CN110972456A - Ultrathin vapor chamber with composite liquid absorption core structure and manufacturing method thereof - Google Patents
Ultrathin vapor chamber with composite liquid absorption core structure and manufacturing method thereof Download PDFInfo
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- CN110972456A CN110972456A CN201911399639.0A CN201911399639A CN110972456A CN 110972456 A CN110972456 A CN 110972456A CN 201911399639 A CN201911399639 A CN 201911399639A CN 110972456 A CN110972456 A CN 110972456A
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Abstract
The invention discloses an ultrathin soaking plate with a composite liquid absorption core structure and a manufacturing method thereof, wherein the ultrathin soaking plate comprises an evaporation plate and a condensation plate, wherein a concave cavity is arranged on the inner surface of the evaporation plate, and a first capillary structure and a second capillary structure are arranged in the concave cavity; the first capillary structure is a micro-channel structure integrally processed with the evaporation plate, and the second capillary structure is a porous metal structure formed by sintering; a third capillary structure is arranged on the inner surface of the condensing plate, and the third capillary structure is a circumferential array micro-channel with an emission shape; the manufacturing method comprises the steps of integrally processing the concave cavity of the evaporation plate and the first capillary structure, sintering the second capillary structure, processing the condensation plate, cleaning, sealing, welding and vacuumizing for liquid injection. The vapor chamber with the composite liquid absorption core structure has the characteristics of thin thickness, high permeability, high supporting strength, high heat dissipation efficiency and reversible gravity.
Description
Technical Field
The invention relates to the technical field of heat dissipation of microelectronic devices, in particular to an ultrathin vapor chamber with a composite liquid absorption core structure and a manufacturing method thereof.
Background
Along with the integration and function complexity of electronic devices, the unit area heat productivity of electronic equipment is higher and higher, and how to realize the efficient heat dissipation of high heat flux density electronic equipment becomes the key point of the technical development of the electronic equipment. The vapor chamber realizes the rapid diffusion of concentrated heat to a larger condensation surface by the phase change heat transfer principle, thereby effectively reducing the heat flux density of the electronic equipment. For this reason, vapor chamber technology is highly appreciated by researchers in the field of heat dissipation in electronic devices.
The existing vapor chamber is generally flat and is composed of an evaporation plate, a condensation plate and a corresponding liquid absorption core. When the device works, heat of a heat source is transferred to the liquid working medium through the wall shell of the evaporation surface and the liquid absorption core, so that the liquid working medium is boiled and gasified due to temperature rise; the working medium converted into the gas state is transferred to the condensing surface, the gas state is condensed into liquid again after releasing heat, the liquid working medium returns to the evaporation end by means of gravity or capillary force of the evaporation tank, a working cycle is completed, and the steps are repeated, so that the heat is rapidly diffused to the whole condensing surface from a concentrated area. However, the existing soaking plate technology has the following defects:
1. the existing vapor chamber of the vapor chamber is generally reserved as a vapor diffusion channel, and the vapor chamber has low structural strength and is easy to deform to cause poor contact, so that the heat dissipation performance of the vapor chamber is sharply reduced. On the other hand, the vapor chamber structure makes the vapor chamber more difficult to be ultrathin, the processing is more complicated, and the cost is higher.
2. Most of the prior vapor chamber wicks are formed by porous metal sintering. The liquid absorption core has large flow resistance, small permeability and low heat dissipation efficiency.
3. The existing part of vapor chamber adopts a channel-type liquid absorbing core, so that the permeability is high, the flow resistance is low, but the capillary suction is low, and the sufficient reflux power can not be provided for the working medium, so that the heat dissipation efficiency of the vapor chamber is reduced. On the other hand, the existing channel type liquid absorption core vapor chamber has poor anti-gravity effect and can only be horizontally installed.
4. The existing soaking plate has large thickness, and the phenomenon of sharp increase of thermal resistance can occur when the thickness is reduced or micro stress deformation occurs.
Disclosure of Invention
In order to overcome the defects and shortcomings of the prior art, the invention provides the ultrathin vapor chamber with the composite liquid absorbing core structure, which has the advantages of thin thickness, high permeability, low flow resistance, high support strength, high heat dissipation efficiency and reversible gravity.
A second object of the present invention is to provide a method of making an ultra-thin vapor chamber having a composite wick structure.
The invention adopts the following technical scheme:
an ultrathin soaking plate with a composite liquid absorption core structure comprises an evaporation plate and a condensation plate, wherein a heat source is arranged below the evaporation plate, a concave cavity is formed in the inner surface of the evaporation plate, and a first capillary structure and a second capillary structure are arranged in the concave cavity; a third capillary structure is disposed on an inner surface of the cold plate.
Preferably, the first capillary structure is a microchannel channel structure integrally processed with the evaporation plate, and the second capillary structure is a porous metal structure formed by sintering.
Preferably, the first capillary structure is distributed in the concave cavity in a circular ring shape and comprises a first micro-channel structure and a second micro-channel structure.
Preferably, the first microchannel structure is a straight channel diverging from the center of the cavity to the edge, and the channel width gradually increases from the center of the cavity to the edge.
Preferably, the second microchannel structure is distributed in a net shape, the circular first capillary structure is divided into the microneedle rib structure, and the width of the second microchannel is smaller than that of the first microchannel.
Preferably, the second capillary structure is placed in the center of the circular ring of the first capillary structure, and the height of the second capillary structure is equal to that of the first capillary structure.
Preferably, the third capillary structure is a circumferential micro-channel array with an emission shape, and the circumferential micro-channel array with the emission shape is formed by micro-channels which gradually diverge from the circle center to the edge.
Preferably, the microchannel includes a plurality of stages of the ternary tree microchannel, each stage of the ternary tree microchannel includes a main channel and two sub-channels, the sub-channels of adjacent stages are connected by a connecting channel, and the two sub-channels diverge to two sides of the main channel.
Preferably, the width and length of the rear stage main channel are less than or equal to those of the front stage main channel.
A method for manufacturing an ultrathin soaking plate with a composite liquid absorption core structure comprises the following steps:
(1) the evaporation plate concave cavity and the first capillary structure are integrally processed: processing a concave cavity and a first capillary structure by laser engraving, chemical corrosion or a micro-milling technology;
(2) sintering of a second capillary structure: and sintering the porous metal plate in the center of the circular ring of the first capillary structure by a vacuum sintering technology, and controlling the height of the porous metal plate to be the same as that of the first capillary structure.
(3) Processing a condensation plate: processing a third capillary structure on the condensing plate by laser engraving, chemical corrosion or a micro-milling technology;
(4) cleaning and sealing welding: cleaning the surfaces of the evaporation plate and the condensation plate, and welding the evaporation plate, the condensation plate and the capillary structure thereof together in a diffusion welding mode after cleaning to form a sealed packaging cavity;
(5) vacuumizing and injecting liquid: and vacuumizing the interior of the packaging cavity, and sealing after injecting working media.
The invention has the beneficial effects that:
(1) the evaporation plate liquid absorption core structure is formed by adopting a composite capillary structure, has the characteristic of large capillary force of the porous metal sintered liquid absorption core, and has the advantages of large heat exchange area, small flow resistance and high permeability of the groove type liquid absorption core.
(2) The first capillary structure of the invention adopts a composite micro-channel structure, wherein the first micro-channel structure is a gradually-expanding channel from the center of the concave cavity to the edge. The structural design can provide certain reflux capillary force for reflux of the condensed liquid working medium on the premise of ensuring large permeability and small flow resistance, and avoid the phenomenon of dry burning of the evaporating plate. When the composite micro-channel structure works, the electronic chip is generally positioned at the central part of the evaporation plate, the central part has strong evaporation, boiling and gasification effects, and is easy to dry, and the problem can be alleviated to a certain extent by the composite micro-channel structure.
(3) The vapor chamber condensation end adopts an emission-shaped micro-channel structure design, and has the advantages of small flow resistance, large capillary suction force, large condensation area, short condensation reflux path and high heat dissipation efficiency.
(4) The vapor chamber liquid absorption core is mainly of a micro-channel structure, a support column structure is avoided, the support strength is high, the pressure resistance and the heat resistance are high, the ultra-thin vapor chamber can be designed without influencing the strength, and the micro-channel structure can realize flexibility to a certain extent without influencing the heat dissipation performance.
(5) The liquid absorbing core structure of the vapor chamber has the advantages of level effect, good anti-gravity effect, low requirement on the installation position, capability of realizing the installation requirements of horizontal, vertical and overturning, and wide adaptability.
(6) The manufacturing method of the vapor chamber with the composite liquid absorption core structure is simple and convenient to operate and is suitable for large-scale production.
Drawings
FIG. 1 is a schematic structural view of an ultra-thin vapor chamber having a composite wick structure according to the present invention;
FIG. 2 is a cross-sectional view of FIG. 1;
FIG. 3 is an enlarged view of a portion of the evaporating plate of FIG. 1;
FIG. 4 is a schematic diagram of the structure of the condenser plate of FIG. 1;
FIG. 5 is a schematic view of one of the condensing regions of FIG. 4.
The figures show: 1-an evaporation plate; 11-a first capillary structure; 111-a first microchannel structure; 112-a second microchannel structure; 12-a second capillary structure; 2-a cold plate; 21-a third capillary structure; 211-main channel; 212-secondary channel; 213-connecting the channels; 3-heat source.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited to these examples.
Example 1
As shown in fig. 1-5, an ultra-thin vapor chamber with a composite liquid absorption core structure is circular, the overall height is 0.6mm, and comprises an evaporation plate 1 and a condensation plate 2, a heat source 3 is arranged below the evaporation plate, a concave cavity is arranged on the inner surface of the evaporation plate 1, and a first capillary structure 11 and a second capillary structure 12 are arranged in the concave cavity; the first capillary structure 11 is a micro-channel structure integrally processed with the evaporation plate 1, and the second capillary structure 12 is a porous metal structure formed by sintering; the inner surface of the condensation plate 2 is provided with a third capillary structure 21, the third capillary structure 21 has a circumferential array micro-channel structure with an emission-shaped structure, and the lower surface of the condensation plate, namely the surface opposite to the evaporation plate, is the inner surface in the embodiment, and the inner surface is a protrusion.
In this embodiment, the porous metal structure may be porous foam metal, copper powder sintered, or wire mesh sintered.
In this embodiment, the first capillary structure 11 is a micro-channel structure, and is specifically distributed in the concave cavity in a circular ring shape, and includes a first micro-channel structure 111 and a second micro-channel structure 112, the first micro-channel is a straight channel diverging from the center of the concave cavity to the edge, and the channel width gradually increases from the center of the concave cavity to the edge; the second microchannel structures 112 are distributed in a mesh shape, and divide the circular first capillary structure 11 into microneedle rib structures, as shown in the partially enlarged schematic view of fig. 3, the width of the second microchannel is smaller than that of the first microchannel.
In this embodiment, the cavity depth is 0.4mm, the first microchannel structure 111 and the second microchannel structure 112 are processed in the cavity, and the starting end width W of the first microchannel 11100.2mm, the second microchannel 112 is of an equidistant micro-needle rib structure, the spacing is 0.05mm, and all microchannels have a depth of oneThe samples were all 0.2 mm.
In this embodiment, the second capillary structure 12 is formed in the center of the cavity of the evaporation plate, the second capillary structure 12 is formed by sintering porous copper foam, the porosity is 0.8, the second capillary structure is placed in the center of the ring of the first capillary structure 11, and the height of the second capillary structure is equal to that of the first capillary structure 11.
In this embodiment, the condensing plate 2 is processed with a third capillary structure 21, which is an emission-shaped micro-channel array, in this embodiment, the third capillary structure 21 includes 12 sets of micro-channels in a circumferential array, each micro-channel is a condensing area, and each set of condensing area is composed of a 4-level ternary tree micro-channel structure; the three-branch tree micro-channel structure comprises a main channel 211 in the middle and two secondary channels 212 which are diverged to two sides; the divergent secondary channels 212 are connected into a whole by the connecting channels 213 at both sides of the condensation zone, the two secondary channels may be symmetrical about the primary channel, the width and length of the latter primary channel are less than or equal to those of the former primary channel, and the width of the latter secondary channel is less than or equal to those of the former secondary channel, as shown in fig. 5; in the embodiment, the lengths of the main channels of each stage are equal, the width of the main channel of 0 stage is 0.6mm, then the main channels are gradually decreased in proportion of 0.7 step by step, and the width of the secondary channel is half of the width of the main channel of the corresponding stage; the angle between the primary channel 211 and the secondary channel 212 is 30 °; the width of the connecting channel is 0.15 mm; all channels are of equal depth, all 0.2 mm.
The following describes in detail the method for manufacturing the ultrathin vapor chamber with the composite liquid absorption core structure to further show the structural characteristics and advantages of the ultrathin vapor chamber, and mainly comprises the following steps:
(1) the evaporation plate concave cavity and the first capillary structure 11 are integrally processed: processing a concave cavity of the evaporation plate and a first capillary structure 11 by a laser engraving technology;
(2) sintering of the second capillary structure 12: the porous metal plate is sintered at the center of the circular ring of the first capillary structure 11 by a vacuum sintering technique, and the height of the porous metal plate is controlled to be the same as that of the first capillary structure.
(3) And (3) processing a condensation plate 2: processing a third capillary structure 21 on the condensation plate 2 by a laser engraving technique;
(4) cleaning and sealing welding: cleaning the surfaces of the evaporation plate and the condensation plate, and welding the evaporation plate, the condensation plate and the capillary structure thereof together in a diffusion welding mode after cleaning to form a sealed packaging cavity;
(5) vacuumizing and injecting liquid: and vacuumizing the interior of the packaging cavity, and sealing after injecting working media.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (10)
1. The utility model provides an ultra-thin soaking plate with compound wick structure which characterized in that: the heat source is arranged below the evaporating plate, a concave cavity is arranged on the inner surface of the evaporating plate, a first capillary structure and a second capillary structure are arranged in the concave cavity, and a third capillary structure is arranged on the inner surface of the condensing plate.
2. The ultra-thin vapor chamber of claim 1, wherein: the first capillary structure is a microchannel channel structure integrally processed with the evaporation plate, and the second capillary structure is a porous metal structure formed by sintering.
3. The ultra-thin vapor chamber of claim 2, wherein: the first capillary structure is distributed in the concave cavity in a circular ring shape and comprises a first micro-channel structure and a second micro-channel structure.
4. The ultra-thin vapor chamber of claim 3, wherein: the first micro-channel structure is a straight channel which diverges from the center of the cavity to the edge, and the channel width gradually increases from the center of the cavity to the edge.
5. The ultra-thin vapor chamber of claim 3, wherein: the second microchannel structure is distributed in a net shape, the annular first capillary structure is divided into the micro-needle rib structure, and the width of the second microchannel is smaller than that of the first microchannel.
6. The ultra-thin vapor chamber of claim 3, wherein: the second capillary structure is placed in the center of the circular ring of the first capillary structure, and the height of the second capillary structure is equal to that of the first capillary structure.
7. The ultra-thin vapor chamber of claim 1, wherein: the third capillary structure is a circumferential array micro-channel with an emission shape, and the circumferential array micro-channel with the emission shape is formed by micro-channels which gradually diverge from the circle center to the edge.
8. The ultra-thin vapor chamber of claim 7, wherein: the microchannel comprises a plurality of stages of ternary tree microchannels, each stage of ternary tree microchannel comprises a main channel and two secondary channels, the secondary channels of adjacent stages are connected through a connecting channel, and the two secondary channels are dispersed to two sides of the main channel.
9. The ultra-thin vapor chamber of claim 8, wherein the width and length of the subsequent stage main channel is less than or equal to the width and length of the previous stage main channel.
10. A method of making ultra-thin vapor chamber with composite wick structure for use in any of claims 1-9, wherein: the method comprises the following steps:
(1) the evaporation plate concave cavity and the first capillary structure are integrally processed: processing a concave cavity and a first capillary structure by laser engraving, chemical corrosion or a micro-milling technology;
(2) sintering of a second capillary structure: sintering the porous metal plate in the center of the circular ring of the first capillary structure by a vacuum sintering technology, and controlling the height of the porous metal plate to be the same as that of the first capillary structure;
(3) processing a condensation plate: processing a third capillary structure on the condensing plate by laser engraving, chemical corrosion or a micro-milling technology;
(4) cleaning and sealing welding: cleaning the surfaces of the evaporation plate and the condensation plate, and welding the evaporation plate, the condensation plate and the capillary structure thereof together in a diffusion welding mode after cleaning to form a sealed packaging cavity;
(5) vacuumizing and injecting liquid: and vacuumizing the interior of the packaging cavity, and sealing after injecting working media.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112944964A (en) * | 2021-02-20 | 2021-06-11 | 广东工业大学 | Ultrafast reflux soaking plate and preparation method thereof |
| CN113295027A (en) * | 2021-06-01 | 2021-08-24 | 广东工业大学 | Self-refluxing flat heat pipe |
| CN113316355A (en) * | 2021-04-20 | 2021-08-27 | 江西展耀微电子有限公司 | Soaking structure and electronic equipment |
| CN114258249A (en) * | 2021-12-13 | 2022-03-29 | 哈尔滨工业大学 | Bionic micro-nano self-driven steam cavity and forming method |
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2019
- 2019-12-30 CN CN201911399639.0A patent/CN110972456A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112944964A (en) * | 2021-02-20 | 2021-06-11 | 广东工业大学 | Ultrafast reflux soaking plate and preparation method thereof |
| CN112944964B (en) * | 2021-02-20 | 2023-05-16 | 广东工业大学 | Ultra-fast reflux vapor chamber and preparation method thereof |
| CN113316355A (en) * | 2021-04-20 | 2021-08-27 | 江西展耀微电子有限公司 | Soaking structure and electronic equipment |
| CN113295027A (en) * | 2021-06-01 | 2021-08-24 | 广东工业大学 | Self-refluxing flat heat pipe |
| CN114258249A (en) * | 2021-12-13 | 2022-03-29 | 哈尔滨工业大学 | Bionic micro-nano self-driven steam cavity and forming method |
| CN114258249B (en) * | 2021-12-13 | 2024-04-05 | 哈尔滨工业大学 | Bionic micro-nano self-driven steam cavity and forming method |
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Effective date of registration: 20220512 Address after: 511480 A103, No. 1, Shaxing Road, Lanhe Town, Nansha District, Guangzhou City, Guangdong Province Applicant after: Guangzhou zhileng Energy Saving Technology Co.,Ltd. Address before: 510640 No. five, 381 mountain road, Guangzhou, Guangdong, Tianhe District Applicant before: SOUTH CHINA University OF TECHNOLOGY Applicant before: Guangzhou zhileng Energy Saving Technology Co., Ltd |