CN111016432A - Piezoelectric type printing head and manufacturing method thereof - Google Patents
Piezoelectric type printing head and manufacturing method thereof Download PDFInfo
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- CN111016432A CN111016432A CN201911318517.4A CN201911318517A CN111016432A CN 111016432 A CN111016432 A CN 111016432A CN 201911318517 A CN201911318517 A CN 201911318517A CN 111016432 A CN111016432 A CN 111016432A
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- piezoelectric ceramic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14258—Multi layer thin film type piezoelectric element
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
The invention belongs to the technical field of droplet jet printing, and particularly relates to a piezoelectric type printing head and a manufacturing method thereof. The problem that the manufacturing process of the existing body piezoelectric actuator is complex is solved, and the printing head comprises the actuator and the runner plate; the driver comprises a body piezoelectric ceramic layer, a resin adhesive layer and a vibration film layer which are laminated from top to bottom; the top surface of the flow passage plate is provided with a main ink passage and n pressure cavities with the same size; the main ink channel is arranged along the length direction of the flow channel plate, the pressure cavities are arranged along the width direction of the flow channel plate, and the n pressure cavities are sequentially arranged along the length direction of the flow channel plate; the inlet ends of the n pressure cavities are communicated with the main ink channel; the bottoms of the n pressure cavities are provided with ink outlets; the vibrating membrane layer covers the tops of the n pressure cavities to seal the pressure cavities. The printing head driver is manufactured by bonding the piezoelectric ceramic and the printing head vibration film, is simple to process and manufacture, and is easy to realize continuous jet of the printing head.
Description
Technical Field
The invention belongs to the technical field of droplet jet printing, and particularly relates to a piezoelectric type printing head and a manufacturing method thereof.
Background
The droplet jet printing technology is a printing technology which generates a pressure difference between an ink chamber and the outside in a certain extrusion mode, so that the internal pressure of a nozzle is larger than the outside pressure, and ink is pushed out of the nozzle to generate tiny ink droplets. In general, droplet ejection technology can be divided into continuous and on-demand types, and the on-demand type has wide application because of its simple structure, good droplet consistency, high printing precision, and the like.
The inkjet print head is generally classified into a piezoelectric type inkjet print head and a thermal bubble type inkjet print head according to the ejection manner of ink droplets. The piezoelectric ink jet print head uses the deformation of piezoelectric material to generate force to jet ink drops; a thermal bubble type inkjet printhead ejects ink droplets by expansion of bubbles generated in ink by heating.
When the piezoelectric ink-jet printing head works, each driver of the printing head drives ink to jet, and the printing head is the most core part, and the dimensional consistency of the structure determines the consistency of liquid jetted by the printing head. It is therefore desirable to select a reasonable actuator configuration.
At present, the mainstream manufacturing process method of the bulk piezoelectric actuator is a piezoelectric driving structure preparation process based on eutectic bonding. The process needs to comprise the following steps: a. polishing the surface to be bonded, and polishing the surface to be bonded of the piezoelectric ceramic and the vibration film, which is very critical, because for the precise bonding technology such as eutectic bonding, the surface roughness directly determines the quality of the bonding result; b. and depositing a bonding layer, wherein the thickness of the bonding intermediate layer needs to be reduced as much as possible in order to avoid great influence of the bonding intermediate layer on the output characteristics of the piezoelectric ceramics. However, when there is no bonding layer, the piezoelectric ceramic cannot be directly bonded to the vibration film. c. And (3) eutectic bonding, wherein after the steps are completed, the eutectic bonding is completed at a specific temperature and under a specific pressure, and if the bonding temperature is too high, the piezoelectric ceramic needs to be polarized again. The process flow method is complex, if any one ring has a defect, the final bonding can fail, and the rejection rate is high.
Disclosure of Invention
In order to solve the problem of complex manufacturing process of piezoelectric actuators of target precursor materials, the invention provides a novel piezoelectric type printing head and a manufacturing process thereof, which are simple to process and manufacture, can effectively ensure the processing consistency of each actuator of the array printing head, can reduce the crosstalk between adjacent actuators, realize the consistency of the liquid sprayed by the printing head and improve the spraying performance of the printing head.
The technical scheme of the invention is to provide a piezoelectric printing head, which is characterized in that: comprises a driver and a runner plate;
the driver comprises a body piezoelectric ceramic layer, a resin adhesive layer and a vibration film layer which are laminated from top to bottom; the body piezoelectric ceramic layer is provided with a dividing groove, and the body piezoelectric ceramic layer is divided into n independent body piezoelectric ceramic units with the same size, wherein n is a positive integer greater than or equal to 1;
the top surface of the flow passage plate is provided with a main ink passage and n pressure cavities with the same size; the main ink channel is arranged along the length direction of the flow channel plate, the pressure cavities are arranged along the width direction of the flow channel plate, and the n pressure cavities are sequentially arranged along the length direction of the flow channel plate; the inlet ends of the n pressure cavities are communicated with the main ink channel; the bottoms of the n pressure cavities are provided with ink outlets;
the vibration film layer covers the tops of the n pressure cavities, seals the pressure cavities, and enables each pressure cavity to correspond to each body material piezoelectric ceramic unit one by one and to be located under each body material piezoelectric ceramic unit respectively.
Further, in order to facilitate electrode leads, the bulk piezoelectric ceramic layer comprises a lower electrode positioned on the lower surface of the bulk piezoelectric ceramic layer and an upper electrode positioned on the upper surface of the bulk piezoelectric ceramic layer; one end of the lower electrode is arranged on the upper surface of the bulk piezoelectric ceramic layer in an inverted mode through the side surface of the bulk piezoelectric ceramic layer, and an inverted electrode is formed on the upper surface; an isolation groove is arranged between the inverted electrode and the upper electrode.
Further, the resin adhesive layer is an epoxy resin adhesive layer.
Furthermore, the piezoelectric printing head also comprises a piezoelectric ceramic segmentation positioning mark which is arranged on the upper surface of the runner plate.
Furthermore, the piezoelectric printing head also comprises a transition plate arranged on the bottom surface of the flow channel plate, and the transition plate is provided with a transition channel which is communicated with each ink outlet and is coaxial with each ink outlet.
The piezoelectric printing head further comprises a nozzle plate arranged at the bottom of the transition plate, the nozzle plate is provided with nozzles which are communicated with and coaxial with the transition channels, and the caliber of each nozzle is smaller than that of each transition channel.
Further, the thickness of the bulk piezoelectric ceramic layer is 20um to 300um, and the thickness of the vibration thin layer is 10um to 200 um.
Furthermore, in order to eliminate the crosstalk between adjacent driving units, the groove depth of the dividing groove is equal to the thickness of the piezoelectric ceramic layer, and the piezoelectric ceramic layer is completely cut off; or the depth of the dividing groove is smaller than the thickness of the piezoelectric ceramic layer, so that the cutting depth allowance is within 10 um.
Furthermore, in order to ensure that the ink supply of each cavity is smooth and sufficient, the piezoelectric type printing head also comprises n pressure difference channels and n flow limiting channels, wherein the inlet end of each pressure difference channel is communicated with the main ink channel, and the outlet end of each pressure difference channel is communicated with each pressure cavity through each flow limiting channel; the level of the ink outlet end of the pressure difference channel is lower than that of the ink inlet end of the main ink channel, so that the ink in the main ink channel and the ink in each pressure cavity have the same hydraulic pressure difference.
The invention also provides a manufacturing method of the piezoelectric printing head, which comprises the following steps:
step one, forming a main ink channel, n pressure cavities with the same size and a positioning mark on the top surface of a flow channel plate;
calibrating the positions of the positioning marks and each pressure cavity;
bonding the body piezoelectric ceramic layer on the vibration film layer, and covering the vibration film layer on the pressure cavity;
determining the position of a cutting groove on the body piezoelectric ceramic layer through the positioning marks and the positions of the pressure cavities, and cutting the body piezoelectric ceramic layer into n independent body piezoelectric ceramic units with the same size; so that the plurality of separated piezoelectric ceramic small units correspond to the pressure cavities one by one.
The invention has the beneficial effects that:
1. the printing head driver is manufactured by bonding the piezoelectric ceramic and the printing head vibration film, is simple to process and manufacture, and is easy to realize continuous jet of the printing head.
2. The piezoelectric ceramic lower electrode is reversely arranged on the upper electrode surface, and the upper electrode and the lower electrode are separated by adopting an isolation groove, so that electrode leads are convenient.
3. The piezoelectric ceramic segmentation positioning marks are arranged on the pressure cavity runner plate, so that the segmented piezoelectric ceramic can be aligned with each pressure cavity.
4. When the piezoelectric ceramics are divided, each pressure cavity is completely cut off (even the pressure cavity can be cut to a vibration film or deeper) corresponding to the piezoelectric ceramics or cut in the depth allowance 10um, and the crosstalk of adjacent driving units is favorably reduced.
5. A certain hydraulic pressure difference exists between the main ink channel and each pressure cavity, so that ink is promoted to enter each cavity under the action of hydraulic pressure, smoothness and sufficiency of ink supply of each cavity are ensured, and the printing efficiency is effectively improved.
Drawings
FIG. 1 is a front view of a printhead according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view taken along line N-N of FIG. 1;
FIG. 3 is a cross-sectional view taken along line M-M of FIG. 1;
FIG. 4 is a schematic three-dimensional structure of a printhead according to an embodiment of the present invention;
the reference numbers in the figures are: 11-bulk piezoelectric ceramic layer, 12-inverted electrode, 13-isolation groove, 14-dividing groove, 15-resin glue layer, 16-vibration film layer, 17-flow channel plate, 18-main ink channel, 19-pressure cavity, 20-transition plate, 21-transition channel, 22-nozzle plate, 23-nozzle and 24-positioning mark.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
Fig. 1 is a schematic front view of the print head of the present embodiment, the front view being a horizontal xy plane. It mainly includes driver, main ink channel pressure chamber, etc.
Referring to fig. 1 to 4, the driver mainly includes a bulk piezoelectric ceramic layer 11, a counter electrode 12, an isolation groove 13, a dividing groove 14, a resin adhesive layer 15, and a vibration film 16. The print head driver of the embodiment adopts the piezoelectric ceramic layer 11 (including the electrode thickness of 20 um-300 um) and the vibration film layer 16 (thickness of 10 um-200 um) to be bonded and molded by resin, so that the processing and manufacturing are simple, and complex processes such as grinding, bonding and the like are not needed. Epoxy glue is used in this example. The lower electrode 12 of the bulk piezoelectric ceramic layer 11 is arranged opposite to the upper electrode surface, and the isolation groove 13 separates the upper electrode from the lower electrode, so that the upper electrode and the lower electrode are conveniently led out. In addition, the pressure ceramic 11 is divided into a plurality of independent piezoelectric ceramic units by the dividing grooves 14, wherein 26 is an upper electrode lead area, 25 is a lower electrode lead area, and each independent piezoelectric ceramic unit deforms to cause the pressure in the corresponding pressure cavity to increase, so that the ink is ejected.
In the figure, 17 is a flow channel plate, and a main ink channel 18 and a pressure cavity 19 are formed on the flow channel plate; the main ink channel is arranged along the length direction of the flow channel plate, the pressure cavities are arranged along the width direction of the flow channel plate, and 5 pressure cavities are sequentially arranged along the length direction of the flow channel plate; the inlet ends of the 5 pressure cavities are communicated with the main ink channel; the bottom parts of the 5 pressure cavities are provided with ink outlets; 18 is a main ink passage for providing a flow path of ink into the pressure chamber 19; and 19 is a pressure chamber which is positioned right below the separated small piezoelectric ceramic units, and when the piezoelectric ceramic deforms to cause the deformation of the vibration film 16, the pressure in the pressure chamber 19 is increased, and the ink ejection is realized. A nozzle plate 22 is arranged at the bottom of the pressure cavity, nozzles 23 communicated with the pressure cavities 19 are arranged on the nozzle plate 22, and a transition plate 20 can be additionally arranged between the bottom of the pressure cavity 19 and the nozzle plate 22 in order to enhance the strength of the nozzle plate 22.
As shown in the dotted line of fig. 2, in order to ensure the sufficiency and uniformity of the ink in each pressure chamber, a pressure difference channel and a flow-limiting channel are arranged between the main ink channel and the pressure chamber, the inlet end of each pressure difference channel is communicated with the main ink channel, and the outlet end is communicated with each pressure chamber through each flow-limiting channel; the level of the ink outlet end of the pressure difference channel is lower than that of the ink inlet end of the main ink channel, so that the ink in the main ink channel and the ink in each pressure cavity have the same hydraulic pressure difference. Compared with the traditional ink flow path of the piezoelectric ink-jet printing head, the main ink channel and each pressure cavity have certain and same hydraulic pressure difference, the uniform pressure of ink in each pressure cavity is ensured, the hydraulic pressure difference is helpful for pushing ink to enter the pressure cavity from the main ink channel through the pressure difference channel and the current-limiting channel, and the smooth and sufficient ink supply is realized.
In order to ensure that the plurality of independent piezoelectric ceramic small units after being divided correspond to the pressure cavities one by one, the positions of the pressure cavities need to be positioned and then divided. However, since the piezoelectric ceramic is adhered to the diaphragm and the diaphragm covers the pressure chamber, the position of the pressure chamber cannot be directly observed. The invention adopts the positioning mark 24, and the position of the positioning mark and the pressure cavity is calibrated, so that the position of the piezoelectric ceramic cutting groove is determined. In addition, the positioning mark 24 is arranged on the flow channel plate 17, the main ink channel 18, the pressure cavity 19 and the positioning mark 24 are formed in one-step machining, the position accuracy of the positioning mark and each pressure cavity is improved, the piezoelectric ceramics are divided by the positioning mark, the alignment of the divided piezoelectric ceramics and each pressure cavity 19 is favorably ensured, and the consistency of a printing head driver is improved.
In order to effectively reduce crosstalk between adjacent drivers, when the piezoelectric ceramics are divided, the pressure chambers are completely cut off (even the pressure chambers can be cut to the vibration film or deeper) corresponding to the piezoelectric ceramics or cut within 10um of the depth allowance.
The print head in this embodiment can be manufactured by the following method:
step one, forming a main ink channel, n pressure cavities with the same size and a positioning mark on the top surface of a flow channel plate;
calibrating the positions of the positioning marks and each pressure cavity;
bonding the body piezoelectric ceramic layer on the vibration film layer, and covering the vibration film layer on the pressure cavity;
determining the position of a cutting groove on the body piezoelectric ceramic layer through the positioning marks and the positions of the pressure cavities, and cutting the body piezoelectric ceramic layer into n independent body piezoelectric ceramic units with the same size; so that the plurality of separated piezoelectric ceramic small units correspond to the pressure cavities one by one.
The method for manufacturing the piezoelectric actuator is characterized in that the piezoelectric ceramic of the body material is bonded with the vibration film of the printing head to manufacture the printing head actuator, the piezoelectric ceramic adopting the reverse electrode and the segmentation scheme thereof, and the method for manufacturing the piezoelectric actuator belongs to the patent protection range.
Claims (10)
1. A piezoelectric printhead, comprising: comprises a driver and a runner plate;
the driver comprises a body piezoelectric ceramic layer, a resin adhesive layer and a vibration film layer which are laminated from top to bottom; the body piezoelectric ceramic layer is provided with a dividing groove, and the body piezoelectric ceramic layer is divided into n independent body piezoelectric ceramic units with the same size, wherein n is a positive integer greater than or equal to 1;
the top surface of the flow channel plate is provided with a main ink channel and n pressure cavities with the same size; the main ink channel is arranged along the length direction of the flow channel plate, the pressure cavities are arranged along the width direction of the flow channel plate, and the n pressure cavities are sequentially arranged along the length direction of the flow channel plate; the inlet ends of the n pressure cavities are communicated with the main ink channel; the bottoms of the n pressure cavities are provided with ink outlets;
the vibration film layer covers the tops of the n pressure cavities, seals the pressure cavities, and enables each pressure cavity to correspond to each body material piezoelectric ceramic unit one by one and to be located under each body material piezoelectric ceramic unit respectively.
2. The piezoelectric printhead of claim 1, wherein: the bulk piezoelectric ceramic layer comprises a lower electrode positioned on the lower surface of the bulk piezoelectric ceramic layer and an upper electrode positioned on the upper surface of the bulk piezoelectric ceramic layer; one end of the lower electrode is reversely arranged on the upper surface of the bulk piezoelectric ceramic layer through the side surface of the bulk piezoelectric ceramic layer, and a reverse electrode is formed on the upper surface; an isolation groove is arranged between the reverse electrode and the upper electrode.
3. The piezoelectric printhead of claim 2, wherein: the resin adhesive layer is an epoxy resin adhesive layer.
4. The piezoelectric printhead of claim 3, wherein: the flow passage plate is characterized by further comprising a piezoelectric ceramic segmentation positioning mark, wherein the piezoelectric ceramic segmentation positioning mark is arranged on the upper surface of the flow passage plate.
5. The piezoelectric printhead of any one of claims 1 to 4, wherein: the ink jet printing ink cartridge is characterized by further comprising a transition plate arranged on the bottom surface of the flow channel plate, wherein a transition channel which is communicated with each ink outlet and is coaxial with each ink outlet is formed in the transition plate.
6. The piezoelectric printhead of claim 5, wherein: the nozzle plate is arranged at the bottom of the transition plate, nozzles which are communicated with and coaxial with the transition channels are arranged on the nozzle plate, and the caliber of each nozzle is smaller than that of each transition channel.
7. The piezoelectric printhead of claim 6, wherein: the thickness of body material piezoceramics layer is 20um ~ 300um, the thickness of vibration thin layer is 10um ~ 200 um.
8. The piezoelectric printhead of claim 7, wherein: the groove depth of the dividing groove is equal to the thickness of the piezoelectric ceramic layer, and the piezoelectric ceramic layer is completely cut off; or the depth of the dividing groove is smaller than the thickness of the piezoelectric ceramic layer, so that the cutting depth allowance is within 10 um.
9. The piezoelectric printhead of claim 7, wherein: the ink jet printing head also comprises n pressure difference channels and n flow limiting channels, wherein the inlet end of each pressure difference channel is communicated with the main ink channel, and the outlet end of each pressure difference channel is communicated with each pressure cavity through each flow limiting channel; the level of the ink outlet end of the pressure difference channel is lower than that of the ink inlet end of the main ink channel, so that the ink in the main ink channel and the ink in each pressure cavity have the same hydraulic pressure difference.
10. A method for manufacturing a piezoelectric type printing head is characterized by comprising the following steps:
step one, forming a main ink channel, n pressure cavities with the same size and a positioning mark on the top surface of a flow channel plate;
calibrating the positions of the positioning marks and each pressure cavity;
bonding the body piezoelectric ceramic layer on the vibration film layer, and covering the vibration film layer on the pressure cavity;
determining the position of a cutting groove on the body piezoelectric ceramic layer through the positioning marks and the positions of the pressure cavities, and cutting the body piezoelectric ceramic layer into n independent body piezoelectric ceramic units with the same size; so that the plurality of separated piezoelectric ceramic small units correspond to the pressure cavities one by one.
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| CN201911318517.4A CN111016432A (en) | 2019-12-19 | 2019-12-19 | Piezoelectric type printing head and manufacturing method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114228341A (en) * | 2021-12-16 | 2022-03-25 | 山东中康国创先进印染技术研究院有限公司 | Piezoelectric ink jet head and ink jet printing equipment |
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| CN104097400A (en) * | 2013-04-01 | 2014-10-15 | 施乐公司 | Processing and application of liquid epoxy adhesive for printhead structures interstitial bonding in high density piezo printheads fabrication |
| CN106827813A (en) * | 2015-12-07 | 2017-06-13 | 清华大学 | Finger-like cantilever type piezoelectric shower nozzle and its processing method and spraying equipment |
| CN109421374A (en) * | 2017-08-30 | 2019-03-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Piezoelectric ink jet printing chip and the encapsulating structure for encapsulating the piezoelectric ink jet printing chip |
| CN109130169A (en) * | 2018-09-03 | 2019-01-04 | 西安增材制造国家研究院有限公司 | A kind of MEMS print head encapsulation |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114228341A (en) * | 2021-12-16 | 2022-03-25 | 山东中康国创先进印染技术研究院有限公司 | Piezoelectric ink jet head and ink jet printing equipment |
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