. During measurement, the carrying guide rail and the measuring device are placed between the measured objects, and the relative positions of the sensors on the carrying platform are adjusted, so that the distances between the sensors on the two sides of the carrying platform are d1And d2And the measured object is positioned in the measuring range of each displacement sensor. After the adjustment is completed, the carrier rail is used for stepping by a distance s (s ═ d)1-d2And d is1、d2Which is an integral multiple of s) moving the carrying platform, and controlling each sensor to collect measurement data once every time the carrying platform moves. After the scanning measurement and the data acquisition are finished, a reconstruction result is obtained through the various calculations.

Claims (5)

1. A data processing error free reconstruction device for parallel profiles comprises a carrying platform (2) which is arranged between two parallel measured profiles (3, 4) and can move along a linear guide rail (1), and is characterized in that 4 displacement sensors are arranged on the carrying platform (2) corresponding to the two parallel measured profiles (3, 4), wherein a first displacement sensor (p) is arranged1) And a second displacement sensor (p)2) Arranged side by side on one side of the carrying platform (2) and having a measuring head corresponding to the profile (3) to be measured, a third displacement sensor (p)3) And a fourth displacement sensor (p)4) The measuring heads are arranged on the other side of the carrying platform (2) side by side, and correspond to the measured profile (4).
2. The parallel-contour data-processing-error-free reconstruction device of claim 1, wherein said device is disposed in said computerOn the carrying platform (2), the first displacement sensor (p)1) And a third displacement sensor (p)3) Are collinear.
3. A parallel-profile data-processing-error-free reconstruction device according to claim 1, characterized in that the first displacement sensor (p) is set1) And a second displacement sensor (p)2) Are spaced apart from each other by a distance d1Third displacement sensor (p)3) And a fourth displacement sensor (p)4) Are spaced apart from each other by a distance d2And, and:
d1-d2=s
wherein s is the step spacing of the carrying platform, d1And d2Is an integer multiple of s.
4. A reconstruction method of a parallel-profile data processing error-free reconstruction apparatus according to claim 1, comprising the steps of:
1) a carrying platform (2) is arranged on a linear guide rail (1) between two parallel measured profiles (3, 4) and is positioned at the head ends (5) of the two parallel measured profiles (3, 4), and a first displacement sensor (p) to a fourth displacement sensor (p) on the carrying platform (2)1、p2、p3、p4) The measuring heads respectively correspond to two parallel measured profiles (3, 4);
2) moving the carrying platform (2) along the linear guide (1) to move the first to fourth displacement sensors (p)1、p2、p3、p4) Moving from the head end (5) of two parallel measured profiles (3, 4) to the tail end (6) according to a set stepping distance, and stepping once every time, and moving the first to fourth displacement sensors (p)1、p2、p3、p4) Respectively collecting once measurement data, the measurement data being a first to a fourth displacement sensor (p)1、p2、p3、p4) From the measuring point on the corresponding measured profile (3, 4) to the first to fourth displacement sensors (p)1、p2、p3、p4) Distance data between corresponding measurement zeros;
3) and processing the acquired measurement data to obtain the reconstruction results of the two parallel measured profiles (3, 4).
5. The reconstruction method of the parallel-profile data processing error-free reconstruction device according to claim 4, wherein the step 3) comprises:
(1) respectively setting: first displacement sensor (p)1) And a second displacement sensor (p)2) At a distance d from each other1Third displacement sensor (p)3) And a fourth displacement sensor (p)4) At a distance d from each other2(ii) a The step distance of the carrying platform is s, and s is d1-d2,d1And d2Is an integer multiple of s; setting the moving direction of the carrying platform (2) as the x-axis direction and the measuring direction of the displacement sensor as the y-axis direction;
(2) setting the first displacement sensor (p) after the ith step in the acquisition measurement1) The x-axis coordinate of the corresponding measuring point is xiAt this time, the first to fourth displacement sensors (p)1、p2、p3、p4) The acquired distance data corresponds to m1(xi)、m2(xi)、m3(xi)、m4(xi) (ii) a Acquiring stepping of the sensors for N times in measurement, wherein the number of data acquired by each sensor is N + 1;
(3) setting the reconstruction profiles of the two parallel measured profiles (3, 4) as f and g respectively, wherein f is a first displacement sensor (p) in the acquisition measurement1) And a second displacement sensor (p)2) The reconstructed profile of the corresponding measured profile, g is the third displacement sensor (p) in the acquisition measurement3) And a fourth displacement sensor (p)4) A reconstructed contour of the corresponding measured contour; set f' (x)i+d2) And g' (x)i+d2) Respectively, a first displacement sensor (p) in the acquisition measurement1) And a second displacement sensor (p)2) Corresponding measured profile and a third displacement sensor (p) in the acquisition measurement3) And a fourth displacement sensor (p)4) The coordinate of the corresponding measured profile on the x axis is xi+d2The first derivative of (a) is calculated by a differential formula:
Figure FDA0002322705270000021
Figure FDA0002322705270000022
wherein m is1(xi+d1) And m1(xi+d2) For acquiring a first displacement sensor (p) in the measurement1) The x-axis coordinate of the corresponding measuring point is xi+d1And xi+d2While, the first displacement sensor (p)1) Collected distance data; m is3(xi+d1) And m3(xi+d2) For acquiring a first displacement sensor (p) in the measurement1) The x-axis coordinate of the corresponding measuring point is xi+d1And xi+d2While, the third displacement sensor (p)3) Collected distance data;
(4) setting a first displacement sensor (p) in the acquisition measurement1) And a second displacement sensor (p)2) The x-axis coordinate on the reconstructed contour obtained by iteration of the corresponding measured contour is xiThe reconstruction value at the reconstruction point is f (x)i) Third displacement sensor (p) in acquisition measurement3) And a fourth displacement sensor (p)4) The x-axis coordinate on the reconstructed contour obtained by iteration of the corresponding measured contour is xiThe reconstruction value at the reconstruction point is g (x)i) F (x) is calculated by the following iterative formulai) And g (x)i):
f(xi)=f′(xi-1)·s+f(xi-1)
g(xi)=g′(xi-1)·s+g(xi-1)
Wherein, f (x)i-1) And g (x)i-1) Respectively, a first displacement sensor (p) in the acquisition measurement1) And a second displacement sensor (p)2) Corresponding measured profile and third displacement transmissionSenser (p)3) And a fourth displacement sensor (p)4) The x-axis coordinate on the reconstructed contour obtained by iteration of the corresponding measured contour is xi-1At the reconstructed value of the reconstructed point, f' (x)i-1) And g' (x)i-1) Respectively, a first displacement sensor (p) in the acquisition measurement1) And a second displacement sensor (p)2) Corresponding measured profile and a third displacement sensor (p) in the acquisition measurement3) And a fourth displacement sensor (p)4) The coordinate of the corresponding measured profile on the x axis is xi-1The first derivative of (c).
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