CN110963697A - Synchronous drive PCVD (plasma chemical vapor deposition) furnace device - Google Patents
Synchronous drive PCVD (plasma chemical vapor deposition) furnace device Download PDFInfo
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- CN110963697A CN110963697A CN201911074297.5A CN201911074297A CN110963697A CN 110963697 A CN110963697 A CN 110963697A CN 201911074297 A CN201911074297 A CN 201911074297A CN 110963697 A CN110963697 A CN 110963697A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
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Abstract
The utility model relates to a synchronous drive PCVD deposition furnace device, include stove, lifting unit, the subassembly and the frame that open and shut, lifting unit sets up on the frame, lifting unit connects and drives the subassembly that opens and shuts reciprocates, the subassembly that opens and shuts includes first mounting panel, fixes first motor and first lead screw on the first mounting panel, the subassembly that opens and shuts still include right angle speed reducer and with the transmission shaft that right angle speed reducer connects, first screw connection is in on the transmission shaft, first motor output connects and drives right angle speed reducer and then drives the transmission shaft rotates, the first lead screw axle of first lead screw is in upwards or downstream under the transmission shaft drives. The invention has simple structural design and low processing and assembling difficulty, replaces electrical synchronization with mechanical synchronization and improves the transmission stability.
Description
Technical Field
The application belongs to the technical field of optical fiber manufacturing, and particularly relates to a synchronous driving PCVD deposition furnace device.
Background
The PCVD technique refers to a method of introducing a plasma technique to chemical vapor deposition to form a capping layer, and is called plasma chemical vapor deposition, PCVD for short. The PCVD technique can promote chemical reactions using low temperature plasma, allowing films to be deposited at lower temperatures than thermal chemical reactions. In recent years, in the industrial fields of semiconductors, electronic products, optical instruments, and the like, the practical use of the plasma chemical vapor deposition technique has been attracting attention, and its application is rapidly developing.
In the optical fiber PCVD process, the deposition furnace needs to complete the actions of lifting, opening and closing and the like. The existing furnace driving device mainly completes the lifting action in a mode of combining an alternating current asynchronous motor and a turbine lifter, and realizes the opening and closing action of the furnace by using an electric push rod or an air cylinder. The furnace driving device has low transmission efficiency in the PCVD process, and the problem of synchronism can cause damage to the mechanism and materials in the furnace, so that the core rod produced by the whole deposition process has various defects. The prior art has the deposition furnace device with basically the same operation action, namely, the four actions of up-down and opening and closing are completed. The device used for moving up and down is mostly matched with an alternating current asynchronous motor for a turbine screw lifter, guide rail positioning is required for assistance, the structure is complex, and the transmission efficiency is low. The device that the drive opened and shut mostly is that cylinder or electric putter drive connecting rod accomplish, because the synchronism itself is relatively poor, damages the mechanism easily or damages the inside insulation material of stove to the plug that leads to whole deposition process output has various defect problems.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the device for synchronously driving the PCVD deposition furnace is provided for solving the defects of poor deposition synchronism and low action efficiency of the PCVD deposition furnace device in the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a synchronous drive PCVD deposition furnace device, includes stove, lifting unit, opens and shuts subassembly and frame, lifting unit sets up on the frame, lifting unit connects and drives the subassembly that opens and shuts reciprocates, the subassembly that opens and shuts includes first mounting panel, fixes first motor and the first lead screw on the first mounting panel, the subassembly that opens and shuts still includes right angle speed reducer and with the transmission shaft that right angle speed reducer is connected, first screw connection is in on the transmission shaft, first motor output end is connected and is driven right angle speed reducer and then drive the transmission shaft rotates, the first lead screw axle of first lead screw upwards or downstream under the transmission shaft drives, the stove has the fixed part and rotates the connection and is in a pair of portion that opens and shuts on the fixed part, the fixed part with first lead screw axle is fixed, a pair of portion that opens and shuts respectively through round pin axle assembly with first mounting panel is connected, when the first screw shaft drives the fixing part to move upwards or downwards, the pair of opening and closing parts are separated from each other and opened or closed together.
In one embodiment, the lifting assembly comprises a second mounting plate, a second motor, a second lead screw and a driving pulley, the second mounting plate is fixed on the frame, the second lead screw is fixed on the second mounting plate, two ends of the driving pulley are respectively connected with an output end of the second motor and a driving end of the second lead screw, a driven end of the second lead screw is fixed with the first mounting plate, and the second motor drives a driven end of the second lead screw to move upwards or downwards through the driving pulley.
In one embodiment, the second motor is a servo motor, and the second lead screw is a trapezoidal lead screw.
In one embodiment, the driving belt wheel includes a driving belt and a pair of driving wheels respectively disposed at two ends of the driving belt, the second screw includes a second screw shaft and a screw nut fixed at a top end of the second screw shaft, the pair of driving wheels are respectively connected to an output end of the second motor and the screw nut, the second motor drives the screw nut to rotate through the driving belt wheel, and the rotating screw nut drives the second screw shaft to move up or down.
In one embodiment, the second motor is a brake motor.
In one embodiment, the second motor is connected with a frequency converter, and the frequency converter controls the rotating speed of the second motor to enable the opening and closing assembly to move downwards first and then slowly and to move upwards first and then quickly.
In one embodiment, the first lead screw is a turbine lead screw.
In one embodiment, a sliding rail is vertically arranged on the frame, a sliding block is fixed on the first mounting plate, and the sliding block moves along the sliding rail when the lifting assembly is connected with and drives the opening and closing assembly to move up and down.
In one embodiment, the slide rail has a pair of rails fixed to the frame in parallel with each other.
In one embodiment, the pin shaft assembly comprises a shaft rod and a pair of rotating joints, the pair of rotating joints are respectively fixed on the opening and closing part and the first mounting plate, and two ends of the shaft rod are respectively connected with the pair of rotating joints in a rotating mode.
The invention has the beneficial effects that: the invention has simple structural design and low processing and assembling difficulty, replaces electrical synchronization with mechanical synchronization, and improves the transmission stability; the electric cylinder is adopted to replace a turbine screw machine, so that the control is accurate, and the driving efficiency is improved; the turbine screw device is adopted to replace an electric push rod or an air cylinder, so that the operation is stable, and the positioning is accurate; the combination of the servo motor and the trapezoidal screw replaces a turbine screw lifter and an asynchronous motor, so that the action efficiency is improved; the precision of the movement position is improved by servo control and a slide rail guiding mode.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
FIG. 1 is a perspective view of a PCVD deposition furnace apparatus that is synchronously driven in accordance with an embodiment of the present application;
FIG. 2 is a front view of a PCVD deposition furnace apparatus that is synchronously driven in accordance with an embodiment of the present application;
FIG. 3 is a side view of a synchronously driven PCVD deposition furnace apparatus according to an embodiment of the present application.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
The utility model provides a synchronous drive PCVD deposition furnace device, includes stove 1, lifting unit, opens and shuts subassembly and frame 2, and lifting unit sets up on frame 2, and lifting unit connects and drives and opens and shut the subassembly and reciprocate. The subassembly that opens and shuts includes first mounting panel 3, fixes first motor 4 and first lead screw 5 on first mounting panel 3, and the subassembly that opens and shuts still includes right angle speed reducer 6 and the transmission shaft 7 of being connected with right angle speed reducer 6, and first lead screw 5 is connected on transmission shaft 7. The output end of the first motor 4 is connected with and drives the right-angle speed reducer 6 to further drive the transmission shaft 7 to rotate, and the first screw shaft of the first screw 5 moves upwards or downwards under the driving of the transmission shaft. The stove 1 has fixed part 8 and a pair of portion 9 that opens and shuts of rotating connection on fixed part 8, and fixed part 8 is fixed with first lead screw axle, and a pair of portion 9 that opens and shuts is connected with first mounting panel 3 through round pin axle subassembly 10 respectively, and when first lead screw axle drove fixed part 8 upwards or the downstream, a pair of portion 9 that opens and shuts separated each other and open or gather together the closure to realize the switching of stove 1.
The opening and closing assembly of the embodiment adopts a combination device of a motor, a speed reducer and a lead screw, the opening and closing of the furnace are always kept synchronous through a mechanical synchronization mode, electrical synchronization is replaced by mechanical synchronization, and the stability of transmission is improved. The pin shaft is a standard fastener, can be statically and fixedly connected, can also move relative to a connected piece, and is mainly used at the hinged position of two parts to form a hinged connection. The pin shaft is usually locked by a cotter pin, and has reliable work and convenient disassembly.
In this embodiment, the pin assembly 10 connects the opening and closing portion 9 and the first mounting plate 3 to each other for relative movement. Because the fixing part 8 is fixed with the first screw shaft, when the first screw shaft moves upwards, the fixing part 8 moves upwards, the opening and closing part 9 rotates relative to the first mounting plate 3, after the opening and closing part 9 rotates relative to the fixing part 8, the opening and closing part 9 is in an open state, and the furnace 1 is opened; when the first screw shaft moves downwards, the fixing part 8 moves downwards, the opening and closing part 9 rotates relative to the first mounting plate 3, after the opening and closing part 9 rotates relative to the fixing part 8, the pair of opening and closing parts 9 are in a closed state, and the furnace 1 is closed.
In one embodiment, the lifting assembly comprises a second mounting plate 11, a second motor 12, a second lead screw 13 and a driving pulley 14, the second mounting plate 11 is fixed on the frame 2, the second lead screw 13 is fixed on the second mounting plate, two ends of the driving pulley 14 are respectively connected with an output end of the second motor 12 and a driving end of the second lead screw 13, a driven end of the second lead screw 13 is fixed with the first mounting plate 3, and the second motor 12 drives the driven end of the second lead screw to move upwards or downwards through the driving pulley 14, so as to drive the first mounting plate 3 to move upwards or downwards, and thus the opening and closing assembly can move up and down.
In one embodiment, the second motor 12 is a servo motor, and the second lead screw 13 is a trapezoidal lead screw. This embodiment lifting unit adopts electric jar composite set, and the combination that is servo motor and trapezoidal lead screw inside the electric jar promptly adopts the electric jar to replace turbine screw machine, and control is accurate, has improved drive efficiency. The trapezoidal lead screw is an important component for transmission motion in mechanical equipment, is wide in application range, can convert linear motion into rotary motion or convert rotary motion into linear motion, has conversion efficiency of seventy percent, and is a better choice for providing a faster feeding speed during low-speed rotation due to a larger lead. In the embodiment, the self-locking function of the trapezoidal lead screw is utilized, so that the device can be protected, the safety is improved, and the precision of motion control is increased. The combination of the servo motor and the trapezoidal screw replaces a turbine screw lifter and an asynchronous motor, so that the action efficiency is improved.
In one embodiment, the driving belt wheel 14 includes a driving belt and a pair of driving wheels respectively disposed at two ends of the driving belt, the second lead screw 13 includes a second lead screw shaft and a lead screw nut fixed at a top end of the second lead screw shaft, the pair of driving wheels are respectively connected to an output end of the second motor 12 and the lead screw nut, the second motor 12 drives the lead screw nut to rotate through the driving belt wheel 14, and the rotating lead screw nut drives the second lead screw shaft to move up or down.
To improve safety and increase the accuracy of the motion control, in one embodiment, the second motor 12 is a brake motor.
In one embodiment, the second motor 12 is connected to a frequency converter, the frequency converter controls the motor by changing the frequency of the working power supply of the motor, and the frequency converter controls the rotation speed of the second motor 12 to make the opening and closing assembly move downwards first fast and then slow, and move upwards first slow and then fast.
In one embodiment, the first lead screw 5 is a turbine lead screw. The turbine screw device is adopted to replace an electric push rod or an air cylinder, so that the operation is stable, and the positioning is accurate.
In one embodiment, a slide rail 15 is vertically arranged on the frame 2, a slider 16 is fixed on the first mounting plate 3, and when the lifting assembly is connected with and drives the opening and closing assembly to move up and down, the slider 16 moves along the slide rail 15. The precision of the movement position is improved by a guide mode of the slide rail 15. The slide rail 15 guarantees the parallelism through the shoulder installation, can guarantee the accurate directional removal of first mounting panel 3.
In order to further guarantee the precision of the movement, in one of the embodiments the slide 15 has a pair of rails fixed parallel to each other on the frame 2.
In one embodiment, the pin assembly 10 includes a shaft and a pair of rotating joints, the pair of rotating joints are respectively fixed on the opening and closing portion 9 and the first mounting plate 3, and two ends of the shaft are respectively rotatably connected with the pair of rotating joints.
In one embodiment, the lifting action is implemented as: the second motor 12 is controlled by the frequency converter to drive the opening and closing assembly to complete the lifting state; when descending, the speed control is performed firstly, and then, the speed is controlled to be fast and slow, and is specifically determined by the stroke; when the speed rises, the speed is firstly slow and then fast, and is determined by the stroke. The opening and closing actions are realized: the right-angle speed reducer 6 is driven by the first motor 4, the first lead screws 5 at two ends are driven by the transmission shaft 7, and when the first lead screws 5 lift the furnace 1 upwards, the furnace 1 is closed; when the elevator lowers the furnace 1, the furnace 1 is opened.
The invention has the beneficial effects that: the invention has simple structural design and low processing and assembling difficulty, replaces electrical synchronization with mechanical synchronization, and improves the transmission stability; the electric cylinder is adopted to replace a turbine screw machine, so that the control is accurate, and the driving efficiency is improved; the turbine screw device is adopted to replace an electric push rod or an air cylinder, so that the operation is stable, and the positioning is accurate; the combination of the servo motor and the trapezoidal screw replaces a turbine screw lifter and an asynchronous motor, so that the action efficiency is improved; the precision of the movement position is improved by servo control and a slide rail guiding mode.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The utility model provides a synchronous drive PCVD deposition furnace device, its characterized in that, includes stove, lifting unit, the subassembly that opens and shuts and the frame, lifting unit sets up on the frame, lifting unit connects and drives the subassembly that opens and shuts reciprocates, the subassembly that opens and shuts includes first mounting panel, fixes first motor and the first lead screw on the first mounting panel, the subassembly that opens and shuts still include right angle speed reducer and with the transmission shaft that right angle speed reducer is connected, first screw connection is in on the transmission shaft, first motor output connects and drives right angle speed reducer and then drive the transmission shaft rotates, the first lead screw axle of first lead screw is in the transmission shaft drives down upward or downstream, the stove has the fixed part and rotates the connection a pair of portion that opens and shuts on the fixed part, the fixed part with first lead screw axle is fixed, the pair of opening and closing parts are respectively connected with the first mounting plate through pin shaft assemblies, and when the first screw shaft drives the fixing part to move upwards or downwards, the pair of opening and closing parts are separated from each other and opened or closed together.
2. The apparatus of claim 1, wherein the lifting assembly comprises a second mounting plate, a second motor, a second lead screw, and a driving pulley, the second mounting plate is fixed on the frame, the second lead screw is fixed on the second mounting plate, two ends of the driving pulley are respectively connected to the output end of the second motor and the driving end of the second lead screw, the driven end of the second lead screw is fixed to the first mounting plate, and the second motor drives the driven end of the second lead screw to move upwards or downwards through the driving pulley.
3. The synchronously driven PCVD deposition furnace apparatus of claim 2, wherein the second motor is a servo motor and the second lead screw is a trapezoidal lead screw.
4. The apparatus of claim 2, wherein the driving pulley comprises a driving belt and a pair of driving wheels respectively disposed at two ends of the driving belt, the second lead screw comprises a second lead screw shaft and a lead screw nut fixed at a top end of the second lead screw shaft, the pair of driving wheels are respectively connected to an output end of the second motor and the lead screw nut, the second motor drives the lead screw nut to rotate through the driving pulley, and the rotating lead screw nut drives the second lead screw shaft to move up or down.
5. The synchronously driven PCVD deposition furnace apparatus of claim 2, wherein the second motor is a brake motor.
6. The apparatus of claim 2, wherein the second motor is connected to a frequency converter, and the frequency converter controls the rotation speed of the second motor to make the opening and closing assembly move downwards first fast and then slow and move upwards first slow and then fast.
7. The synchronously driven PCVD deposition furnace apparatus of claim 1, wherein the first lead screw is a turbine lead screw.
8. The synchronously driven PCVD deposition furnace device according to claim 1, wherein a slide rail is vertically arranged on the frame, a slide block is fixed on the first mounting plate, and the slide block moves along the slide rail when the lifting component is connected with and drives the opening and closing component to move up and down.
9. The synchronously driven PCVD deposition furnace apparatus according to claim 8, wherein the slide rail has a pair fixed to the frame in parallel with each other.
10. The apparatus of claim 1, wherein the pin assembly comprises a shaft and a pair of rotating joints, the pair of rotating joints are respectively fixed on the opening/closing portion and the first mounting plate, and two ends of the shaft are respectively rotatably connected to the pair of rotating joints.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911074297.5A CN110963697A (en) | 2019-10-31 | 2019-10-31 | Synchronous drive PCVD (plasma chemical vapor deposition) furnace device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911074297.5A CN110963697A (en) | 2019-10-31 | 2019-10-31 | Synchronous drive PCVD (plasma chemical vapor deposition) furnace device |
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| CN110963697A true CN110963697A (en) | 2020-04-07 |
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| CN201911074297.5A Pending CN110963697A (en) | 2019-10-31 | 2019-10-31 | Synchronous drive PCVD (plasma chemical vapor deposition) furnace device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110963695A (en) * | 2019-10-31 | 2020-04-07 | 江苏永鼎光纤科技有限公司 | Synchronous drive PCVD (plasma chemical vapor deposition) furnace device |
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