CN110994146A - High-temperature-resistant flexible antenna and manufacturing method thereof - Google Patents
High-temperature-resistant flexible antenna and manufacturing method thereof Download PDFInfo
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- CN110994146A CN110994146A CN201911222173.7A CN201911222173A CN110994146A CN 110994146 A CN110994146 A CN 110994146A CN 201911222173 A CN201911222173 A CN 201911222173A CN 110994146 A CN110994146 A CN 110994146A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/364—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor
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Abstract
The high-temperature-resistant flexible antenna comprises a flexible substrate layer made of a flexible mica sheet material and a metal pattern layer arranged on the flexible mica sheet. The high-temperature-resistant flexible antenna can resist high temperature and has good flexibility.
Description
Technical Field
The invention relates to the field of manufacturing of flexible antennas, in particular to a high-temperature-resistant flexible antenna and a manufacturing method thereof.
Background
The traditional flexible antenna uses polymer materials such as PI film, PET film, LCP film and the like as substrates, and forms the flexible antenna through surface metallization and patterning. However, conventional flexible antennas cannot be used at high temperatures, since the polymer materials cannot withstand high temperatures, e.g., > 500 ℃.
On the other hand, among inorganic dielectric materials, high-temperature resistant materials mainly include glass, ceramic, and the like, but ceramic materials cannot be used as a flexible substrate directly because they cannot be made flexible, while glass can be made flexible by reducing its thickness, but it is difficult to form a metallized layer having a high-strength bond on the surface because its surface is smooth and has poor hydrophilicity. Therefore, the above materials still cannot be used in a high temperature resistant flexible antenna.
If the antenna consists of the metal pattern and the inorganic medium substrate, the combination of the metal pattern and the inorganic medium substrate has a heterojunction interface, when the antenna is used in a normal-high temperature thermal cycle environment, stress concentration at the interface is caused by different thermal expansion coefficients of two different materials, and the problem of functional failure of the antenna caused by interface delamination is generated, and the antenna is particularly obvious in a flexible antenna.
Disclosure of Invention
In view of this, the present invention provides a high temperature resistant flexible antenna and a manufacturing method thereof, where the high temperature resistant flexible antenna can withstand higher temperature and has better flexibility.
The invention provides a high-temperature-resistant flexible antenna which comprises a flexible substrate layer made of a flexible mica sheet material and a metal pattern layer arranged on the flexible mica sheet.
Further, the thickness of the flexible mica sheet is 10-50 μm.
Further, the metal pattern layer is formed by conductive paste with sintering temperature higher than 500 ℃.
Further, the conductive paste is silver paste, platinum paste, copper paste or nickel paste.
Further, the metal coating comprises a base layer formed on one side of the flexible mica sheet and a thickening layer formed on one side, away from the flexible mica sheet, of the base layer.
Further, the bottom layer is formed by one or more than two metals of Ti, Ni, Cr and Mo, and the thickening layer is formed by one or more than two metals of Cu, Ag, Au, Pt and Al.
Further, the thickness of the bottom layer is 10-100nm, and the thickness of the thickening layer is 2-12 μm.
The invention also provides a manufacturing method of the high-temperature-resistant flexible antenna, which comprises the following steps:
providing a flexible mica sheet;
forming a metal pattern layer on the flexible mica sheet;
and curing the metal layer.
Further, before forming the metal coating layer on the flexible mica sheet, the method further comprises: carrying out plasma cleaning on the flexible mica sheet; or
And carrying out sand blasting treatment on the flexible mica sheet, and carrying out plasma cleaning on the flexible mica sheet after the sand blasting treatment.
Further, when the metal layer is formed, the method includes:
providing conductive paste with sintering temperature higher than 500 ℃;
conductive paste is formed on the flexible mica sheet through a screen printing process or a 3D printing process.
Further, when the metal layer is formed, the method includes:
forming a priming layer on one side of the flexible mica sheet through a deposition process;
and forming a thickening layer on one side of the base layer, which is far away from the flexible mica sheet, through a deposition process.
In summary, in the invention, the flexible substrate layer of the flexible antenna is made of the flexible mica sheet material, the flexible mica sheet has the characteristics of softness, high elasticity, rough surface and the like, and mica has excellent insulating property and high temperature resistance.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic cross-sectional structure diagram of a high-temperature-resistant flexible antenna according to a first embodiment of the present invention.
Fig. 2 is a schematic cross-sectional structure diagram of a high-temperature resistant flexible antenna according to a second embodiment of the present invention.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description is given with reference to the accompanying drawings and preferred embodiments.
The invention provides a high-temperature-resistant flexible antenna and a manufacturing method thereof.
Fig. 1 is a schematic cross-sectional structure diagram of the high-temperature resistant flexible antenna according to the embodiment of the present invention, and as shown in fig. 1, the high-temperature resistant flexible antenna according to the embodiment of the present invention includes a flexible substrate layer made of a flexible mica sheet 10, and a metal layer 20 disposed on the flexible mica sheet 10.
In the embodiment, the flexible substrate layer is made of the flexible mica sheet 10, the flexible mica sheet 10 can be made of a mica sheet through peeling, thickness setting, cutting, drilling or punching, and has the characteristics of softness, high elasticity, rough surface and the like, mica has excellent insulating property, the dielectric constant of the mica is about 7.3, the dielectric loss of the mica is about 0.01, the mica is an ideal microwave medium substrate material, and is high-temperature resistant, and the temperature can reach 1000 ℃, and a device made of the mica can be used at high temperature. Therefore, the high-temperature-resistant flexible antenna can resist high temperature and has good flexibility. In order to make the formed high-temperature-resistant flexible antenna have better flexibility, the thickness of the flexible mica sheet 10 is 10-50 μm.
Further, in the present embodiment, the metal layer 20 is a metal layer 20 made of a conductive paste with a sintering temperature higher than 500 ℃, such as a silver paste, a platinum paste, a copper paste, or a nickel paste. Because the conductive paste of the material contains the glass additive, when the conductive paste is solidified at high temperature, the molten glass additive corrodes the surface of the flexible mica sheet, so that the surface of the flexible mica sheet 10 becomes rougher, the metal pattern layer 20 formed by the conductive paste can be tightly combined with the flexible mica sheet 10 into a whole, the problems of stress concentration at an interface and antenna function failure caused by interface delamination due to different thermal expansion coefficients of the material are reduced, and the bonding strength of the material and the flexible mica sheet is improved. Preferably, the thickness of metal layer 20 is 5-30 μm.
In order to ensure the tight bonding between the conductive paste and the flexible mica sheet 10, in this embodiment, the surface tension coefficient of the mica sheet is 60-80 dyne (dyn), and after the conductive paste with the sintering temperature higher than 500 ℃ is formed, the bonding force between the metal pattern layer 20 and the flexible mica sheet 10 is greater than 1kg/cm2。
Fig. 2 is a schematic cross-sectional view illustrating a high-temperature resistant flexible antenna according to a second embodiment of the present invention, and as shown in fig. 2, the high-temperature resistant flexible antenna according to the second embodiment of the present invention is substantially the same as the first embodiment, except that in this embodiment, the metal pattern layer 20 includes a primer layer 21 disposed on one side of the flexible mica sheet 10 and a thickening layer 22 disposed on a side of the primer layer 21 away from the flexible mica sheet 10, the primer layer 21 is formed by one or more of Ti, Ni, Cr, Mo, and the like, and the thickening layer 22 is formed by one or more of Cu, Ag, Au, Pt, Al, and the like. Through the arrangement of the bottoming layer 21 and the thickening layer 22, because the metal surfaces of Ti, Ni, Cr, Mo and the like have good wettability and the metal activity is high, the contact section between the bottoming layer 21 and the flexible mica sheet 10 formed by the metal materials is easy to diffuse and adhere, in addition, the metal materials can also have low internal stress, and after being combined with other interfaces, the combination force is not easy to reduce due to thermal shock, so that the bottoming layer 21 can be better combined with the flexible mica sheet 10, and the stress between the metal pattern layer 20 and the flexible mica sheet 10 is reduced; the thick layer 22 made of an alloy of one or more metals selected from Cu, Ag, Au, Pt, and Al has more excellent conductivity.
In the present embodiment, the thickness of the primer layer 21 is 10 to 100 nm; the thickness of the thickening layer 22 is 2-12 μm.
The invention also provides a manufacturing method of the high-temperature-resistant flexible antenna, which comprises the following steps:
providing a flexible mica sheet 10;
forming a metal coating layer 20 on the flexible mica sheet 10;
and solidifying the metal layer 20.
In the embodiment, since the flexible mica sheet 10 has the characteristics of softness, elasticity, rough surface, and the like, after the metal layer 20 is formed on the flexible mica sheet 10, the metal layer 20 and the flexible mica sheet 10 have a high bonding force.
Further, in this embodiment, before the metal layer 20 is formed on the flexible mica sheet 10, the flexible mica sheet 10 may be subjected to plasma cleaning to remove organic matter on the flexible mica sheet 10, so as to improve hydrophilicity of the surface of the flexible mica sheet 10. When plasma cleaning is carried out, the flexible mica sheet 10 with the thickness of 10-50 mu m is firstly placed in a vacuum chamber and vacuumized until the vacuum degree is not lower than 3 multiplied by 10-3Pa, passing gas (passing gas includes but is not limited to Ar, O2、H2、N2One or more gases in the mica sheet are mixed) to ensure that the vacuum degree is 0.1-0.5 Pa, and the flexible mica sheet 10 is heated to a certain temperature (the temperature for heating the flexible mica sheet 10 is 50-150 ℃). And when plasma cleaning is carried out, controlling the direct-current voltage to be 1000-2000V, and carrying out plasma cleaning on the mica sheet for 2-20 min by the generated plasma. The surface tension coefficient of the flexible mica sheet 10 prepared after plasma cleaning is 60-80 dynes.
In the present embodiment, the metal layer 20 is formed by screen printing or 3D printing on the flexible mica sheet 10 from a conductive paste with a sintering temperature higher than 500 ℃. When screen printing is carried out, the mesh size of the screen printing plate is 200-300 meshes, and the included angle between a scraper and the screen printing plate when high-temperature slurry is printed on the flexible mica sheet 10 in the screen printing process is 30-60 degrees. Preferably, the conductive paste with the sintering temperature higher than 500 ℃ is silver paste, platinum paste, copper paste or nickel paste.
When the metal coating 20 is cured, specifically, the flexible mica sheet 10 with the metal paste pattern is placed in a high temperature furnace, the temperature is raised to 800 ℃ at a temperature rise speed of 2 ℃/min or 3 ℃/min, the temperature is kept for 15-30 min, and the temperature rise speed is controlled to prevent the production efficiency from being influenced by too slow temperature rise and prevent the conductive paste from being influenced by additives in the conductive paste due to too fast temperature riseVolatilize too quickly and generate pores. And cooling the insulated metal layer 20 and the flexible mica sheet 10 to room temperature, and curing to form the flexible antenna with high bonding strength between the metal layer 20 and the flexible mica sheet 10. Wherein the pattern tolerance of the metal slurry is not more than 30 μm, and the bonding force between the metal pattern layer 20 and the flexible mica sheet 10 is not less than 1kg/cm2The maximum temperature of the flexible antenna used was 700 ℃.
In another embodiment provided by the present invention, in forming the metal coating 20, the method includes depositing a primer layer 21 on a side of the flexible mica sheet 10 through a deposition process, and forming a thickening layer 22 on a side of the primer layer 21 facing away from the flexible mica sheet 10 through the deposition process. The undercoat layer 21 is an alloy of one or more metals selected from Ti, Ni, Cr, Mo, and the like. Thickening layer 22 is an alloy of one or more metals selected from Cu, Ag, Au, Pt, and Al.
In order to increase the bonding tightness between the primer layer 21 and the flexible mica sheet 10, the method further comprises performing sand blasting on the flexible mica sheet 10 before performing plasma cleaning on the flexible mica sheet 10 to increase the roughness of the surface of the flexible mica sheet 10. Preferably, the roughness of the flexible mica sheet 10 after sand blasting is 100nm to 0.5 μm.
When the flexible mica sheet 10 after sand blasting is subjected to plasma cleaning, the patterned mask and the flexible mica sheet 10 can be placed in a vacuum chamber together, so that the deposition of the bottom layer 21 and the thickening layer 22 can be directly performed after the plasma cleaning. This can accomplish the plasma cleaning and the process of deposit in same vacuum chamber, avoids on broken vacuum dust adhesion on flexible mica sheet 10 and mask plate, improves the preparation efficiency simultaneously.
When the bottom layer 21 and the thickening layer 22 are deposited, magnetron sputtering is preferably adopted with the current of 1-10A, the deposition vacuum degree of 0.1-0.5 Pa, the metal deposition time of the bottom layer 21 is 30 s-5 min, the thickness is 10-100nm, the metal deposition time of the thickening layer 22 is 30 min-3 h, and the thickness is 2-12 μm. The tolerance of the metal layer 20 does not exceed 30 μm.
After the metal coating layer 20 is formed by a deposition process in a vacuum chamber, it is cooled in an Ar atmosphereCooling to room temperature, then placing the flexible mica sheet 10 deposited with the metal coating 20 in a tubular high-temperature furnace, vacuumizing to remove air in the tube, and filling high-purity gas, wherein the filled gas includes but is not limited to Ar and N2、H2、NH3And mixing one or more gases, and performing high-temperature treatment on the flexible mica sheet 10 with the metal layer 20 at normal pressure, wherein the temperature of the high-temperature treatment is 300-800 ℃, and the treatment time is 10-30 min. And then cooling to room temperature in the above gas atmosphere to form the flexible antenna with high bonding strength between the metal layer 20 and the flexible mica sheet 10. The binding force between the metal coating 20 and the flexible mica sheet 10 is more than or equal to 1kg/cm2. The maximum temperature at which the flexible antenna is used is 700 ℃.
The high temperature resistant flexible antenna provided by the present invention is described in the following by specific embodiments:
example 1
Placing a flexible mica sheet 10 with a thickness of 10 μm in a vacuum chamber, and vacuumizing to 3 × 10-3Pa. Filling Ar into the vacuum chamber to ensure that the vacuum degree is 0.1Pa, turning on a power supply of a heater, heating the flexible mica sheet 10 to 50 ℃, turning on a Plasma power supply, adjusting the voltage to 1000V, and processing the mica sheet by the generated Ar Plasma for 2 min. And when the flexible mica sheet 10 is cooled to room temperature, taking out the flexible mica sheet 10, wherein the surface tension coefficient of the surface of the flexible mica sheet 10 is 60 dynes. Placing a silk-screen printing plate with the mesh size of 200 meshes on the surface of the flexible mica sheet 10, coating high-temperature silver paste on the screen printing plate, wherein the included angle between a scraper and the screen printing plate is 30 degrees, silk-screening the metal pattern layer 20 on the flexible mica sheet 10, drying, placing in a high-temperature furnace, heating to 800 ℃ at the speed of 2 ℃/min, and preserving heat for 15 min. Cooling to room temperature, taking out to obtain the flexible antenna, wherein the tolerance of the metal layer 20 is 30 μm, and the binding force between the metal layer 20 made of silver paste and the flexible mica sheet 10 is 1kg/cm2. The flexible antenna can work normally in an environment below 700 ℃.
Example 2
Placing the flexible mica sheet 10 with the thickness of 50 μm in a vacuum chamber, and vacuumizing to 3 × 10-3Pa. Charging O into the vacuum chamber2Making the vacuum degree to be 0.5Pa, turning on the power supply of the heater, and adjusting the flexibilityHeating mica sheet 10 to 150 deg.C, turning on Plasma power supply, regulating voltage to 2000V, and generating O2The flexible mica sheet 10 was treated by plasma for 20 min. And taking out the flexible mica sheet 10 when the temperature is cooled to room temperature, wherein the surface tension coefficient of the surface of the flexible mica sheet 10 is 80 dynes. Printing high-temperature platinum paste on the surface of the flexible mica sheet 10 by a 3D printing process to form a metal coating 20, drying, placing in a high-temperature furnace, heating to 800 ℃ at the speed of 2 ℃/min, and keeping the temperature for 30 min. Cooling to room temperature, taking out to obtain the flexible antenna, wherein the tolerance of the metal layer 20 is 20 μm, and the binding force between the metal layer 20 made of platinum paste and the flexible mica sheet 10 is 3kg/cm2. The flexible antenna can work normally in an environment below 700 ℃.
Example 3
Carrying out sand blasting treatment on a flexible mica sheet 10 with the thickness of 10 mu m to ensure that the surface roughness is 100nm, placing the flexible mica sheet 10 with a mask plate in a vacuum chamber, and vacuumizing to 3 multiplied by 10-3Pa. Filling Ar into the vacuum chamber to ensure that the vacuum degree is 0.1Pa, turning on a power supply of a heater, heating the flexible mica sheet 10 to 50 ℃, turning on a Plasma power supply, adjusting the voltage to 1000V, and treating the flexible mica sheet 10 by the generated Ar Plasma for 2min to obtain the flexible mica sheet 10 with the surface tension coefficient of 60 dynes. And (3) closing a Plasma power supply, opening a magnetron sputtering power supply, regulating the current to be 1A, carrying out magnetron sputtering deposition on one side of the flexible mica sheet 10 with the mask to deposit a priming layer 21 of metal Ti for 30s, wherein the thickness of the priming layer is 10nm, depositing a thickening layer 22 of metal Ag on one side of the priming layer 21, which is far away from the flexible mica sheet 10, wherein the deposition time is 30min, the thickness of the thickening layer is 2 microns, and further forming a patterned metal layer on the flexible mica sheet 10. And cooling the flexible mica sheet 10 with the patterned metal layer to room temperature in Ar atmosphere, taking out, placing in a tubular high-temperature furnace, carrying out heat treatment at 300 ℃ for 10min in Ar atmosphere, cooling to room temperature in Ar atmosphere, and taking out to obtain the flexible antenna. The bonding force between the metal coating 20 and the flexible mica sheet 10 is 1kg/cm2And the tolerance of the metal layer 20 is 30 μm, and the flexible antenna can normally work in an environment below 700 ℃.
Example 4
A flexible cloud with a thickness of 50 μmThe master sheet 10 was subjected to sand blasting so that the surface roughness was 0.5 μm, and the flexible mica sheet 10 with the mask was placed in a vacuum chamber and evacuated to 3X 10-3Pa. Charging vacuum chamber with N2The vacuum degree is 0.5Pa, the heater power supply is turned on, the flexible mica sheet 10 is heated to 150 ℃, the Plasma power supply is turned on, the voltage is adjusted to 1000V, and the generated N2The flexible mica sheet 10 is treated by the plasma for 20min, and the surface tension coefficient of the obtained flexible mica sheet 10 is 80 dynes. And (3) closing a Plasma power supply, opening a magnetron sputtering power supply, adjusting the current of the magnetron sputtering power supply to be 10A, carrying out magnetron sputtering deposition on one side of the flexible mica sheet 10 with the mask plate to deposit the metal Cr of the priming layer 21 for 5min, wherein the thickness of the priming layer is 100nm, depositing the metal Au of the thickening layer 22 on one side of the priming layer 21, which is far away from the flexible mica sheet 10, wherein the deposition time is 3h and the thickness of the thickening layer is 12 microns, and further forming a patterned metal layer on the flexible mica sheet 10. Arranging the flexible mica sheet 10 with the patterned metal layer in N2Cooling to room temperature in the atmosphere, taking out, placing in a tubular high-temperature furnace, and performing vacuum distillation in a vacuum furnace2Heat treatment at 800 deg.C for 30min in atmosphere, N2And cooling to room temperature in the atmosphere, and taking out to obtain the flexible antenna. The bonding force between the metal coating 20 and the flexible mica sheet 10 is 2kg/cm2And the tolerance of the metal layer 20 is 20 μm, and the flexible antenna can normally work in an environment below 700 ℃.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (11)
1. A high temperature resistant flexible antenna characterized in that: the mica plate comprises a flexible substrate layer made of flexible mica plates and a metal pattern layer arranged on the flexible mica plates.
2. The high temperature resistant flexible antenna of claim 1, wherein: the thickness of the flexible mica sheet is 10-50 μm.
3. The high temperature resistant flexible antenna of claim 1, wherein: the metal pattern layer is formed by conductive paste with sintering temperature higher than 500 ℃.
4. The high temperature resistant flexible antenna of claim 3, wherein: the conductive slurry is silver slurry, platinum slurry, copper slurry or nickel slurry.
5. The high temperature resistant flexible antenna of claim 1, wherein: the metal picture layer is including being formed in make the bottom layer on flexible mica sheet one side, and be formed in make the bottom layer deviate from thickening on flexible mica sheet one side.
6. The high temperature resistant flexible antenna of claim 5, wherein: the bottom layer is formed by one or more than two metals of Ti, Ni, Cr and Mo, and the thickening layer is formed by one or more than two metals of Cu, Ag, Au, Pt and Al.
7. The high temperature resistant flexible antenna of claim 5, wherein: the thickness of the bottom layer is 10-100nm, and the thickness of the thickening layer is 2-12 μm.
8. A manufacturing method of a high-temperature-resistant flexible antenna is characterized by comprising the following steps: the method comprises the following steps:
providing a flexible mica sheet;
forming a metal pattern layer on the flexible mica sheet;
and curing the metal layer.
9. The method for manufacturing the high-temperature-resistant flexible antenna according to claim 8, wherein: before forming the metal coating layer on the flexible mica sheet, the method further comprises the following steps: carrying out plasma cleaning on the flexible mica sheet; or
And carrying out sand blasting treatment on the flexible mica sheet, and carrying out plasma cleaning on the flexible mica sheet after the sand blasting treatment.
10. The method for manufacturing the high-temperature-resistant flexible antenna according to claim 8, wherein: when the metal layer is formed, the method comprises the following steps:
providing conductive paste with sintering temperature higher than 500 ℃;
conductive paste is formed on the flexible mica sheet by a screen printing process or a 3D printing technique.
11. The method for manufacturing the high-temperature-resistant flexible antenna according to claim 8, wherein: when the metal layer is formed, the method comprises the following steps:
forming a priming layer on one side of the flexible mica sheet through a deposition process;
and forming a thickening layer on one side of the base layer, which is far away from the flexible mica sheet, through a deposition process.
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Application publication date: 20200410 |