CN111678510A - MEMS energy collector - Google Patents
MEMS energy collector Download PDFInfo
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- CN111678510A CN111678510A CN201911281783.4A CN201911281783A CN111678510A CN 111678510 A CN111678510 A CN 111678510A CN 201911281783 A CN201911281783 A CN 201911281783A CN 111678510 A CN111678510 A CN 111678510A
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- outer frame
- electrode
- lead
- energy harvester
- mems energy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
- H02K35/04—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving coil systems and stationary magnets
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Gyroscopes (AREA)
Abstract
The invention belongs to the technical field of micro inertial navigation instrument and meter parts, and particularly relates to an MEMS energy collector. Compared with the prior art, the gyroscope energy collector has obvious advancement, adopts an MEMS process, takes a bonding substrate as a carrier, arranges an outer frame, a sensitive mass block and a combination beam on the outer frame, is matched and connected with the outer frame, symmetrically arranges permanent magnets with the same structure in grooves of the bonding substrate, arranges a detection lead, a lead electrode and a lead on the sensitive mass block, and the detection combination beam consists of a connecting block and a movable beam.
Description
Technical Field
The invention belongs to the technical field of micro inertial navigation instrument and meter parts, and particularly relates to an MEMS energy collector.
Background
The energy collector utilizes solar energy, temperature gradient, acoustic vibration, mechanical vibration, etc. to achieve infinite device lifetime. Plays an important role in the fields of modern buildings, traffic, environmental protection, electric power, medical treatment, health, consumer electronics and the like and the civil field.
At present, there are three methods for converting the vibration mechanical energy into the electric energy, i.e. piezoelectric type, electrostatic type, electromagnetic type, wherein the electrostatic collector needs a starting voltage, and the electrostatic device generates a high voltage, a low current and a high output impedance, and also takes into consideration the problem of short circuit of electrodes in wafer application, which makes it difficult to commercialize the device by generating the electric energy by static electricity. Electromagnetic induction is based on faraday's law and generates an electric current from the relative motion between a magnet and a coil when vibrating or from a change in the magnetic field, the intensity of the current being dependent on the strength of the magnetic field, the speed of the relative motion and the number of turns of the coil. The model is mature and widely applied to a plurality of electric energy collectors. At present, large-size and good-performance body magnets, multi-revolution and macro-range coils are realized in a large system, and for the technical field of micro inertial navigation instrument and meter parts, relevant published documents and relevant patents do not appear at present aiming at the technical defect that an energy collector cannot be miniaturized.
Disclosure of Invention
The invention aims to design a non-driven, miniature and easily-integrated MEMS energy collector aiming at the defect that the energy collector cannot be miniaturized, so that the energy collector is simpler and more miniaturized.
A MEMS energy harvester that applies the principles of electromagnetic induction to produce energy, the MEMS energy harvester comprising:
the bonding substrate is used as a carrier, a first groove and a second groove are formed in the bonding substrate through processing and etching, and a first permanent magnet and a second permanent magnet which are used for providing a magnetic field are respectively arranged in the first groove and the second groove;
the bonding substrate is fixedly provided with the outer frame, a sensitive mass block is arranged in a frame space formed in the outer frame, and the sensitive mass block is connected with the outer frame through a combined beam structure;
the sensitive mass block is provided with a detection coil used for cutting the magnetic induction line, one end of the detection coil is connected with the second electrode, and the other end of the detection coil is connected with the first electrode through a lead electrode and a lead.
Further, the composite beam structure comprises a first composite beam, a second composite beam, a third composite beam and a fourth composite beam;
the first combination beam, the second combination beam, the third combination beam and the fourth combination beam are respectively arranged at the four sides of the sensing mass block and connected, and the sensing mass block is positioned at the center of the outer frame.
Further, the whole structure of the detection coil is a 'loop' coil structure, one end of the detection coil is a lead electrode and is arranged at the central position of the sensitive mass block, and the other end of the detection coil is folded back and is connected to an external circuit through the second electrode.
Furthermore, the first combined beam comprises at least two movable beams and a connecting block, the connecting block is of a T-shaped structure, and the thickness of the connecting block is consistent with that of each combined beam and the sensitive mass block;
the movable beams are in a long and thin beam structure, the movable beams are symmetrically arranged on two sides of the connecting block, and the two movable beams of the same combined beam are parallel to each other.
Furthermore, the outer frame is a square frame structure, the outer frame is positioned on the bonding substrate and has the same length and width with the bonding substrate, and the outer frame is matched and connected with the bonding substrate and is firmly bonded with the bonding substrate.
Further, one end, which is not in contact with the movable beam, of the connecting block is connected with the outer frame.
Further, the first permanent magnet and the second permanent magnet adopt ferromagnetic films.
Furthermore, the lead is of a bent lead structure, one end of the lead is connected with the lead electrode, and the other end of the lead is connected to an external circuit through the first electrode.
Advantageous effects
Compared with the prior art, the gyroscope energy collector has obvious advancement, adopts an MEMS process, takes a bonding substrate as a carrier, arranges an outer frame, a sensitive mass block and a combination beam on the outer frame, is matched and connected with the outer frame, symmetrically arranges permanent magnets with the same structure in grooves of the bonding substrate, arranges a detection lead, a lead electrode and a lead on the sensitive mass block, and the detection combination beam consists of a connecting block and a movable beam.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention, shown disassembled;
FIG. 2 is a perspective view of the overall structure of an embodiment of the present invention;
FIG. 3 is a top view of the overall structure of an embodiment of the present invention;
FIG. 4 is a side view of the overall structure of an embodiment of the present invention;
FIG. 5 is a cross-sectional perspective view of the overall structure of an embodiment of the present invention;
FIG. 6 is a diagram of a bonded substrate structure according to an embodiment of the present invention;
FIG. 7 is a diagram of the structure of the outer frame of the embodiment of the present invention;
FIG. 8 is a view of a permanent magnet structure of an embodiment of the present invention;
FIG. 9 is a schematic structural view of a composite beam according to an embodiment of the present invention;
FIG. 10 is a top view of a composite beam structure according to an embodiment of the present invention
FIG. 11 is another schematic structural diagram in accordance with the present invention;
fig. 12 is a detection coil structure view of the embodiment of the invention;
FIG. 13 is a lead frame diagram according to an embodiment of the invention;
FIG. 14 is a view of a composite beam structure according to an embodiment of the present invention;
FIG. 15 is a front view of a composite beam according to another embodiment of the present invention;
as shown in the figures, the list of reference numbers is as follows:
1-a first permanent magnet; 2-a second permanent magnet; 3-a first electrode; 4-outer frame; 5-a proof mass; 6-a second electrode; 7-a first composite beam; 8-a detection coil; 9-a lead; 10-a lead electrode; 11-a second composite beam; 12-a bonded substrate; 13-outer frame side wall; 14-a third composite beam; 15-a fourth composite beam; 16-a first groove; 17-a second groove; 18-a first travelling beam 18; 19-a second movable beam 19; 20-a first connecting mass.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 1 to 15, which are schematic structural diagrams of an embodiment of the present invention, the MEMS energy collector includes a bonding substrate 12, an outer frame 4, a first permanent magnet 1, a second permanent magnet 2, an outer frame 4, a proof mass 5, a first lead electrode 3, a second lead electrode 6, a first combination beam 7, a second combination beam 11, a third combination beam 11, a fourth combination beam 14, a detection coil 8, a third lead electrode 10, and a lead 9;
the bonding substrate 12 is square in overall structure, a first groove 16 and a second groove 17 are formed in the middle through technological processing, the first permanent magnets 1 are symmetrically arranged on the first groove 16, and the second permanent magnets 2 are symmetrically arranged on the second groove 17.
The first permanent magnet 1 and the second permanent magnet 2 are respectively consistent with the length and width of the first groove 16 and the second groove 17, the first permanent magnet 1 is matched and connected with the first groove 16 and is firmly bonded, and the second permanent magnet 1 is matched and connected with the second groove 17 and is firmly bonded.
Further, the outer frame 4 is disposed on one side above the first permanent magnet 1 and the second permanent magnet 2, the outer frame 4 includes a first combination beam 7, a second combination beam 11, a third combination beam 14, a fourth combination beam 15, an outer frame 4, and a sensing mass 5, the first combination beam 7, the second combination beam 11, the third combination beam 14, and the fourth combination beam 15 have the same structural size, in this embodiment, only the first combination beam 7 is used for explanation, the first combination beam 7 includes at least two movable beams and a connecting block, the connecting block is "T" shaped, and the thickness of the connecting block is consistent with the thickness of each combination beam and the sensing mass, and is used for connecting the outer frame 4 and the movable beams.
The outer frame 4 is a square frame structure, the outer frame 4 is located on the bonding substrate 12 and has the same length and width dimensions as the bonding substrate 12, the outer frame 4 is matched and connected with the bonding substrate 12 and is firmly bonded, and the outer frame side wall 13 is flush with the outer peripheral wall of the bonding substrate 12.
The sensing mass 5 is arranged in the inner space of the outer frame 4 through the first combination beam 7, the second combination beam 11, the third combination beam 14 and the fourth combination beam 15, the sensing mass 5 can move left and right above the bonding substrate 12, and the sensing mass is provided with a detection coil 8, a lead electrode 10 and a lead 9.
Specifically, the detection coil 8 is arranged above the sensing mass 5, the detection coil 8 is of a 'loop' shaped coil structure, the inner wall of the outer frame 4 is respectively matched and connected with the first combination beam 7, the second combination beam 11, the third combination beam 14 and the fourth combination beam 15, specifically, the connecting block of the first combination beam 7 is matched and connected with the inner wall of the outer frame 4, the movable beam of the first combination beam 7 is connected to the sensing mass 5, and equivalently, in the frame space of the outer frame 4, the first combination beam 7, the second combination beam 11, the third combination beam 11 and the fourth combination beam 14 support one sensing mass 5 together;
one end of the detection coil 8 is a lead electrode 10 and is arranged at the central position of the sensitive mass block 5, and the other end of the detection coil is folded back and arranged at the position of the connecting block and is connected to an external circuit through the second electrode 6;
the detection coil 8 is connected with the lead wire 9 at one end opposite to the second electrode 6, namely the lead wire electrode 10 is connected with the lead wire 9, the lead wire 9 is of a bent lead wire structure, one end of the lead wire 9 is connected with the lead wire electrode 10, and the other end of the lead wire is arranged at the position of the connecting block of the fourth combination beam 15 and is connected to an external circuit through the first electrode 3;
in this embodiment, the external circuit is a conventional circuit capable of collecting electromagnetic effect to generate electric energy, and only a circuit capable of converting common collected electromagnetic energy into electric energy disclosed in the art is required, which is not described in detail herein.
The detection coil 8, the third lead electrode 10 and the lead 9 are matched and connected with the outer frame 4 and the sensitive mass block 5 and are firmly bonded, the bonding substrate 13 is matched and connected with the outer frame 4 and is firmly bonded, and the lead 9 and other inflection structures of the detection coil 8 are not in electric contact with each other
As shown in fig. 14 and 15, the first combined beam 7 comprises at least two movable beams and a connecting block, the connecting block is in a T shape, the thickness of the connecting block is consistent with the thickness of each combined beam and the sensitive mass block, the connecting block is used for connecting the outer frame 4 and the movable beam, in the present embodiment, the connecting block is defined as a first connecting block 20, the movable beam is defined as a first movable beam 18, and a second movable beam 19, the connecting block is a thin plate structure, a first movable beam 18 and a second movable beam 19 are bent and extended from one side of the connecting block, the first movable beam 18 and the second movable beam 19 are in a slender beam structure, i.e. the length of the beam is much greater than its width, for connecting the proof mass with the first connecting block 20, the two movable beams of the same composite beam are parallel to each other, and the structural sizes are completely the same, so that the sensing mass block can detect the tiny displacement distance.
The working process is as follows: when MEMS switch inertia module carries out the detection of small displacement, for example when the X axle has external force input, the proof mass on the X axle receives external force effect and moves along the X axle, proof mass passes through the combination beam structure, drives the detection coil and takes place small displacement for the frame, relative displacement changes between detection coil, the permanent magnet, realizes that the detection coil cuts magnetic induction line, arouses electromagnetic effect to can realize through first electrode, second electrode output voltage signal that electromagnetic energy converts the ability collection work of electric energy into.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.
Claims (8)
1. A MEMS energy harvester that utilizes electromagnetic induction principles to generate energy, the MEMS energy harvester comprising:
the bonding substrate is used as a carrier, a first groove and a second groove are formed in the bonding substrate through processing and etching, and a first permanent magnet and a second permanent magnet which are used for providing a magnetic field are respectively arranged in the first groove and the second groove;
the bonding substrate is fixedly provided with the outer frame, a sensitive mass block is arranged in a frame space formed in the outer frame, and the sensitive mass block is connected with the outer frame through a combined beam structure; the sensitive mass block is provided with a detection coil used for cutting the magnetic induction line, one end of the detection coil is connected with the second electrode, and the other end of the detection coil is connected with the first electrode through a lead electrode and a lead.
2. The MEMS energy harvester of claim 1, wherein the composite beam structure comprises a first composite beam, a second composite beam, a third composite beam, a fourth composite beam;
the first combination beam, the second combination beam, the third combination beam and the fourth combination beam are respectively arranged at the four sides of the sensing mass block and connected, and the sensing mass block is positioned at the center of the outer frame.
3. The MEMS energy collector as claimed in claim 1, wherein the detecting coil is a loop coil structure, one end of the detecting coil is a lead electrode and is disposed at the center of the sensing mass, and the other end is folded and connected to an external circuit through the second electrode.
4. A MEMS energy harvester as in claim 2 wherein the first composite beam comprises at least two movable beams and a connecting block, the connecting block being of a "T" configuration having a thickness corresponding to the thickness of each composite beam and the proof mass;
the movable beams are in a long and thin beam structure, the movable beams are symmetrically arranged on two sides of the connecting block, and the two movable beams of the same combined beam are parallel to each other.
5. The MEMS energy harvester of claim 1, wherein the outer frame is a square frame structure, the outer frame is located on the bonded substrate and has the same length and width dimensions as the bonded substrate, and the outer frame and the bonded substrate are fit and bonded firmly.
6. A MEMS energy harvester according to claim 4 wherein the end of the connecting block which is not in contact with the moveable beam is interconnected to the frame.
7. The MEMS energy harvester of claim 1, wherein the first and second permanent magnets are ferromagnetic films.
8. A MEMS energy harvester according to claim 1 wherein the lead is a bent wire structure interconnected at one end to the lead electrode 10 and connected at the other end to an external circuit via the first electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911281783.4A CN111678510A (en) | 2019-12-13 | 2019-12-13 | MEMS energy collector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911281783.4A CN111678510A (en) | 2019-12-13 | 2019-12-13 | MEMS energy collector |
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| CN111678510A true CN111678510A (en) | 2020-09-18 |
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| CN201911281783.4A Pending CN111678510A (en) | 2019-12-13 | 2019-12-13 | MEMS energy collector |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112600462A (en) * | 2020-12-10 | 2021-04-02 | 中北大学南通智能光机电研究院 | Electromagnetic energy collector of MEMS multifrequency vibration |
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2019
- 2019-12-13 CN CN201911281783.4A patent/CN111678510A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112600462A (en) * | 2020-12-10 | 2021-04-02 | 中北大学南通智能光机电研究院 | Electromagnetic energy collector of MEMS multifrequency vibration |
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