CN111005063A - High-precision crystal growth powder setting control device - Google Patents
High-precision crystal growth powder setting control device Download PDFInfo
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- CN111005063A CN111005063A CN201911372401.9A CN201911372401A CN111005063A CN 111005063 A CN111005063 A CN 111005063A CN 201911372401 A CN201911372401 A CN 201911372401A CN 111005063 A CN111005063 A CN 111005063A
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- 239000013078 crystal Substances 0.000 title claims abstract description 43
- 239000000843 powder Substances 0.000 title claims abstract description 15
- 230000001105 regulatory effect Effects 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 8
- 230000001276 controlling effect Effects 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 abstract description 5
- 238000004458 analytical method Methods 0.000 abstract description 2
- 238000013461 design Methods 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 238000009826 distribution Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000563 Verneuil process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000002068 genetic effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/04—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt
- C30B11/08—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt every component of the crystal composition being added during the crystallisation
- C30B11/10—Solid or liquid components, e.g. Verneuil method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/006—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
- C30B29/32—Titanates; Germanates; Molybdates; Tungstates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention belongs to the technical field of new materials, and particularly relates to a high-precision given control device for crystal growth powder. The device is provided with a PWM speed regulating motor, a rotating bearing of the PWM speed regulating motor is connected with a rotating-linear motion bearing through a rotating rocker arm, the rotating-linear motion bearing drives a linear motion dead axle device to move up and down to enable a vibration reciprocating piston to move up and down, the vibration reciprocating piston is connected with a vibrating rod, and the vibrating rod drives a powder feeding screen mesh at the bottom of a feeding bin to vibrate and feed into a crystal growth furnace according to set amplitude and frequency. Quantitative control is realized by precise mechanical structure design of the crystal growth raw material supply mechanism, and through experimental analysis, the feeding precision can reach 0.01 g/s, and the feeding control requirement of the system is completely met.
Description
Technical Field
The invention belongs to the technical field of new materials, and particularly relates to a high-precision given control device for crystal growth powder.
Background
The rutile single crystal has high birefringence and chemical stability, and has irreplaceable advantages in the preparation of optical isolators, optical circulators, polarizers and other devices. High temperature oxide single crystals, such as rutile, have traditionally been grown using conventional flame-melt crystal growth furnaces.
In the traditional control of the feeding raw materials of the crystal growth furnace by the flame fusion method, a method of combining amplitude regulation of a lead screw and vibration frequency regulation by controlling the rotating speed of a motor is mainly adopted, the feeding amount can be roughly regulated only according to experience and observation of the crystal growth form, high-precision quantitative feeding cannot be realized, and the precision requirement of automatic feeding of crystal growth cannot be met. In the actual crystal growth control process, the double-parameter coordination control not only increases the control difficulty of the system, but also makes the overall mechanical structure more complex, so that the system has overlarge volume, overhigh manufacturing cost and high maintenance cost, and is not beneficial to the mass production of equipment. Through crystal growth experiments in recent five years, it is found that in a feeding link for controlling the growth speed of crystals, frequency is often limited, amplitude is changed mainly, and a frequency and amplitude control mode not only causes waste of the utilization rate of a system control structure, but also causes obstacles for modeling of an automatic control mode of a feeding system. In addition, in the conventional crystal growth furnace, since many growth process parameters are not precisely controlled, the crystal growth speed, the growth form, and the temperature distribution and the composition distribution in the whole growth chamber can only be manually observed and adjusted, so that the grown crystal has structural integrity, such as high dislocation density, large stress, non-uniformity and the like. The system can greatly increase the labor intensity for controlling the crystal growth, and because the crystal form needs to be observed in real time and the given speed of raw materials needs to be adjusted in the crystal growth process, each equipment operator can operate 2 crystal growth furnaces at most, and operate the equipment while observing the equipment, and the equipment is often in a mess of hands and feet, so that the crystal flows, and the success rate of the crystal growth is greatly influenced.
Disclosure of Invention
The invention aims to provide a high-precision crystal growth powder material setting control device, which solves the problems that high-precision quantitative feeding cannot be realized and the precision requirement of automatic feeding of crystal growth cannot be met.
The present invention is achieved in such a way that,
a high-precision crystal growth powder setting control device, comprising: the controller comprises a controller supporting piece, wherein a PWM speed regulating motor comprising the PWM speed regulating motor is installed in the controller supporting piece, a rotating bearing of the PWM speed regulating motor is connected with a rotating-linear motion bearing through a rotating rocker arm, the rotating-linear motion bearing drives a linear motion fixed shaft device to move up and down, the end part of the linear motion fixed shaft device extends out of a controller shell, and a vibration displacement regulating head is installed at the end part of the linear motion fixed shaft device; the feeding device is characterized in that a feeding bin is arranged above the crystal growth furnace, a vibration reciprocating piston is installed below the feeding bin, the end portion of the feeding bin is vertically corresponding to the linear motion shaft fixing device, the linear motion shaft fixing device moves up and down to touch the vibration reciprocating piston to enable the vibration reciprocating piston to move up and down in a reciprocating mode, the vibration reciprocating piston is connected with a vibrating rod, and the vibrating rod drives a powder feeding screen at the bottom of the feeding bin to vibrate according to set amplitude and frequency to feed materials into the crystal growth furnace.
Further, the powder feeding screen mesh slides up and down along the inner wall of the feeding bin according to given frequency and amplitude.
Furthermore, the device adopts a programmable controller, the programmable controller determines the feeding amount through a feedback signal acquired by a material amount sensor connected with the EM235 analog quantity module, and sends a control value to the PWM control module to control the PWM speed regulating motor by adopting an embedded control algorithm according to the control requirement.
Further, the programmable controller adjusts the control signal according to the difference between the actual feeding amount and the set value, when the difference of the control signal is larger than a step length, the control is carried out according to a fuzzy control algorithm, and when the difference of the control signal is smaller than a step length, the control is carried out by adopting a continuous control algorithm.
Furthermore, the frequency output by the PWM speed regulating motor adopts a vector control mode, and the magnitude and the phase of the stator current of the PWM speed regulating motor are controlled through a vector coordinate circuit to control the torque of the motor.
Compared with the prior art, the invention has the beneficial effects that:
on the basis of production practice, a PWM high-precision control motor, a programmable controller, an analog quantity module, a human-computer interface and a control program are added through precise mechanical structure design of a crystal growth raw material supply mechanism, a large amount of experimental data are accumulated through feeding control experiments for more than 1 year, the system supports that all feeding quantities with the corresponding frequencies of 80 times/minute to 160 times/minute can be controlled in a fixed quantity mode when the amplitudes are set to be 1mm, 2mm and 5mm respectively, feeding precision can reach 0.01 g/second through experimental analysis, and feeding control requirements of the system are completely met.
The invention can accurately control the feeding parameters of crystal growth, ensure the temperature distribution, composition distribution and mechanical distribution in a growth chamber, and can grow high-quality high-temperature oxide single crystals with complete microstructures, especially high-temperature oxide single crystals with decomposition tendency in a melt state, such as strontium titanate, rutile and other single crystals.
The device not only realizes the accurate digital control of all process parameters of the crystal growth process, including the crystal growth speed, the fuel supply speed and the raw material supply speed, but also forms a closed-loop automatic control system, and can realize the functions of accurate quantitative feeding, advanced estimation of material increase/reduction and automatic control of feeding amount for the crystal growth.
Drawings
FIG. 1 is a schematic diagram of the mechanical structure of the device provided by the present invention;
FIG. 2 is a schematic structural diagram of a PWM speed-regulating motor, a rotary rocker arm and a rotary-linear motion bearing provided by the invention;
fig. 3 is an electrical control schematic.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 in conjunction with fig. 2 and 3, a high-precision apparatus for controlling the supply of crystal growth powder, comprising: the device comprises a controller supporting piece, a feeding bin and a vibration displacement adjusting head, wherein the controller supporting piece is positioned at the upper part of the feeding bin through a frame, a PWM (pulse-width modulation) speed regulating motor is arranged in the controller supporting piece, a rotary bearing 1 of the PWM speed regulating motor is connected with a rotary-linear motion bearing 3 through a rotary rocker arm 2, the rotary-linear motion bearing 3 drives a linear motion shaft fixing device 4 to move up and down, the end part of the linear motion shaft fixing device 4 extends out of a controller shell, and the end part of the linear motion shaft fixing device is provided with the vibration displacement adjusting head 5; the distance of operation is limited through the vibration displacement adjusting head 5, a feeding bin is arranged above the crystal growth furnace, a vibration reciprocating piston 6 is installed below a linear motion shaft fixing device corresponding to the end part of the feeding bin 9 vertically, a reset spring is arranged below the space where the piston 6 operates and used for resetting, the linear motion shaft fixing device 4 moves up and down to touch the vibration reciprocating piston so that the vibration reciprocating piston moves up and down under the action of the spring after moving below the vibration reciprocating piston, the vibration reciprocating piston is connected with a vibration rod 7, and the vibration rod drives a powder feeding screen 8 at the bottom of the feeding bin to vibrate according to set amplitude and frequency and feed the crystal growth furnace. The screen mesh vibrates for feeding, the feeding amount is controlled by the frequency and amplitude of the screen mesh vibration, the frequency and amplitude of the screen mesh vibration are respectively driven by a PWM stepping motor, and the stepping motor is automatically adjusted and accurately controlled by the program feeding amount.
And the powder feeding screen mesh slides up and down along the inner wall of the feeding bin according to a given frequency and amplitude.
The device adopts a programmable controller, the programmable controller determines the feeding amount through a feedback signal acquired by a material amount sensor connected with an EM235 analog quantity module, and sends a control value to a PWM control module to control the PWM speed regulating motor by adopting an embedded control algorithm according to the control requirement.
The rated voltage of the PWM speed regulating motor is 24V, the load revolution is 5.3 rpm to 160 rpm, and the corresponding relation of the corresponding driving revolution-current-torque-power-load torsion is shown in the following table:
table 1: parameter corresponding table for speed regulating motor
The input voltage is designed to be 12V-24V direct current through a programmable controller, and the output voltage of the motor control is 0-100% of the input voltage; the output power is 0.01-400W; rated current 8A, maximum passing current 10A and quiescent current 0.02A in a standby state; the highest output frequency is 13Khz, and the PWM pulse width speed regulation range is 10-100%; the 10A fuse is provided for overcurrent protection, and has functions of reverse power protection and control voltage overvoltage protection.
The frequency setting adopts a vector control mode, and the magnitude and the phase of the stator current of the motor are controlled through a vector coordinate circuit, so that the exciting current and the torque current of the motor in d, q and 0 coordinate shafting are controlled, and the aim of controlling the torque of the motor is fulfilled. By controlling the action sequence and time of each vector and the action time of the zero vector, various PWM is formed, and the control purposes of various applications are achieved. Compared with the original amplitude stepping pulse control mode, the mode is more visual and simpler, and the calculation speed and the calculation precision are improved compared with the original control mode. Even in the open-loop state, a rated torque value of 100% can be output, and load balancing is provided for a plurality of drags.
The programmable controller adopts a Siemens PLC programmable controller and is controlled by a S7-224CPU and an EM235 expansion module in a mixed mode, the programmable controller determines the feeding amount through an EM235 analog quantity module feedback signal, a control value is sent to a PWM control module by adopting an embedded control algorithm according to the control requirement, and the quantitative feeding is tracked and fed back in real time. The control mode consists of a manual mode and an automatic mode, the automatic control mode is completed by the PLC, namely, the control mode can be immediately switched to the manual mode to ensure the normal operation of the system when the automatic control mode breaks down, so that an operator can conveniently handle emergency situations.
The invention combines fuzzy control and continuous control, so that the system has the characteristics of intelligence and self-learning of fuzzy control, the stability of PID control and the advantage of being capable of eliminating steady-state errors, and meanwhile, on the premise of ensuring the control precision of the system, the dimension of a fuzzy matrix of the system is reduced, the fuzzy control rule is simplified, the occupation rate of an algorithm on system resources of the controller is reduced, and the stability and the control efficiency of the system are enhanced. The algorithm adopts fuzzy control when the difference signal changes greatly and adopts continuous control when the difference signal changes less, because the minimum execution value of the control action of the fuzzy control is a step length, if the deviation value of the control signal is less than a step length, the controller does not act, which causes a dead zone in the fuzzy control, and because of the uncontrollable characteristic of the dead zone, compared with a PID control method, the control output of the fuzzy control cannot achieve the control effect of eliminating the steady-state error, and the method for reducing the steady-state error in the fuzzy control usually adopts the dimension of an increased strategy matrix or adopts advanced control algorithms such as a genetic algorithm, and the operation burden of the fuzzy controller is increased invisibly. So that the small PLC cannot complete the control of the system at all. The invention combines fuzzy control and continuous control, when the difference is more than one step length, the control is carried out according to the algorithm of fuzzy control, when the difference is less than one step length, the control is carried out by adopting the continuous control algorithm, thus improving the control precision on the basis of not making the fuzzy matrix too complicated and reducing the engineering cost.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (5)
1. A high-precision crystal growth powder setting control device is characterized by comprising: the controller comprises a controller supporting piece, wherein a PWM (pulse-width modulation) speed regulating motor is installed in the controller supporting piece, a rotating bearing of the PWM speed regulating motor is connected with a rotating-linear motion bearing through a rotating rocker arm, the rotating-linear motion bearing drives a linear motion shaft fixing device to move up and down, the end part of the linear motion shaft fixing device extends out of a controller shell, and a vibration displacement adjusting head is installed at the end part of the linear motion shaft fixing device; the feeding bin is arranged above the crystal growth furnace, a vibration reciprocating piston is installed below the feeding bin, the end portion of the feeding bin is vertically corresponding to the linear motion shaft fixing device, the linear motion shaft fixing device moves up and down to touch the vibration reciprocating piston to enable the vibration reciprocating piston to reciprocate up and down, the vibration reciprocating piston is connected with a vibrating rod, and the vibrating rod drives a powder feeding screen at the bottom of the feeding bin to vibrate according to set amplitude and frequency to feed the crystal growth furnace.
2. The apparatus of claim 1, wherein the powder feed screen slides up and down along the inner wall of the feed bin at a given frequency and amplitude.
3. The device as claimed in claim 1, wherein the device comprises a programmable controller, the programmable controller determines the feeding amount through a feedback signal collected by a material amount sensor connected with the EM235 analog quantity module, and a control value is sent to the PWM control module to control the PWM speed regulating motor by adopting an embedded control algorithm according to the control requirement.
4. The apparatus of claim 1 wherein the programmable controller adjusts the control signal based on a difference between the actual feed rate and the setpoint, and wherein the fuzzy control algorithm is controlled when the difference in the control signal is greater than a step length, and wherein the continuous control algorithm is controlled when the difference in the control signal is less than a step length.
5. The device of claim 1, wherein the frequency of the output of the PWM speed-regulating motor is given by a vector control mode, and the motor torque is controlled by controlling the magnitude and phase of the stator current of the PWM speed-regulating motor through a vector coordinate circuit.
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| CN201911372401.9A CN111005063A (en) | 2019-12-27 | 2019-12-27 | High-precision crystal growth powder setting control device |
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| CN201911372401.9A CN111005063A (en) | 2019-12-27 | 2019-12-27 | High-precision crystal growth powder setting control device |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040108824A1 (en) * | 2002-05-31 | 2004-06-10 | Mitsuo Ueda | Motor drive control apparatus |
| CN104389020A (en) * | 2014-11-26 | 2015-03-04 | 山东萨菲尔晶体科技有限公司 | Process and device for rapidly growing sapphire crystal material of corundum system by virtue of flame fusion method |
| CN107829133A (en) * | 2017-11-28 | 2018-03-23 | 沈阳工程学院 | A kind of flame melt method numerical control crystal growing furnace |
| CN211595843U (en) * | 2019-12-27 | 2020-09-29 | 沈阳工程学院 | High-precision crystal growth powder setting control device |
-
2019
- 2019-12-27 CN CN201911372401.9A patent/CN111005063A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040108824A1 (en) * | 2002-05-31 | 2004-06-10 | Mitsuo Ueda | Motor drive control apparatus |
| CN104389020A (en) * | 2014-11-26 | 2015-03-04 | 山东萨菲尔晶体科技有限公司 | Process and device for rapidly growing sapphire crystal material of corundum system by virtue of flame fusion method |
| CN107829133A (en) * | 2017-11-28 | 2018-03-23 | 沈阳工程学院 | A kind of flame melt method numerical control crystal growing furnace |
| CN211595843U (en) * | 2019-12-27 | 2020-09-29 | 沈阳工程学院 | High-precision crystal growth powder setting control device |
Non-Patent Citations (1)
| Title |
|---|
| 唐坚等: "金红石单晶体制备方法发展现状", 《沈阳师范大学学报 自然科学版》, vol. 35, no. 1, pages 118 - 46 * |
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