CN110988968A - Multichannel X-ray optical machine energy spectrum measuring system and measuring method - Google Patents
Multichannel X-ray optical machine energy spectrum measuring system and measuring method Download PDFInfo
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Abstract
The invention discloses a multichannel X-ray optical machine energy spectrum measuring system and a measuring method, wherein a dosage probe is uniquely designed, a structure that N layers of absorption material layers and N detector wafers are distributed in a staggered manner is adopted, because dosage rates at different positions of the absorption material layers are different, the detector wafers at different layers can generate fluorescence signals with different intensities, the fluorescence signals are transmitted to corresponding silicon photodiode arrays through optical fiber arrays, the signals are amplified through an amplifying circuit and then sent into a PC (personal computer) through a data acquisition card for processing, and the primary spectrum distribution of a spectrum is finally obtained. The invention also provides a photoluminescence measurement by laser emitted by the laser, which is used for measuring the cumulative dose of the x-ray generated in the detector wafer. And the invention can obtain the radiation luminescence and luminescence signals, thereby simultaneously obtaining the real-time radiation dose and the accumulated dose, and simultaneously calculating the X-ray energy spectrum distribution, and the results of the two can be used for comparison and analysis.
Description
Technical Field
The invention relates to a measuring system and a measuring method, in particular to a multichannel X-ray optical machine energy spectrum measuring system and a measuring method.
Background
The primary X-ray energy spectrum distribution plays an important role in the application of the X-ray light pipe and is an important basis for evaluating the performance index of the X-ray light pipe. For example, in medical imaging and radiotherapy, the energy spectrum distribution is closely related to dose rate estimation and imaging effect.
Currently, two methods are used to determine the primary radiation energy spectrum distribution of an X-ray tube, one of the simplest methods being direct measurement. This method requires a high-precision, high-resolution, fast-response detector, and is difficult to apply to strong X-ray sources. And due to factors such as dead time of the detector, response time of a measuring circuit and the like, when the strong X-ray light source is directly measured, the detector cannot normally work due to counting rate saturation or overload. Therefore, the method of direct measurement is difficult to realize by the existing detector. Another common method is a semi-empirical formula, which characterizes the primary X-ray spectral distribution by the parameters of the X-ray tube itself. However, in actual work, the distribution of the X-ray energy spectrum often changes correspondingly with the change of working conditions, which leads to the problems of complex measurement process, more manual interventions and the like, so that the energy spectrum distribution described by the parameters of the energy spectrum distribution is difficult to meet the requirement of actual measurement.
Disclosure of Invention
The invention aims to provide a multichannel X-ray optical machine energy spectrum measuring system and a measuring method, which can solve the problems of complex measuring process and much manual intervention.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows: a multi-channel X-ray optical machine energy spectrum measuring system comprises a dosage probe for detecting X-rays, a signal acquisition circuit, a PC, a laser, an optical fiber coupler and a data acquisition card;
the dosage probe comprises a shield body which is in a hollow cylindrical shape with an opening at the lower part and is of a double-layer structure, wherein the outer layer is a lead shielding layer, the inner layer is a copper shielding layer, N layers of absorbing material layers are horizontally arranged in the shield body from top to bottom, and each absorbing material layer is internally provided with a layer of α -Al2O3The detector wafers made of the material C comprise N detector wafers, the detector wafers are used for absorbing rays in the corresponding absorbing material layers, and the N detector wafers are not overlapped on a horizontal plane and form a circle in a surrounding mode;
each detector wafer is respectively connected with one detector optical fiber, and N detector optical fibers are respectively led out from the side edge of the corresponding absorbing material layer and are butted with one-to-two optical fibers through an optical fiber coupler;
the one-to-two optical fiber is divided into a group of laser transmission optical fibers and a group of radiation detection optical fibers, and the laser transmission optical fibers are connected to the emitting end of the laser and the radiation detection optical fibers are connected to the input end of the signal acquisition circuit;
the signal acquisition circuit comprises a light guide array, a silicon photodiode array and an amplifying circuit, wherein the silicon photodiode array is composed of N silicon photodiodes, the light guide array is positioned at the input end of the silicon photodiodes and comprises a small end and a large end, the small end is connected with the radiation detection optical fibers in a one-to-one correspondence manner, the large end is the same as the input end of the silicon photodiodes in shape and size and is connected with the silicon photodiodes in a one-to-one correspondence manner through an optical coupling agent, the amplifying circuit comprises N amplifiers, and the output ends of the silicon photodiodes are connected with the N amplifiers in a one-to-one correspondence manner;
the input end of the data acquisition card is connected with the amplifying circuit, and the output end of the data acquisition card is connected with the PC;
the X-ray enters a dose probe, N detector wafers are excited to radiate and emit light to form N paths of radiation light, the N paths of radiation light reach an optical fiber coupler through corresponding N detector optical fibers, then the N paths of radiation light are correspondingly sent into N silicon photodiodes through N radiation detection optical fibers, N paths of current signals are generated by the silicon photodiodes, the N paths of current signals are converted into voltage signals through N amplifiers and subjected to amplitude adjustment to form N paths of amplitude signals, the N paths of amplitude signals are input into a data acquisition card, and the data acquisition card converts the N paths of amplitude signals into N paths of digital signals and sends the N paths of digital signals into a PC (personal computer);
the data acquisition card is also connected with the laser and used for controlling the laser to send out laser signals.
Preferably, the method comprises the following steps: the absorption material is aluminum, copper or polyethylene, the diameter of the detector wafer is 5mm, the thickness of the detector wafer is 0.2mm, and the density of the detector wafer is 2.5g/cm3And the circle surrounded by the N detector wafers is coaxial with the shielding body.
Preferably, the method comprises the following steps: the silicon photodiode array is composed of 8 by 8 silicon photodiodes, and the laser is a 570nm green laser.
Preferably, the method comprises the following steps: the outer wall of the light guide is provided with a nano film layer, and the input end of the silicon photodiode array is also provided with a filter disc.
Preferably, the method comprises the following steps: the data acquisition card is connected with the laser device as follows: two IO ports of the data acquisition card are respectively connected with a transmitting switch and a power switch of the laser, and a DAC output end of the data acquisition card is connected with a power output end of the laser.
A measuring method of a multichannel X-ray optical machine energy spectrum measuring system comprises the following steps:
(1) establishing a multichannel X-ray optical machine energy spectrum measuring system, wherein a dosage probe is arranged in front of an X-ray optical tube bundle outflow emission window to be measured and is in the same direction with a beam current, and detector wafers are sequentially from the bottom to the top, namely the first to the Nth;
(2) energy spectrum distribution of X-ray to be tested
X-rays enter the dose probe, are sequentially absorbed by the N layers of absorption material layers and excite the detector wafers on the corresponding layers to radiate and emit light to form N paths of radiation light, the radiation light enters the N silicon photodiodes through the N detector optical fibers, the optical fiber coupler, the N radiation detection optical fibers and the N light guides, and the silicon photodiodes generate lightThe method comprises the following steps that N paths of current signals are converted into voltage signals through N amplifiers and amplitude-adjusted to form N paths of amplitude signals, the N paths of amplitude signals are input into a data acquisition card, the data acquisition card converts the N paths of amplitude signals into N paths of digital signals and sends the N paths of digital signals into a PC (personal computer), the N paths of digital signals are absorption dose rates of N detector wafers, the absorption dose rate of the ith detector wafer is Di, and i is 1-N;
(3) obtaining a response function matrix:
(31) presetting an X-ray intensity as M and a maximum energy as ENAt 0-ENN energy is selected and arranged from small to large to form an energy set E, wherein the jth element is Ej；
(32) Adopting a Monte Carlo simulation method to calculate the intensity as M and the energy as EjThe X-ray enters the dose probe and penetrates the i-th layer of the absorption material layer to generate absorption dose rate on the i-th layer of the detector wafer
The corresponding response coefficient is
(33) According to the step (32), calculating the corresponding response coefficients of the X-rays with the intensity of M and the energy of other elements in E, wherein all the response coefficients form a response function matrix A;
(34) obtaining the energy spectrum distribution of the X-ray according to the following formula
Preferably, the method comprises the following steps: the method also comprises the following steps of,
(4) the X-ray energy spectrum distribution is calculated by a PC
Then, controlling the laser to generate laser;
(5) the laser enters a detector wafer after passing through a laser transmission optical fiber, an optical fiber coupler and a detector optical fiber, the radiation energy deposited in the detector wafer is excited, a light release optical signal is generated, the light release optical signal is sent into a signal acquisition circuit, and N paths of amplitude signals are converted into N paths of digital signals by a data acquisition card; sending the mixture into a PC; the N paths of digital signals are the absorption dose rates of N detector wafers under the condition of light release,
(6) obtaining the energy spectrum distribution of the light release optical signal according to the absorption dose rate of the N detector wafers obtained in the step (2) under the light release condition and the method in the step (3)
(7) Comparison
And
if the error is more than 20%, the measurement is carried out again.
The invention relates to a dose probe, which is characterized in that the structure of the dose probe is special, wherein the outer layer of a shield body is a lead shielding layer and is used for shielding interference caused by peripheral scattered X rays entering the dose probe, the inner layer is a copper shielding layer and is made of high-purity Cu and is used for shielding X rays generated by Pb, an absorption material layer is used for absorbing the X rays incident through the dose probe, and a detector wafer in each absorption material layer is used for being excited by the X rays absorbed by the absorption material layer to emit light2O3The optical fibers used in transmission are all selected to be the optical fibers which accord with the light-emitting central wavelength of the material A. And the whole dosage probe is required to be sealed and shielded from light. The detector wafers are arranged in a staggered manner, so that the technical defect that the response function of the detector is inconsistent because the detector wafers absorb and scatter radiation rays can be effectively avoided, and Al is reduced2O3C has an effect on absorption and scattering of radiation rays.
The invention is connected with the laser, and the laser is adopted to realize the light release for annealing, so that the ions in the detector wafer, which are excited by X rays, return to the initial state, thereby saving the operation time of the instrument and simultaneously reducing the trouble caused by the disassembly of the detector.
The invention adopts the one-to-two optical fiber to separate the laser transmission optical fiber of the laser and the radiation detection optical fiber of the silicon photodiode, thereby reducing the complexity of the system. And the silicon photodiode array adopts 8 by 8 arrays, and 64-path input can be realized.
The light guide adopts a structure with a small upper part and a large lower part, converts a point light source of the optical fiber into a surface light source and sends the surface light source into the silicon photodiode, but because the outer wall of the light guide is provided with the nano film layer, the complete isolation of each path of light can be realized.
The data acquisition adopts a low-noise data acquisition card, the sampling rate is 5k/s, and the data acquisition card can acquire 64 paths of data at the same time; after data of each path is collected, data collection and packaging are carried out to form a standard data packet format, the data are transmitted to a PC through a network port or a USB, and the data are read and processed by PC software.
The idea of the measuring method of the invention is as follows: the response function of the dose probe needs to be calibrated before the dose probe is used. The calibration method can adopt a theoretical calculation method and a Monte Carlo simulation calculation method, and the theoretical calculation method has larger error but high calculation speed for materials with stronger scattering; the Monte Carlo method has high calculation accuracy but slow calculation speed. The invention adopts a Monte Carlo simulation calculation method.
The spectrometer probe is arranged in front of an X-ray beam bundle outflow emission window to be measured and is in the same direction with the beam, so that errors caused by X-rays due to a shielding body of the dose probe can be effectively prevented.
Compared with the prior art, the invention has the advantages that:
(1) can measure the spectrum of an X-ray machine on line and directly read α -Al by using an optical fiber2O3The radiation luminescence and the luminescence signals of the C crystal avoid the trouble of taking out the dose plate for measurement and improve the working efficiency;
(2) the method can simultaneously measure the radiation luminescence and the luminescence signals, can simultaneously calculate the energy spectrum distribution of the X-ray light tube according to the two measurement results, is convenient for data comparison and analysis, and improves the reliability of the measurement results.
(3) The invention adopts the silicon photodiode array to read and read the optical radiation signals, and compared with a photomultiplier, the volume of the device is effectively reduced, and the device is convenient to carry and use on site.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a dose probe;
FIG. 3 is a schematic view of the structure of the detector wafer, the absorbing material layer and the optical fiber in the dose probe;
FIG. 4 is a circuit diagram of a laser interface;
FIG. 5 is a schematic diagram of a signal acquisition circuit;
FIG. 6 is a graph showing the stability of the X-ray tube in example 3;
FIG. 7 is a diagram showing verification of the present invention in example 5.
In the figure: 1. a detector optical fiber; 2. a fiber coupler; 3. a laser transmission optical fiber; 4. a radiation detection optical fiber; 5. a filter disc; 6. a lead shielding layer; 7. a copper shield layer; 8. a layer of absorbent material; 9. a detector wafer; 10. a silicon photodiode; 11. a light guide; 12. and a nano film layer.
Detailed Description
The invention will be further explained with reference to the drawings.
Example 1: referring to fig. 1 to 5, a multichannel X-ray optical machine energy spectrum measuring system comprises a dose probe for detecting X-rays, a signal acquisition circuit and a PC, and further comprises a laser, an optical fiber coupler 2 and a data acquisition card;
the dosage probe comprises a shield body which is in a hollow cylindrical shape with an opening at the lower part and is of a double-layer structure, wherein the outer layer is a lead shielding layer 6, the inner layer is a copper shielding layer 7, N layers of absorbing material layers 8 are horizontally arranged in the shield body from top to bottom, and each absorbing material layer 8 is internally provided with a layer of absorbing material formed by α -Al2O3The detector wafer 9 made of the material C comprises N detector wafers 9, the detector wafers 9 are used for absorbing rays in the corresponding absorbing material layer 8, and the N detector wafers 9 are not overlapped on a horizontal plane and form a circle in an enclosing mode;
each detector wafer 9 is respectively connected with one detector optical fiber 1, and N detector optical fibers 1 are respectively led out from the side edge of the corresponding absorbing material layer 8 and are butted with one-to-two optical fibers through an optical fiber coupler 2;
the one-to-two optical fiber is divided into a group of laser transmission optical fibers 3 and a group of radiation detection optical fibers 4, the laser transmission optical fibers 3 are connected to the emitting end of a laser, and the radiation detection optical fibers 4 are connected to the input end of a signal acquisition circuit;
the signal acquisition circuit comprises a light guide array, a silicon photodiode 10 array and an amplifying circuit, wherein the silicon photodiode 10 array is composed of N silicon photodiodes 10, the light guide array is positioned at the input end of the silicon photodiode 10 and comprises a small end and a large end, the small end is connected with the radiation detection optical fibers 4 in a one-to-one correspondence manner, the large end is the same as the input end of the silicon photodiode 10 in shape and size and is connected with the silicon photodiodes 10 in a one-to-one correspondence manner through an optical coupling agent, the amplifying circuit comprises N amplifiers, and the output ends of the silicon photodiodes 10 are connected with the N amplifiers in a one-to-one correspondence manner;
the input end of the data acquisition card is connected with the amplifying circuit, and the output end of the data acquisition card is connected with the PC;
the X-ray enters a dose probe, N detector wafers 9 are excited to radiate and emit light to form N paths of radiation light, the N paths of radiation light reach an optical fiber coupler 2 through corresponding N detector optical fibers 1, then the N paths of radiation light are correspondingly sent into N silicon photodiodes 10 through N radiation detection optical fibers 4, N paths of current signals are generated by the silicon photodiodes 10, the current signals are converted into voltage signals through N amplifiers and subjected to amplitude adjustment to form N paths of amplitude signals, the N paths of amplitude signals are input into a data acquisition card, and the N paths of amplitude signals are converted into N paths of digital signals by the data acquisition card and sent into a PC (personal computer);
the data acquisition card is also connected with the laser and used for controlling the laser to send out laser signals.
In this embodiment: the absorbent materialThe material is aluminum, copper or polyethylene, the diameter of the detector wafer 9 is 5mm, the thickness is 0.2mm, and the density is 2.5g/cm3The circle surrounded by the N detector wafers 9 is coaxial with the shielding body; the silicon photodiode 10 array is composed of 8 by 8 silicon photodiodes 10, and the laser is a 570nm green laser; the outer wall of the light guide 11 is provided with a nano film layer 12, and the input end of the silicon photodiode 10 array is also provided with a filter 5; the data acquisition card is connected with the laser device as follows: two IO ports of the data acquisition card are respectively connected with a transmitting switch and a power switch of the laser, and a DAC output end of the data acquisition card is connected with a power output end of the laser.
Example 2: referring to fig. 1 to 5, a measuring method of a multichannel X-ray optical machine energy spectrum measuring system includes the following steps:
(1) establishing a multichannel X-ray optical machine energy spectrum measuring system, installing a dose probe in front of an X-ray optical tube bundle outflow emission window to be measured, wherein the dose probe and a beam flow are in the same direction, and a detector wafer 9 is sequentially from the first to the Nth from bottom to top;
(2) energy spectrum distribution of X-ray to be tested
The X-ray enters a dose probe, is sequentially absorbed by N layers of absorption material layers 8, and excites detector wafers 9 of corresponding layers to radiate and emit light to form N paths of radiation light, the radiation light enters N silicon photodiodes 10 through N detector optical fibers 1, an optical fiber coupler 2, N radiation detection optical fibers 4 and N light guides 11, the silicon photodiodes 10 generate N paths of current signals, the current signals are converted into voltage signals through N amplifiers and subjected to amplitude adjustment to form N paths of amplitude signals, the N paths of amplitude signals are input into a data acquisition card, the data acquisition card converts the N paths of amplitude signals into N paths of digital signals and sends the N paths of digital signals into a PC (personal computer), the N paths of digital signals are the absorption dose rates of the N detector wafers 9, and the absorption dose rate of the ith detector wafer 9 is Di, i is 1-N;
(3) obtaining a response function matrix:
(31) presetting an X-ray intensity as M and a maximum energy as ENAt 0-ENFrom N energies down toLarge permutation to form an energy set E, wherein the jth element is Ej；
(32) Adopting a Monte Carlo simulation method to calculate the intensity as M and the energy as EjThe X-rays enter the dose probe and penetrate the i-th layer of absorbing material 8 to generate an absorbed dose rate on the i-th layer of detector wafer 9
The corresponding response coefficient is
(33) According to the step (32), calculating the corresponding response coefficients of the X-rays with the intensity of M and the energy of other elements in E, wherein all the response coefficients form a response function matrix A;
(34) obtaining the energy spectrum distribution of the X-ray according to the following formula
Example 3: a measuring method of a multichannel X-ray optical machine energy spectrum measuring system comprises the following steps:
(1) same as in step (1) of example 2;
(2) same as in step (2) of example 2;
(3) same as in step (3) of example 2;
(4) the X-ray energy spectrum distribution is calculated by a PC
Then, controlling the laser to generate laser;
(5) the laser enters a detector wafer 9 after passing through a laser transmission optical fiber 3, an optical fiber coupler 2 and a detector optical fiber 1, the radiation energy deposited in the detector wafer 9 is excited, a light release optical signal is generated, the light release optical signal is sent into a signal acquisition circuit, N paths of amplitude signals are converted into N paths of digital signals by a data acquisition card and sent into a PC; the N digital signals are the absorption dose rates of the N detector wafers 9 under the light release condition,
(6) obtaining the energy spectrum distribution phi' (E) of the light release optical signal according to the absorption dose rate of the N detector wafers 9 obtained in the step (2) under the light release condition and the method in the step (3);
(7) comparison
And
if the error is more than 20%, the measurement is carried out again.
Example 4: referring to fig. 6, a multichannel X-ray machine energy spectrum measurement system and a measurement method are the same as embodiment 1 and the measurement method is the same as embodiment 2, and when a multichannel X-ray machine energy spectrum measurement system is established, two or three filter sheets 5 are set when a filter sheet 5 is further arranged at the input end of a silicon photodiode 10 array. Then, the X-ray light tube is opened to perform energy spectrum measurement. Since the X-ray tube has a warm-up time, it is necessary to measure the 1 minute instrument degree after the output of the X-ray tube is stable. The instrument can read 64 data simultaneously, which is shown in fig. 6. In fig. 6, a curve with large undulations shows a case of two filter sheets 5, and a curve with small undulations below shows a case of three filter sheets 5.
Example 5: referring to FIG. 7, the system of the present invention is used to verify a known X-ray, wherein the energy spectrum of the X-ray is shown by the dotted line in FIG. 7, and after the system of the present invention detects the X-ray, the energy spectrum distribution of the X-ray is calculated by the method of the present invention
As shown by the solid line in fig. 7, it can be seen that the solution of the present invention is feasible.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (7)
1. The utility model provides a multichannel X ray apparatus energy spectrum measurement system, includes dose probe, signal acquisition circuit and the PC that is used for surveying X ray which characterized in that: the system also comprises a laser, an optical fiber coupler and a data acquisition card;
the dosage probe comprises a shield body which is in a hollow cylindrical shape with an opening at the lower part and is of a double-layer structure, wherein the outer layer is a lead shielding layer, the inner layer is a copper shielding layer, N layers of absorbing material layers are horizontally arranged in the shield body from top to bottom, and each absorbing material layer is internally provided with a layer of α -Al2O3The detector wafers made of the material C comprise N detector wafers, the detector wafers are used for absorbing rays in the corresponding absorbing material layers, and the N detector wafers are not overlapped on a horizontal plane and form a circle in a surrounding mode;
each detector wafer is respectively connected with one detector optical fiber, and N detector optical fibers are respectively led out from the side edge of the corresponding absorbing material layer and are butted with one-to-two optical fibers through an optical fiber coupler;
the one-to-two optical fiber is divided into a group of laser transmission optical fibers and a group of radiation detection optical fibers, and the laser transmission optical fibers are connected to the emitting end of the laser and the radiation detection optical fibers are connected to the input end of the signal acquisition circuit;
the signal acquisition circuit comprises a light guide array, a silicon photodiode array and an amplifying circuit, wherein the silicon photodiode array is composed of N silicon photodiodes, the light guide array is positioned at the input end of the silicon photodiodes and comprises a small end and a large end, the small end is connected with the radiation detection optical fibers in a one-to-one correspondence manner, the large end is the same as the input end of the silicon photodiodes in shape and size and is connected with the silicon photodiodes in a one-to-one correspondence manner through an optical coupling agent, the amplifying circuit comprises N amplifiers, and the output ends of the silicon photodiodes are connected with the N amplifiers in a one-to-one correspondence manner;
the input end of the data acquisition card is connected with the amplifying circuit, and the output end of the data acquisition card is connected with the PC;
the X-ray enters a dose probe, N detector wafers are excited to radiate and emit light to form N paths of radiation light, the N paths of radiation light reach an optical fiber coupler through corresponding N detector optical fibers, then the N paths of radiation light are correspondingly sent into N silicon photodiodes through N radiation detection optical fibers, N paths of current signals are generated by the silicon photodiodes, the N paths of current signals are converted into voltage signals through N amplifiers and subjected to amplitude adjustment to form N paths of amplitude signals, the N paths of amplitude signals are input into a data acquisition card, and the data acquisition card converts the N paths of amplitude signals into N paths of digital signals and sends the N paths of digital signals into a PC (personal computer);
the data acquisition card is also connected with the laser and used for controlling the laser to send out laser signals.
2. The multi-channel X-ray machine spectral measurement system of claim 1, wherein: the absorption material is aluminum, copper or polyethylene, the diameter of the detector wafer is 5mm, the thickness of the detector wafer is 0.2mm, and the density of the detector wafer is 2.5g/cm3And the circle surrounded by the N detector wafers is coaxial with the shielding body.
3. The multi-channel X-ray machine spectral measurement system of claim 1, wherein: the silicon photodiode array is composed of 8 by 8 silicon photodiodes, and the laser is a 570nm green laser.
4. The multi-channel X-ray machine spectral measurement system of claim 1, wherein: the outer wall of the light guide is provided with a nano film layer, and the input end of the silicon photodiode array is also provided with a filter disc.
5. The multi-channel X-ray machine spectral measurement system of claim 1, wherein: the data acquisition card is connected with the laser device as follows: two IO ports of the data acquisition card are respectively connected with a transmitting switch and a power switch of the laser, and a DAC output end of the data acquisition card is connected with a power output end of the laser.
6. The measurement method of the multichannel X-ray optical machine energy spectrum measurement system according to claim 1, characterized in that: the method comprises the following steps:
(1) establishing a multichannel X-ray optical machine energy spectrum measuring system, wherein a dosage probe is arranged in front of an X-ray optical tube bundle outflow emission window to be measured and is in the same direction with a beam current, and detector wafers are sequentially from the bottom to the top, namely the first to the Nth;
(2) energy spectrum distribution of X-ray to be tested
The X-ray enters a dose probe, is sequentially absorbed by N layers of absorption material layers, and excites detector wafers of corresponding layers to radiate and emit light to form N paths of radiation light, the radiation light enters N silicon photodiodes through N detector optical fibers, an optical fiber coupler, N radiation detection optical fibers and N light guides, the silicon photodiodes generate N paths of current signals, the current signals are converted into voltage signals through N amplifiers and subjected to amplitude adjustment to form N paths of amplitude signals, the N paths of amplitude signals are input into a data acquisition card, the data acquisition card converts the N paths of amplitude signals into N paths of digital signals, the N paths of digital signals are sent into a PC (personal computer), the N paths of digital signals are absorption dose rates of the N detector wafers, the absorption dose rate of the ith detector wafer is Di, and i is 1-N;
(3) obtaining a response function matrix:
(31) presetting an X-ray intensity as M and a maximum energy as ENAt 0-ENN energy is selected and arranged from small to large to form an energy set E, wherein the jth element is Ej；
(32) Adopting a Monte Carlo simulation method to calculate the intensity as M and the energy as EjThe X-ray enters the dose probe and penetrates the i-th layer of the absorption material layer to generate absorption dose rate on the i-th layer of the detector wafer
The corresponding response coefficient is
(33) According to the step (32), calculating the corresponding response coefficients of the X-rays with the intensity of M and the energy of other elements in E, wherein all the response coefficients form a response function matrix A;
(34) obtaining the energy spectrum distribution of the X-ray according to the following formula
7. The measurement method of the multichannel X-ray optical machine energy spectrum measurement system according to claim 6, characterized in that: the method also comprises the following steps of,
(4) the X-ray energy spectrum distribution is calculated by a PC
Then, controlling the laser to generate laser;
(5) the laser enters a detector wafer after passing through a laser transmission optical fiber, an optical fiber coupler and a detector optical fiber, the radiation energy deposited in the detector wafer is excited, a light release optical signal is generated, the light release optical signal is sent into a signal acquisition circuit, N paths of amplitude signals are converted into N paths of digital signals by a data acquisition card, and the N paths of digital signals are sent into a PC; the N paths of digital signals are the absorption dose rates of N detector wafers under the condition of light release;
(6) obtaining the energy spectrum distribution of the light release optical signal according to the absorption dose rate of the N detector wafers obtained in the step (2) under the light release condition and the method in the step (3)
(7) Comparison
And
if the error is larger thanAnd 20%, re-measuring.
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