CN110940910A - Carrying disc cooling system and wafer testing equipment - Google Patents
Carrying disc cooling system and wafer testing equipment Download PDFInfo
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- CN110940910A CN110940910A CN201911314141.XA CN201911314141A CN110940910A CN 110940910 A CN110940910 A CN 110940910A CN 201911314141 A CN201911314141 A CN 201911314141A CN 110940910 A CN110940910 A CN 110940910A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
- G01R31/2877—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to cooling
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Abstract
The invention discloses a cooling system for a carrying disc, which is used for cooling a test carrying disc, wherein a liquid containing cavity is arranged in the test carrying disc, and the liquid containing cavity is provided with a liquid inlet and a liquid outlet which penetrate through the test carrying disc; the carrying disc cooling system comprises an infusion device, a control switch, a temperature detector and a controller, wherein the controller outputs a voltage signal to the control switch when receiving an infusion signal to enable the infusion device to output cooling liquid to the liquid containing cavity, so that the rapid cooling of the carrying disc is realized, the time for waiting for cooling the carrying disc is greatly reduced, and the utilization rate and the production efficiency of the wafer testing equipment are improved. Meanwhile, the temperature detector detects the temperature of the test carrying disc, and the controller stops outputting a voltage signal to the control switch when the temperature of the test carrying disc is reduced to a preset value, so that the infusion device stops outputting the cooling liquid, the automatic stop of cooling of the test carrying disc is realized, manual monitoring is not needed, and the labor cost is saved. In addition, the invention also discloses wafer test equipment.
Description
Technical Field
The invention relates to the technical field of wafer testing, in particular to a carrying disc cooling system and wafer testing equipment.
Background
Wafer testing (CP) is an important step in the production process of integrated circuits, and aims to pick out a defective Die (Die) to save the packaging cost of the defective Die. In the process of testing the wafer, because part of the wafer needs to be heated to a higher temperature (such as 115 ℃) to test the stability of the wafer, the test carrying disc used for carrying the wafer to be tested needs to be heated to 115 ℃ to be tested; after the higher temperature test is completed, the wafer needs to be tested at normal temperature by waiting for the temperature of the test carrying disc to be reduced to 25 ℃. However, the time consumed for naturally cooling the test carrying disc from a higher temperature to a normal temperature is long, which causes the low utilization rate of the wafer test equipment in the wafer test process and the low production efficiency.
Therefore, it is desirable to provide a cooling system for a carrier tray capable of rapidly cooling a test carrier tray to overcome the above-mentioned problems.
Disclosure of Invention
The invention aims to provide a cooling system for a carrying disc, which is used for realizing the rapid cooling of a test carrying disc and improving the utilization rate and the production efficiency of wafer test equipment.
Another objective of the present invention is to provide a wafer testing apparatus, which can realize rapid cooling of a test tray, and improve the utilization rate and production efficiency of the testing apparatus.
In order to achieve the purpose, the invention provides a carrier plate cooling system for cooling a test carrier plate, wherein a liquid containing cavity is arranged in the test carrier plate, wherein, the tray cooling system comprises a transfusion device, a controller, a control switch and a temperature detector which are electrically connected with the controller, the liquid outlet end of the infusion device is connected to the liquid inlet of the liquid containing cavity, the control switch is used for controlling the output of the infusion device, the controller outputs a voltage signal to the control switch when receiving an infusion signal so that the infusion device outputs cooling liquid to the liquid containing cavity, the temperature detector is used for detecting the temperature of the test carrying disc and transmitting the temperature to the controller, and the controller stops outputting the voltage signal to the control switch when the temperature is reduced to a preset value, so that the infusion device stops outputting the cooling liquid.
Preferably, the liquid inlet end of the infusion device is used for being connected to the liquid outlet of the liquid containing cavity, and the cooling liquid flowing out from the liquid outlet is cooled by the infusion device and then is output from the liquid outlet end.
Preferably, the cooling liquid is cooling water.
Preferably, the infusion device comprises a water cooler, and a liquid outlet pipe and a liquid inlet pipe which are connected with the water cooler, wherein the liquid outlet pipe forms the liquid outlet end, and the liquid inlet pipe forms the liquid inlet end.
Preferably, when the controller outputs the voltage signal to the control switch, the control switch is closed; when the controller stops outputting the voltage signal to the control switch, the control switch is switched off.
Preferably, the control switch is an ac contactor.
Preferably, the tray cooling system further comprises a trigger button, and the controller continuously outputs the voltage signal to the control switch when the trigger button is clicked.
Preferably, the tray cooling system further comprises a prompter, and the controller outputs a control signal to the prompter when the temperature drops to the preset value, so that the prompter sends a prompt signal.
Preferably, the prompting device is a buzzer.
In order to achieve the above object, the present invention further provides a wafer testing apparatus, which comprises a test tray and a tray cooling system, a liquid containing cavity is arranged in the test carrying disc, the liquid containing cavity is provided with a liquid inlet and a liquid outlet which penetrate through the test carrying disc, the carrier plate cooling system comprises a transfusion device, a controller, a control switch and a temperature detector which are electrically connected with the controller, the liquid outlet end of the infusion device is connected to the liquid inlet, the control switch is used for controlling the output of the infusion device, the controller outputs a voltage signal to the control switch when receiving an infusion signal so that the infusion device outputs cooling liquid to the liquid containing cavity, the temperature detector is used for detecting the temperature of the test carrying disc and transmitting the temperature to the controller, and the controller stops outputting the voltage signal to the control switch when the temperature is reduced to a preset value, so that the infusion device stops outputting the cooling liquid.
Compared with the prior art, the liquid containing cavity is formed in the test carrying disc, the infusion device is arranged, the liquid outlet end of the infusion device is connected to the liquid inlet of the liquid containing cavity, and when the test carrying disc needs to be cooled, the controller controls the infusion device to output cooling liquid to the liquid containing cavity through the control switch, so that the test carrying disc is quickly cooled, the time for waiting for cooling the test carrying disc is greatly shortened, and the utilization rate and the production efficiency of wafer test equipment are improved; meanwhile, the temperature of the test carrying disc is detected through the temperature detector, and the infusion device is controlled to stop outputting the cooling liquid when the temperature of the test carrying disc is reduced to a preset value, so that the test carrying disc is automatically stopped to be cooled, manual monitoring is not needed, and the labor cost is saved.
Drawings
Fig. 1 is a schematic structural diagram of a cooling system for a tray and a test tray according to an embodiment of the present invention.
Fig. 2 is a block diagram of an electric control system of the tray cooling system according to the embodiment of the present invention.
Detailed Description
In order to explain technical contents and structural features of the present invention in detail, the following description is made with reference to the embodiments and the accompanying drawings.
Referring to fig. 1 to 2, the present invention provides a system 100 for cooling a blade 200, which is used to remove heat from the test blade 200 when the test blade 200 is required to be cooled from a higher temperature to a target temperature, so as to rapidly cool the test blade 200. Specifically, the test tray 200 is installed on the test machine 300, and a liquid containing cavity (not shown) is provided in the test tray 200, and the liquid containing cavity has a liquid inlet (not shown) and a liquid outlet (not shown) penetrating through the test tray 200; the tray cooling system 100 comprises a transfusion device 1, a control switch 2, a temperature detector 3 and a controller 4, wherein the control switch 2 and the temperature detector 3 are respectively electrically connected with the controller 4, the control switch 2 is arranged on the transfusion device 1 to control the output of the transfusion device 1, the liquid outlet end of the transfusion device 1 is used for being connected to a liquid inlet of a liquid containing cavity, when the controller 4 receives a transfusion signal, the controller 4 outputs a voltage signal to the control switch 2 to enable the transfusion device 1 to output cooling liquid, and the cooling liquid enters the liquid containing cavity from the liquid inlet and then flows out of the test tray 200 from the liquid outlet, so that the heat of the test tray 200 is taken away, and the test tray 200 is rapidly cooled; the temperature detector 3 is disposed on the test tray 200, and is used for detecting the temperature of the test tray 200 and transmitting the temperature to the controller 4, the controller 4 compares the temperature of the test tray 200 with a preset value, and when the temperature of the test tray 200 drops to the preset value, the controller 4 stops outputting a voltage signal to the control switch 2 to stop the infusion device 1 from outputting the cooling liquid, so as to automatically stop cooling the test tray 200. The preset value is a temperature value set according to a test temperature requirement that the test tray 200 needs to meet during a normal temperature test, such as 25 ℃.
In one embodiment, the cooling liquid is cooling water, and the cooling water with low temperature (e.g., cold water at 10 ℃) is input into the liquid containing cavity of the test boat 200 to take away the heat of the test boat 200, so that the cost is low and the environment is protected; of course, in other embodiments, the cooling liquid may also be a liquid containing a coolant, and therefore, should not be limited thereto. Preferably, the liquid flow channel in the liquid containing cavity should be able to achieve sufficient heat exchange between the cooling liquid and the test carrying tray 200, and a liquid inlet and a liquid outlet are formed at two ends of the liquid flow channel, and it is not described herein again as to how to arrange the liquid containing cavity, the liquid inlet and the liquid outlet to better achieve heat exchange between the cooling liquid and the test carrying tray 200.
In an embodiment, the liquid inlet end of the infusion apparatus 1 is used for being connected to a liquid outlet of the liquid containing cavity, the cooling liquid flowing through the liquid containing cavity flows out of the liquid outlet and then enters the infusion apparatus 1 from the liquid inlet end, and the cooling liquid entering from the liquid inlet end is cooled by the infusion apparatus 1 and then is output from the liquid outlet end, so that the cyclic utilization of the cooling liquid is realized. Further, the infusion device 1 comprises a water cooler 11, a liquid outlet pipe 12 and a liquid inlet pipe 13, wherein first ends of the liquid outlet pipe 12 and the liquid inlet pipe 13 are respectively connected to the water cooler 11, a second end of the liquid outlet pipe 12 forms a liquid outlet end and is connected to a liquid inlet of the liquid containing cavity, and a second end of the liquid inlet pipe 13 forms a liquid inlet end and is connected to a liquid outlet of the liquid containing cavity.
Specifically, when the controller 4 outputs a voltage signal to the control switch 2, the control switch 2 is closed, the power supply of the water chiller 11 is turned on, and the water chiller 11 outputs cooling liquid and conveys the cooling liquid to the liquid containing cavity through the liquid outlet pipe 12; when the controller 4 stops outputting the voltage signal to the control switch 2, the control switch 2 is automatically switched off, the power supply of the water chiller 11 is turned off, and the water chiller 11 stops outputting the cooling liquid. Preferably, the control switch 2 is an ac contactor, and when the controller 4 outputs a 24V voltage signal to the control switch 2, the control switch 2 is closed; of course, the specific implementation is not limited to the specific form of the control switch 2.
In an embodiment, the tray cooling system 100 further includes a key panel 5, the key panel 5 is provided with a trigger key 51, and when the trigger key 51 is clicked, the controller 4 obtains a fluid infusion signal and continuously outputs a voltage signal to the control switch 2, so that the control switch 2 is always kept in a closed state, and the water chiller 11 continuously outputs the cooling fluid. Of course, the trigger button 51 may be a touch button or a mechanical button, and therefore, the present invention should not be limited thereto.
In an embodiment, the tray cooling system 100 further includes a prompter 6, the prompter 6 is electrically connected to the controller 4, and the controller 4 outputs a control signal to the prompter 6 when the temperature drops to a preset value, so that the prompter 6 sends a prompt signal to prompt an operator that the temperature of the test tray 200 has dropped to the preset value, so that the operator can perform the next production operation in time, such as normal temperature testing of the wafer. Preferably, the prompter 6 is a buzzer, but should not be limited thereto. Further, the key panel 5 is further provided with a cancel key 52, the cancel key 52 is electrically connected to the controller 4, when the cancel key 52 is clicked, the cooling function of the tray cooling system 100 is turned off, the controller 4 stops sending the prompt signal to the prompt 6, and the prompt 6 is turned off. In this embodiment, the controller 4 outputs a 24V voltage signal to the prompter 6 to make the prompter 6 send out a prompt signal, but not limited thereto.
The invention also provides wafer test equipment, which comprises a test carrier disc 200 and a carrier disc cooling system 100, wherein the test carrier disc 200 is arranged on a test machine platform 300, a liquid containing cavity is arranged in the test carrier disc 200, the liquid containing cavity is provided with a liquid inlet and a liquid outlet which penetrate through the test carrier disc 200, the carrier disc cooling system 100 comprises a liquid conveying device 1, a control switch 2, a temperature detector 3 and a controller 4, the control switch 2 and the temperature detector 3 are respectively and electrically connected with the controller 4, the control switch 2 is arranged on the liquid conveying device 1 to control the output of the liquid conveying device 1, the liquid outlet end of the liquid conveying device 1 is used for being connected to the liquid inlet of the liquid containing cavity, when the controller 4 receives a liquid conveying signal, the controller 4 outputs a voltage signal to the control switch 2 to enable the liquid conveying device 1 to output cooling liquid, the cooling liquid enters the liquid containing cavity from the liquid inlet and then flows out of the test carrier disc 200 from the liquid outlet, the test carrying disc 200 is cooled rapidly; the temperature detector 3 is disposed on the test tray 200, and is used for detecting the temperature of the test tray 200 and transmitting the temperature to the controller 4, the controller 4 compares the temperature of the test tray 200 with a preset value, and when the temperature of the test tray 200 drops to the preset value, the controller 4 stops outputting a voltage signal to the control switch 2 to stop the infusion device 1 from outputting the cooling liquid, so as to automatically stop cooling the test tray 200. The preset value is a temperature value set according to a test temperature requirement that the test tray 200 needs to meet during a low-temperature test, such as 25 ℃. The specific structure of the tray cooling system 100 is as described above, and is not described herein again.
Compared with the prior art, the liquid containing cavity is formed in the test carrying disc 200, then the infusion device 1 is arranged, the liquid outlet end of the infusion device 1 is connected to the liquid containing cavity of the test carrying disc 200, and when the test carrying disc 200 needs to be cooled, the controller 4 controls the infusion device 1 to output cooling liquid to the liquid containing cavity through the control switch 2, so that the test carrying disc 200 is rapidly cooled, the time for waiting for cooling the test carrying disc 200 is greatly reduced, and the utilization rate and the production efficiency of wafer test equipment are improved; meanwhile, the temperature of the test carrying disc 200 is detected by the temperature detector 3, and the infusion device 1 is controlled to stop outputting the cooling liquid when the temperature of the test carrying disc 200 is reduced to a preset value, so that the test carrying disc 200 is automatically stopped to be cooled, manual monitoring is not needed, and the labor cost is saved.
The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, therefore, the present invention is not limited by the appended claims.
Claims (10)
1. A cooling system for a carrying disc is used for cooling a test carrying disc, a liquid containing cavity is arranged in the test carrying disc, the liquid containing cavity is provided with a liquid inlet and a liquid outlet which penetrate through the test carrying disc, it is characterized in that the tray cooling system comprises a transfusion device, a controller, a control switch and a temperature detector which are electrically connected with the controller, the liquid outlet end of the infusion device is connected to the liquid inlet, the control switch is used for controlling the output of the infusion device, the controller outputs a voltage signal to the control switch when receiving an infusion signal so that the infusion device outputs cooling liquid to the liquid containing cavity, the temperature detector is used for detecting the temperature of the test carrying disc and transmitting the temperature to the controller, and the controller stops outputting the voltage signal to the control switch when the temperature is reduced to a preset value, so that the infusion device stops outputting the cooling liquid.
2. The system for cooling a boat as claimed in claim 1, wherein the liquid inlet end of the liquid-feeding device is connected to the liquid outlet of the liquid-containing chamber, and the liquid-feeding device cools the cooling liquid flowing out through the liquid outlet and outputs the cooling liquid from the liquid outlet end.
3. The platen cooling system of claim 2, wherein the cooling fluid is cooling water.
4. The platen cooling system of claim 3, wherein the fluid delivery device comprises a water chiller and a liquid outlet tube and a liquid inlet tube connected to the water chiller, the liquid outlet tube forming the liquid outlet end and the liquid inlet tube forming the liquid inlet end.
5. The system for cooling a boat of claim 1, wherein the control switch is closed when the controller outputs the voltage signal to the control switch; when the controller stops outputting the voltage signal to the control switch, the control switch is switched off.
6. The cold plate system of claim 5, wherein said control switch is an ac contactor.
7. The system for cooling a boat carrier of claim 1, further comprising a trigger button, wherein the controller continuously outputs the voltage signal to the control switch when the trigger button is clicked.
8. The system of claim 1, further comprising a reminder, wherein the controller outputs a control signal to the reminder to cause the reminder to send a reminder signal when the temperature drops to the predetermined value.
9. The tray cooling system of claim 7, wherein the indicator is a buzzer.
10. A wafer test device is characterized by comprising a test carrying disc and a carrying disc cooling system, a liquid containing cavity is arranged in the test carrying disc, the liquid containing cavity is provided with a liquid inlet and a liquid outlet which penetrate through the test carrying disc, the carrier plate cooling system comprises a transfusion device, a controller, a control switch and a temperature detector which are electrically connected with the controller, the liquid outlet end of the infusion device is connected to the liquid inlet, the control switch is used for controlling the output of the infusion device, the controller outputs a voltage signal to the control switch when receiving an infusion signal so that the infusion device outputs cooling liquid to the liquid containing cavity, the temperature detector is used for detecting the temperature of the test carrying disc and transmitting the temperature to the controller, and the controller stops outputting the voltage signal to the control switch when the temperature is reduced to a preset value, so that the infusion device stops outputting the cooling liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911314141.XA CN110940910A (en) | 2019-12-17 | 2019-12-17 | Carrying disc cooling system and wafer testing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911314141.XA CN110940910A (en) | 2019-12-17 | 2019-12-17 | Carrying disc cooling system and wafer testing equipment |
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| Publication Number | Publication Date |
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| CN110940910A true CN110940910A (en) | 2020-03-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911314141.XA Pending CN110940910A (en) | 2019-12-17 | 2019-12-17 | Carrying disc cooling system and wafer testing equipment |
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| CN201142322Y (en) * | 2007-08-17 | 2008-10-29 | 力鼎精密股份有限公司 | Improved structure of carrier disk |
| CN101354403A (en) * | 2007-07-25 | 2009-01-28 | 赛科隆股份有限公司 | Wafer carrying platform for wafer detection device and wafer detection device having the same |
| TWM350817U (en) * | 2008-09-04 | 2009-02-11 | Lpi Prec Inc | Wafer carrying device |
| CN104792197A (en) * | 2015-05-07 | 2015-07-22 | 合肥彩虹蓝光科技有限公司 | High-efficiency cooling system |
| CN106560665A (en) * | 2015-10-22 | 2017-04-12 | 安徽超元半导体有限公司 | Cooling device for carrying plate of pin measuring machine |
| CN206546413U (en) * | 2017-01-20 | 2017-10-10 | 深圳清华大学研究院 | A kind of test system of semiconductor laser chip |
| CN109144123A (en) * | 2018-08-15 | 2019-01-04 | 王晓勇 | A kind of semiconductor test temperature control equipment and control method |
| CN209444427U (en) * | 2019-02-25 | 2019-09-27 | 湖南汽车工程职业学院 | A kind of electric-control motor test cooling cycle water installations |
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2019
- 2019-12-17 CN CN201911314141.XA patent/CN110940910A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101354403A (en) * | 2007-07-25 | 2009-01-28 | 赛科隆股份有限公司 | Wafer carrying platform for wafer detection device and wafer detection device having the same |
| CN201142322Y (en) * | 2007-08-17 | 2008-10-29 | 力鼎精密股份有限公司 | Improved structure of carrier disk |
| TWM350817U (en) * | 2008-09-04 | 2009-02-11 | Lpi Prec Inc | Wafer carrying device |
| CN104792197A (en) * | 2015-05-07 | 2015-07-22 | 合肥彩虹蓝光科技有限公司 | High-efficiency cooling system |
| CN106560665A (en) * | 2015-10-22 | 2017-04-12 | 安徽超元半导体有限公司 | Cooling device for carrying plate of pin measuring machine |
| CN206546413U (en) * | 2017-01-20 | 2017-10-10 | 深圳清华大学研究院 | A kind of test system of semiconductor laser chip |
| CN109144123A (en) * | 2018-08-15 | 2019-01-04 | 王晓勇 | A kind of semiconductor test temperature control equipment and control method |
| CN209444427U (en) * | 2019-02-25 | 2019-09-27 | 湖南汽车工程职业学院 | A kind of electric-control motor test cooling cycle water installations |
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