CN111014205B

CN111014205B - Tank body cleaning, maintaining and maintaining method and cleaning tank system

Info

Publication number: CN111014205B
Application number: CN202010002883.5A
Authority: CN
Inventors: 李翼; 李伟; 杨旭
Original assignee: Omnisun Information Materials Co ltd
Current assignee: Omnisun Information Materials Co ltd
Priority date: 2020-01-02
Filing date: 2020-01-02
Publication date: 2021-06-25
Anticipated expiration: 2040-01-02
Also published as: CN111014205A

Abstract

The invention discloses a tank body cleaning, maintaining and maintaining method, which comprises the following steps: emptying the old cleaning liquid in the inner tank and the outer tank of the cleaning tank; injecting pure water into the inner tank, and controlling the pure water to circularly flow between the inner tank and the outer tank until no obvious black impurities and a large amount of detergent bubbles exist in the inner tank; emptying the cleaning tank, injecting new pure water into the inner tank and controlling the outer tank to continuously discharge water so as to clean the outer tank; emptying the cleaning tank, sterilizing the cleaning tank and performing a bacteria test on the cleaning tank; the cleaning tank is emptied, and new pure water is filled into the cleaning tank, so that the cleaning yield of the cleaning tank is effectively ensured, the yield fluctuation after cleaning the tank body is avoided, and the defect that microorganisms grow to cause bad defects on the glass substrate is also avoided. In addition, the invention also discloses a cleaning tank system for implementing the method.

Description

Tank body cleaning, maintaining and maintaining method and cleaning tank system

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a groove body cleaning, maintaining and maintaining method for cleaning a glass substrate of a mask plate. In addition, the invention also relates to a cleaning tank system used for the method.

Background

In semiconductor chip or integrated circuit manufacturing, the manufacture of a mask is a key process for connecting layout manufacturing and wafer manufacturing. In the manufacturing process of the mask, the defects of the glass substrate and the fine contamination on the surface of the glass substrate account for 70-80% of the yield loss.

Therefore, in order to remove stains on the glass substrate, the glass substrate is usually cleaned by "ultrasonic wave + cleaning agent", and methods such as cleaning with SPM solution and rinsing with pure water are supplemented. Wherein, the cleaning by the mode of ultrasonic wave plus the cleaning agent removes more than 90 percent of contamination on the glass substrate. The removed stains are remained in the mixed liquid of the lotion and the water, and can cause secondary pollution to the glass substrate, thereby greatly reducing the yield of the product.

In the prior art, the pure water in the cleaning tank is updated and the pollution in the cleaning tank is discharged in a mode of emptying and injecting the water in the cleaning tank again. However, the method has poor pollution discharge effect, secondary pollution is caused by untreated contamination, the cleaning yield is often reduced after cleaning, even the cleaning yield is reduced to 0%, and the cleaning yield is greatly fluctuated.

In summary, how to provide a method for cleaning, maintaining and maintaining a tank body that ensures a cleaning yield is an urgent problem to be solved by those skilled in the art.

Disclosure of Invention

In view of the above, the present invention is to provide a method for cleaning, maintaining and maintaining a tank, which effectively ensures the cleaning yield of the cleaning tank, avoids the yield fluctuation after cleaning the tank, and avoids the bad defects of the glass substrate caused by the growth of microorganisms.

In addition, the invention also provides a cleaning tank system for implementing the method.

In order to achieve the above purpose, the invention provides the following technical scheme:

a method of cleaning, maintaining and maintaining a tank, comprising:

emptying the old cleaning liquid in the inner tank and the outer tank of the cleaning tank;

injecting pure water into the inner tank, and controlling the pure water to circularly flow between the inner tank and the outer tank until no obvious black impurities and a large number of bubbles exist in the inner tank;

emptying the cleaning tank, injecting new pure water into the inner tank and controlling the outer tank to continuously discharge water so as to clean the outer tank;

emptying the cleaning tank, sterilizing the cleaning tank and performing a bacteria test on the cleaning tank;

and emptying the cleaning tank, and filling new pure water into the cleaning tank.

Preferably, the injecting pure water into the inner tank to control circulation of the pure water between the inner tank and the outer tank includes:

injecting pure water into the inner tank;

controlling the pure water in the inner tank to sequentially pass through the outer tank, the flow control valve, the pure water filter element and an outer tank circulating water inlet pipeline to return to the inner tank, wherein the time of reciprocating circulation is t1, and t1 is the time of single tank body circulating flushing;

and emptying the cleaning tank.

Preferably, the injecting new pure water into the inner tank and controlling the outer tank to continuously discharge water includes:

and controlling the new pure water to sequentially pass through the inner tank, the outer tank, the flow control valve and the pure water filter element and then to be discharged by a circulating drainage pipeline of the outer tank.

the control duration flushing time is t2, and t2 is the single outer tank flushing time.

Preferably, the sterilizing process of the cleaning tank and the bacterial test of the cleaning tank include:

injecting pure water into the cleaning tank and adding a sterilizing liquid, controlling the pure water to circularly flow between the inner tank and the outer tank, and continuously soaking the tank for t3, wherein t3 is the time for soaking the tank body by the sterilizing liquid;

and carrying out a bacteria test on the pure water in the clear water tank.

Preferably, the disinfectant comprises hydrogen peroxide, and the proportion of the hydrogen peroxide in the cleaning tank is 5-15%.

Preferably, the bacterial test comprises:

sterilizing the culture dish;

measuring a certain volume of pure water in the cleaning tank, and filtering with a filter membrane;

placing the filter membrane on the culture dish, and placing the filter membrane into a constant-temperature biochemical incubator for culturing for a certain time;

detecting the number of bacteria on the culture dish.

A cleaning tank system comprises an inner tank, an outer tank, a water inlet pipeline communicated with the inner tank, a water discharge pipeline communicated with the inner tank, an outer tank circulating water discharge pipeline communicated with the outer tank and an outer tank circulating water inlet pipeline communicated with the inner tank and the outer tank, wherein a flow control valve and a pure water filter element are arranged on the outer tank circulating water inlet pipeline;

the outer tank circulating water drainage pipeline is communicated with the outer tank circulating water inlet pipeline, and the flow control valve and the pure water filter element are arranged at the joint of the outer tank circulating water drainage pipeline and the outer tank.

Preferably, a three-way valve is arranged at the joint of the outer tank circulating drainage pipeline and the outer tank circulating water inlet pipeline.

The cleaning, maintenance and maintenance method of the tank body provided by the invention is characterized in that firstly, the inner tank is circularly cleaned, impurities, bubbles and residual old cleaning liquid in the inner tank can be effectively removed, then, the inner tank and the outer tank are washed, bubbles and residual old cleaning liquid remained in the outer tank and the circulating pipeline after circular cleaning can be effectively removed, and finally, the cleaning tank is sterilized, so that microorganisms in the cleaning tank can be effectively removed, and the growth and pollution of the microorganisms are avoided.

Therefore, the cleaning yield of the cleaning tank is effectively ensured, the yield fluctuation after the cleaning of the tank body is avoided, and the defect that microorganisms grow to cause bad defects on the glass substrate is also avoided.

In addition, the invention also provides a cleaning tank system for implementing the method, compared with the prior art, the conversion between the tank body circulation cleaning and the continuous cleaning of the outer tank is realized by adding the outer tank circulation drainage pipeline communicated with the outer tank, and after the connection part of the outer tank circulation drainage pipeline and the outer tank circulation water inlet pipeline is positioned on the flow control valve and the pure water filter element, the cleaning of impurities and residual old cleaning liquid in the pure water filter element can be realized in the outer tank continuous cleaning mode, so that the generation of secondary pollution is avoided.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a schematic flow chart of an embodiment of a tank cleaning, maintenance and service method provided by the present invention;

FIG. 2 is a schematic cross-sectional view of an embodiment of a purge tank system provided by the present invention.

In fig. 1-2:

1 is an inner groove, 2 is an outer groove, 3 is a flow control valve, 4 is a pure water filter element, 5 is a three-way valve, 6 is an outer groove circulating drainage pipeline, 7 is a water inlet pipeline, 8 is a drainage pipeline, and 9 is an outer groove circulating water inlet pipeline.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The core of the invention is to provide a tank body cleaning, maintenance and maintenance method, which effectively ensures the cleaning yield of the cleaning tank, avoids yield fluctuation after cleaning the tank body, and avoids the defect that the growth of microorganisms causes bad defects to the glass substrate.

The invention also provides a cleaning tank system for implementing the method.

Referring to fig. 1-2, fig. 1 is a schematic flow chart of an embodiment of a cleaning, maintaining and maintaining method for a tank body according to the present invention; FIG. 2 is a schematic cross-sectional view of an embodiment of a purge tank system provided by the present invention.

The invention provides a tank body cleaning, maintaining and maintaining method, which comprises the following steps:

step S1, emptying the old cleaning liquid in the inner tank 1 and the outer tank 2 of the cleaning tank;

step S2, injecting pure water into the inner tank 1, and controlling the pure water to circularly flow between the inner tank 1 and the outer tank 2 until no obvious black impurities and a large amount of bubbles exist in the inner tank 1;

step S3, emptying the cleaning tank, injecting new pure water into the inner tank 1 and controlling the outer tank 2 to continuously discharge water so as to clean the outer tank 2;

step S4, emptying the cleaning tank, sterilizing the cleaning tank and testing bacteria in the cleaning tank;

step S5, the cleaning tank is emptied and filled with new pure water.

In step S1, when the cleaning basket is not present in the inner tank 1, that is, after the cleaning process for the glass substrate is completed, the cleaning tank is emptied to discharge the old cleaning liquid in the cleaning tank. Preferably, the used cleaning liquid can be drained by opening the drain line 8 connected to the inner tank 1.

In step S2, since the black impurities are impurities in the old cleaning liquid which fall after cleaning and the old cleaning liquid is likely to generate a large amount of bubbles, if there are no significant black impurities and a large amount of bubbles in the inner tank 1, it is considered that there are no impurities and old cleaning liquid remaining in the inner tank 1 and no secondary pollution is generated. The large amount of bubbles here means that the number of bubbles is large, and the bubbles are accumulated on the water surface of the inner tank 1 or continuously rise and accumulate from the lower portion of the inner tank 1.

In step S3, impurities and old cleaning liquid remain in the outer tank 2 and the circulation line after the inner tank 1 is cleaned in step S2, and the outer tank 2 and the circulation line need to be flushed to avoid secondary contamination of the inner tank 1.

Since the outer tub 2 continues to discharge water, it is necessary to keep the inner tub 1 continuously supplying water to maintain the outer tub rinsing process to be continued.

During flushing, the flow of the water inlet pipeline 7 is determined according to the actual production conditions such as the residual degree of impurities in the outer tank 2, the higher the residual degree of the impurities is, the larger the required flow of the water inlet pipeline 7 is, the larger the impact force on the impurities attached to the inner wall of the outer tank 2 is, and the better the flushing effect is; the opening degree of the flow control valve 3 provided in front of the outer tank circulation drain line 6 is determined according to actual production conditions, such as the degree of impurity remaining in the pure water filter element 4, and the higher the degree of impurity remaining, the larger the opening degree of the control flow control valve 3, and the larger the flow rate passing through the flow control valve 3, the larger the impact force on the impurities attached to the inner walls of the pure water filter element 4 and the outer tank circulation drain line, and the better the flushing effect.

Preferably, fresh pure water is controlled to pass through the inner tank 1, the outer tank 2, the flow control valve 3, and the pure water filter 4 in this order and then discharged through the outer tank circulation drain line 6.

Preferably, in order to obtain good cleaning effect, the continuous flushing time is controlled to be t2, and t2 is the single outer tank flushing time. the specific value of t2 is determined according to the actual production needs, for example, t2 can be set within the range of 10min-30 min.

It should be noted that in step S4, in order to prevent the glass substrate from being contaminated by microorganisms that have been grown in the cleaning tank, the cleaning tank needs to be sterilized and the microbial environment in the cleaning tank needs to be checked by a bacterial test.

In step S5, after the cleaning tank is emptied, new pure water is poured into the cleaning tank and the water is changed 2 to 4 times. The specific times of water changing can be determined according to the actual production requirements.

In the embodiment, impurities, bubble residues and residual cleaning liquid in the inner tank 1 can be effectively removed by circularly cleaning the inner tank 1; the inner tank 1 and the outer tank 2 are washed, so that bubbles and residual old cleaning liquid remained in the outer tank 2 and a circulation pipeline after the circulation cleaning can be effectively removed; the cleaning tank is sterilized, so that microorganisms in the cleaning tank can be effectively removed, and the growth and pollution of the microorganisms are avoided.

Preferably, the step S2 of injecting pure water into the inner tank 1 and controlling the circulation flow of pure water between the inner tank 1 and the outer tank 2 may include:

step S21, injecting pure water into the inner tank 1;

step S22, controlling the pure water in the inner tank 1 to sequentially pass through the outer tank 2, the flow control valve 3, the pure water filter element 4 and the outer tank circulating water inlet pipeline 9 to return to the inner tank 1, wherein the time of the reciprocating circulation is t1, and t1 is the time of single tank body circulating flushing;

step S23, drain the cleaning tank.

In step S22, the pure water in the inner tank 1 is controlled by the external pump to return to the inner tank 1 through the outer tank 2, the flow control valve 3, the pure water filter element 4, and the external circulation water inlet pipe 9 in this order, and then the pure water in the inner tank 1 enters the outer tank 2 again, thereby circulating the pure water between the inner tank 1 and the outer tank 2. The type and model of the external pump can be selected according to the requirements of actual production conditions, and the description is omitted. The length of the single tank body circulating flushing time t1 can be determined according to the requirements of actual production conditions, and preferably, the single tank body circulating flushing time t1 is set between 5min and 10 min.

It should be noted that, in step S2, in order to clean the inner tank 1 completely, step S21, step S22 and step S23 need to be repeated a plurality of times, and the specific number of times of repetition may be determined according to the needs of the actual production situation, and is generally set to be repeated 2-5 times.

On the basis of the above embodiment, step S4 may include:

step S41, injecting pure water into the cleaning tank and adding the sterilizing liquid, controlling the pure water to circularly flow between the inner tank 1 and the outer tank 2, and continuously soaking the tank t3, wherein t3 is the time for soaking the tank body by the sterilizing liquid;

in step S42, a bacteria test is performed on the pure water in the clear water tank.

In step S41, the ratio of the sterilizing liquid in the clean water tank is determined by the type of the sterilizing liquid. The pure water mixed with the sterilizing liquid is controlled to circularly flow among the inner tank 1, the outer tank 2, the flow control valve 3, the pure water filter element 4 and the outer tank circulating water inlet pipeline 9 in sequence through an external pump. The type and model of the external pump can be selected according to the requirements of actual production conditions, and the description is omitted.

Preferably, the disinfectant can be hydrogen peroxide, and the proportion of the hydrogen peroxide in the cleaning tank is between 5 and 15 percent.

The ratio herein refers to a volume ratio of the hydrogen peroxide solution to the liquid in the cleaning tank.

In step S42, the bacteria test is used to detect the number of microorganisms in the pure water in the clear water tank and determine whether the sterilization process has performed a corresponding function.

Preferably, step S42 may include:

step S421, sterilizing the culture dish;

step S422, measuring a certain volume of pure water in a clear water tank, and filtering with a filter membrane;

step S423, placing the filter membrane on a culture medium, and placing the filter membrane into a constant-temperature biochemical incubator for culturing for a certain time;

in step S424, the number of bacteria on the culture dish is detected.

It should be noted that in step S421, the culture dish can be sterilized by baking the culture dish at a high temperature to kill the microorganisms on the surface of the culture dish and prevent the microorganisms on the culture dish from affecting the structure of the bacterial test.

It should be noted that, in step S422, the volume of the measured pure water is determined according to the actual production requirement, and please refer to the prior art for the measuring tool and the measuring method, which are not described herein again.

It should be noted that in step S423, the filter membrane is cultured in the constant temperature biochemical incubator for 24 hours, and the temperature of the constant temperature biochemical incubator is set to 37.5 ℃ to provide a suitable environment for the growth of microorganisms such as bacteria. The temperature of the constant-temperature biochemical incubator can be adjusted according to the difference of the types of microorganisms in water in different regions.

In a specific embodiment, the culture dish is baked for 20min at 180 ℃ to sterilize the culture dish; measuring 200ml of pure water in a cleaning tank, and filtering the pure water by using a filter membrane; placing the filter membrane on a sterilized culture dish, placing the culture dish in a constant-temperature biochemical incubator, and culturing for 24 hours at the temperature of 37.5 ℃; the number of bacteria on the dish was measured.

In addition to the above cleaning, maintenance and repair method for the tank body, the present invention also provides a cleaning tank system for the method disclosed in the above embodiment, comprising an inner tank 1, an outer tank 2, a water inlet pipeline 7 communicated with the inner tank 1, a water discharge pipeline 8 communicated with the inner tank 1, an outer tank circulating water discharge pipeline 6 communicated with the outer tank 2, and an outer tank circulating water inlet pipeline 9 communicating the inner tank 1 and the outer tank 2, wherein the outer tank circulating water inlet pipeline 9 is provided with a flow control valve 3 and a pure water filter element 4; the outer tank circulating water discharging pipeline 6 is communicated with the outer tank circulating water inlet pipeline 9, and the flow control valve 3 and the pure water filter element 4 are arranged between the joint of the outer tank circulating water discharging pipeline and the outer tank 2.

Referring to fig. 2, the inner tank 1 and the outer tank 2 are rectangular tanks, the intersection point of two diagonal lines on the cross section of the outer tank 2 in the height direction coincides with the intersection point of two diagonal lines on the cross section of the inner tank 1 at the same height, and the upper wall surface of the outer tank 2 is higher than the upper wall surface of the inner tank 1, so that pure water can flow through the inner tank 1 and enter the outer tank 2 after entering water.

Of course, the inner tank 1 and the outer tank 2 have other shapes and arrangement manners as long as the requirement that the upper wall surface of the outer tank 2 is higher than the upper wall surface of the inner tank 1 and pure water can flow through the inner tank 1 and enter the outer tank 2 is satisfied, and specific reference is made to the prior art, which is not described herein again.

The flow control valve 3 and the pure water filter element 4 are arranged on the outer tank circulating water inlet pipeline 9, the outer tank circulating water inlet pipeline 9 is communicated with the outer tank 2 and the inner tank 1, therefore, the flow control valve 3 can control the flow of the pure water which flows back to the inner tank 1 from the outer tank 2, and the pure water filter element 4 is used for filtering impurities to prevent the impurities from flowing back to the inner tank 1. The type and specification of the flow control valve 3 and the type and specification of the pure water filter 4 are referred to the prior art and will not be described herein.

The outer tank circulating water discharging pipeline 6 is communicated with the outer tank 2 through an outer tank circulating water inlet pipeline 9, and can empty the outer tank 2.

The water inlet pipeline 7 and the water discharge pipeline 8 are both communicated with the inner groove 1, and a water inlet flow control valve and a water discharge flow control valve are respectively arranged on the water inlet pipeline 7 and the water discharge pipeline 8 and used for adjusting the water inlet flow of the inner groove 1 and the water outlet flow of the inner groove 1.

Of course, the drain flow control valve on the drain line 8 may be replaced by a switch valve, and the specific type and specification of the switch valve refer to the prior art and are not described herein again.

Because the flow control valve 3 is arranged between the joint of the outer tank circulating water drainage pipeline 6 and the outer tank circulating water inlet pipeline 9 and the outer tank 2, a first flow control valve and a second flow control valve are respectively arranged on the outer tank circulating water drainage pipeline 6 and the outer tank circulating water inlet pipeline 9 behind the joint to control the on-off of the two pipelines. For the type and specification of the first flow control valve and the type and specification of the second flow control valve, please refer to the prior art, which is not repeated herein.

When the step S2 needs to be performed, the flow control valve 3 is controlled to be opened, the first flow control valve is closed, and the second flow control valve is controlled to be opened, so that the outer tank circulating water inlet pipeline 9 is opened, and the outer tank circulating water outlet pipeline 6 is closed; when step S3 is required, the flow control valve 3 is controlled to be opened, the first flow control valve is controlled to be opened, the second flow control valve is controlled to be closed, the outer tank circulation water inlet pipeline 9 is controlled to be closed, and the outer tank circulation water outlet pipeline 6 is controlled to be opened.

In this embodiment, through the outer tank circulation water drainage pipe way 6 that increases and outer tank 2 intercommunication, realized that the cell body circulation is washd and the outer tank lasts the conversion between washing, and outer tank circulation water drainage pipe way 6 and outer tank circulation water intake pipe 9 junction lie in flow control valve 3 and pure water filter core 4 back, and the accessible outer tank lasts the washing mode and realizes filtering core 4 interior impurity and the washing of remaining old washing liquid to the pure water, has avoided secondary pollution's production.

Preferably, in order to reduce the number of control valves and simplify the pipeline structure, a three-way valve 5 can be arranged at the joint of the outer tank circulating water drainage pipeline 6 and the outer tank circulating water inlet pipeline 9, and the flow entering the outer tank circulating water drainage pipeline 6 and the outer tank circulating water inlet pipeline 9 can be distributed simultaneously through the three-way valve 5, so that the switching between two cleaning states of tank body circulating cleaning and outer tank continuous flushing is realized.

When step S2 needs to be performed, the outlet of the three-way valve 5, which is communicated with the outer tank circulating water outlet pipeline 6, is controlled to be completely closed, and the outlet of the three-way valve 5, which is communicated with the outer tank circulating water inlet pipeline 9, is controlled to be opened; when the step S3 needs to be performed, the outlet of the three-way valve 5, which is communicated with the outer tank circulating water outlet pipeline 6, is controlled to be opened, and the outlet of the three-way valve 5, which is communicated with the outer tank circulating water inlet pipeline 9, is controlled to be completely closed.

It should be noted that the first flow control valve and the second flow control valve mentioned in this document are only used to distinguish the difference of the positions, and do not contain any limitation on the sequence.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

The above detailed description is provided for the cleaning, maintenance and maintenance method and cleaning tank system of the tank body provided by the present invention. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.

Claims

1. A method of cleaning, maintaining and maintaining a tank, comprising:

emptying old cleaning liquid in an inner tank (1) and an outer tank (2) of the cleaning tank;

injecting pure water into the inner tank (1), and controlling the pure water in the inner tank (1) to return to the inner tank (1) through the outer tank (2), the flow control valve (3), the pure water filter element (4) and an outer tank circulating water inlet pipeline (9) in sequence so that the pure water circularly flows between the inner tank (1) and the outer tank (2) until no obvious black impurities and a large amount of bubbles exist in the inner tank (1);

emptying the cleaning tank, injecting new pure water into the inner tank (1) and controlling the outer tank (2) to continuously discharge water so as to clean the outer tank (2);

emptying the cleaning tank, and filling the cleaning tank with new pure water;

the sterilizing treatment and the bacterial test of the cleaning tank comprise,

injecting pure water into the cleaning tank and adding a sterilizing liquid, controlling the pure water to circularly flow between the inner tank (1) and the outer tank (2), and continuously soaking the tank for t3, wherein t3 is the time for soaking the tank body by the sterilizing liquid;

carrying out a bacteria test on the pure water in the cleaning tank;

the bacterial test comprises the steps of testing the bacteria,

sterilizing the culture dish;

detecting the number of bacteria on the culture dish;

the cleaning tank comprises the inner tank (1), the outer tank (2), a water inlet pipeline (7) communicated with the inner tank (1), a water drainage pipeline (8) communicated with the inner tank (1), an outer tank circulating water drainage pipeline (6) communicated with the outer tank (2) and an outer tank circulating water inlet pipeline (9) communicated with the inner tank (1) and the outer tank (2), and the flow control valve (3) and the pure water filter element (4) are arranged on the outer tank circulating water inlet pipeline (9);

the outer trough circulation water drainage pipeline (6) with outer trough circulation water inlet pipeline (9) intercommunication, flow control valve (3) with pure water filter core (4) set up in the junction of the two with between outer trough (2).

2. The tank body cleaning, maintenance and service method according to claim 1, wherein the injecting new pure water into the inner tank (1) and controlling the outer tank (2) to continuously discharge water comprises:

and controlling the new pure water to sequentially pass through the inner tank (1), the outer tank (2), the flow control valve (3) and the pure water filter element (4) and then to be discharged by an outer tank circulating drainage pipeline (6).

3. The tank body cleaning, maintenance and service method according to claim 2, wherein the injecting new pure water into the inner tank (1) and controlling the outer tank (2) to continuously discharge water comprises:

4. The cleaning, maintenance and repair method for the tank body according to claim 3, wherein the sterilizing liquid comprises hydrogen peroxide, and the volume ratio of the hydrogen peroxide in the cleaning tank is 5% -15%.

5. The tank cleaning, maintenance and service method according to any one of claims 1 to 4, characterized in that a three-way valve (5) is arranged at the junction of the outer tank circulating water drainage pipeline (6) and the outer tank circulating water inlet pipeline (9).