CN110904420A - Fiber end face coating device in magnetron sputtering - Google Patents
Fiber end face coating device in magnetron sputtering Download PDFInfo
- Publication number
- CN110904420A CN110904420A CN201911400391.5A CN201911400391A CN110904420A CN 110904420 A CN110904420 A CN 110904420A CN 201911400391 A CN201911400391 A CN 201911400391A CN 110904420 A CN110904420 A CN 110904420A
- Authority
- CN
- China
- Prior art keywords
- fiber
- magnetron sputtering
- box body
- base
- clamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 title claims abstract description 62
- 238000000576 coating method Methods 0.000 title claims abstract description 31
- 239000011248 coating agent Substances 0.000 title claims abstract description 30
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 239000013077 target material Substances 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 239000007888 film coating Substances 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/83—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with metals; with metal-generating compounds, e.g. metal carbonyls; Reduction of metal compounds on textiles
Abstract
The invention discloses a fiber end face coating device in magnetic control sputtering, which comprises a base, wherein a sealing box body is arranged on the base, a supporting seat is arranged on the base, a target material is arranged on the supporting seat, and a fiber clamping mechanism is arranged in the sealing box body in a matching manner at a position right above the target material; the fiber clamping mechanism comprises a group of clamping plates, a bolt and a nut, wherein the bolt is arranged on the group of clamping plates in a penetrating mode and is clamped and fixed through the nut. The invention has the beneficial effects that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre terminal surface, only needs place the fibre among the wire casing of splint, places splint again on the seal box, has guaranteed the maneuverability and the reliability of fibre terminal surface coating film, has important meaning to the manufacturing field of fibre coating film.
Description
Technical Field
The invention relates to the technical field of vacuum magnetron sputtering coating, in particular to a fiber end face coating device in magnetron sputtering.
Background
The fiber coating has great value in practical application, the metal-plated fiber is a composite fiber taking metal as a sheath and non-metal fiber as a core, and the metal-plated fiber can be divided into the following parts according to the metal of the coating: the composite fiber has the advantages of keeping the flexibility and mechanical property of the original core fiber, along with the reflection performance and conductivity to electromagnetic waves and infrared rays, prolonging the service life and the like according to different coatings. And the end face of the optical fiber is coated with a film, so that the laser transmission or reflection function can be increased.
In the prior art, the fiber is coated with a film by an electrochemical method, but when the fiber is coated with aluminum by the method, pollution is easily caused, and the aluminum film is not very dense. The magnetron sputtering related to the device is one of physical vapor deposition, has the advantage of strong film adhesion and has no pollution to the environment. However, because the fibers are fine, the working process of clamping and mounting before coating is complicated and the reliability during coating is not high when the fiber end faces are coated in the magnetron sputtering process, and therefore, how to ensure the operability and reliability of coating for a plurality of fibers becomes a technical problem to be solved urgently.
Disclosure of Invention
In view of the above problems in the prior art, an object of the present invention is to provide a fiber end surface coating apparatus in magnetron sputtering, which can improve coating operability and reliability.
The technical scheme of the invention is as follows:
the fiber end face coating device in magnetron sputtering is characterized by comprising a base, wherein a sealing box body is arranged on the base, a supporting seat is arranged on the base, a target material is arranged on the supporting seat, and a fiber clamping mechanism is arranged in the sealing box body in a matching manner at a position right above the target material; the fiber clamping mechanism comprises a group of clamping plates, a bolt and a nut, wherein the bolt is arranged on the group of clamping plates in a penetrating mode and is clamped and fixed through the nut.
The fiber end face coating device in magnetron sputtering is characterized in that the clamping plate is of a T-shaped structure, and through holes for bolts to penetrate through are formed in two sides of the top of the clamping plate.
The fiber end face coating device in magnetron sputtering is characterized in that a row of wire grooves are formed in two sides of each clamping plate, and two adjacent clamping plates are matched with each other, so that fibers are clamped and fixed in the wire grooves.
The fiber end face coating device in magnetron sputtering is characterized in that a sealing cover plate is arranged on the sealing box body in a sliding fit mode, and the right end of the sealing cover plate is attached to the top of the clamping plate, so that the sealing performance of the sealing box body is guaranteed.
The invention has the beneficial effects that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre terminal surface, only needs place the fibre among the wire casing of splint, places splint again on the seal box, has guaranteed the maneuverability and the reliability of fibre terminal surface coating film, has important meaning to the manufacturing field of fibre coating film.
Drawings
FIG. 1 is a schematic view of the internal mounting of the present invention;
FIG. 2 is an overall three-dimensional schematic of the present invention;
FIG. 3 is a schematic view of a sealed cartridge of the present invention;
FIG. 4 is a view showing the construction of the fiber clamping apparatus of the present invention;
FIG. 5 is a three-dimensional view of a fiber clamping device of the present invention;
FIG. 6 is a schematic view of a single piece cleat of the present invention;
in the figure: 1-base, 2-sealing box body, 3-sealing cover plate, 4-bolt, 5-nut, 6-clamping plate, 7-target, 8-supporting seat, 9-wire groove and 10-through hole.
Detailed Description
The technical scheme of the invention is further described by combining the attached drawings of the specification:
as shown in figures 1-6, the fiber end face coating device in magnetron sputtering comprises a base 1, a supporting seat 8, a sealing box and a fiber clamping device,
the seal box includes seal box body 2 and sealed apron 3, and seal box body 2 adopts inversion L type structure, and its top is equipped with the open slot, 3 sliding fit settings of sealed apron are on the open slot at 2 tops of seal box body.
The fiber clamping device comprises a group of clamping plates 6, bolts 4 and nuts 5, the clamping plates 6 are of T-shaped structures, and through holes 10 for the bolts 4 to penetrate through are formed in the two sides of the tops of the clamping plates 6 respectively; the bolt 4 is arranged in the through hole of the 6 clamping plates 6 in a penetrating way, and the tail end of the bolt is clamped and fixed by a nut 5; ten wire casings 9 which are arranged in parallel are respectively arranged on the two surfaces of the clamping plate 6, and the two adjacent clamping plates are mutually matched, so that the fibers are clamped and fixed in the wire casings 9.
Fiber clamping device places on sealed box body 2, and the splint of T type structure just in time the joint is in the open slot of sealed box body 2 to with open slot end seal, the sealed apron of reuse 3 hides, and the right-hand member of sealed apron 3 sets up with the laminating of 6 tops of splint, covers the fibre among the sealed box, ensures that the fibre surface can not by the coating film, and only fibre terminal surface can the coating film.
The fiber end face coating device is placed on a base 1 of vacuum equipment, a supporting seat 8 is placed on the base 1, a target 7 is placed on the supporting seat 8, a cathode is connected to the target 7, and after the power is turned on, a part of target atoms sputtered from the target 7 collide with fibers and are finally deposited on the surfaces of fiber silk threads.
The working process is as follows:
firstly, selecting the number of clamping plates according to the number of fibers, placing the fibers in grooves of the clamping plates 6, clamping the fibers by the clamping plates 6 to ensure that only the end faces of the fibers are exposed, and fixing the clamping plates by using nuts 5 and bolts 4; then, the clamping plate is placed on the sealing box 2, and the clamping plate 6 is covered by the cover plate 3, so that atoms sputtered out cannot be sputtered onto the surface of the fiber cylinder during film coating; and finally, placing the whole device on the base 1, ensuring that the film-coating end face of the fiber is positioned right above the target 7, starting the equipment, when the equipment normally works, starting a vacuum pump to pump gas out, applying an electric field after a certain vacuum degree is reached, impacting part of target atoms sputtered from the target 7 on the fiber end face and depositing, and starting film coating on the fiber end face.
Claims (4)
1. The fiber end face coating device in magnetron sputtering is characterized by comprising a base (1), wherein a sealing box body (2) is arranged on the base (1), a supporting seat (8) is arranged on the base (1), a target (7) is arranged on the supporting seat (8), and a fiber clamping mechanism is arranged in the sealing box body (2) in a position right above the target (7) in a matching manner; the fiber clamping mechanism comprises a group of clamping plates (6), a bolt (4) and a nut (5), wherein the bolt (4) is arranged on the group of clamping plates (6) in a penetrating mode and is clamped and fixed through the nut (5).
2. The fiber end face coating device in magnetron sputtering according to claim 1, wherein the clamping plate (6) adopts a T-shaped structure, and through holes (10) for the bolts (4) to penetrate through are formed in two sides of the top of the clamping plate (6).
3. The fiber end face coating device in magnetron sputtering of claim 1, wherein a row of slots (9) are respectively arranged on two sides of the clamping plate (6), and two adjacent clamping plates are mutually matched so as to clamp and fix the fibers in the slots (9).
4. The fiber end face coating device in magnetron sputtering according to claim 1, wherein the sealing box body (2) is provided with a sealing cover plate (3) in a sliding fit manner, and the right end of the sealing cover plate (3) is attached to the top of the clamping plate (6) to ensure the sealing performance of the sealing box body (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911400391.5A CN110904420A (en) | 2019-12-30 | 2019-12-30 | Fiber end face coating device in magnetron sputtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911400391.5A CN110904420A (en) | 2019-12-30 | 2019-12-30 | Fiber end face coating device in magnetron sputtering |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110904420A true CN110904420A (en) | 2020-03-24 |
Family
ID=69814197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911400391.5A Pending CN110904420A (en) | 2019-12-30 | 2019-12-30 | Fiber end face coating device in magnetron sputtering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110904420A (en) |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0511119A (en) * | 1991-07-02 | 1993-01-19 | Toray Ind Inc | End face working method and working device for plastic optical fiber |
| JPH0514157U (en) * | 1991-08-07 | 1993-02-23 | 日本電気硝子株式会社 | Jig for vapor deposition of optical fiber end face |
| JPH11271574A (en) * | 1998-03-25 | 1999-10-08 | Toshiba Corp | Optical component and optical semiconductor module using its optical component |
| JP2001318244A (en) * | 2000-03-03 | 2001-11-16 | Furukawa Electric Co Ltd:The | Method for forming film onto fiber end surface and optical fiber having film |
| CN102122008A (en) * | 2010-12-27 | 2011-07-13 | 西南技术物理研究所 | Method for clamping YAG and optical fiber jumper wire in optical film coating of 100 percent light passing surface |
| CN102251224A (en) * | 2011-07-11 | 2011-11-23 | 中国科学院金属研究所 | Device and method for depositing film on SiC fiber surface |
| CN203383401U (en) * | 2013-07-04 | 2014-01-08 | 厦门特房建设工程集团有限公司 | Clamping anchor for carbon-fiber composite material bar |
| CN203582965U (en) * | 2013-11-25 | 2014-05-07 | 宁波大学 | Optical fiber end face coating carrier |
| CN204843907U (en) * | 2015-06-17 | 2015-12-09 | 河南省鑫宇光实业有限公司 | Tail optical fiber end face coating processing positioning fixture |
| CN105779945A (en) * | 2016-04-01 | 2016-07-20 | 三河市浩运盛跃碳纳米科技有限公司 | Fiber coating equipment and coating method for carbon nanotube fibers |
| CN205799203U (en) * | 2016-07-07 | 2016-12-14 | 四川思迈科技有限公司 | A kind of universal optical fibre end face grinding clamp |
| CN207757492U (en) * | 2017-11-21 | 2018-08-24 | 深圳市飞莱特科技有限公司 | Novel optical fiber coating clamp |
| CN207994330U (en) * | 2018-03-19 | 2018-10-19 | 山东华光光电子股份有限公司 | A kind of optical fiber rack mounting clamp |
| CN209157956U (en) * | 2018-11-08 | 2019-07-26 | 北京市电信工程局有限公司 | A kind of handling arrangement of end head of optical fiber |
| CN211339675U (en) * | 2019-12-30 | 2020-08-25 | 浙江工业大学 | Fiber end face coating device in magnetron sputtering |
-
2019
- 2019-12-30 CN CN201911400391.5A patent/CN110904420A/en active Pending
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0511119A (en) * | 1991-07-02 | 1993-01-19 | Toray Ind Inc | End face working method and working device for plastic optical fiber |
| JPH0514157U (en) * | 1991-08-07 | 1993-02-23 | 日本電気硝子株式会社 | Jig for vapor deposition of optical fiber end face |
| JPH11271574A (en) * | 1998-03-25 | 1999-10-08 | Toshiba Corp | Optical component and optical semiconductor module using its optical component |
| JP2001318244A (en) * | 2000-03-03 | 2001-11-16 | Furukawa Electric Co Ltd:The | Method for forming film onto fiber end surface and optical fiber having film |
| CN102122008A (en) * | 2010-12-27 | 2011-07-13 | 西南技术物理研究所 | Method for clamping YAG and optical fiber jumper wire in optical film coating of 100 percent light passing surface |
| CN102251224A (en) * | 2011-07-11 | 2011-11-23 | 中国科学院金属研究所 | Device and method for depositing film on SiC fiber surface |
| CN203383401U (en) * | 2013-07-04 | 2014-01-08 | 厦门特房建设工程集团有限公司 | Clamping anchor for carbon-fiber composite material bar |
| CN203582965U (en) * | 2013-11-25 | 2014-05-07 | 宁波大学 | Optical fiber end face coating carrier |
| CN204843907U (en) * | 2015-06-17 | 2015-12-09 | 河南省鑫宇光实业有限公司 | Tail optical fiber end face coating processing positioning fixture |
| CN105779945A (en) * | 2016-04-01 | 2016-07-20 | 三河市浩运盛跃碳纳米科技有限公司 | Fiber coating equipment and coating method for carbon nanotube fibers |
| CN205799203U (en) * | 2016-07-07 | 2016-12-14 | 四川思迈科技有限公司 | A kind of universal optical fibre end face grinding clamp |
| CN207757492U (en) * | 2017-11-21 | 2018-08-24 | 深圳市飞莱特科技有限公司 | Novel optical fiber coating clamp |
| CN207994330U (en) * | 2018-03-19 | 2018-10-19 | 山东华光光电子股份有限公司 | A kind of optical fiber rack mounting clamp |
| CN209157956U (en) * | 2018-11-08 | 2019-07-26 | 北京市电信工程局有限公司 | A kind of handling arrangement of end head of optical fiber |
| CN211339675U (en) * | 2019-12-30 | 2020-08-25 | 浙江工业大学 | Fiber end face coating device in magnetron sputtering |
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