CN111051894A - Test socket and conductive particles - Google Patents
Test socket and conductive particles Download PDFInfo
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- CN111051894A CN111051894A CN201880055925.2A CN201880055925A CN111051894A CN 111051894 A CN111051894 A CN 111051894A CN 201880055925 A CN201880055925 A CN 201880055925A CN 111051894 A CN111051894 A CN 111051894A
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- insulating material
- conductive portions
- elastic insulating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0483—Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The invention relates to a test socket and a conductive particle. In particular, it relates to a test socket configured to be placed between a test target element and a test device to electrically connect terminals of the test target element to pads of the test device, comprising: a plurality of conductive portions provided at positions corresponding to terminals of the test target element, respectively, wherein a plurality of conductive particles are arranged in the elastic insulating material in the vertical direction; and an insulating support portion disposed between and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions, wherein at least one of the plurality of conductive particles includes: a body including a metal material and forming an outer portion of the conductive particle; and a plurality of fine silica particles securely coupled to the elastic insulating material of the plurality of conductive parts while being in contact with the elastic insulating material in a state where portions of the plurality of fine silica particles are fixed to the inside of the main body and other portions of the plurality of fine silica particles protrude from the main body.
Description
Technical Field
The present invention relates to a test socket and a conductive particle, and more particularly, to a test socket and a conductive particle configured to prevent the conductive particle from being separated from a conductive portion during a test process.
Background
Generally, the test socket is used to check whether the manufactured device has defects or errors during the test process. That is, when an electrical test is performed to check whether a manufactured element (test target element) has a defect or an error, the test target element and the inspection device are not brought into direct contact with each other but are indirectly connected to each other via the test socket. The reason for this is that the inspection device is relatively expensive, and it causes difficulty and high cost when it is frequently contacted with the test target member to cause abrasion or damage, thereby requiring replacement with a new inspection device. Accordingly, the test socket may be detachably attached to the upper side of the inspection apparatus, and then the test target element to be tested may be electrically connected to the inspection apparatus by contacting the test target element with the test socket instead of contacting the test target element with the inspection apparatus. Thereafter, the electrical signal generated from the test device can be transmitted to the test target device through the test socket.
Referring to fig. 1 and 2, the test socket (100) may be placed between the test target element (140) and the inspection device (130) so as to electrically connect the terminals (141) of the test target element (140) to the pads (131) of the inspection device (130). The test socket (100) comprises: conductive portions (110) respectively arranged at positions corresponding to the terminals (141) of the test target element (140) and having conductivity in a thickness direction of the test socket (100), each of the conductive portions (110) being formed by arranging a plurality of conductive particles (111) in an elastic insulating material in the thickness direction of the test socket (100); and an insulating support portion (120) supporting the conductive portions (110) and insulating the conductive portions (110) from each other. In this case, the test socket (100) is configured such that when the test socket (100) is placed on the inspection device (130), the conductive portion (110) can be brought into contact with the pad (131) of the inspection device (130), and the test target element (140) can be brought into contact with the conductive portion (110) of the test socket (100).
The test target element (140) transferred using the interposer (not shown) is brought into contact with the conductive portion (110) of the test socket (100) and stably placed on the test socket (100), and then the electric signal applied by the detection device (130) is transmitted to the test target element (140) via the conductive portion (110). In this way, electrical testing is performed.
The conductive portion of the test socket is formed by arranging conductive particles in an elastic insulating material, and the terminals of the test target element can be brought into frequent contact with the conductive portion. As described above, when the terminal of the test target element is frequently brought into contact with the conductive portion, the conductive particles distributed in the elastic insulating material may be easily separated from the elastic insulating material. In particular, since the conductive particles have a spherical shape, the conductive particles may be more easily separated from the elastic insulating material. As described above, if the conductive particles separate, the conductivity of the test socket may decrease and thus may negatively impact test reliability.
According to a technique disclosed in korean patent registration No. 1339166 (publication date: 12/9/2013) filed by the applicant of the present application to solve the above-mentioned problems, through-holes are formed in conductive particles, and a surrounding elastic insulating material is filled in the through-holes to prevent the conductive particles from being separated from the conductive parts.
This technique of the related art has an effect of preventing the conductive particles from being separated from the conductive portion, compared to the case of using spherical conductive particles. However, basically, due to the difference in material between the conductive particles formed of the conductive metal material and the elastic insulating material formed of the silicone rubber and surrounding the conductive particles, the interfacial adhesion force (at the surface portion of the conductive particles with which the elastic insulating material makes contact) is weak.
Disclosure of Invention
Technical problem
The present invention is provided to solve the above problems. In particular, it is an object of the present invention to provide a test socket and a conductive particle configured to maintain a constant level of conductivity during a test process by securely maintaining the coupling between the conductive particle and the surrounding elastic insulating material.
Means for solving the problems
To achieve the above object, the present invention provides a test socket configured to be placed between a test target element and a test device to electrically connect terminals of the test target element to pads of the test device, the test socket comprising:
a plurality of conductive portions in which a plurality of conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to terminals of the test target element; and
an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the plurality of conductive particles comprises:
a body including a metal material and forming an outer portion of the conductive particle; and
a plurality of fine silica particles securely coupled to the elastic insulating material of the plurality of conductive portions while being in contact with the elastic insulating material in: a portion of the plurality of fine silica particles is fixed to the inside of the main body and the other portion of the plurality of fine silica particles protrudes from the main body.
In the case of a test socket, it is,
the plurality of fine silica particles may be uniformly distributed along the entire surface of the main body.
In the case of a test socket, it is,
the plurality of conductive portions may be manufactured by hardening the resilient insulating material from a liquid state,
wherein the plurality of conductive particles are arranged in a thickness direction of the elastic insulating material, and the fine silica particles can prevent the conductive particles from being separated from the elastic insulating material by inducing strong coupling between the conductive particles and the elastic insulating material when the elastic insulating material is hardened from a liquid state.
In the case of a test socket, it is,
the highly conductive metal and the magnetic substance may be coupled to each other in the body by mixing the highly conductive metal and the magnetic substance with each other or bringing the highly conductive metal and the magnetic substance into physical or chemical contact with each other.
In the case of a test socket, it is,
a recess that is concave and filled with an elastic insulating material may be provided in the body,
and the fine silica particles may be fixed to and protrude from the inner surface of the recess for securely coupling with the elastic insulating material filled in the recess.
To achieve the above object, the present invention provides a test socket configured to be placed between a test target element and a test device to electrically connect terminals of the test target element to pads of the test device, the test socket comprising:
a plurality of conductive portions in which a plurality of conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to terminals of the test target element; and
an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the plurality of conductive particles comprises:
a body including a metal material and forming an outer portion of the conductive particle; and
a plurality of high coupling strength fine particles firmly coupled to the elastic insulating material of the plurality of conductive portions while being in contact with the elastic insulating material in a state of: a portion of the plurality of high coupling strength fine particles is fixed to the inside of the body and the other portion of the plurality of high coupling strength fine particles protrudes from the body,
wherein the plurality of high coupling strength fine particles comprise a material having a higher adhesion to the elastic insulating material than to the metal material of the body.
In the case of a test socket, it is,
the plurality of high coupling strength fine particles may comprise calcium carbonate.
In the case of a test socket, it is,
the plurality of high coupling strength fine particles may be uniformly distributed along the entire surface of the body.
To achieve the above object, the present invention provides conductive particles for use in a test socket, the test socket comprising: a plurality of conductive portions in which conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to terminals of a test target element to be subjected to an electrical test; and an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the conductive particles disposed in the conductive portion comprises:
a body including a metal material and forming an outer portion of the conductive particle; and
a plurality of fine silica particles securely coupled to the resilient insulating material while in contact with the resilient insulating material in: a portion of the plurality of fine silica particles is fixed to the inside of the main body and the other portion of the plurality of fine silica particles protrudes from the main body.
Among the conductive particles, the particles of the conductive paste,
the plurality of fine silica particles may be uniformly distributed along the entire surface of the main body.
Among the conductive particles, the particles of the conductive paste,
the highly conductive metal and the magnetic substance may be coupled to each other in the body by mixing the highly conductive metal and the magnetic substance with each other or bringing the highly conductive metal and the magnetic substance into physical or chemical contact with each other.
To achieve the above object, the present invention provides conductive particles for use in a test socket,
the test socket includes: a plurality of conductive portions in which conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to terminals of the test target element; and an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the conductive particles comprises:
a body including a metal material and forming an outer portion of the conductive particle; and
a plurality of high coupling strength fine particles firmly coupled to the elastic insulating material of the plurality of conductive portions while being in contact with the elastic insulating material in a state of: a portion of the plurality of high coupling strength fine particles is fixed to the inside of the body and the other portion of the plurality of high coupling strength fine particles protrudes from the body,
wherein the plurality of high coupling strength fine particles comprise a material having a higher adhesion to the elastic insulating material than to the metal material of the body.
Among the conductive particles, the particles of the conductive paste,
the plurality of high coupling strength fine particles may be uniformly distributed along the entire surface of the body.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, fine silica particles are disposed on the surface of the conductive particles to ensure strong coupling between the conductive particles and the elastic insulating material, and thus the conductive particles may not be separated from the conductive portion even when the conductive portion is pressed during a test process, thereby maintaining the conductivity of the conductive portion at a constant level.
Drawings
Fig. 1 is a view showing a test socket of the prior art.
Fig. 2 is a view illustrating an operation state of the test socket shown in fig. 1.
Fig. 3 is a view illustrating a test socket according to an embodiment of the present invention.
Fig. 4 is a view illustrating conductive particles of the test socket illustrated in fig. 3.
Fig. 5 and 6 are views illustrating a method of manufacturing a test socket according to the present invention.
Fig. 7 is a view illustrating a conductive particle according to another embodiment of the present invention.
Detailed Description
Hereinafter, the test socket of the present invention will be described in detail with reference to the accompanying drawings.
According to the present invention, a test socket (10) is placed between a test target element (60) and a detecting device (70) to electrically connect terminals (61) of the test target element (60) to pads (71) of the detecting device (70). The test socket (10) includes a conductive portion (20) and an insulating support portion (30).
The conductive portions (20) are arranged at positions corresponding to the terminals (61) of the test target elements (60), respectively. The conductive portions (20) are spaced apart from each other in a surface direction of the test socket (10) such that the conductive portions (20) may be conductive in a thickness direction of the test socket (10) and may be non-conductive in a surface direction perpendicular to the thickness direction of the test socket (10). The conductive portion (20) is formed by arranging a plurality of conductive particles (21) in an elastic insulating material in the thickness direction of the test socket (10). When the upper surface of the conductive portion (20) is pressed, the conductive portion (20) is pressed in the thickness direction of the test socket (10) while expanding in the surface direction of the test socket (10).
Preferably, the elastic insulating material of the conductive portion (20) may comprise a polymeric substance having a cross-linked structure. Various curable polymer-forming materials can be used to obtain the elastic insulation material. Specific examples of the curable polymer-forming material include: conjugated diene rubbers such as polybutadiene rubbers (polybutadienerubber), natural rubbers, polyisoprene rubbers (polyisopropylene rubbers), styrene-butadiene copolymer rubbers (styrene-butadiene copolymer rubbers), and acrylonitrile-butadiene copolymer rubbers (acrylonitrile-butadiene copolymer rubbers), and hydrogenated products thereof; block copolymer rubbers such as styrene-butadiene-diene block copolymer rubbers and styrene-isoprene block copolymer rubbers, and hydrogenated products thereof; chloroprene rubber (chloroprene rubber); urethane rubber (urethane rubber); polyester rubber; epichlorohydrin rubber (epichlorohydrin rubber); silicone rubber (silicone rubber); ethylene-propylene copolymer rubber; and an ethylene-propylene-diene copolymer rubber.
When the conductive portion (20) is required to have weather resistance, the listed materials other than the conjugated diene rubber may be used. In particular, silicone rubber may be used in accordance with moldability and electrical characteristics.
The silicone rubber may be obtained from a liquid silicone rubber via crosslinking or condensation. The liquid silicone rubber may preferably be at 10-1Has a deformation rate of 10 seconds5Poise (poise) or less than 105Viscosity of poise. The silicone rubber may be one of a condensation-cured silicone rubber, an addition-cured silicone rubber, and a silicone rubber having a vinyl group or a hydroxyl group. Examples of the silicone rubber may include dimethyl silicone raw rubber (dimethyl silicone raw rubber), methyl vinyl silicone raw rubber (methyl vinyl silicone raw rubber), and methyl phenyl vinyl silicone raw rubber (methyl phenyl vinyl silicone raw rubber).
The conductive particles (21) have conductivity as a whole, and current can flow in the conductive portion (20) due to the conductive particles (21). The conductive particles (21) are contained in an elastic insulating material.
The conductive particles (21) include a main body (21a) and fine silica particles (21 b).
The main body (21a) contains a metal material and forms the overall exterior of the conductive particles (21). The body (21a) may have a generally spherical shape. However, the main body (21a) is not limited thereto. For example, the body (21a) may have another shape, such as a tubular column shape, a star shape, or an irregular shape.
The body (21a) contains a magnetic material. Specific examples of the magnetic material may include: particles of magnetic metals such as iron (iron; Fe), Cobalt (CO), nickel (Ni), aluminum nickel, ferrite, neodymium material (NdFeB), or samarium magnet (SmCo); particles of a metal alloy; particles containing any one of the metals; particles formed by preparing such particles as core particles and coating the core particles with a highly conductive metal such as gold, silver, palladium or rhodium; particles formed by preparing nonmagnetic metal particles, inorganic material particles such as glass beads, or polymer particles as core particles and coating the core particles with a conductive magnetic metal such as nickel or cobalt. In the enumerated examples, particles including nickel particles as core particles and coated with gold having high conductivity may be preferable.
In addition, the body (21a) may comprise an alloy in which a magnetic substance such as iron, cobalt, or nickel is mixed with a highly conductive metal such as gold, silver, or copper, or may be prepared by bringing the magnetic substance into physical or chemical contact with the highly conductive metal.
The fine silica particles (21b) are smaller than the main body (21a) and have a granular shape. The fine silica particles (21b) have the chemical formula SiO2. The fine silica (21b) has a higher adhesive strength with respect to the silicone rubber of the elastic insulating material than the metal material. That is, the interfacial adhesion between the fine silica particles (21b) and the silicone rubber is high, and therefore once the fine silica particles (21b) are coupled to the silicone rubber, the fine silica particles (21b) are not easily separated from the silicone rubber.
A part of the fine silica particles (21b) is masked in the surface of the main body (21a) so as to be firmly fixed to the main body (21a), and the other part of the fine silica particles (21b) protrudes from the main body (21 a). Fine silica particles (21b) protruding from the main body (21a) come into contact with and are firmly coupled to the elastic insulating material. The fine silica particles (21b) are uniformly distributed along the entire surface of the main body (21 a). However, the fine silica particles (21b) do not completely cover the surface of the main body (21a) so that the surfaces of the adjacent conductive particles (21) can make electrical contact with each other. In addition, the fine silica particles (21b) attached to the conductive particles (21) are spaced apart from each other.
In addition, if the number of the fine silica particles (21b) is increased, the conductivity may be lowered, but the life span of the test socket (10) may be improved by improving the adhesion between the fine silica particles (21b) and the elastic insulating material through effective adjustment of the number of the fine silica particles (21 b).
The insulating support portion (30) supports the conductive portions (20) and insulates the conductive portions (20) from each other to prevent current from flowing between the conductive portions (20). The insulating support portion (30) may comprise the same material as the resilient insulating material of the conductive portion (20). For example, the insulating support portion (30) may comprise silicone rubber. However, the insulating support portion (30) is not limited thereto. For example, the insulating support portion (30) may comprise a material different from the material comprised in the conductive portion (20).
A method of manufacturing the test socket (10) of the present invention will now be described with reference to fig. 5 and 6.
First, a forming material (20A) having fluidity is prepared by dispersing conductive particles (21) having magnetic properties in a liquid elastic insulating material. Next, as shown in fig. 5, the forming material (20A) is filled in the cavity of the mold, and at the same time, the frame plate 40 is placed in the mold in a state where the frame plate 40 is between the ferromagnetic portion (52) of the upper mold (50) and the ferromagnetic portion (57) of the corresponding lower mold (55). Then, for example, a pair of electromagnets (not shown) is placed on the upper surface of the ferromagnetic substance (51) of the upper mold (50) and on the lower surface of the ferromagnetic substance (56) of the lower mold (55), and this pair of electromagnets is operated so that a parallel magnetic field having a non-uniform intensity distribution can be applied in the thickness direction of the formation material (20A). That is, a parallel magnetic field having a relatively high magnetic strength is applied between the ferromagnetic portion (52) of the upper mold (50) and the ferromagnetic portion (57) of the corresponding lower mold (55) in the thickness direction of the forming material (20A).
Therefore, as shown in fig. 6, the conductive particles (21) dispersed in the forming material (20A) coalesce in the region to be formed into the conductive portion (20) between the ferromagnetic portion (52) of the upper mold (50) and the ferromagnetic portion (57) of the corresponding lower mold (55), and together with this, the conductive particles (21) are arranged in the thickness direction of the forming material (20A).
Further, in this state, the forming material (20A) is hardened, thereby manufacturing a test socket (10) including: a conductive portion (20) arranged between the ferromagnetic portion (52) of the upper mold (50) and the corresponding ferromagnetic portion (57) of the lower mold (55), the conductive particles (21) being densely filled in the conductive portion (20) in a state where the conductive particles (21) are arranged in a thickness direction of the elastic insulating material; and an insulating support portion (30) that is provided around the conductive portion (20) and contains no or almost no conductive particles (21).
When the test socket (10) is manufactured as described above, the fine silica particles (21b) induce a strong coupling between the conductive particles (21) and the elastic insulating material during the hardening process of the elastic insulating material. Therefore, even when the conductive portion (20) is pressed in a test process of testing the target element (60), it is possible to prevent the slip crack between the conductive particles (21).
In addition, even when the conductive portion (20) is compressed, strong coupling between the conductive particles (21) and the elastic insulating material can be maintained, and thus the conductivity can be maintained at a constant level.
In addition, since the fine silica particles (21b) have a high adhesion to an elastic insulating material such as silicone rubber, the conductive particles (21) may not be easily separated from the conductive part (20), and the life span of the test socket (10) may be improved.
According to the embodiment of the present invention, the test socket (10) has the following operational effects.
First, after the test socket (10) is placed on the inspection device (70), the test target element (60) is placed on the test socket (10). At this time, the conductive portion (20) of the test socket (10) is compressed by the terminal (61) of the test target element (60), and thus the conductive portion (20) becomes conductive. Then, an electric signal can be transmitted from the inspection device (70) to the test target element (60) via the conductive portion (20), thereby performing a test.
In the test socket of the present invention, the fine silica particles disposed on the conductive particles induce a firm coupling between the conductive particles and the silicone rubber (i.e., the elastic insulating material), and thus the conductivity can be maintained at a constant level.
In addition, in the prior art, when the elastic insulating material is expanded in a high-temperature environment, the contact surfaces between the conductive particles are always separated from each other. However, according to the embodiment of the present invention, the conductive particles to which the fine silica particles are attached can maintain strong coupling between the silica and the elastic insulating material, and thus contact between the conductive particles and the elastic insulating material can be maintained even when the elastic insulating material is expanded. That is, a more stable electrical contact can be maintained even in a high temperature environment.
In addition, according to the present invention, although the plating layer is formed on the main body of the conductive particles to obtain high conductivity, the fine silica particles may not be plated and remain in an exposed state.
The test socket of the present invention can be modified as follows.
In the present invention, the conductive particles are provided by attaching fine silica particles to the main body. However, this is a non-limiting example. For example, high coupling strength fine particles of a different material having a higher adhesion to the elastic insulating material than to the metal material of the body may be used. The high coupling strength fine particles may comprise calcium carbonate, calcium phosphate, alumina, titanium oxide, or the like. In addition, only fine silica particles or fine calcium carbonate particles may be used, or the main body may be formed by mixing different materials.
As described above, since the fine particles adhered to the surface of the body maintain their inherent characteristics, the fine particles can perfectly maintain adhesion to the elastic insulating material.
In addition, fine silica particles are formed on the surface of the main body having the spherical surface shape in the above-described embodiment. However, as shown in fig. 7, a plurality of recesses (22') may be formed in the surface of the main body (21a') of the conductive particles, and fine silica particles (21b ') may be formed on the inner surface of the recesses (22'). That is, the conductive particles (21') are firmly coupled to the elastic insulating material because the elastic insulating material is filled in the recess (22'), and besides, the conductive particles (21') can be more firmly coupled to the elastic insulating material due to the fine silica particles disposed on the inner surface of the recess (22').
Although preferred embodiments of the present invention have been shown and described above, the present invention is not limited to examples of embodiments or modifications thereof, and various other modifications and changes may be made without departing from the scope of the present invention.
Claims (13)
1. A test socket configured to be placed between a test target element and a test device to electrically connect terminals of the test target element to pads of the test device, the test socket comprising:
a plurality of conductive portions in which a plurality of conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to the terminals of the test target element; and
an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the plurality of conductive particles comprises:
a body including a metal material and forming an exterior of the conductive particle; and
a plurality of fine silica particles securely coupled to the elastic insulating material of the plurality of conductive portions while being in contact with the elastic insulating material in: a portion of the plurality of fine silica particles is fixed to the inside of the main body and the other portion of the plurality of fine silica particles protrudes from the main body.
2. The test socket of claim 1, wherein the plurality of fine silica particles are evenly distributed along the entire surface of the body.
3. The test socket of claim 1, wherein the plurality of conductive portions are manufactured by hardening the elastic insulating material from a liquid state, wherein the plurality of conductive particles are arranged in a thickness direction of the elastic insulating material, and
the fine silica particles prevent the conductive particles from being separated from the elastic insulating material by inducing strong coupling between the conductive particles and the elastic insulating material when the elastic insulating material is hardened from the liquid state.
4. The test socket of claim 1, wherein highly conductive metal and magnetic substance are coupled to each other in the body by mixing the highly conductive metal and the magnetic substance with each other or bringing the highly conductive metal and the magnetic substance into physical or chemical contact with each other.
5. The test socket of claim 1, wherein a plurality of recesses that are concave and filled with the resilient insulating material are disposed in the body, and
the fine silica particles are fixed to and protrude from an inner surface of the recess for securely coupling with the elastic insulating material filled in the recess.
6. A test socket configured to be placed between a test target element and a test device to electrically connect terminals of the test target element to pads of the test device, the test socket comprising:
a plurality of conductive portions in which a plurality of conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to the terminals of the test target element; and
an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the plurality of conductive particles comprises:
a body including a metal material and forming an exterior of the conductive particle; and
a plurality of high coupling strength fine particles securely coupled to the elastic insulating material of the plurality of conductive portions while being in contact with the elastic insulating material in a state of: a portion of the plurality of high-coupling-strength fine particles is fixed to the inside of the body and the other portion of the plurality of high-coupling-strength fine particles protrudes from the body,
wherein the plurality of high coupling strength fine particles comprise a material having a higher adhesion to the elastic insulating material than to the metal material of the body.
7. The test socket of claim 6, wherein the plurality of high coupling strength fine particles comprise calcium carbonate.
8. The test socket of claim 1, wherein the plurality of high coupling strength fine particles are evenly distributed along an entire surface of the body.
9. A conductive particle for use in a test socket, the conductive particle comprising: a plurality of conductive portions in which the conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to terminals of a test target element to be electrically tested; and an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the conductive particles disposed in the conductive portion comprises:
a body including a metal material and forming an exterior of the conductive particle; and
a plurality of fine silica particles securely coupled to the resilient insulating material while in contact with the resilient insulating material in: a portion of the plurality of fine silica particles is fixed to the inside of the main body and the other portion of the plurality of fine silica particles protrudes from the main body.
10. The conductive particle according to claim 9, wherein the plurality of fine silica particles are uniformly distributed along the entire surface of the main body.
11. The conductive particle according to claim 9, wherein a highly conductive metal and a magnetic substance are coupled to each other in the body by mixing the highly conductive metal and the magnetic substance with each other or bringing the highly conductive metal and the magnetic substance into physical or chemical contact with each other.
12. A conductive particle for use in a test socket, the conductive particle comprising: a plurality of conductive portions in which the conductive particles are arranged in an elastic insulating material in a vertical direction, the plurality of conductive portions being respectively provided at positions corresponding to terminals of a test target element; and an insulating support portion disposed between the plurality of conductive portions and electrically insulating the plurality of conductive portions from each other while supporting the plurality of conductive portions,
wherein at least one of the conductive particles comprises:
a body including a metal material and forming an exterior of the conductive particle; and
a plurality of high coupling strength fine particles securely coupled to the elastic insulating material of the plurality of conductive portions while being in contact with the elastic insulating material in a state of: a portion of the plurality of high coupling-strength fine particles is fixed to the inside of the body and the other portion of the high coupling-strength fine particles protrudes from the body,
wherein the plurality of high coupling strength fine particles comprise a material having a higher adhesion to the elastic insulating material than to the metal material of the body.
13. The conductive particle according to claim 12, wherein the plurality of high coupling strength fine particles are uniformly distributed along the entire surface of the body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0110660 | 2017-08-31 | ||
| KR1020170110660A KR101976703B1 (en) | 2017-08-31 | 2017-08-31 | Test socket and conductive particle |
| PCT/KR2018/009939 WO2019045426A1 (en) | 2017-08-31 | 2018-08-29 | Test socket and conductive particles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111051894A true CN111051894A (en) | 2020-04-21 |
| CN111051894B CN111051894B (en) | 2023-02-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880055925.2A Active CN111051894B (en) | 2017-08-31 | 2018-08-29 | Test socket and conductive particles |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR101976703B1 (en) |
| CN (1) | CN111051894B (en) |
| TW (1) | TWI708065B (en) |
| WO (1) | WO2019045426A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114076836A (en) * | 2020-08-21 | 2022-02-22 | Ｔｓｅ有限公司 | Test socket and test equipment comprising same |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110726918B (en) * | 2019-09-25 | 2022-04-05 | 苏州韬盛电子科技有限公司 | Semiconductor chip test coaxial socket with impedance matching structure and preparation method thereof |
| KR102387745B1 (en) * | 2020-06-23 | 2022-05-19 | (주)하이그레이드 | Method of reconstructing damaged silicone rubber socket |
| TWI845865B (en) * | 2021-10-08 | 2024-06-21 | 韓商斯諾有限公司 | Test socket |
| KR102707149B1 (en) * | 2021-12-13 | 2024-09-19 | 주식회사 티에프이 | Rubber socket for testing semiconductor package and conductive member for the same |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040080048A1 (en) * | 1999-09-17 | 2004-04-29 | Jsr Corporation | Anisotropically conductive sheet, production process thereof and connector |
| CN1926643A (en) * | 2003-11-06 | 2007-03-07 | 第一毛织株式会社 | Insulated conductive particles and an anisotropic conductive film containing the particles |
| KR20100069989A (en) * | 2008-12-17 | 2010-06-25 | 제일모직주식회사 | Insulated conductive particles and anisotropic conductive film composition using the same |
| CN101836265A (en) * | 2007-10-22 | 2010-09-15 | 日本化学工业株式会社 | Coated conductive powder and conductive adhesive using the same |
| CN103178033A (en) * | 2011-12-20 | 2013-06-26 | 第一毛织株式会社 | Semiconductor devices connected by anisotropic conductive film comprising conductive microspheres |
| CN104412112A (en) * | 2012-06-18 | 2015-03-11 | 株式会社Isc | Test socket including conductive particles in which through-holes are formed and method for manufacturing same |
| CN104741605A (en) * | 2015-04-10 | 2015-07-01 | 武汉大学 | Nano-silver wrapping type silicon dioxide nano-micron ball conductive powder and production method and application thereof |
| US20150377923A1 (en) * | 2013-02-19 | 2015-12-31 | Isc Co., Ltd. | Test socket with high density conduction section |
| TW201636617A (en) * | 2014-12-26 | 2016-10-16 | Isc股份有限公司 | Electric test socket and method of manufacturing conductive particles for electric test socket |
| KR101748184B1 (en) * | 2016-02-02 | 2017-06-19 | (주)티에스이 | Test socket and fabrication method of conductive powder for test socket |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101266124B1 (en) * | 2012-04-03 | 2013-05-27 | 주식회사 아이에스시 | Test socket with high density conduction section and fabrication method thereof |
| CN105448620B (en) * | 2014-07-10 | 2017-08-08 | 清华大学 | Field-transmitting cathode and field emission apparatus |
-
2017
- 2017-08-31 KR KR1020170110660A patent/KR101976703B1/en active IP Right Grant
-
2018
- 2018-08-29 WO PCT/KR2018/009939 patent/WO2019045426A1/en active Application Filing
- 2018-08-29 CN CN201880055925.2A patent/CN111051894B/en active Active
- 2018-08-30 TW TW107130236A patent/TWI708065B/en active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040080048A1 (en) * | 1999-09-17 | 2004-04-29 | Jsr Corporation | Anisotropically conductive sheet, production process thereof and connector |
| CN1926643A (en) * | 2003-11-06 | 2007-03-07 | 第一毛织株式会社 | Insulated conductive particles and an anisotropic conductive film containing the particles |
| CN101836265A (en) * | 2007-10-22 | 2010-09-15 | 日本化学工业株式会社 | Coated conductive powder and conductive adhesive using the same |
| KR20100069989A (en) * | 2008-12-17 | 2010-06-25 | 제일모직주식회사 | Insulated conductive particles and anisotropic conductive film composition using the same |
| CN103178033A (en) * | 2011-12-20 | 2013-06-26 | 第一毛织株式会社 | Semiconductor devices connected by anisotropic conductive film comprising conductive microspheres |
| CN104412112A (en) * | 2012-06-18 | 2015-03-11 | 株式会社Isc | Test socket including conductive particles in which through-holes are formed and method for manufacturing same |
| US20150153387A1 (en) * | 2012-06-18 | 2015-06-04 | Isc Co., Ltd. | Test socket including conductive particles in which through-holes are formed and method for manufacturing same |
| US20150377923A1 (en) * | 2013-02-19 | 2015-12-31 | Isc Co., Ltd. | Test socket with high density conduction section |
| TW201636617A (en) * | 2014-12-26 | 2016-10-16 | Isc股份有限公司 | Electric test socket and method of manufacturing conductive particles for electric test socket |
| CN104741605A (en) * | 2015-04-10 | 2015-07-01 | 武汉大学 | Nano-silver wrapping type silicon dioxide nano-micron ball conductive powder and production method and application thereof |
| KR101748184B1 (en) * | 2016-02-02 | 2017-06-19 | (주)티에스이 | Test socket and fabrication method of conductive powder for test socket |
Non-Patent Citations (1)
| Title |
|---|
| 科学技术文献出版社: "《绿色化工助剂》", 31 January 2006 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114076836A (en) * | 2020-08-21 | 2022-02-22 | Ｔｓｅ有限公司 | Test socket and test equipment comprising same |
| CN114076836B (en) * | 2020-08-21 | 2024-06-04 | Ｔｓｅ有限公司 | Test socket and test equipment comprising same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20190024070A (en) | 2019-03-08 |
| CN111051894B (en) | 2023-02-21 |
| WO2019045426A1 (en) | 2019-03-07 |
| TW201920973A (en) | 2019-06-01 |
| TWI708065B (en) | 2020-10-21 |
| KR101976703B1 (en) | 2019-05-09 |
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