CN110890298A - High-efficient double-end solid brilliant device - Google Patents
High-efficient double-end solid brilliant device Download PDFInfo
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- CN110890298A CN110890298A CN201911292056.8A CN201911292056A CN110890298A CN 110890298 A CN110890298 A CN 110890298A CN 201911292056 A CN201911292056 A CN 201911292056A CN 110890298 A CN110890298 A CN 110890298A
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- 239000007787 solid Substances 0.000 title claims description 8
- 230000007246 mechanism Effects 0.000 claims abstract description 45
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 21
- 239000010439 graphite Substances 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 5
- 238000005538 encapsulation Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 4
- 230000005012 migration Effects 0.000 claims description 3
- 238000013508 migration Methods 0.000 claims description 3
- 230000009977 dual effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000009323 psychological health Effects 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000004630 mental health Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000035479 physiological effects, processes and functions Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Die Bonding (AREA)
Abstract
The invention provides a high-efficiency double-head die bonder which comprises a die expansion disc and a workbench, and further comprises a throwing arm, a conveying rail, a material receiving mechanism and a throwing arm driving mechanism, wherein the workbench is slidably mounted on the conveying rail through a workbench adjusting mechanism, the throwing arm driving mechanism can drive the throwing arm to move between the die expansion disc and the workbench, a die on a die blue film is taken out and mounted on a material sheet in a graphite disc, the workbench is slidably arranged on the conveying rail, the die taking, die bonding and material receiving work can be efficiently carried out, the position accuracy of the die taking and die bonding is high, two throwing arms are driven by a rotary table to rotate, the first throwing arm carries out die bonding operation, and the second throwing arm carries out die taking operation, so that the production efficiency is further improved, the production cost is reduced, and the noise generated by a vertical adjusting mechanism of an eccentric wheel and a supporting shaft is low, the damage to physical and psychological health of operators caused by overlarge noise is avoided.
Description
Technical Field
The invention relates to the field of electronic element manufacturing, in particular to a high-efficiency double-head die bonder.
Background
At the encapsulation of blue membrane wafer solid brilliant in-process, take out the wafer from blue membrane through getting rid of the arm and install on the tablet of graphite plate, generally divide into and get the brilliant, gu brilliant and receipts material multichannel process, generally through the mode of artificial suction cup among the prior art, but the efficiency of this kind of method is not high, the cost of labor is higher, in addition through getting rid of the automatic mode that snatchs of arm, on picking up the graphite plate with blue epimembranal wafer of rotation through getting rid of the arm, among the prior art, generally mostly singly get rid of the arm structure, this kind of mode is compared in the artificial mode and is promoted limitedly, and the noise that current get rid of the arm structure and produce is great, cause certain influence to the physical and mental health of operator.
Disclosure of Invention
The invention aims to solve the technical problems that in the prior art, the mode of an artificial sucker and a single swing arm structure is low in efficiency and high in cost, and simultaneously, the generated noise is high, and certain influence is caused on physical and psychological health of operators.
The technical scheme adopted by the invention for solving the technical problems is as follows: a high-efficiency double-head die bonder comprises a die expansion disc, a die bonding disc and a die bonding pad, wherein the die expansion disc is used for placing a die blue film to be packaged; the workbench is used for placing a graphite disc, and a material sheet to be packaged is placed in the graphite disc; the high-efficiency double-end die bonder further comprises a throwing arm, a conveying rail, a material receiving mechanism and a throwing arm driving mechanism, wherein the conveying rail is arranged on a fixed bottom plate, the workbench is slidably mounted on the conveying rail through a workbench adjusting mechanism, the throwing arm driving mechanism can drive the throwing arm to move between a die expanding disc and the workbench, and the dies on the die blue film are taken out and mounted on material sheets in the graphite disc, and the material receiving mechanism is arranged on the bottom plate and used for taking out the packaged graphite disc from the workbench.
Further: the number of the swing arms is two, the two swing arms are respectively a first swing arm and a second swing arm, the swing arm driving mechanism comprises a rotary table and a first driving motor, the first swing arm and the second swing arm are symmetrically arranged on the left side and the right side of the rotary table, the first driving motor is arranged on a fixed frame, an output shaft of the first driving motor is fixedly connected with the rotary table and can drive the rotary table to rotate so as to adjust the positions of the first swing arm and the second swing arm in the rotating direction, the swing arm driving mechanism further comprises a first vertical adjusting unit and a second vertical adjusting unit, the first swing arm is movably arranged on the rotary table through the first vertical adjusting unit, the first vertical adjusting unit can drive the first swing arm to move in the vertical direction, and the second swing arm is movably arranged on the rotary table through the second vertical adjusting unit, the second vertical adjustment unit may drive the second swing arm to move in a vertical direction.
Further: the first vertical adjusting unit comprises a supporting shaft, a first connecting rod, a first guide rail and a first sliding block, the first guide rail is arranged on the rotary table along the vertical direction, the first sliding block is arranged on the first guide rail in a sliding mode and is fixedly connected with the first swing arm, the supporting shaft is movably mounted on the rotary table along the vertical direction, the bottom of the supporting shaft is rotatably connected with one end of the first connecting rod, the other end of the first connecting rod is fixedly connected with the first sliding block, and the supporting shaft can drive the first swing arm to move up and down by moving up and down; the first vertical adjusting unit further comprises a second connecting rod, a first crank, a first eccentric wheel and a second driving motor, the second driving motor is fixedly arranged on the rack, an output shaft of the second driving motor is fixedly connected with the first eccentric wheel, one end of the first crank is hinged to the first eccentric wheel, the other end of the first crank is hinged to one end of the second connecting rod, the other end of the second connecting rod is rotatably connected with the top of the supporting shaft, and the first eccentric wheel is driven by the second driving motor to rotate to drive the supporting shaft to move up and down.
Further: the second vertical adjusting unit comprises a connecting shaft, a third connecting rod, a second guide rail and a second sliding block, a mounting hole is formed in the supporting shaft, the connecting shaft is inserted into the mounting hole from top to bottom and can move up and down along the axial direction of the mounting hole, the second guide rail is arranged on the rotary table along the vertical direction, the second sliding block is arranged on the second guide rail in a sliding mode and is fixedly connected with the second swing arm, the bottom of the supporting shaft is rotatably connected with one end of the third connecting rod, the other end of the third connecting rod is fixedly connected with the second sliding block, and the second swing arm can be driven to move up and down by the up and down movement of the connecting shaft; the second vertical adjusting mechanism further comprises a fourth connecting rod, a second crank, a second eccentric wheel and a third driving motor, the third driving motor is fixedly arranged on the rack, an output shaft of the third driving motor is fixedly connected with the second eccentric wheel, one end of the second crank is hinged to the second eccentric wheel, the other end of the second crank is hinged to one end of the fourth connecting rod, the other end of the fourth connecting rod is rotatably connected with the top of the connecting shaft, and the second eccentric wheel is driven by the third driving motor to rotate to drive the connecting shaft to move up and down so as to drive the second swing arm to move up and down.
Further: the material receiving mechanism comprises a connecting plate and a suction nozzle arranged on the connecting plate, and the suction nozzle can adsorb and lift the graphite plate on the workbench; receiving agencies still includes the drive wheel, follows driving wheel, fourth driving motor, third slider, third guide rail and first linear electric motor, the drive wheel with follow the driving wheel setting and be in the frame and connect through the hold-in range, fourth driving motor sets up in the frame, fourth driving motor's drive shaft with the drive wheel is connected, the third guide rail is fixed to be set up in the frame and be on a parallel with the hold-in range sets up, the third slider with hold-in range fixed connection can follow the third guide rail removes, first linear electric motor's slide rail sets up along vertical direction, and with third slider fixed connection, first linear electric motor's mobile sub-seat with connecting plate fixed connection, first linear electric motor work can drive the connecting plate reciprocates.
Further: workstation adjustment mechanism includes second linear electric motor and third linear electric motor, second linear electric motor sets up carry the rail on and can follow carry rail horizontal migration, third linear electric motor's slide rail is fixed to be set up along the horizontal direction on the rotor seat of second linear electric motor, and the perpendicular to carry the rail setting, third linear electric motor's rotor seat upper end fixed connection the workstation.
Further: and a ball retainer is arranged in the mounting hole, and the inner wall of the ball retainer is attached to the outer wall of the connecting shaft.
The efficient double-head die bonder has the advantages that the workbench is arranged on the conveying rail in a sliding mode, die taking, die bonding and material receiving can be efficiently carried out, the position accuracy of the die taking and die bonding is high, the two swing arms are driven to rotate through the rotary table, the first swing arm carries out die bonding operation, and the second swing arm carries out die taking operation at the same time, so that the production efficiency is further improved, the production cost is reduced, meanwhile, noise generated by the eccentric wheel and the vertical adjusting mechanism of the supporting shaft is low, and damage to physical and mental health of operators caused by overlarge noise is avoided.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of a high-efficiency dual-head die bonder according to the present invention;
FIG. 2 is a schematic structural view of a swing arm drive mechanism;
FIG. 3 is a cross-sectional view of the swing arm drive mechanism;
FIG. 4 is a schematic structural view of the receiving mechanism;
FIG. 5 is a schematic view of the structure of the adjustment mechanism of the table;
fig. 6 is an enlarged view of a in fig. 3.
In the figure, 1, a wafer expanding disc, 2, a workbench, 3, a conveying rail, 4, a bottom plate, 5, a first swing arm, 6, a second swing arm, 7, a rotary table, 8, a first driving motor, 9, a frame, 10, a supporting shaft, 11, a first connecting rod, 12, a first guide rail, 13, a first sliding block, 14, a second connecting rod, 15, a first crank, 16, a first eccentric wheel, 17, a second driving motor, 20, a connecting shaft and 21, a third connecting rod 22, a second guide rail 23, a second sliding block 24, a fourth connecting rod 25, a second crank 26, a second eccentric wheel 27, a third driving motor 28, a ball retainer 30, a connecting plate 31, a suction nozzle 32, a driving wheel 33, a driven wheel 34, a fourth driving motor 35, a third sliding block 36, a third guide rail 37, a first linear motor 40, a second linear motor 41 and a third linear motor.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention. On the contrary, the embodiments of the invention include all changes, modifications and equivalents coming within the spirit and terms of the claims appended hereto.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and alternate implementations are included within the scope of the preferred embodiment of the present invention in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present invention.
As shown in fig. 1, the present invention provides an efficient dual-head die bonder, which comprises a die expansion disc 1 for placing a die blue film to be packaged; the workbench 2 is used for placing a graphite disc, and a material sheet to be packaged is placed in the graphite disc; high-efficient double-end solid brilliant device is still including getting rid of the arm, carrying rail 3, receiving agencies and getting rid of arm actuating mechanism, carry rail 3 to set up on fixed bottom plate 4, workstation 2 through workstation adjustment mechanism slidable mounting be in on carrying rail 3, get rid of arm actuating mechanism and can drive get rid of the arm and move between expanding brilliant dish 1 and workstation 2, and will the wafer on the blue membrane of wafer takes out and installs on the tablet in the graphite dish, receiving agencies sets up on the bottom plate 4 for take out the graphite dish that the encapsulation finishes from workstation 2.
During operation, workstation adjustment mechanism drive table 2 moves to the moving range who gets rid of the arm along carrying rail 3, gets rid of the arm drive and gets rid of the arm and will expand on the wafer of brilliant dish 1 installs the material piece on workstation 2, and then accomplishes solid brilliant work, then workstation adjustment mechanism drive table 2 moves to receiving agencies along carrying rail 3 department, and receiving agencies takes out the graphite plate that the encapsulation was accomplished from workstation 2.
Referring to fig. 2 and 3, the number of the swing arms is two, the two swing arms are respectively a first swing arm 5 and a second swing arm 6, the swing arm driving mechanism includes a rotary table 7 and a first driving motor 8, the first swing arm 5 and the second swing arm 6 are symmetrically disposed on the left and right sides of the rotary table 7, the first driving motor 8 is disposed on a fixed frame 9, an output shaft of the first driving motor 8 is fixedly connected to the rotary table 7 and can drive the rotary table 7 to rotate so as to adjust the positions of the first swing arm 5 and the second swing arm 6 in the rotation direction, the swing arm driving mechanism further includes a first vertical adjusting unit and a second vertical adjusting unit, the first swing arm 5 is movably disposed on the rotary table 7 through the first vertical adjusting unit, and the first vertical adjusting unit can drive the first swing arm 5 to move in the vertical direction, the second swing arm 6 is movably arranged on the rotary table 7 through the second vertical adjusting unit, and the second vertical adjusting unit can drive the second swing arm 6 to move along the vertical direction.
During operation, first driving motor 8 drive revolving stage 7 rotates, adjust first arm 5 that gets rid of to expanding brilliant dish 1 position, first vertical adjustment mechanism drive is first get rid of the arm 5 and is removed along vertical direction and get brilliant operation, then first driving motor 8 drives revolving stage 7 again and rotates, adjust first arm 5 that gets rid of to workstation 2 positions, first vertical adjustment mechanism drive is first get rid of arm 5 and removes along vertical direction and carry out solid brilliant operation, simultaneously, the second gets rid of arm 6 and is adjusted to expanding brilliant dish 1 position, the vertical adjustment mechanism drive second of second gets rid of arm 6 and removes along vertical direction and get brilliant operation, and then it gets brilliant fixed purpose to have reached the double-end high efficiency.
As shown in fig. 6, the first vertical adjusting unit includes a supporting shaft 10, a first connecting rod 11, a first guide rail 12 and a first slider 13, the first guide rail 12 is vertically disposed on the turntable 7, the first slider 13 is slidably disposed on the first guide rail 12 and is fixedly connected to the first swing arm 5, the supporting shaft 10 is movably mounted on the turntable 7 along the vertical direction, the bottom of the supporting shaft 10 is rotatably connected to one end of the first connecting rod 11, the other end of the first connecting rod 11 is fixedly connected to the first slider 13, and the supporting shaft 10 moves up and down to drive the first swing arm 5 to move up and down; the first vertical adjusting unit further comprises a second connecting rod 14, a first crank 15, a first eccentric wheel 16 and a second driving motor 17, the second driving motor 17 is fixedly arranged on the rack 9, an output shaft of the second driving motor 17 is fixedly connected with the first eccentric wheel 16, one end of the first crank 15 is hinged to the first eccentric wheel 16, the other end of the first crank 15 is hinged to one end of the second connecting rod 14, the other end of the second connecting rod 14 is rotatably connected with the top of the supporting shaft 10, and the first eccentric wheel 16 is driven by the second driving motor 17 to rotate to drive the supporting shaft 10 to move up and down.
The second vertical adjusting unit comprises a connecting shaft 20, a third connecting rod 21, a second guide rail 22 and a second sliding block 23, a mounting hole is formed in the supporting shaft 10, the connecting shaft 20 is inserted into the mounting hole from top to bottom and can move up and down along the axial direction of the mounting hole, the second guide rail 22 is arranged on the rotary table 7 along the vertical direction, the second sliding block 23 is arranged on the second guide rail 22 in a sliding mode and is fixedly connected with the second swing arm 6, the bottom of the supporting shaft 10 is rotatably connected with one end of the third connecting rod 21, the other end of the third connecting rod 21 is fixedly connected with the second sliding block 23, and the connecting shaft 20 can drive the second swing arm 6 to move up and down by moving up and down; the second vertical adjusting mechanism further comprises a fourth connecting rod 24, a second crank 25, a second eccentric wheel 26 and a third driving motor 27, the third driving motor 27 is fixedly arranged on the frame 9, an output shaft of the third driving motor 27 is fixedly connected with the second eccentric wheel 26, one end of the second crank 25 is hinged to the second eccentric wheel 26, the other end of the second crank 25 is hinged to one end of the fourth connecting rod 24, the other end of the fourth connecting rod is rotatably connected with the top of the connecting shaft 20, and the second eccentric wheel 26 is driven by the third driving motor 27 to rotate to drive the connecting shaft 20 to move up and down so as to drive the second swing arm 6 to move up and down.
The supporting shaft 10 is driven to move up and down through the rotation of the first eccentric wheel 16 so as to drive the first throwing arm 5 to carry out crystal taking and crystal fixing operation; meanwhile, the second eccentric wheel 26 rotates to drive the connecting shaft 20 to move up and down so as to drive the second swing arm 6 to carry out crystal taking and crystal fixing operations, the driving mode of the eccentric wheel has better position repeatability, and meanwhile, the noise generated by the adjusting mode is smaller, so that the harm of overlarge noise to the physiology and psychology of operators is avoided. The adjusting precision is high in a mode that the driving motor rotates to drive the eccentric wheel to rotate, and the moving parameters of the swing arm in the vertical direction can be accurately controlled by controlling the rotation quantity of the driving motor, so that the accurate control of the position of the swing arm in the vertical direction can be realized.
As shown in fig. 4, the material receiving mechanism includes a connecting plate 30 and a suction nozzle 31 disposed on the connecting plate 30, and the suction nozzle 31 can suck and lift the graphite plate on the worktable 2; the material receiving mechanism also comprises a driving wheel 32, a driven wheel 33, a fourth driving motor 34, a third slide block 35, a third guide rail 36 and a first linear motor 37, the driving pulley 32 and the driven pulley 33 are provided on the frame 9 and connected by a timing belt, the fourth driving motor 34 is disposed on the frame 9, a driving shaft of the fourth driving motor 34 is connected with the driving wheel 32, the third guide rail 36 is fixedly arranged on the frame 9 and is arranged parallel to the synchronous belt, the third sliding block 35 is fixedly connected with the synchronous belt and can move along the third guide rail 36, the sliding rail of the first linear motor 37 is arranged along the vertical direction, and is fixedly connected with the third slider 35, a rotor base of the first linear motor 37 is fixedly connected with the connecting plate 30, and the first linear motor 37 can drive the connecting plate 30 to move up and down when working.
The fourth driving motor 34 drives the connecting plate 30 to move in the horizontal direction in a rotating mode, the adjusting precision of the adjusting mode is high, the vertical adjusting distance of the connecting plate 30 is driven by the first linear motor 37, the adjusting mechanism has good self-locking capacity, the position of the current vertical direction can be effectively kept, the occurrence of displacement in the vertical direction is avoided, and the suction nozzle 31 is influenced to adsorb a graphite plate.
Combine fig. 5 to show, workstation adjustment mechanism includes second linear electric motor 40 and third linear electric motor 41, second linear electric motor 40 sets up carry 3 last and can follow of rail 3 horizontal migration, third linear electric motor 41's slide rail is fixed to be set up along the horizontal direction on the mobile sub-seat of second linear electric motor 40, and the perpendicular to carry 3 settings of rail, third linear electric motor 41's mobile sub-seat upper end fixed connection workstation 2, through the cooperation of second linear electric motor 40 and third linear electric motor 41, can make the graphite plate on the workstation 2 remove the motion range who gets rid of arm and suction nozzle 31 in, be convenient for get rid of the arm and carry out solid brilliant work, the suction nozzle 31 of being convenient for simultaneously receives material work.
The ball retainer 28 is arranged in the mounting hole, the inner wall of the ball retainer 28 is attached to the outer wall of the connecting shaft 20, on one hand, the ball retainer 28 can support the connecting shaft 20 in the radial direction, so that the connecting shaft 20 is prevented from being mutually dry and dry with the supporting shaft 10 due to deflection, shaking and the like, the rigidity and stability of the connecting shaft 20 are improved, the bearing capacity of the connecting shaft is greatly improved, meanwhile, the balls on the ball retainer 28 provide enough freedom for the connecting shaft 20, and the connecting shaft 20 can smoothly move up and down in the vertical direction.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic representation of the term does not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (7)
1. A high-efficiency double-head die bonder comprises
The wafer expanding disc (1) is used for placing a wafer blue film to be packaged;
the workbench (2) is used for placing a graphite disc, and a material sheet to be packaged is placed in the graphite disc;
the method is characterized in that: high-efficient double-end solid brilliant device is still including getting rid of the arm, carrying rail (3), receiving agencies and getting rid of arm actuating mechanism, carry rail (3) to set up on fixed bottom plate (4), workstation (2) through workstation adjustment mechanism slidable mounting be in carry on rail (3), get rid of arm actuating mechanism and can drive get rid of the arm and remove between expanding brilliant dish (1) and workstation (2), and will the last wafer of wafer blue membrane takes out and installs on the tablet in the graphite dish, receiving agencies sets up on bottom plate (4) for take out the graphite dish that finishes with the encapsulation from workstation (2).
2. The high-efficiency double-head die bonding device as claimed in claim 1, wherein: the number of the swing arms is two, the two swing arms are respectively a first swing arm (5) and a second swing arm (6), the swing arm driving mechanism comprises a rotary table (7) and a first driving motor (8), the first swing arm (5) and the second swing arm (6) are symmetrically arranged on the left side and the right side of the rotary table (7), the first driving motor (8) is arranged on a fixed rack (9), an output shaft of the first driving motor (8) is fixedly connected with the rotary table (7) and can drive the rotary table (7) to rotate so as to adjust the positions of the first swing arm (5) and the second swing arm (6) in the rotating direction, the swing arm driving mechanism further comprises a first vertical adjusting unit and a second vertical adjusting unit, the first swing arm (5) is movably arranged on the rotary table (7) through the first vertical adjusting unit, the first vertical adjusting unit can drive the first throwing arm (5) to move in the vertical direction, the second throwing arm (6) is movably arranged on the rotary table (7) through the second vertical adjusting unit, and the second vertical adjusting unit can drive the second throwing arm (6) to move in the vertical direction.
3. The high-efficiency double-head die bonding device as claimed in claim 2, wherein: the first vertical adjusting unit comprises a supporting shaft (10), a first connecting rod (11), a first guide rail (12) and a first sliding block (13), the first guide rail (12) is arranged on the rotary table (7) along the vertical direction, the first sliding block (13) is arranged on the first guide rail (12) in a sliding mode and is fixedly connected with the first swing arm (5), the supporting shaft (10) is movably mounted on the rotary table (7) along the vertical direction, the bottom of the supporting shaft (10) is rotatably connected with one end of the first connecting rod (11), the other end of the first connecting rod (11) is fixedly connected with the first sliding block (13), and the supporting shaft (10) can drive the first swing arm (5) to move up and down due to the up and down movement; the first vertical adjusting unit further comprises a second connecting rod (14), a first crank (15), a first eccentric wheel (16) and a second driving motor (17), the second driving motor (17) is fixedly arranged on the rack (9), an output shaft of the second driving motor (17) is fixedly connected with the first eccentric wheel (16), one end of the first crank (15) is hinged to the first eccentric wheel (16), the other end of the first crank (15) is hinged to one end of the second connecting rod (14), the other end of the second connecting rod (14) is rotatably connected with the top of the supporting shaft (10), and the first eccentric wheel (16) is driven by the second driving motor (17) to rotate to drive the supporting shaft (10) to move up and down.
4. A high efficiency dual head die bonder as claimed in claim 3 wherein: the second vertical adjusting unit comprises a connecting shaft (20), a third connecting rod (21), a second guide rail (22) and a second sliding block (23), a mounting hole is formed in the supporting shaft (10), the connecting shaft (20) is inserted into the mounting hole from top to bottom and can move up and down along the axial direction of the mounting hole, the second guide rail (22) is arranged on the rotary table (7) along the vertical direction, the second sliding block (23) is arranged on the second guide rail (22) in a sliding mode and is fixedly connected with the second swing arm (6), the bottom of the supporting shaft (10) is rotatably connected with one end of the third connecting rod (21), the other end of the third connecting rod (21) is fixedly connected with the second sliding block (23), and the connecting shaft (20) can move up and down to drive the second swing arm (6) to move up and down; the second vertical adjusting mechanism further comprises a fourth connecting rod (24), a second crank (25), a second eccentric wheel (26) and a third driving motor (27), the third driving motor (27) is fixedly arranged on the rack (9), an output shaft of the third driving motor (27) is fixedly connected with the second eccentric wheel (26), one end of the second crank (25) is hinged to the second eccentric wheel (26), the other end of the second crank (25) is hinged to one end of the fourth connecting rod (24), the other end of the fourth connecting rod is rotatably connected with the top of the connecting shaft (20), and the second eccentric wheel (26) is driven by the third driving motor (27) to rotate to drive the connecting shaft (20) to move up and down so as to drive the second swing arm (6) to move up and down.
5. The high-efficiency double-head die bonding device as claimed in claim 1, wherein: the receiving mechanism comprises a connecting plate (30) and a suction nozzle (31) arranged on the connecting plate (30), and the suction nozzle (31) can adsorb and lift the graphite plate on the workbench (2); the receiving mechanism further comprises a driving wheel (32), a driven wheel (33), a fourth driving motor (34), a third sliding block (35), a third guide rail (36) and a first linear motor (37), the driving wheel (32) and the driven wheel (33) are arranged on the rack (9) and connected through a synchronous belt, the fourth driving motor (34) is arranged on the rack (9), a driving shaft of the fourth driving motor (34) is connected with the driving wheel (32), the third guide rail (36) is fixedly arranged on the rack (9) and parallel to the synchronous belt, the third sliding block (35) is fixedly connected with the synchronous belt and can move along the third guide rail (36), a sliding rail of the first linear motor (37) is arranged along the vertical direction and is fixedly connected with the third sliding block (35), a movable sub-seat of the first linear motor (37) is fixedly connected with the connecting plate (30), the first linear motor (37) works to drive the connecting plate (30) to move up and down.
6. The high-efficiency double-head die bonding device as claimed in claim 1, wherein: workstation adjustment mechanism includes second linear electric motor (40) and third linear electric motor (41), second linear electric motor (40) set up carry on rail (3) and can follow carry rail (3) horizontal migration, the slide rail of third linear electric motor (41) is fixed to be set up along the horizontal direction on the active cell seat of second linear electric motor (40), and the perpendicular to carry rail (3) to set up, the active cell seat upper end fixed connection of third linear electric motor (41) workstation (2).
7. The swing arm driving mechanism of the high-efficiency double-head die bonder as claimed in claim 4, wherein: and a ball retainer (28) is arranged in the mounting hole, and the inner wall of the ball retainer (28) is attached to the outer wall of the connecting shaft (20).
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| CN201911292056.8A CN110890298B (en) | 2019-12-16 | 2019-12-16 | High-efficient double-end die bonding device |
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| CN201911292056.8A CN110890298B (en) | 2019-12-16 | 2019-12-16 | High-efficient double-end die bonding device |
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| CN110890298B CN110890298B (en) | 2024-06-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115360127A (en) * | 2022-10-19 | 2022-11-18 | 江苏新智达新能源设备有限公司 | Double-head driving device of DieBond process |
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|---|---|
| CN110890298B (en) | 2024-06-28 |
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