CN110940280A - 对焦传感器的校准方法 - Google Patents
对焦传感器的校准方法 Download PDFInfo
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- CN110940280A CN110940280A CN201911212027.6A CN201911212027A CN110940280A CN 110940280 A CN110940280 A CN 110940280A CN 201911212027 A CN201911212027 A CN 201911212027A CN 110940280 A CN110940280 A CN 110940280A
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- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000005070 sampling Methods 0.000 claims abstract description 37
- 238000006073 displacement reaction Methods 0.000 claims abstract description 25
- 238000012937 correction Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- Length Measuring Devices By Optical Means (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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CN201911212027.6A CN110940280B (zh) | 2019-11-29 | 2019-11-29 | 对焦传感器的校准方法 |
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CN201911212027.6A CN110940280B (zh) | 2019-11-29 | 2019-11-29 | 对焦传感器的校准方法 |
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CN110940280A true CN110940280A (zh) | 2020-03-31 |
CN110940280B CN110940280B (zh) | 2021-08-31 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003227708A (ja) * | 2003-03-04 | 2003-08-15 | Toshiba Corp | 厚さ計 |
CN102647566A (zh) * | 2011-02-17 | 2012-08-22 | 全视科技有限公司 | 用于cmos图像传感器的模拟行黑色电平校准 |
CN106168466A (zh) * | 2015-05-21 | 2016-11-30 | 财团法人工业技术研究院 | 全域式影像检测系统及其检测方法 |
CN106483622A (zh) * | 2016-11-25 | 2017-03-08 | 苏州均华精密机械有限公司 | 提供检查与量测的自动对焦装置及其方法 |
CN107150509A (zh) * | 2016-03-03 | 2017-09-12 | 海德堡印刷机械股份公司 | 带传感器系统的页张印刷机和校准调节传感器系统的方法 |
CN207832124U (zh) * | 2018-02-14 | 2018-09-07 | 广西桂景计量检测有限公司 | 车轮踏面参数智能检测仪校准装置 |
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2019
- 2019-11-29 CN CN201911212027.6A patent/CN110940280B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003227708A (ja) * | 2003-03-04 | 2003-08-15 | Toshiba Corp | 厚さ計 |
CN102647566A (zh) * | 2011-02-17 | 2012-08-22 | 全视科技有限公司 | 用于cmos图像传感器的模拟行黑色电平校准 |
CN106168466A (zh) * | 2015-05-21 | 2016-11-30 | 财团法人工业技术研究院 | 全域式影像检测系统及其检测方法 |
CN107150509A (zh) * | 2016-03-03 | 2017-09-12 | 海德堡印刷机械股份公司 | 带传感器系统的页张印刷机和校准调节传感器系统的方法 |
CN106483622A (zh) * | 2016-11-25 | 2017-03-08 | 苏州均华精密机械有限公司 | 提供检查与量测的自动对焦装置及其方法 |
CN207832124U (zh) * | 2018-02-14 | 2018-09-07 | 广西桂景计量检测有限公司 | 车轮踏面参数智能检测仪校准装置 |
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Inventor after: Li Jing Inventor after: Wu Zhipeng Inventor after: Ma Xianghong Inventor after: Ding Minxia Inventor after: Chen Jinxin Inventor after: Meng Lulu Inventor before: Li Jing Inventor before: Wu Zhipeng Inventor before: Xie Dongdong Inventor before: Ma Xianghong Inventor before: Ding Minxia Inventor before: Chen Jinxin Inventor before: Meng Lulu |
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