CN110876221A - Plasma temperature distribution measuring system - Google Patents
Plasma temperature distribution measuring system Download PDFInfo
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- CN110876221A CN110876221A CN201810997486.9A CN201810997486A CN110876221A CN 110876221 A CN110876221 A CN 110876221A CN 201810997486 A CN201810997486 A CN 201810997486A CN 110876221 A CN110876221 A CN 110876221A
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- 239000000463 material Substances 0.000 claims abstract description 24
- 238000005259 measurement Methods 0.000 claims abstract description 21
- 230000000903 blocking effect Effects 0.000 claims abstract description 19
- 238000009413 insulation Methods 0.000 claims abstract description 10
- 230000005540 biological transmission Effects 0.000 claims abstract description 6
- 230000004888 barrier function Effects 0.000 claims description 29
- 239000000203 mixture Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 7
- 210000002381 plasma Anatomy 0.000 description 69
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
- H05H1/0043—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using infrared or ultraviolet radiation
Abstract
The invention relates to the technical field of plasma, in particular to a plasma temperature distribution measuring system. The system comprises: the plasma generation module comprises a positive electrode, a negative electrode and an insulation blocking medium, wherein the positive electrode and the negative electrode are oppositely arranged, the insulation blocking medium is arranged between the positive electrode and the negative electrode at intervals, the insulation blocking medium is formed into a cavity with an opening on one side, and at least one side surface of the other side surfaces of the cavity is blocked by an infrared transmission blocking material; and the infrared measurement module is arranged at a position which is separated from one side surface of the cavity blocked by the infrared transmission blocking material by a preset distance and is used for measuring the infrared distribution of the plasma generated in the cavity so as to measure the temperature distribution of the plasma. The plasma temperature distribution measuring system can measure the temperature distribution of plasma by measuring the infrared distribution of plasma, thereby enabling nondestructive and accurate temperature distribution measurement.
Description
Technical Field
The invention relates to the technical field of plasma, in particular to a plasma temperature distribution measuring system.
Background
Plasma is the fourth form of matter, and gas discharge is the main form of plasma generation in scientific research and practical applications. Because the plasma is in a highly ionized state and in a complex electromagnetic coupling state, the temperature parameters of substances in the plasma form are extremely difficult to perform nondestructive, accurate and effective measurement, for example, when an invasive measurement method is adopted, once a sensor probe enters a plasma region, disturbance is generated on the plasma form, the plasma state parameters near the probe become good, and inaccurate and unreal measurement is caused. In addition, under the condition of high-voltage discharge, the sensor is often damaged by invasive measurement, and the invasive measurement is not easy to realize. The non-contact measurement is often only capable of measuring the surface temperature of the plasma generator shell, and it is difficult to measure the internal temperature distribution of the plasma.
The temperature parameter is very important parameter data for performance characterization, material selection, structural design and the like of the plasma generator, so that a technology capable of accurately measuring the temperature distribution of the plasma is lacked in the prior art.
Disclosure of Invention
An object of an embodiment of the present invention is to provide a plasma temperature distribution measuring system capable of measuring a temperature distribution of a plasma by measuring an infrared distribution of the plasma, thereby enabling a nondestructive and accurate temperature distribution measurement.
In order to achieve the above object, an embodiment of the present invention provides a plasma temperature distribution measuring system, including: the plasma generation module comprises a positive electrode, a negative electrode and an insulation blocking medium, wherein the positive electrode and the negative electrode are oppositely arranged, the insulation blocking medium is arranged between the positive electrode and the negative electrode at intervals, the insulation blocking medium is formed into a cavity with an opening on one side, and at least one side surface of the other side surfaces of the cavity is blocked by an infrared transmission blocking material; and the infrared measurement module is arranged at a position which is separated from one side surface of the cavity blocked by the infrared transmission blocking material by a preset distance and is used for measuring the infrared distribution of the plasma generated in the cavity so as to measure the temperature distribution of the plasma.
Wherein the system may further comprise a gas source module that supplies a gas of a specific composition into the chamber at a predetermined flow rate.
Wherein the positive electrode and the negative electrode are both hollow and arranged in a coaxial form, and the positive electrode serves as an inner electrode and the negative electrode serves as an outer electrode.
Wherein the positive electrode and the negative electrode are both hollow and arranged in a coaxial form, and the positive electrode is an inner electrode, the negative electrode is an outer electrode, the inner electrode has a through hole formed along a circumference, the gas source module is connected to the inner electrode to supply the gas of the specific composition into the inner electrode, and the gas of the specific composition enters the cavity through the through hole.
Wherein the through hole is formed at a position of the inner electrode away from the opening side of the cavity.
The insulating barrier medium is preferably formed in a cylindrical shape, the outer electrode is arranged on the outer side of the insulating barrier medium, the inner electrode is arranged inside the insulating barrier medium, the infrared transmitting material blocks one end of the insulating barrier medium, and the outer electrode, the inner electrode and the insulating barrier medium are arranged in a coaxial mode.
Wherein the insulating barrier medium is preferably formed in a cylindrical shape, the positive electrode and the negative electrode are formed outside the insulating barrier medium and oppositely arranged, and the infrared transmitting material blocks one end of the insulating barrier medium.
Wherein, the infrared-transmitting material is preferably infrared-transmitting glass.
The infrared thermal imager is preferably used as the red line measuring module.
Wherein the plasma generation module is preferably a coaxial plasma generator.
Through the technical scheme, the temperature distribution of the plasma can be measured by measuring the infrared distribution of the plasma generated in the cavity, so that the plasma is not interfered in the measuring process, the plasma can be measured in situ, the temperature loss caused by the measuring process is avoided, and the accurate measurement of the plasma temperature can be realized.
Additional features and advantages of embodiments of the invention will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the embodiments of the invention without limiting the embodiments of the invention. In the drawings:
FIG. 1 is a block diagram of a plasma temperature distribution measurement system according to an embodiment of the present invention; and
fig. 2 is a block diagram of a plasma temperature distribution measuring system according to another embodiment of the present invention.
Description of the reference numerals
A: positive electrode B: negative electrode
1: and (3) gas source 2: valve gate
3: and a flow control meter 4: trachea
5: gas circuit interface 6: inner electrode
7: the barrier medium 8: external electrode
9: the high-voltage power supply 10: high voltage power supply
11: through-hole 12: infrared-transmitting plugging material
13: thermal infrared imager 14: cavity body
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating embodiments of the invention, are given by way of illustration and explanation only, not limitation.
FIG. 1 is a block diagram of a plasma temperature distribution measurement system according to an embodiment of the present invention; fig. 2 is a block diagram of a plasma temperature distribution measuring system according to another embodiment of the present invention.
The plasma temperature distribution measuring system of an embodiment of the present invention includes: the plasma generation module comprises a positive electrode A, a negative electrode B and an insulating barrier medium 7, wherein the positive electrode A and the negative electrode B are oppositely arranged, the insulating barrier medium 7 is arranged between the positive electrode A and the negative electrode B at intervals, the insulating barrier medium is formed into a cavity 14 with an opening on one side, and at least one side surface of the other side surfaces of the cavity is blocked by an infrared-transmitting blocking material 12; and an infrared measurement module 13 disposed at a position spaced apart from a side of the cavity 14 blocked with the infrared transmitting blocking material 7 by a predetermined distance, for measuring an infrared distribution of plasma generated in the cavity 14, thereby measuring a temperature distribution of the plasma.
The infrared transmissive blocking material 12 can be any material that is transparent to infrared radiation and is preferably infrared transmissive glass, thereby not only measuring the plasma temperature distribution within the chamber, but also providing a transparent viewing window.
The infrared measurement module may be, for example, an infrared measurement instrument, or any device capable of performing infrared measurement.
The open side of the cavity 14 may be formed to be completely open as shown in fig. 1 and 2 or partially open.
As shown in fig. 1, the insulating barrier medium 7 is formed in a cylindrical shape, the positive electrode a and the negative electrode B are formed on the outer side surface of the insulating barrier medium 7 and are oppositely arranged, and the infrared transmitting material 12 blocks one end of the insulating barrier medium. The positive electrode a and the negative electrode B may be formed in a plate shape, or may be formed in other shapes such as a circular arc shape.
In another embodiment, as shown in fig. 2, the positive electrode and the negative electrode are both hollow and arranged in a coaxial fashion, with the positive electrode serving as the inner electrode 6 and the negative electrode serving as the outer electrode 8. The inner electrode 6 is arranged inside the insulating barrier medium 7, the infrared transmitting material blocks one end of the insulating barrier medium, and the outer electrode 8, the inner electrode 6 and the insulating barrier medium 7 are arranged in a coaxial form.
Furthermore, although fig. 1 and 2 show the case where the insulating plug material is located at the end of the cavity 14, the insulating plug material may be formed at any position within the cavity.
With the above embodiment, when the positive electrode and the negative electrode are connected to the high voltage power supply 10, the plasma 9 is formed in the cavity 14, the end of the cavity 14 having the opening can discharge the gas in the cavity from the opening, and the infrared measurement module 13 can measure the infrared distribution of the plasma 9 through the infrared-transmitting blocking material 12, so as to measure the temperature distribution of the plasma.
The infrared-transmitting plugging material is adopted to isolate the discharge plasma region inside the plasma generator from the outside, so that the internal high voltage and the outside are isolated in an electric insulation manner, the high voltage is prevented from interfering and damaging a measuring instrument, the discharge plasma is isolated from the external environment, and the plasma state is prevented from being influenced by the external environment.
In addition, the system may further include a gas source module that supplies a gas of a specific composition into the chamber at a predetermined flow rate. As shown in fig. 2, the gas source module may include a gas source 1, a valve 2, a flow rate controller 3, and a gas path interface, wherein the gas source 1 contains a gas of a predetermined composition, and the gas is connected to the inner electrode 6 through the gas path interface so as to be supplied into the inner electrode. In order to allow the gas in the inner electrode to enter the cavity, through holes 11 are further formed at the periphery of the inner electrode to allow the gas to pass therethrough.
With the above embodiments, the plasma temperature measurement system of the present invention can also measure the temperature distribution when plasma is generated using a gas of a specific composition, and in addition, can measure the temperature distribution at different gas flow rates.
In a preferred embodiment, the through holes 11 are formed in the inner electrode 6 at a position away from the opening side of the chamber, so that the gas is sufficiently discharged to generate plasma before being discharged from the opening portion.
The plasma temperature distribution measuring system of the above embodiment is particularly suitable for a coaxial plasma generator, in which case the plasma generating module is a coaxial plasma generator.
Taking the case that the plasma generating module is the same plasma generator as an example, the process of measuring the temperature distribution of the plasma may include the steps of: firstly, fixing a coaxial discharge plasma generator to ensure that a central electrode (an inner electrode 6), a cylindrical barrier medium and an outer electrode are coaxially arranged, wherein the outer electrode is tightly attached to the outer surface of the barrier medium, so that infrared transmitting glass is tightly connected with a port of the cylindrical barrier medium, and a seam is sealed; secondly, connecting the central electrode to the high-voltage output end of the high-voltage power supply 10, grounding the outer electrode, and checking the reliability of electrical connection; thirdly, installing a gas path interface on the gas inlet side of the central electrode, connecting the gas path interface with a gas source through a gas pipe, a flowmeter and a valve, and checking the gas path connection tightness; fourthly, placing the thermal infrared imager on the other side of the infrared transmitting glass, and placing the lens and the plasma generator coaxially to ensure that the thermal infrared imager can observe the cross section state of the plasma generator; fifthly, opening a gas circuit valve, adjusting a flowmeter, and injecting gas of a gas source into the plasma generator through a gas hole in the central electrode at a certain flow rate; sixthly, turning on a high-voltage power supply, and adjusting voltage and frequency parameters until discharge plasma is generated; seventhly, opening the thermal infrared imager, and adjusting the distance between the lens and the infrared-transmitting glass or the focal length of the thermal infrared imager to enable the thermal infrared imager to observe a clear plasma radial temperature distribution image so as to realize the measurement of the plasma radial temperature distribution; and step eight, adjusting parameters such as gas components, flow rate, power supply voltage, frequency and the like of a gas source according to needs, and observing radial temperature distribution characteristics of the plasma under different conditions.
Firstly, one end of a designed plasma generator is blocked by flat-plate type infrared-transmitting glass, so that the plasma is effectively isolated from the environment and an infrared thermal imager, the plasma substance is prevented from being interfered by the outside and damaging a measuring instrument, and the infrared radiation characteristic of the plasma can be acquired by the infrared thermal imager without hindrance; secondly, the central electrode adopts a cylindrical metal electrode, and a plurality of air holes are designed at one end of the plug, so that air source gas can be introduced into the plasma generator to generate different types of plasmas, and the measuring system is suitable for measuring the discharge plasmas under various gas conditions.
Although the embodiments of the present invention have been described in detail with reference to the accompanying drawings, the embodiments of the present invention are not limited to the details of the above embodiments, and various simple modifications can be made to the technical solutions of the embodiments of the present invention within the technical idea of the embodiments of the present invention, and the simple modifications all belong to the protection scope of the embodiments of the present invention.
It should be noted that the various features described in the above embodiments may be combined in any suitable manner without departing from the scope of the invention. In order to avoid unnecessary repetition, the embodiments of the present invention do not describe every possible combination.
In addition, any combination of various different implementation manners of the embodiments of the present invention is also possible, and the embodiments of the present invention should be considered as disclosed in the embodiments of the present invention as long as the combination does not depart from the spirit of the embodiments of the present invention.
Claims (10)
1. A plasma temperature distribution measurement system, comprising:
the plasma generation module comprises a positive electrode, a negative electrode and an insulation blocking medium, wherein the positive electrode and the negative electrode are oppositely arranged, the insulation blocking medium is arranged between the positive electrode and the negative electrode at intervals, the insulation blocking medium is formed into a cavity with an opening on one side, and at least one side surface of the other side surfaces of the cavity is blocked by an infrared transmission blocking material; and
and the infrared measurement module is arranged at a position which is separated from one side surface of the cavity blocked by the infrared transmission blocking material by a preset distance and is used for measuring the infrared distribution of the plasma generated in the cavity so as to measure the temperature distribution of the plasma.
2. The system of claim 1, further comprising a gas source module that supplies a gas of a particular composition into the chamber at a predetermined flow rate.
3. The system of claim 1, wherein the positive electrode and the negative electrode are both hollow and arranged in a coaxial fashion with the positive electrode acting as an inner electrode and the negative electrode acting as an outer electrode.
4. The system of claim 2, wherein the positive electrode and the negative electrode are each hollow and arranged in a coaxial form, and the positive electrode serves as an inner electrode, the negative electrode serves as an outer electrode, the inner electrode has a through hole formed along a circumference, the gas source module is connected to the inner electrode to supply the gas of the specific composition into the inner electrode, and the gas of the specific composition enters the cavity through the through hole.
5. The system of claim 4, wherein the through-hole is formed at a location of the inner electrode away from the open side of the cavity.
6. The system according to any of claims 3-5, wherein the insulating barrier medium is formed in a cylindrical shape, the outer electrode is disposed outside the insulating barrier medium, the inner electrode is disposed inside the insulating barrier medium, the infrared transmitting material blocks one end of the insulating barrier medium, and the outer electrode, the inner electrode, and the insulating barrier medium are disposed in a coaxial form.
7. The system according to claim 1 or 2, wherein the insulating barrier medium is formed in a cylindrical shape, the positive electrode and the negative electrode are formed outside the insulating barrier medium and oppositely arranged, and the infrared transmitting material blocks one end of the insulating barrier medium.
8. The system of any one of claims 1-5, wherein the infrared-transmissive material is infrared-transmissive glass.
9. The system of any one of claims 1-5, wherein the red line measurement module is a thermal infrared imager.
10. The system of any one of claims 1-5, wherein the plasma generation module is a coaxial plasma generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810997486.9A CN110876221A (en) | 2018-08-29 | 2018-08-29 | Plasma temperature distribution measuring system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810997486.9A CN110876221A (en) | 2018-08-29 | 2018-08-29 | Plasma temperature distribution measuring system |
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| CN110876221A true CN110876221A (en) | 2020-03-10 |
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| CN201810997486.9A Pending CN110876221A (en) | 2018-08-29 | 2018-08-29 | Plasma temperature distribution measuring system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113747645A (en) * | 2021-09-09 | 2021-12-03 | 南京工业大学 | Flexible plasma source characteristic analysis system |
| CN114903558A (en) * | 2022-05-19 | 2022-08-16 | 杭州天路医疗器械有限公司 | Shock wave generating device for molding internal cavity |
| CN115790855A (en) * | 2023-02-08 | 2023-03-14 | 中国空气动力研究与发展中心低速空气动力研究所 | Device and method for measuring temperature field of dielectric barrier discharge plasma induced airflow |
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| CN102897892A (en) * | 2012-10-26 | 2013-01-30 | 清华大学 | Enhanced-type capillary-needle discharging plasma water treatment device |
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| CN114903558A (en) * | 2022-05-19 | 2022-08-16 | 杭州天路医疗器械有限公司 | Shock wave generating device for molding internal cavity |
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