CN110907057B - Sensor with adjustable circular dichroism absorption - Google Patents
Sensor with adjustable circular dichroism absorption Download PDFInfo
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- CN110907057B CN110907057B CN201911234422.4A CN201911234422A CN110907057B CN 110907057 B CN110907057 B CN 110907057B CN 201911234422 A CN201911234422 A CN 201911234422A CN 110907057 B CN110907057 B CN 110907057B
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Abstract
The invention relates to a sensor with adjustable circular dichroism absorption, which comprises a substrate layer, wherein a chiral structure array which is periodically arranged is arranged above the substrate layer, the chiral structure array is arranged above the substrate layer through a supporting part, a cavity is formed between each chiral structure array and the substrate layer, a plurality of holes are also arranged on the chiral structure array, a plurality of discs are arranged at the vertical projection positions of the holes above the substrate layer, and a thermal expansion material block is also arranged at one side of the chiral structure array; this absorption circular dichroism adjustable sensor can convert temperature signal into optical signal, through the change of the circular dichroism of detecting optical signal to detect the temperature, have higher accuracy and sensitivity.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a sensor with adjustable circular dichroism absorption.
Background
The sensor (english name: transducer/sensor) is a detection device, which can sense the measured information and convert the sensed information into electric signals or other information in required form according to a certain rule to output, so as to meet the requirements of information transmission, processing, storage, display, recording, control and the like.
The sensor features include: miniaturization, digitalization, intellectualization, multifunction, systematization and networking. The method is the first link for realizing automatic detection and automatic control. The existence and development of the sensor enable the object to have the senses of touch, taste, smell and the like, and the object slowly becomes alive. Generally, the sensor is classified into ten categories, i.e., a thermosensitive element, a photosensitive element, a gas-sensitive element, a force-sensitive element, a magnetic-sensitive element, a humidity-sensitive element, a sound-sensitive element, a radiation-sensitive element, a color-sensitive element, and a taste-sensitive element, according to their basic sensing functions.
A temperature sensor (temperature transducer) refers to a sensor that senses temperature and converts it into a usable output signal. The temperature sensor is the core part of the temperature measuring instrument and has a plurality of varieties. The measurement method can be divided into a contact type and a non-contact type, and the measurement method can be divided into a thermal resistor and a thermocouple according to the characteristics of sensor materials and electronic elements. With the development of semiconductor technology, semiconductor pressure sensors have come to be developed. Its advantages are small size, light weight, high accuracy and high temp. Particularly, with the development of MEMS technology, the semiconductor sensor is miniaturized, and has low power consumption and high reliability. In the prior art, when a pressure sensor is selected, the comprehensive precision and sensitivity of the pressure sensor need to be considered, and how to improve the precision and sensitivity of the pressure sensor is always an important direction for researching the pressure sensor.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a sensor with adjustable circular dichroism absorption, which includes a substrate layer, a chiral structure array arranged periodically is disposed above the substrate layer, the chiral structure array is disposed above the substrate layer through a support portion, and a cavity is formed between each chiral structure array and the substrate layer, the chiral structure array is further provided with a plurality of holes, a plurality of discs are disposed above the substrate layer at vertical projections of the holes, and a thermal expansion material block is further disposed on one side of the chiral structure array.
The horizontal section of the chiral structure array is a right-angled triangle, and the thermal expansion material block is arranged on one side of the right-angled side of the horizontal section of the chiral structure array.
The height of the disc is lower than that of the support part.
The thermal expansion material block is polymethyl methacrylate.
The horizontal section of the chiral structure array is L-shaped, and the thermal expansion material block is arranged on one side of the L-shaped horizontal section of the chiral structure array.
The height of the cavity is 50 nm-60 nm.
The thickness of the chiral structure array is 30 nm-50 nm.
The thickness of the disc is 30 nm-50 nm.
The holes are triangular holes.
The utility model provides an absorb circular dichroism adjustable sensor, includes the stratum basale, the top of stratum basale is provided with the chiral structure array of periodic arrangement, chiral structure array sets up in the stratum basale top through the supporting part to every chiral structure array all with the stratum basale between form the cavity, still be provided with a plurality of holes on the chiral structure array, the perpendicular projection department that the top on stratum basale is located the hole all is provided with a plurality of discs, still be provided with the second thermal expansion material piece between disc and the stratum basale.
The invention has the beneficial effects that: the sensor with adjustable absorption circular dichroism can convert a temperature signal into an optical signal, and detect the temperature by detecting the change of the circular dichroism of the optical signal; when the sensor is used for detecting temperature, the expansion of the thermal expansion material can change the position of the chiral structure array, so that the coupling mode of the upper chiral structure array and the lower disc to incident circularly polarized light is changed, the distribution mode of charges on the upper chiral structure array and the lower disc is changed, circular dichroism is changed, the temperature can be detected by detecting the change of the circular dichroism, and the sensor with adjustable absorption circular dichroism has higher accuracy and sensitivity.
The present invention will be described in further detail below with reference to the accompanying drawings.
Drawings
FIG. 1 is a side schematic view of a sensor with tunable absorption circular dichroism.
Fig. 2 is a schematic top view of a sensor with tunable absorption circular dichroism.
Fig. 3 is a schematic top view of a sensor with tunable absorption circular dichroism.
FIG. 4 is a schematic side view of a sensor with tunable absorption circular dichroism.
Fig. 5 is a schematic view of circular dichroism of incident light before and after temperature-changing the position of a block of thermally-expansible material.
In the figure: 1. a base layer; 2. an array of chiral structures; 3. a support portion; 4. a block of thermally expansive material; 5. a hole; 6. a disc; 7. a cavity; 8. a second block of thermally expansive material.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.
Example 1
The present embodiment provides a sensor with tunable absorption circular dichroism as shown in fig. 1, which includes a substrate layer 1, wherein the substrate layer 1 mainly plays a role of support and is capable of transmitting light, and therefore, the substrate layer 1 may be made of silicon dioxide; the substrate layer 1 is provided with periodically arranged chiral structure arrays 2, the chiral structure arrays 2 are arranged above the substrate layer 1 through support parts 3, a cavity 7 is formed between each chiral structure array 2 and the substrate layer 1, the support parts 3 are used for supporting the chiral structure arrays 2 and separating the substrate layer 1 from the chiral structure arrays 2, so that the cavity 7 is formed between the substrate layer 1 and the chiral structure arrays 2, and therefore, the support parts 3 can also be made of silicon dioxide; still be provided with a plurality of holes 5 on the chiral structure array 2, hole 5 all is located the top of cavity 7, the vertical projection department that the top of stratum basale 1 is located hole 5 all is provided with a plurality of discs 6, one side of chiral structure array 2 still is provided with thermal expansion material piece 4, and like this, when ambient temperature changes, can make thermal expansion material piece 4 extrude chiral structure array 2 to lead to chiral structure array 2 and lower floor's disc 6 to the coupling mode of the circular polarization light of vertical incidence change, the distribution mode of charge on upper chiral structure array 2 and lower floor's disc 6 changes, thereby lead to the change of circular dichroism, through detecting the change of circular dichroism, just can realize the detection of temperature, this sensor that absorbs circular dichroism adjustable has higher accuracy and sensitivity.
Further, as shown in fig. 2, the horizontal cross section of the chiral structure array 2 is a right triangle, and the thermal expansion material block 4 is disposed at the right-angle side of the horizontal cross section of the chiral structure array 2, so that the thermal expansion material block 4 can change the coupling manner of the chiral structure array 2 in the shape of a right triangle and the disk 6 to the vertically incident circularly polarized light, so that the circular dichroism of the vertically incident circularly polarized light is changed.
Further, the arrangement period of the chiral structure array 2 is 300nm × 300 nm.
Further, the height of the disc 6 is lower than that of the support 3, so that the disc 6 is not in direct contact with the chiral structure array 2, and under the action of circularly polarized light, an electric field is formed between the disc 6 and the chiral structure array 2, thereby changing the distribution mode of charges on the upper layer chiral structure array 2 and the lower layer disc 6.
Further, the thermal expansion material block 4 is polymethyl methacrylate (PMMA), also called acryl, Acrylic or plexiglass, Lucite (trade name), and has high transparency, high light transmittance, and visible light: PMMA is the most excellent high-molecular transparent material at present, and the light transmittance reaches 92 percent and is higher than that of glass. Ultraviolet light: quartz is completely transparent to uv light, but is expensive, and ordinary glass can only transmit 0.6% of uv light. PMMA can effectively filter ultraviolet light with the wavelength less than 300nm, but the filtering effect between 300nm and 400nm is poor. Some manufacturers coat the PMMA surface to increase its effectiveness and properties in filtering 300nm to 400nm uv light. On the other hand, under the condition of irradiating ultraviolet light, PMMA has better stability compared with polycarbonate; infrared ray: PMMA allows the passage of Infrared (IR) rays with a wavelength of less than 2800 nm. Longer wavelength IR, less than 25,000nm, may be substantially blocked. There are special colored PMMA that transmits IR of a specific wavelength while blocking visible light.
Further, as shown in the figure, the horizontal section of the chiral structure array 2 is L-shaped, and the thermal expansion material block 4 is disposed on one side of the L-shaped horizontal section of the chiral structure array 2, or may be disposed on another side.
Further, the height of the cavity 7 is 50nm to 60nm, and preferably, the height of the cavity 7 is 60 nm.
Further, the thickness of the chiral structure array 2 is 30nm to 50nm, and preferably, the thickness of the chiral structure array 2 is 40 nm.
Further, the thickness of the disc 6 is 30nm to 50nm, and preferably, the thickness of the disc 6 is 40 nm.
Further, the shape of the hole 5 is not limited to a circle, and the shape of the hole 5 may also be a triangle, and may also be other shapes, such as a V-shape, an S-shape, a Z-shape, etc.
Example 2
The embodiment provides a sensor with adjustable circular dichroism absorption as shown in fig. 4, which includes a substrate layer 1, a chiral structure array 2 arranged periodically is disposed above the substrate layer 1, the chiral structure array 2 is disposed above the substrate layer 1 through a support 3, a cavity 7 is formed between each chiral structure array 2 and the substrate layer 1, a plurality of holes 5 are further disposed on the chiral structure array 2, a plurality of discs 6 are disposed above the substrate layer 1 at vertical projections of the holes 5, and a second thermally-expandable material block 8 is further disposed between each disc 6 and the substrate layer 1; in this way, the coupling distance between the array of chiral structures 2 and the disc 6 can be adjusted by the second block of thermally expandable material 8, controlling the coupling strength of the circular dichroic structure. As the distance slowly increases, the coupling slowly increases. Therefore, the circular dichroism of the vertically incident circularly polarized light is changed, and the temperature detection is realized.
Further, the second thermal expansion material block 8 may also be made of polymethyl methacrylate or other thermal expansion materials.
In summary, the sensor with adjustable circular dichroism can convert a temperature signal into an optical signal, and detect the temperature by detecting the change of the circular dichroism of the optical signal; when a sensor is used for detecting temperature, the expansion of the thermal expansion material block 4 can change the position of the chiral structure array 2, so that the coupling mode of the upper layer chiral structure array 2 and the lower layer disk 6 to incident circularly polarized light is changed, the distribution mode of charges on the upper layer chiral structure array 2 and the lower layer disk 6 is changed, so that circular dichroism is changed, and the detection of the temperature can be realized by detecting the change of the circular dichroism, as shown in fig. 5, the circular dichroism schematic diagram of the incident light before and after the temperature changes the position of the thermal expansion material block, and the sensor with adjustable absorption circular dichroism has higher accuracy and sensitivity; on the other hand, the structure can realize circular dichroism adjustment of circularly polarized light by adjusting temperature, namely, by controlling the temperature, the coupling mode of the thermal expansion material 4 to the upper layer chiral structure array 2 and the lower layer disc 6 to incident circular polarized light is changed, so that the effect of adjusting circular dichroism is achieved.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (7)
1. A sensor with tunable absorption circular dichroism, comprising: the device comprises a substrate layer (1), chiral structure arrays (2) which are periodically arranged are arranged above the substrate layer (1), the chiral structure arrays (2) are arranged above the substrate layer (1) through supporting parts (3), a cavity (7) is formed between each chiral structure array (2) and the substrate layer (1), a plurality of holes (5) are further formed in the chiral structure arrays (2), a plurality of discs (6) are arranged at the vertical projection positions of the holes (5) above the substrate layer (1), and a thermal expansion material block (4) is further arranged on one side of each chiral structure array (2); the height of the disc (6) is lower than the height of the support (3);
the horizontal section of the chiral structure array (2) is a right-angled triangle, and the thermal expansion material block (4) is arranged on one side of the right-angled side of the horizontal section of the chiral structure array (2); or the horizontal section of the chiral structure array (2) is L-shaped, and the thermal expansion material block (4) is arranged on one side of the L-shaped horizontal section of the chiral structure array (2).
2. The tunable absorption circular dichroism sensor of claim 1, wherein: the thermal expansion material block (4) is polymethyl methacrylate.
3. The tunable absorption circular dichroism sensor of claim 1, wherein: the height of the cavity (7) is 50 nm-60 nm.
4. The tunable absorption circular dichroism sensor of claim 1, wherein: the thickness of the chiral structure array (2) is 30 nm-50 nm.
5. The tunable absorption circular dichroism sensor of claim 1, wherein: the thickness of the disc (6) is 30 nm-50 nm.
6. The tunable absorption circular dichroism sensor of claim 1, wherein: the holes (5) are triangular holes.
7. A sensor with tunable absorption circular dichroism, comprising: including stratum basale (1), the top of stratum basale (1) is provided with periodic arrangement's chiral structure array (2), chiral structure array (2) set up in stratum basale (1) top through supporting part (3) to every chiral structure array (2) all with stratum basale (1) between form cavity (7), still be provided with a plurality of holes (5) on chiral structure array (2), the vertical projection department that the top of stratum basale (1) is located hole (5) all is provided with a plurality of discs (6), one side of chiral structure array (2) still is provided with thermal expansion material piece (4), disc (6) and stratum basale (1) between still be provided with second thermal expansion material piece (8).
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