CN111551296A - Pressure sensor based on bent optical fiber - Google Patents
Pressure sensor based on bent optical fiber Download PDFInfo
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- CN111551296A CN111551296A CN202010419291.3A CN202010419291A CN111551296A CN 111551296 A CN111551296 A CN 111551296A CN 202010419291 A CN202010419291 A CN 202010419291A CN 111551296 A CN111551296 A CN 111551296A
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- China
- Prior art keywords
- optical fiber
- metal layer
- pressure sensor
- noble metal
- pressure
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 58
- 229910000510 noble metal Inorganic materials 0.000 claims abstract description 43
- 239000008188 pellet Substances 0.000 claims abstract description 19
- 239000000835 fiber Substances 0.000 claims abstract description 16
- 239000011324 bead Substances 0.000 claims description 21
- 230000000903 blocking effect Effects 0.000 claims description 4
- 229920001971 elastomer Polymers 0.000 claims description 4
- 239000000806 elastomer Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 2
- 229920002554 vinyl polymer Polymers 0.000 claims description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims 1
- 239000004793 Polystyrene Substances 0.000 abstract description 44
- 230000008878 coupling Effects 0.000 abstract description 10
- 238000010168 coupling process Methods 0.000 abstract description 10
- 238000005859 coupling reaction Methods 0.000 abstract description 10
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 239000010970 precious metal Substances 0.000 abstract description 4
- 229920002223 polystyrene Polymers 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 206010063385 Intellectualisation Diseases 0.000 description 1
- -1 acryl Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention relates to a pressure sensor based on a bent optical fiber, which comprises a U-shaped optical fiber arranged transversely, wherein a PS (polystyrene) pellet is arranged in the U-shaped optical fiber and close to the bottom of the U-shaped optical fiber, one side of the PS pellet, close to the bottom of the U-shaped optical fiber, is provided with a hemispherical noble metal layer, and the other side of the PS pellet is provided with an elastic stop block; when pressure is applied to the sensor, the pressure extrudes the PS pellets in the U-shaped optical fiber, so that the shape of the PS pellets is changed, the distance between the precious metal layer arranged on the surface of the PS pellets and the optical fiber is changed, the coupling between the precious metal layer and light is changed, the transmissivity of the light transmitted in the optical fiber is changed, and the pressure can be detected by detecting the transmissivity of the light in the optical fiber; the bent fiber based pressure sensor has higher accuracy and sensitivity.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a pressure sensor based on a bent optical fiber.
Background
The sensor (english name: transducer/sensor) is a detection device, which can sense the measured information and convert the sensed information into electric signals or other information in required form according to a certain rule to output, so as to meet the requirements of information transmission, processing, storage, display, recording, control and the like.
The sensor features include: miniaturization, digitalization, intellectualization, multifunction, systematization and networking. The method is the first link for realizing automatic detection and automatic control. The existence and development of the sensor enable the object to have the senses of touch, taste, smell and the like, and the object slowly becomes alive. Generally, the sensor is classified into ten categories, i.e., a thermosensitive element, a photosensitive element, a gas-sensitive element, a force-sensitive element, a magnetic-sensitive element, a humidity-sensitive element, a sound-sensitive element, a radiation-sensitive element, a color-sensitive element, and a taste-sensitive element, according to their basic sensing functions.
Pressure sensors are one of the most widely used. The traditional pressure sensor is mainly based on a mechanical structure type device, and indicates pressure by deformation of an elastic element, but the structure is large in size and heavy in weight, and cannot provide electrical output. With the development of semiconductor technology, semiconductor pressure sensors have come to be developed. Its advantages are small size, light weight, high accuracy and high temp. Particularly, with the development of MEMS technology, the semiconductor sensor is miniaturized, and has low power consumption and high reliability. In the prior art, when a pressure sensor is selected, the comprehensive precision and sensitivity of the pressure sensor need to be considered, and how to improve the precision and sensitivity of the pressure sensor is always an important direction for researching the pressure sensor.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a pressure sensor based on a bent optical fiber, including a U-shaped optical fiber arranged horizontally, a PS pellet disposed inside the U-shaped optical fiber and near the bottom of the U-shaped optical fiber, a hemispherical noble metal layer disposed on one side of the PS pellet near the bottom of the U-shaped optical fiber, and an elastic stopper disposed on the other side of the PS pellet.
The PS small ball and the elastic barrier block are also provided with a second noble metal layer.
The PS beads are provided in plurality.
The number of the PS beads is 3.
The noble metal layer and the second noble metal layer are made of gold or silver or copper.
The diameter of the PS beads is 100 nm-500 nm.
The thicknesses of the noble metal layer and the second noble metal layer are 30 nm-50 nm.
The invention has the beneficial effects that: the pressure sensor based on the bent optical fiber can convert a pressure signal into a coupling optical signal of noble metal and light, and the pressure to be detected can extrude the PS small ball, so that the shape of the PS small ball is changed, the distance between the PS small ball and the noble metal layer and the optical fiber is changed, the coupling of the noble metal layer and the light is changed, the transmittance of the light in the optical fiber is changed, and the pressure is detected by detecting the change of the transmittance of the light in the optical fiber; when pressure is applied to the sensor, the pressure extrudes the PS pellets in the U-shaped optical fiber, so that the shape of the PS pellets is changed, the distance between the precious metal layer arranged on the surface of the PS pellets and the optical fiber is changed, the coupling between the precious metal layer and light is changed, the transmissivity of the light transmitted in the optical fiber is changed, and the pressure can be detected by detecting the transmissivity of the light in the optical fiber; the bent fiber based pressure sensor has higher accuracy and sensitivity.
The present invention will be described in further detail below with reference to the accompanying drawings.
Drawings
FIG. 1 is a side schematic view of a curved fiber based pressure sensor.
Fig. 2 is a side schematic view of a second curved fiber-based pressure sensor.
FIG. 3 is a side schematic view three of a curved fiber based pressure sensor.
In the figure: 1. an optical fiber; 2. an elastic stopper; 3. a PS bead; 4. a noble metal layer; 5. a first port; 6. a second port; 7. a second noble metal layer.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.
Example 1
The embodiment provides a pressure sensor based on a bent optical fiber as shown in fig. 1-3, which comprises a U-shaped optical fiber 1 arranged transversely, a PS pellet 3 arranged inside the U-shaped optical fiber 1 and close to the bottom of the U-shaped optical fiber 1, a hemispherical noble metal layer 4 arranged on one side of the PS pellet 3 close to the bottom of the U-shaped optical fiber 1, and an elastic stopper 2 arranged on the other side of the PS pellet 3; the optical fiber 1 can transmit light, the PS beads 3 are made of polystyrene, have elasticity, can generate different deformations when being subjected to different pressures, and can change the distance between the noble metal layer 4 and the optical fiber 1, so that the coupling between the noble metal layer 4 and the light transmitted in the optical fiber 1 is changed, and the sensitivity of the pressure sensor based on the bent optical fiber is very high because the optical coupling is very sensitive to the distance between the noble metal layer 4 and the optical fiber 1. On one hand, the noble metal layer 4 can generate surface plasmon resonance and can couple light in the optical fiber 1 into the bent part of the optical fiber 1; on the other hand, the noble metal layer 4 is plated on the PS beads 3, so that the PS beads 3 can bear higher pressure, namely, the pressure resistance of the PS beads 3 is increased; the noble metal layer 4 plated on the PS pellet 3 can prevent the metal from falling off compared with the case where the metal is plated inside the optical fiber. The elastic blocking block 2 can block the PS small ball 3, limit the position of the PS small ball 3 and avoid the influence on the detection precision caused by the large-scale free movement of the PS small ball 3 along the U-shaped optical fiber 1.
Further, as shown in fig. 2, the PS pellet 3 and the elastic blocking block 2 are further provided with a second noble metal layer 7, so that when the PS pellet 3 is pressed by pressure to deform, the positions of the second noble metal layer 7 and the noble metal layer 4 are changed, and the optical coupling therebetween is also changed, thereby improving the degree of change in the transmittance of light propagating in the optical fiber 1, and also improving the sensitivity of the pressure sensor based on the bent optical fiber.
Further, as shown in fig. 3, a plurality of PS beads 3 are provided, so that light in the vertical direction in the optical fiber 1 can be coupled with the plurality of second noble metal layers 7 and the noble metal layers 4, and thus, a plurality of optical couplers are generated in the horizontal direction and the vertical direction, so that the transmittance of light propagating in the optical fiber 1 is changed more significantly, and the sensitivity of the pressure sensor based on the bent optical fiber is higher.
Preferably, there are 3 PS beads 3.
Further, the noble metal layer 4 and the second noble metal layer 7 are made of gold, silver or copper.
Further, the elastic barrier 2 is made of acryl-based elastomer, vinyl-based elastomer.
Further, the diameter of the PS beads 3 is 100 nm-500 nm; preferably, the PS beads 3 have a diameter of 200 nm.
Further, the thicknesses of the noble metal layer 4 and the second noble metal layer 7 are 30nm to 50 nm; preferably, the thickness of the noble metal layer 4 and the second noble metal layer 7 is 40 nm.
In summary, the pressure sensor based on the bent optical fiber can convert a pressure signal into a coupling optical signal of the noble metal and the light, and the pressure to be detected can extrude the PS bead 3, so as to change the shape of the PS bead 3, change the distance between the PS bead and the noble metal layer 4 and the optical fiber 1, change the coupling between the noble metal layer 4 and the light, change the transmittance of the light inside the optical fiber 1, and detect the pressure by detecting the change of the transmittance of the light inside the optical fiber 1; when pressure is applied to the sensor, the pressure extrudes the PS beads 3 in the U-shaped optical fiber 1, so that the shape of the PS beads 3 is changed, the distance between the noble metal layer 4 arranged on the surface of the PS beads 3 and the optical fiber 1 is changed, the coupling between the noble metal layer 3 and light is changed, the transmissivity of the light propagating in the optical fiber 1 is changed, and the pressure can be detected by detecting the transmissivity of the light in the optical fiber 1; the bent fiber based pressure sensor has higher accuracy and sensitivity.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (10)
1. A curved fiber based pressure sensor, comprising: the optical fiber fixing device comprises a U-shaped optical fiber (1) which is transversely arranged, wherein a PS small ball (3) is arranged at the position, close to the bottom of the U-shaped optical fiber (1), in the U-shaped optical fiber (1), one side, close to the bottom of the U-shaped optical fiber (1), of the PS small ball (3) is provided with a hemispherical noble metal layer (4), and the other side of the PS small ball (3) is provided with an elastic blocking block (2).
2. The curved-fiber based pressure sensor of claim 1, wherein: the PS small balls (3) and the elastic blocking block (2) are also provided with a second noble metal layer (7).
3. A bent fiber based pressure sensor according to claim 1 or 2, wherein: the PS beads (3) are provided in plurality.
4. A bent fiber based pressure sensor according to claim 3, wherein: the number of the PS pellets (3) is 3.
5. A bent fiber based pressure sensor according to claim 1 or 2, wherein: the noble metal layer (4) and the second noble metal layer (7) are made of gold, silver or copper.
6. The curved-fiber based pressure sensor of claim 1, wherein: the diameter of the PS beads (3) is 100 nm-500 nm.
7. The curved-fiber based pressure sensor of claim 1, wherein: the diameter of the PS beads (3) is 200 nm.
8. A bent fiber based pressure sensor according to claim 1 or 2, wherein: the thicknesses of the noble metal layer (4) and the second noble metal layer (7) are 30-50 nm.
9. The curved-fiber based pressure sensor of claim 8, wherein: the thicknesses of the noble metal layer (4) and the second noble metal layer (7) are 40 nm.
10. A bent fiber based pressure sensor according to claim 2, wherein: the elastic barrier block (2) is made of a propylene-based elastomer and a vinyl-based elastomer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010419291.3A CN111551296A (en) | 2020-05-18 | 2020-05-18 | Pressure sensor based on bent optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010419291.3A CN111551296A (en) | 2020-05-18 | 2020-05-18 | Pressure sensor based on bent optical fiber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111551296A true CN111551296A (en) | 2020-08-18 |
Family
ID=72002008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010419291.3A Withdrawn CN111551296A (en) | 2020-05-18 | 2020-05-18 | Pressure sensor based on bent optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111551296A (en) |
-
2020
- 2020-05-18 CN CN202010419291.3A patent/CN111551296A/en not_active Withdrawn
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| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20200818 |
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| WW01 | Invention patent application withdrawn after publication |