CN111015741A - Flexible driver integrating perception and execution - Google Patents
Flexible driver integrating perception and execution Download PDFInfo
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- CN111015741A CN111015741A CN201911278907.3A CN201911278907A CN111015741A CN 111015741 A CN111015741 A CN 111015741A CN 201911278907 A CN201911278907 A CN 201911278907A CN 111015741 A CN111015741 A CN 111015741A
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- liquid metal
- flexible
- flexible substrate
- driver
- sensing unit
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
Abstract
A flexible driver integrating sensing and execution comprises a flexible driver consisting of a flexible base body and a flexible driving unit in the flexible driver, wherein liquid metal sensing units are locally arranged on the surface and in the flexible base body and are connected with leads; when the flexible substrate deforms, the expansion or contraction of the flexible substrate can drive the corresponding liquid metal sensing unit to extend or shorten, and when the liquid metal extends, the length is increased and the cross section area is reduced, so that the resistance of the liquid metal is increased; when the liquid metal is shortened, the resistance of the liquid metal is reduced due to the reduction of the length and the increase of the cross-sectional area; obtaining the strain of the flexible substrate at the liquid metal sensing unit by obtaining the change of the liquid metal resistance; the liquid metal sensing units are arranged on the surface and in the flexible substrate in a localized mode, so that the strain of the surface and any position of a bulk phase of the flexible driver can be measured in real time and on line.
Description
Technical Field
The invention belongs to the technical field of micro-nano manufacturing and sensing, and particularly relates to a flexible driver integrating sensing and execution.
Background
Compared with the traditional driver with a complex mechanical structure, the flexible driver with the flexible functional material as the base body can realize complex and intelligent mechanical deformation through a simple structure under the conditions of temperature, light, current and the like, has the functional characteristics of excellent mechanical flexibility, excellent environmental adaptability and the like, and shows great development prospects in the fields of narrow space detection, robot arms, intelligent implantation systems in organisms and the like.
The execution precision is a main bottleneck problem restricting the development of the flexible driver, and in order to improve the execution precision of the flexible driver, a measurement unit is mainly adopted to sense an execution physical quantity at present, and then the sensed quantity is fed back to a control unit of the driver to perform feedback compensation, so that the execution precision of the driver is improved. The existing measurement unit is mainly a mounting structure, and the structure can only sense physical quantities (such as temperature, strain and the like) at a mounting position, cannot sense any position, particularly physical quantities inside a body, and is difficult to reflect the real service state of the driver, such as temperature distribution inside the body, local strain concentration, corresponding crack states and the like.
Since the traditional sensing device is mostly based on metal and semiconductor materials such as copper and iron, the stretchability and the sensitivity of the traditional sensing device are greatly limited, and therefore, when the flexible driver is greatly deformed, the surface and the internal physical quantity of the body are difficult to sense. In addition, the main reasons of failure of the driver are bulk phase cracks and the damage of the driver caused by insufficient bulk phase internal strength, so that the strain sensing of key points in the driver bulk phase has important significance for improving the precision of the driver and ensuring the stable service of the driver.
As the requirement for precision of the driver is becoming higher and the service environment is becoming more complex, the development of drivers for sensing/executing common bodies is required, and particularly for flexible drivers, sensing of multiple physical quantities of surface and bulk phase key points is required.
Disclosure of Invention
In order to overcome the disadvantages of the prior art, the present invention provides a flexible actuator for sensing/executing a common body, which can sense the physical quantity (such as temperature, strain, etc.) of any point in the surface and the body when the flexible actuator is greatly deformed.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a flexible driver integrating sensing and execution comprises a flexible substrate 1 and a flexible driving unit 2 in the flexible substrate, wherein a liquid metal sensing unit 3 is locally arranged on the surface and in the flexible substrate 1, and the liquid metal sensing unit 3 is connected with a lead 4.
The flexible substrate 1 adopts a three-dimensional structure, one or more cavities are distributed in the flexible substrate 1, and flexible driving materials are arranged in the cavities to form the flexible driving unit 2.
The flexible substrate 1 is made of flexible materials including PDMS, Ecoflex, hydrogel and the like.
The flexible driving unit 2 comprises a liquid-gas phase change driving unit, a hydrogel driving unit, a gas driving unit and an ionic liquid driving unit.
The liquid metal of the liquid metal sensing unit 3 is in a thin line shape, and the line width or the diameter is 0.01 mm-1 mm; the liquid metal is a simple metal or alloy with a melting point lower than 200 ℃, and comprises gallium and alloy thereof, bismuth-based alloy and the like.
The lead 4 is partially embedded in the flexible substrate 1, one end of the lead is connected with the liquid metal sensing unit 3, and the other end of the lead is led out of the flexible substrate 1.
Each liquid metal sensing unit 3 works independently, and the plurality of liquid metal sensing units 3 are in a network-shaped optimized layout in the flexible substrate 1 and the cavity thereof to form a sensing array, so that X, Y, Z physical quantity measurement in each direction of space is realized, and the physical quantity is strain and temperature.
When the flexible substrate 1 deforms, the expansion or contraction of the flexible substrate 1 simultaneously drives the corresponding liquid metal sensing unit 3 to extend or shorten, and when the liquid metal extends, the resistance of the liquid metal is increased due to the increase of the length and the reduction of the cross section area; when the liquid metal is shortened, the resistance of the liquid metal is reduced due to the reduction of the length and the increase of the cross-sectional area; obtaining the strain of the flexible substrate 1 at the liquid metal sensing unit 3 by obtaining the change of the liquid metal resistance; the liquid metal sensing units 3 are arranged on the surface and in the flexible substrate 1 in a localized mode, so that the strain of the surface and any position of a bulk phase of the flexible driver can be measured in real time and on line.
The sensing/execution integrated flexible driver can be expanded to measure the temperature of any position of the surface and bulk of the flexible driver, when the length and the cross-sectional area of the liquid metal sensing unit 3 are not changed, the resistance of the liquid metal and the temperature have a one-to-one correspondence relationship due to different resistivities of the liquid metal at different temperatures, and the temperature of the position where the liquid metal is located is obtained by obtaining the resistance of the liquid metal through the lead 4; and then, the liquid metal sensing units 3 are locally arranged on the surface and inside of the flexible driver, so that the temperature of any position on the surface and inside of the flexible driver can be measured in real time and on line.
The invention has the following beneficial effects:
the sensing/execution integrated flexible driver utilizes the inherent metal characteristics and the fluidity of the liquid metal sensing unit 3, and can realize the sensing of the physical quantity (strain, temperature and the like) of any point on the surface and in the bulk phase when the flexible driver is greatly deformed on the basis of the liquid metal sensing unit 3 through the localized arrangement.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention, wherein FIG. (a) is a three-dimensional diagram, FIG. (b) is a front view, and FIG. (c) is a top view.
FIG. 2 is a schematic diagram of the overall heating and cooling operation of an embodiment of the present invention.
Fig. 3 is a schematic diagram of the operation principle of local heating and cooling according to the embodiment of the present invention.
FIG. 4 is a schematic view of the localized arrangement of the liquid metal sensing unit of the present invention.
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the scope of the present invention should not be limited thereto.
Referring to fig. 1, a flexible actuator for sensing/executing integration comprises a flexible actuator consisting of a flexible substrate 1 and a flexible driving unit 2 inside the flexible substrate, a liquid metal sensing unit 3 is locally arranged on the surface and inside the flexible substrate 1, and the liquid metal sensing unit 3 is connected with a lead 4.
The flexible substrate 1 of the embodiment is a PDMS cylinder with a bottom surface radius of 5mm and a height of 15 mm; two columnar cavities with sector sections are arranged in the flexible substrate 1, and ethanol is sealed in the cavities to serve as a flexible driving unit 2; the three liquid metal sensing units 3 are integrally manufactured into the flexible substrate 1 in a thin line shape, wherein one liquid metal sensing unit 3 is positioned on the surface of the flexible substrate 1, and the other two liquid metal sensing units 3 are positioned in the flexible substrate 1; the lead 4 is partially embedded in the flexible substrate 1, one end of the lead is connected with the liquid metal sensing unit 3, the other end of the lead is led out of the flexible substrate 1, and the lead 4 is used for leading signals generated by the liquid metal sensing unit 3 out of the flexible substrate 1.
The liquid metal sensing unit 3 is a liquid metal wire, the diameter or the line width of the liquid metal wire is 0.01 mm-1 mm, the material is metal material or alloy with the melting point lower than 200 ℃ such as EGaIn, on one hand, the liquid metal sensing unit can conduct electricity and has certain resistance like the traditional metal, on the other hand, the liquid metal sensing unit is liquid at a lower temperature and has the liquidity which is not possessed by the traditional metal.
Referring to fig. 2 and 3, when the external temperature changes or a temperature gradient is generated, the flexible driving unit 2 may change from liquid to gas or from gas to liquid when the temperature change reaches the phase change temperature of the flexible driving unit 2; because the cavity in the flexible substrate 1 is closed, when the flexible driving unit 2 is changed from liquid to gas, the pressure in the cavity is increased, and the flexible substrate 1 can deform in a certain range, in which case, the flexible substrate 1 expands and deforms; on the contrary, when the flexible driving unit 2 is changed from gas to liquid, the flexible substrate 1 is shrunk and deformed. When the flexible substrate 1 deforms, the expansion or contraction of the flexible substrate 1 can drive the liquid metal sensing unit 3 in the flexible substrate 1 to extend or shorten, and when the liquid metal sensing unit 3 extends, the length is increased and the cross-sectional area is reduced; conversely, when the liquid metal sensing unit 3 is shortened, the length decreases while the cross-sectional area increases.
Formula of law of resistance
Wherein rho: resistivity of material making up the resistor, L: length of wire to make resistor, S: the cross section area of the wire for making the resistor is increased by increasing the length and decreasing the cross section area when the liquid metal sensing unit 3 is extended; as the liquid metal sensing unit 3 shortens, the decrease in length and the increase in cross-sectional area will decrease the resistance of the liquid metal. The strain at that point of the actuator can be obtained by obtaining a change in the resistance of the liquid metal.
As shown in fig. 4, the strain of any point in the surface and bulk of the actuator during large deformation is obtained by arranging the liquid metal sensing unit 3 in the flexible substrate 1 in a fixed area, and for each point, the strain of the point of the actuator can be obtained by obtaining the change of the liquid metal resistance of the liquid metal sensing unit 3 at the point.
When the length and the cross-sectional area of the liquid metal sensing unit 3 are not changed, the resistance of the liquid metal is in one-to-one correspondence with the temperature due to different resistivity of the liquid metal at different temperatures, and the temperature of the position where the liquid metal is located can be obtained by obtaining the resistance of the liquid metal through the lead. Furthermore, the liquid metal sensing units 3 which are locally arranged on the surface and the inside of the flexible driver can realize real-time and on-line measurement of the temperature of any position on the surface and the inside of the driver.
The optional flexible substrate 1, the flexible drive unit 2, is not limited to the above for the present invention. Meanwhile, the invention is described by taking the liquid-gas phase change driven driver as an example, and other flexible drivers, such as a gas driver, a hydrogel driver and the like, are not substantially different from the liquid-gas phase change driven driver in sensing/execution common aspects compared with the liquid-gas phase change driven driver. Although the present invention has been described in detail with reference to the foregoing examples, it will be apparent to those skilled in the art that various changes in the form and details of the embodiments described herein may be made, and equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A flexible actuator for sensing/performing co-integration, comprising a flexible actuator consisting of a flexible base body (1) and a flexible drive unit (2) inside it, characterized in that: the liquid metal sensing unit (3) is locally arranged on the surface and inside the flexible substrate (1), and the liquid metal sensing unit (3) is connected with the lead (4).
2. A sense/execute co-body flexible drive according to claim 1, wherein: the flexible substrate (1) adopts a three-dimensional structure, one or more cavities are distributed in the flexible substrate (1), and flexible driving materials are arranged in the cavities to form a flexible driving unit (2).
3. A sense/execute co-body flexible drive according to claim 1, wherein: the flexible substrate (1) is made of flexible materials including PDMS, Ecoflex and hydrogel.
4. A sense/execute co-body flexible drive according to claim 1, wherein: the flexible driving unit (2) comprises a liquid-gas phase change driving unit, a hydrogel driving unit, a gas driving unit and an ionic liquid driving unit.
5. A sense/execute co-body flexible drive according to claim 1, wherein: the liquid metal of the liquid metal sensing unit (3) is in a thin line shape, and the line width or the diameter is 0.01 mm-1 mm; the liquid metal is a simple metal or alloy with a melting point lower than 200 ℃, and comprises gallium and alloy thereof and bismuth-based alloy.
6. A sense/execute co-body flexible drive according to claim 1, wherein: the lead (4) is partially embedded into the flexible substrate (1), one end of the lead is connected with the liquid metal sensing unit (3), and the other end of the lead is led out of the flexible substrate (1).
7. A sense/execute co-body flexible drive according to claim 1, wherein: each liquid metal sensing unit (3) works independently, and the plurality of liquid metal sensing units (3) are in a network-shaped optimized layout in the flexible substrate (1) and the cavity of the flexible substrate to form a sensing array, so that X, Y, Z physical quantity measurement in each direction of space is realized, and the physical quantity is strain and temperature.
8. A sense/execute co-body flexible drive according to claim 1, wherein: when the flexible substrate (1) deforms, the expansion or contraction of the flexible substrate (1) can drive the corresponding liquid metal sensing unit (3) to extend or shorten, and when the liquid metal extends, the resistance of the liquid metal can be increased due to the increase of the length and the reduction of the cross section area; when the liquid metal is shortened, the resistance of the liquid metal is reduced due to the reduction of the length and the increase of the cross-sectional area; obtaining the strain of the flexible substrate (1) at the corresponding liquid metal sensing unit (3) by obtaining the change of the liquid metal resistance; the liquid metal sensing units (3) are arranged on the surface and in the flexible substrate (1) in a localized mode, so that the strain of the surface and any position of a bulk phase of the flexible driver can be measured in real time and on line.
9. A sense/execute co-body flexible drive according to claim 1, wherein: the sensing/execution integrated flexible driver can be expanded to temperature measurement of any position of the surface and bulk of the flexible driver, when the length and the cross-sectional area of the liquid metal sensing unit (3) are not changed, the resistance of the liquid metal and the temperature of the liquid metal have a one-to-one correspondence relationship due to different resistivities of the liquid metal at different temperatures, and the temperature of the position where the liquid metal is located is obtained by obtaining the resistance of the liquid metal through the lead (4); and then, the liquid metal sensing units (3) are locally arranged on the surface and the inside of the flexible driver, so that the temperature of any position on the surface and the inside of the flexible driver can be measured in real time and on line.
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| CN201911278907.3A CN111015741B (en) | 2019-12-13 | 2019-12-13 | Flexible driver integrating perception and execution |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111541020A (en) * | 2020-05-08 | 2020-08-14 | 北京航空航天大学 | Antenna based on liquid-gas phase change actuator and preparation method thereof |
| CN112539850A (en) * | 2020-12-04 | 2021-03-23 | 中国电力科学研究院有限公司 | Flexible double-parameter sensor for parallel measurement of temperature and strain and measurement method |
| CN112828864A (en) * | 2020-12-31 | 2021-05-25 | 浙江清华柔性电子技术研究院 | Soft robot driver and mold |
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| CN106695854A (en) * | 2017-03-17 | 2017-05-24 | 燕山大学 | Pneumatic redundancy self-sensing multi-degree-of-freedom flexible nimble finger |
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| CN104437686A (en) * | 2013-09-18 | 2015-03-25 | 中国科学院理化技术研究所 | Micro heater |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111541020A (en) * | 2020-05-08 | 2020-08-14 | 北京航空航天大学 | Antenna based on liquid-gas phase change actuator and preparation method thereof |
| CN111541020B (en) * | 2020-05-08 | 2021-08-10 | 北京航空航天大学 | Antenna based on liquid-gas phase change actuator and preparation method thereof |
| CN112539850A (en) * | 2020-12-04 | 2021-03-23 | 中国电力科学研究院有限公司 | Flexible double-parameter sensor for parallel measurement of temperature and strain and measurement method |
| CN112828864A (en) * | 2020-12-31 | 2021-05-25 | 浙江清华柔性电子技术研究院 | Soft robot driver and mold |
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