CN110940328A - Micro gyroscope based on in-plane detection of planar coil - Google Patents
Micro gyroscope based on in-plane detection of planar coil Download PDFInfo
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- CN110940328A CN110940328A CN201911278636.1A CN201911278636A CN110940328A CN 110940328 A CN110940328 A CN 110940328A CN 201911278636 A CN201911278636 A CN 201911278636A CN 110940328 A CN110940328 A CN 110940328A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5663—Manufacturing; Trimming; Mounting; Housings
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Abstract
The invention discloses a micro gyroscope based on planar coil in-plane detection, which comprises a lower substrate, a bonding frame body arranged on the lower substrate and an upper substrate arranged on the bonding frame body, wherein the upper substrate comprises a supporting frame body, an outer mass block and an inner mass block, the outer mass block is arranged on the inner side of the supporting frame body, the inner mass block is arranged on the inner side of the outer mass block, a driving assembly is arranged at the edge of the inner side of the supporting frame body and connected with the outer mass block, a detection assembly is arranged at the edge of the inner side of the outer mass block and connected with the inner mass block, and a planar coil is arranged on the inner mass block. The micromechanical gyroscope has a symmetrical overall structure, utilizes the electromotive force effect generated by cutting the magnetic induction line by the planar coil to detect the weak coriolis force, has high output precision, reasonable and compact structure, and has the advantages of high sensitivity and good reliability.
Description
Technical Field
The invention relates to a micro gyroscope based on in-plane detection of a planar coil, belonging to the related field of micro inertial navigation technology.
Background
The micromechanical gyroscope is a military and civil dual-purpose high and new technology developed in the beginning of the eighties of the twentieth century, compared with the traditional gyroscope, the micromechanical gyroscope has the advantages of small volume, low power consumption, low cost, easy mass production, high sensitivity, strong overload resistance, large dynamic range, good integratability and the like, can be embedded into an electronic, information and intelligent control system, greatly reduces the volume and cost of the system, greatly improves the overall performance, and accords with the product informatization development direction, so the micromechanical gyroscope has wide application prospect in the civil consumption field and the modern national defense field and is more and more concerned by people.
At present, the detection modes of the micro-mechanical gyroscope mainly comprise capacitance, piezoelectricity and the like, domestic research is still at the level of a laboratory prototype, and a mature product is available abroad.
The capacitance detection type micro gyroscope has the advantages of low temperature coefficient, low power consumption, low noise, high sensitivity, simple structure, easiness in monolithic integration with a CMOS circuit and the like. However, the parasitic capacitance inside the sensor may have a certain influence on the performance of the capacitance detection type micro gyroscope, and in order to reduce the influence of the parasitic capacitance, higher requirements are provided for the detection accuracy and the anti-interference capability of the interface circuit. The piezoelectric detection type MEMS gyroscope has the characteristics of small volume, direct voltage signal output, easy compatibility with an IC and the like, but the piezoelectric detection type MEMS gyroscope has small output voltage signal, and the growth process of a piezoelectric material is complex and cannot be operated at high temperature.
From the above analysis, the existing micromechanical gyroscopes have great defects, which limit the further development of the micro gyroscopes. The planar coil micro gyroscope is a detection device based on a new effect, Coriolis force is detected through electromotive force generated by cutting magnetic induction lines through coils, the planar coil is arranged in a folding type, and the process manufacturing is simple and easy to achieve. The micro-displacement detection has the advantages of high resolution, low noise and easy detection of output signals.
Disclosure of Invention
In order to solve the problems, the invention provides a micro gyroscope which is highly sensitive and is detected by a planar coil and is based on planar detection of the planar coil, so that the sensitivity and the resolution of the micro gyroscope are improved, and the detection data are more accurate.
The technical scheme of the invention is as follows:
a micro-gyroscope based on in-plane detection of planar coils, comprising:
the upper substrate comprises a supporting frame body, an outer mass block and an inner mass block, wherein the outer mass block is arranged on the inner side of the supporting frame body, the inner mass block is arranged on the inner side of the outer mass block, a driving assembly is arranged at the corner of the inner side of the supporting frame body and connected with the outer mass block, a detection assembly is arranged at the corner of the inner side of the outer mass block and connected with the inner mass block, and a planar coil is arranged on the inner mass block.
Optionally, the lower base plate surface is provided with fixed driving magnet, feedback magnet, fixed detection S type magnet and detection N type magnet, fixed driving magnet and feedback magnet bilateral symmetry set up, fixed detection S type magnet and detection N type magnet set up between fixed driving magnet, the feedback magnet and the longitudinal symmetry set up, fixed detection S type magnet and detection N type magnet are located the plane coil below.
Optionally, the end portions of the planar coil are respectively connected with a lead, one end of the lead is connected with the planar coil, and the other end of the lead is led to the supporting frame body through the detection mechanism and the driving mechanism.
Optionally, an insulating layer is disposed on the planar coil for laying a lead, and when the lead passes through the planar coil, the lead is laid on the insulating layer.
Optionally, the drive assembly comprises: the supporting frame comprises a supporting frame body and is characterized by comprising a first driving mechanism, a second driving mechanism, a third driving mechanism and a fourth driving mechanism, wherein the first driving mechanism, the second driving mechanism, the third driving mechanism and the fourth driving mechanism are respectively arranged at the corners of the inner side of the supporting frame body.
Optionally, first actuating mechanism, second actuating mechanism, third actuating mechanism and fourth actuating mechanism constitute by first drive elastic beam, second drive elastic beam, drive connecting block, drive tie-beam, the drive tie-beam sets up drive connecting block one end, first drive elastic beam, second drive elastic beam set up respectively drive connecting block both sides and one end respectively with the drive tie-beam is connected, first drive elastic beam, the second drive elastic beam other end respectively with outer quality piece is connected, the drive connecting block other end with braced frame body connects.
Optionally, the detection assembly comprises: first detection mechanism, second detection mechanism, third detection mechanism and fourth detection mechanism, first detection mechanism, second detection mechanism, third detection mechanism and fourth detection mechanism set up respectively the inboard edge of outer quality piece.
Optionally, first detection mechanism, second detection mechanism, third detection mechanism, fourth detection mechanism detect the elastic beam, detect the connecting block, detect the connecting beam by first detection elastic beam, second and constitute, it sets up to detect the connecting beam detect connecting block one end, first detection elastic beam, second detect the elastic beam and set up respectively detect connecting block both sides and one end respectively with detect the connecting beam and connect, first detection elastic beam, second detect the elastic beam other end respectively with interior quality piece is connected, detect the connecting block other end with outer quality piece is connected.
The invention has the beneficial effects that:
the detection device adopts the integral structure design, has reasonable structure design and is suitable for the miniaturization of devices; the electromagnetic driving mode has the advantages of large displacement in the driving direction and obvious Coriolis effect. The dynamic electromotive force detection mode is adopted, the inner mass block is provided with the dynamic plane coil, and the detection magnet with opposite magnetism is arranged right opposite to the lower substrate, so that the detection data reliability is good, and the device is an ideal angular rate detection device.
Drawings
The advantages of the above and/or additional aspects of the present invention will become apparent and readily appreciated from the following description of the embodiments taken in conjunction with the accompanying drawings of which:
FIG. 1 is an overall structural view of the present invention;
FIG. 2 is a front view of the overall structure of the present invention;
FIG. 3 is a top view of an upper substrate according to the present invention;
FIG. 4 is a schematic view of a bonding frame structure according to the present invention;
FIG. 5 is a top view of a lower substrate according to the present invention;
FIG. 6 is a front view of a lower substrate according to the present invention;
FIG. 7 is a left side view of the lower substrate of the present invention;
FIG. 8 is a schematic view of the spatial structure of the planar coil and the detection magnet according to the present invention;
FIG. 9 is a top view of the planar coil and detection magnet of the present invention;
FIG. 10 is a schematic view of an insulating layer structure according to the present invention;
FIG. 11 is a schematic view of the driving mechanism of the present invention;
FIG. 12 is a schematic view of the detecting mechanism of the present invention.
As shown in the figures, the list of reference numbers is as follows:
1. an upper substrate, 2, a bonding frame body, 3, a lower substrate, 4, an outer mass block, 5, an inner mass block, 6, a first driving mechanism, 7, a second driving mechanism, 8, a third driving mechanism, 9, a fourth driving mechanism, 10, a first detection mechanism, 11, a second detection mechanism, 12, a third detection mechanism, 13, a fourth detection mechanism, 14, a planar coil, 15, a supporting frame body, 16, a driving magnet, 17, a feedback magnet, 18, a detection S-shaped magnet, 19, a detection N-shaped magnet, 20, a first driving elastic beam, 21, a second driving elastic beam, 22, a driving connection block, 23, a driving connection beam, 20a, a first detection elastic beam, 21a, a second detection elastic beam, 22a detection connection block, 23a, a detection connection beam, 24, an insulation layer, 25, and a lead.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The invention is further described below with reference to the accompanying drawings:
fig. 1 and 2 are overall structural diagrams of a micro gyroscope based on in-plane detection of a planar coil according to the present invention, where the micro gyroscope based on in-plane detection of a planar coil includes:
the lower substrate 3, the bonding frame body 2 arranged on the lower substrate 3 and the upper substrate 1 arranged on the bonding frame body 2, wherein the upper substrate 1 comprises a supporting frame body 15, an outer mass block 4 and an inner mass block 5, the outer mass block 4 is arranged on the inner side of the supporting frame body 15, the inner mass block 5 is arranged on the inner side of the outer mass block 4, a driving component is arranged at the corner of the inner side of the supporting frame body 15 and connected with the outer mass block 4, a detection component is arranged at the corner of the inner side of the outer mass block 4 and connected with the inner mass block 5, and a planar coil 14 is arranged on the inner mass block.
As shown in fig. 1 to 5, the upper substrate 1, the bonding frame 2, and the lower substrate 3 are stacked in sequence, and the upper substrate 1 and the bonding frame 2 are both square frame structures, and the upper substrate 1 is firmly bonded to the lower substrate 3 through the bonding frame 2.
As shown in fig. 3, the driving assembly includes: the first driving mechanism 6, the second driving mechanism 7, the third driving mechanism 8 and the fourth driving mechanism 9 are respectively arranged at the corners of the inner side of the supporting frame 15. The first drive mechanism 6, the second drive mechanism 7, the third drive mechanism 8, and the fourth drive mechanism 9 are symmetrically disposed inside the support frame 15.
As shown in fig. 3, the detection assembly includes: first detection mechanism 10, second detection mechanism 11, third detection mechanism 12 and fourth detection mechanism 13, first detection mechanism 10, second detection mechanism 11, third detection mechanism 12 and fourth detection mechanism 13 set up respectively in the edge of outer quality piece 4 inboard. The first detection mechanism 10, the second detection mechanism 11, the third detection mechanism 12 and the fourth detection mechanism 13 are symmetrically arranged at the inner side of the outer mass block 4.
5, 6, 7, which are schematic diagrams of the lower substrate 3 of the present invention, the lower substrate 3 is square, the surface of the lower substrate 3 is provided with a fixed driving magnet 16, a feedback magnet 17, a fixed detecting S-shaped magnet 18 and a detecting N-shaped magnet 19, the fixed driving magnet 16 and the feedback magnet 17 are arranged in bilateral symmetry, the fixed detecting S-shaped magnet 18 and the detecting N-shaped magnet 19 are arranged between the fixed driving magnet 16 and the feedback magnet 17 and are arranged in upper and lower symmetry, the fixed detecting S-shaped magnet 18 and the detecting N-shaped magnet 19 are arranged below the planar coil 14, the driving magnet 16, the feedback magnet 17, the detecting S-shaped magnet 18 and the detecting N-shaped magnet 19 are respectively arranged at two sides and upper and lower positions of the lower substrate 3, the driving magnet 16 and the feedback magnet 17 are equidistant from the center line of the lower substrate 3, and the detecting S-shaped magnet 18, the detecting N-shaped magnet 19, Detect N type magnet 19 with the mutual equidistance of central line of infrabasal plate 3, driving magnet 16 and feedback magnet 17 the central line of infrabasal plate 3 is parallel to each other, detect S type magnet 18, detect N type magnet 19 with the central line of infrabasal plate 3 is parallel to each other. Because the driving and detecting direction magnetic fields are mutually influenced, the driving is completely symmetrical in order to obtain the maximum magnetic field and the magnetic field position is not suspended out of the structure.
The driving magnet 16 provides a magnetic field for the mass block, and when alternating current is introduced to a lead corresponding to the position of the driving magnet on the outer mass block 4, the driving mass block generates resonance in the driving direction by ampere force.
The feedback magnet 17 provides an electric signal related to a driving mode for the rear processing circuit, when the outer mass block 4 resonates along the driving direction, the wire corresponding to the positions of the detection S-shaped magnet 18 and the detection N-shaped magnet 19 on the outer moving mass block 4 cuts the magnetic induction line to generate induction current, the magnitude of the induction current generated by different resonant displacement amounts is different due to the fact that the driving frequency is known, and the magnitude of the driving voltage is controlled by the magnitude of the induction current to achieve the effect of amplitude stabilizing driving.
The positions of the detection S-shaped magnet 18 and the detection N-shaped magnet 19 in the lower substrate 3 can be interchanged, and the effect of generating electromotive force is not influenced. The detection S-shaped magnet 18 and the detection N-shaped magnet 19 provide a magnetic field for the inner mass block 5, and when a lead corresponding to the position of the detection magnet on the inner mass block 5 generates resonance in the detection direction, the lead cutting the magnetic field can generate electromotive force at two ends of the lead according to the Faraday' S law of electromagnetic induction.
As shown in fig. 11 and 12, the first driving mechanism 6, the second driving mechanism 7, the third driving mechanism 8, and the fourth driving mechanism 9 have the same structure as the first detecting mechanism 10, the second detecting mechanism 11, the third detecting mechanism 12, and the fourth detecting mechanism 13, and are also of a folded beam structure, and the folded beam structure is a thin strip beam-shaped structure, and the size of the folded beam structure can be determined according to the application environment and the stiffness coefficient.
As shown in fig. 8 and 9, the planar coil 14 is of a folded type and fixed on the mass block, the planar coil is symmetrically distributed on the inner mass block 5, and because two permanent magnets with opposite magnetism are arranged below the inner mass block 5, according to the law of faraday electromagnetic induction, no electromotive force is generated in the driving and detecting directions by the wires at the left and right sides of the inner mass block 5; the wires on the upper and lower sides of the mass block cut the magnetic induction lines in the detection direction to generate electromotive force.
Fig. 8 and 9 are schematic diagrams illustrating the spatial structure of the planar coil and the detection magnet. Each lead in the planar coil 14 is uniformly arranged at intervals in the directions of an X axis and a Y axis, when the planar coil 14 moves along the X axis, only the lead vertical to the X axis cuts the magnetic induction lines, and half of each lead of the magnetic induction lines is positioned in a magnetic field generated by the detection S-shaped magnet 18 in the positive half shaft of the Y axis and half of each lead is positioned in a magnetic field generated by the detection N-shaped magnet 19 in the negative half shaft of the Y axis, so that the potential at two ends of each lead is equal and no potential is generated outwards; when the planar coil moves along the Y axis, only the lead perpendicular to the Y axis cuts the magnetic induction lines, the lead at the positive half shaft of the Y axis is in the magnetic field generated by the detection S-shaped magnet 18, and the lead at the positive half shaft of the Y axis is in the magnetic field generated by the detection N-shaped magnet 19. The manufacturing process comprises the steps of integrally sputtering a conducting wire material on the mass block, and then etching the planar coil by using a dry method.
Fig. 10 is a schematic view of an insulating layer structure. The end parts of the planar coil 10 are respectively connected with a lead wire 25, one end of the lead wire 25 is connected with the planar coil 10, the other end of the lead wire 25 is led to the supporting frame body 15 through a detection mechanism and a driving mechanism, an insulating layer 24 for laying the lead wire 25 is arranged on the planar coil 10, and when the lead wire passes through the planar coil 10, the lead wire 25 is laid on the insulating layer 24, so that the electromotive force at the center can be led to the supporting frame body 15. The manufacturing process comprises the steps of depositing SiO on the surface of a planar coil after the planar coil is etched by a dry method2As an insulating layer, areas of the desired insulating layer 24 are subsequently etched, finally the lead 25 material is sputtered, and finally the lead 25 is dry etched.
Gaps formed by the first driving elastic beam 20, the second driving elastic beam 21 and the driving connecting block 22 or the first detecting elastic beam 20a, the second detecting elastic beam 21a and the detecting connecting block 22a are displacement amounts in the driving direction, and due to the fact that the electromagnetic driving mode is adopted, compared with the traditional capacitance driving mode, the displacement amount can be designed to be larger, and larger Korotkoff force can be obtained when the same angular rate is induced to input.
The driving mechanisms 6, 7, 8 and 9 are arranged at four corners of the outer mass block 5, the arrangement directions of the four driving mechanisms 6, 7, 8 and 9 are parallel to each other, the parallel direction is a first direction, and the driving mechanisms 6, 9 or 7 and 8 on the same side in the first direction are arranged on the same straight line;
the arrangement directions of the driving mechanisms 6, 7, 8 and 9 are the arrangement directions of the driving connecting block 22 and the first and second driving elastic beams 20 and 21;
the detection mechanisms 10, 11, 12 and 13 are all arranged in a second direction and are arranged in parallel, the second direction is perpendicular to the first direction, and the detection mechanisms 10, 11 or 12 and 13 on the same side in the second direction are arranged on the same straight line;
the arrangement directions of the detection mechanisms 10, 11, 12 and 13 are the arrangement directions of the detection connecting block 20a, the first detection elastic beam 21a and the second detection elastic beam 22 a;
an arrangement area is provided between the two driving mechanisms 6, 7 or 8, 9 on the same side in the second direction, and the two detecting mechanisms 10, 11 or 12, 13 on the same side in the second direction are arranged in the arrangement area, so that the overall layout is symmetrical.
The principle of the invention is as follows:
the inner mass block and the outer mass block are driven to resonate in the X direction under the driving of electromagnetic force. When the angular velocity in the Z direction is input, the inner mass block drives the planar coil to vibrate in the Y direction under the action of the Coriolis force, and cuts a magnetic induction line generated by the lower substrate detection magnet, so that electromotive force is generated at two ends of the planar coil, a weak Coriolis force signal can be converted into a larger electrical signal, the signal is picked up through an interface circuit, and the angular velocity information can be obtained through demodulation, amplification, filtering and zero setting output.
The invention has the beneficial effects that:
the detection device adopts the integral structure design, has reasonable structure design and is suitable for the miniaturization of devices; the electromagnetic driving mode has the advantages of large displacement in the driving direction and obvious Coriolis effect. The dynamic electromotive force detection mode is adopted, the inner mass block is provided with the dynamic plane coil, and the detection magnet with opposite magnetism is arranged right opposite to the lower substrate, so that the detection data reliability is good, and the device is an ideal angular rate detection device.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.
Claims (8)
1. A micro gyroscope based on in-plane detection of a planar coil, comprising:
the lower substrate (3), the bonding framework (2) arranged on the lower substrate (3) and the upper substrate (1) arranged on the bonding framework (2), wherein the upper substrate (1) comprises a supporting framework (15), an outer mass block (4) and an inner mass block (5), the outer mass block (4) is arranged on the inner side of the supporting framework (15), the inner mass block (5) is arranged on the inner side of the outer mass block (4), a driving assembly is arranged at the edge of the inner side of the supporting framework (15) and connected with the outer mass block (4), a detection assembly is arranged at the edge of the inner side of the outer mass block (4) and connected with the inner mass block (5), and a plane coil (14) is arranged on the inner mass block.
2. The micro gyroscope based on planar coil in-plane detection according to claim 1, wherein the lower substrate (3) surface is provided with a fixed driving magnet (16), a feedback magnet (17), a fixed detection S-shaped magnet (18) and a detection N-shaped magnet (19), the fixed driving magnet (16) and the feedback magnet (17) are arranged in bilateral symmetry, the fixed detection S-shaped magnet (18) and the detection N-shaped magnet (19) are arranged between the fixed driving magnet (16) and the feedback magnet (17) and are arranged in vertical symmetry, and the fixed detection S-shaped magnet (18) and the detection N-shaped magnet (19) are positioned below the planar coil (14).
3. The micro gyroscope based on in-plane detection of the planar coil as claimed in claim 1, wherein the ends of the planar coil (10) are respectively connected with a lead wire (25), one end of the lead wire (25) is connected with the planar coil (10), and the other end of the lead wire (25) is led to the supporting frame body (15) through the detection mechanism and the driving mechanism.
4. The micro-gyroscope based on planar coil in-plane detection according to claim 3, characterized in that an insulating layer (24) is arranged on the planar coil (10) for laying down a lead wire (25), and when the lead wire passes through the planar coil (10), the lead wire (25) is laid down on the insulating layer (24).
5. The planar coil in-plane detection-based micro-gyroscope of claim 1, wherein the drive assembly comprises: the supporting frame comprises a first driving mechanism (6), a second driving mechanism (7), a third driving mechanism (8) and a fourth driving mechanism (9), wherein the first driving mechanism (6), the second driving mechanism (7), the third driving mechanism (8) and the fourth driving mechanism (9) are arranged at the inner side corners of the supporting frame body (15) respectively.
6. The micro-gyroscope based on planar coil in-plane detection according to claim 5, the first driving mechanism (6), the second driving mechanism (7), the third driving mechanism (8) and the fourth driving mechanism (9) are all composed of a first driving elastic beam (20), a second driving elastic beam (21), a driving connecting block (22) and a driving connecting beam (23), the driving connecting beam (23) is arranged at one end of the driving connecting block (22), the first driving elastic beam (20) and the second driving elastic beam (21) are respectively arranged at two sides of the driving connecting block (22) and one end of each driving elastic beam is respectively connected with the driving connecting beam (23), the other ends of the first driving elastic beam (20) and the second driving elastic beam (21) are respectively connected with the outer mass block (4), the other end of the driving connecting block (22) is connected with the supporting frame body (15).
7. The planar coil in-plane detection based micro-gyroscope of claim 1, wherein the detection assembly comprises: first detection mechanism (10), second detection mechanism (11), third detection mechanism (12) and fourth detection mechanism (13), first detection mechanism (10), second detection mechanism (11), third detection mechanism (12) and fourth detection mechanism (13) set up respectively the inboard edge of outer quality piece (4).
8. The micro gyroscope based on in-plane detection of the planar coil according to claim 7, wherein the first detection mechanism (10), the second detection mechanism (11), the third detection mechanism (12) and the fourth detection mechanism (13) are all composed of a first detection elastic beam (20a), a second detection elastic beam (21a), a detection connection block (22a) and a detection connection beam (23a), the detection connection beam (23a) is arranged at one end of the detection connection block (22a), the first detection elastic beam (20a) and the second detection elastic beam (21a) are respectively arranged at two sides of the detection connection block (22a) and one end of each detection elastic beam is respectively connected with the detection connection beam (23a), the other ends of the first detection elastic beam (20a) and the second detection elastic beam (21a) are respectively connected with the inner mass block (5), the other end of the detection connecting block (22a) is connected with the outer quality block (4).
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| CN201911278636.1A CN110940328A (en) | 2019-12-13 | 2019-12-13 | Micro gyroscope based on in-plane detection of planar coil |
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| CN201911278636.1A CN110940328A (en) | 2019-12-13 | 2019-12-13 | Micro gyroscope based on in-plane detection of planar coil |
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