CN110873640B - Electrostatic chuck performance detection device and detection method - Google Patents
Electrostatic chuck performance detection device and detection method Download PDFInfo
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- CN110873640B CN110873640B CN201810916692.2A CN201810916692A CN110873640B CN 110873640 B CN110873640 B CN 110873640B CN 201810916692 A CN201810916692 A CN 201810916692A CN 110873640 B CN110873640 B CN 110873640B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
Abstract
The invention discloses a device and a method for detecting the performance of an electrostatic chuck, and belongs to the field of electrostatic chuck performance detection. The performance detection device of the electrostatic chuck comprises a vacuum chamber and a test gas path, wherein the vacuum chamber is connected with a vacuum pump, an adapter plate is arranged in the vacuum chamber, the electrostatic chuck is arranged above the adapter plate, the upper surface of the electrostatic chuck is used for placing an adsorbed object, an adsorption gap exists between the electrostatic chuck and the adsorbed object, and a gas hole communicated with the test gas path is arranged in the centers of the electrostatic chuck and the adapter plate; the back blowing gas source, the gas mass flow meter and the vacuum gauge are sequentially arranged on the testing gas path, a first valve body is arranged between the back blowing gas source and the gas mass flow meter, and a second valve body is arranged between the gas mass flow meter and the vacuum gauge. The invention can ensure that the detection environment is consistent with the coating process environment of the ultrathin material, and the adsorbed object is stressed at the center of the detection environment, and the electrostatic chuck adsorption performance judged by the method is more accurate.
Description
Technical Field
The invention relates to the field of electrostatic chuck performance detection, in particular to an electrostatic chuck performance detection device and method.
Background
The electrostatic chuck product for adsorbing ultrathin materials is mainly used for laser cutting and surface coating processes of liquid crystal panels, ultrathin glass or other thin film materials, and a surface adsorption layer of the electrostatic chuck product can be prepared from polyimide or ceramic materials. The inside electrode that sets up of adsorbed layer cooperates dedicated electrostatic power source to produce the electrostatic adsorption effect. The whole adsorption layer containing the electrode is bonded or hot-pressed on the metal substrate, and then assembled with the relevant process equipment. According to different process requirements, designers can also set special structures such as air holes or air passages and the like on the surfaces of the electrostatic chuck products.
At present, a commonly used performance detection method for an electrostatic chuck product adsorbing ultrathin materials is a pulling-up method, as shown in fig. 1, an electrostatic chuck 1 is fixed on a horizontal plane, a plurality of points are uniformly and randomly selected on an adsorbed object 2, a firm thin line is respectively bonded on the points, and finally the thin lines are gathered at a tension meter 3 right above the center of a workpiece. After the electrostatic chuck 1 is turned on, the operator may manually or by using a related mechanical device pull the tension meter 3 vertically upward and record the value as the force increases. At the moment when the object 2 is pulled up and detached from the adsorption surface of the electrostatic chuck 1, the maximum value displayed by the tension meter 3 is defaulted to the electrostatic adsorption energizing result of the electrostatic chuck 1, and whether the adsorption performance of the electrostatic chuck is qualified is determined based on the maximum value displayed by the tension meter 3.
The pull-up test method described above has at least the following technical problems: 1) the coating process of the ultrathin material is mostly carried out in a vacuum environment, and the pull-up test carried out in an atmospheric environment is inconsistent with the actual working condition; 2) the gathering position of the multipoint connecting lines cannot be ensured to be positioned above the center of the adsorbed object, and the adsorbed object is subjected to uneven upward tension; 3) the numerical value displayed by the tension meter, particularly the maximum value displayed at the moment when the adsorbed object is pulled up, is not accurate and is difficult to be completely recorded by an operator, and whether the adsorption performance of the electrostatic chuck is qualified or not is judged according to the inaccurate maximum value.
Disclosure of Invention
The invention provides a device and a method for detecting the performance of an electrostatic chuck, which can ensure that the detection environment is consistent with the coating process environment of an ultrathin material, can ensure that an adsorbed object is stressed at the center of the adsorbed object during detection, and can judge the adsorption performance of the electrostatic chuck more accurately according to the method.
In order to solve the technical problems, the invention provides the following technical scheme:
in one aspect, the present invention provides an electrostatic chuck performance detection apparatus, including a vacuum chamber and a test gas path connected to the vacuum chamber, wherein:
the vacuum chamber is connected with a vacuum pump, an adapter plate is arranged in the vacuum chamber, an electrostatic chuck is arranged above the adapter plate, the upper surface of the electrostatic chuck is used for placing an adsorbed object, an adsorption gap exists between the electrostatic chuck and the adsorbed object, and an air hole communicated with the test air channel is formed in the centers of the electrostatic chuck and the adapter plate;
the device comprises a testing gas circuit and is characterized in that a back blowing gas source, a gas mass flow meter and a vacuum gauge are sequentially arranged on the testing gas circuit along the gas circuit direction, a first valve body is arranged between the back blowing gas source and the gas mass flow meter, and a second valve body is arranged between the gas mass flow meter and the vacuum gauge.
Furthermore, an air path branch is further arranged between the vacuum chamber and the vacuum gauge, and a third valve body is arranged on the air path branch.
Furthermore, a needle valve is arranged on the gas path branch and connected with the third valve body in parallel.
Furthermore, vacuum chamber and switching dish all adopt stainless steel.
In another aspect, the present invention further provides a method for detecting the electrostatic chuck performance detecting apparatus, including:
step 1: starting the electrostatic adsorption function of the electrostatic chuck to make the adsorbed object adsorbed on the electrostatic chuck;
step 2: opening the vacuum pump, and vacuumizing the vacuum chamber to reach a vacuum environment monitoring condition;
and step 3: after the numerical value of the gas mass flowmeter is set, opening the first valve body and the second valve body;
and 4, step 4: introducing a gas mass flow value within a reasonable range, if the back blowing gas pressure value can be maintained in a certain stable state for a certain time, determining that the electrostatic adsorption performance of the tested electrostatic chuck is qualified, and if the back blowing gas pressure value between the electrostatic chuck and the adsorbed object is too low due to overlarge leakage of the back blowing gas, determining that the electrostatic adsorption performance of the tested electrostatic chuck is unqualified;
and 5: and after the test is finished, closing the gas mass flowmeter, the first valve body and the second valve body in sequence, and breaking the vacuum cavity.
Further, the needle valve is in a normally open state in the whole testing process.
Further, in the step 4, when the mass flow value of the introduced gas is 3-4 sccm and the back blowing gas pressure value can be maintained within 1-7 torr for 2-3 min, the electrostatic adsorption performance of the tested electrostatic chuck can be judged to be qualified.
The invention has the following beneficial effects:
the electrostatic chuck performance detection device and the detection method comprise a vacuum chamber and a test gas circuit connected with the vacuum chamber, wherein the electrostatic chuck and an adsorbed object are both arranged in the vacuum chamber, and the film coating process of the ultrathin material is mostly carried out in a vacuum environment; the center of the electrostatic chuck and the center of the adapter plate are provided with air holes communicated with the testing air path, and because the invention leads in air from the bottom of the electrostatic chuck and measures the pressure value of the back blowing air in the air path to judge whether the performance of the tested electrostatic chuck is qualified or not, the problem of uneven tension of an adsorbed object caused by the traditional pull-up testing method is solved; the back blowing gas source, the gas mass flow meter and the vacuum gauge are sequentially arranged on the testing gas path along the gas path direction, the back blowing gas pressure value in the gas path measured by the vacuum gauge can be observed and recorded in real time in the detection process, and the back blowing gas pressure value is maintained for a certain time when reaching a certain stable state, so that the back blowing gas pressure value is convenient for operators to record, and the accuracy of performance detection of the tested electrostatic chuck is improved.
Drawings
FIG. 1 is a schematic diagram of a prior art electrostatic chuck performance testing method;
fig. 2 is a schematic structural diagram of the electrostatic chuck performance detection apparatus of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
In one aspect, the present invention provides an electrostatic chuck performance detecting apparatus, as shown in fig. 2, including a vacuum chamber 5 and a testing gas path 13 connected to the vacuum chamber 5, wherein:
a vacuum pump (not shown) is connected to the vacuum chamber 5, an adapter plate 4 is arranged in the vacuum chamber 5, an electrostatic chuck 1 is arranged above the adapter plate 4, the upper surface of the electrostatic chuck 1 is used for placing an adsorbed object 2, an adsorption gap exists between the electrostatic chuck 1 and the adsorbed object 2, and air holes communicated with a test air path 13 are formed in the centers of the electrostatic chuck 1 and the adapter plate 4;
the back blowing gas source 6, the gas mass flow meter 8 and the vacuum gauge 12 are sequentially arranged on the testing gas circuit 13 along the gas circuit direction, the first valve body 7 is arranged between the back blowing gas source 6 and the gas mass flow meter 8, and the second valve body 9 is arranged between the gas mass flow meter 8 and the vacuum gauge 12.
The electrostatic chuck performance detection device comprises a vacuum chamber and a test gas path connected with the vacuum chamber, wherein the electrostatic chuck and an adsorbed object are both arranged in the vacuum chamber, the coating process of the ultrathin material is mostly carried out in a vacuum environment, the detection environment is also carried out in vacuum, the influence on the detection result caused by the difference between the detection environment and the actual process environment is eliminated, and the accuracy of the electrostatic chuck performance detection is improved; the center of the electrostatic chuck and the center of the adapter plate are provided with air holes communicated with the testing air path, and because the invention leads in air from the bottom of the electrostatic chuck and measures the pressure value of the back blowing air in the air path to judge whether the performance of the tested electrostatic chuck is qualified or not, the problem of uneven tension of an adsorbed object caused by the traditional pull-up testing method is solved; the back blowing gas source, the gas mass flow meter and the vacuum gauge are sequentially arranged on the testing gas path along the gas path direction, the back blowing gas pressure value in the gas path measured by the vacuum gauge can be observed and recorded in real time in the detection process, and the back blowing gas pressure value is maintained for a certain time when reaching a certain stable state, so that the back blowing gas pressure value is convenient for operators to record, and the accuracy of performance detection of the tested electrostatic chuck is improved.
Further, an air passage branch 14 is provided between the vacuum chamber 5 and the vacuum gauge 12, and a third valve body 11 is provided on the air passage branch 14. After the detection process is finished, the back blowing gas in the test gas circuit 13 can be quickly emptied into the vacuum chamber 5 through the third valve body 11.
Preferably, the needle valve 10 is arranged on the gas path branch 14 in parallel with the third valve body 11. The needle valve 10 is connected in parallel with the third valve body 11, and is used for preventing the air pipe from being blocked due to instantaneous excess of the back blowing gas in the test gas circuit 13 in the test process and causing the phenomenon that the adsorbed object 2 is blown off and damaged.
In order to prolong the service life of the detection device, the vacuum chamber 5 and the adapter plate 4 are made of stainless steel.
In another aspect, the present invention further provides a method for detecting the electrostatic chuck performance detecting apparatus, including:
step 1: starting the electrostatic adsorption function of the electrostatic chuck 1 to make the adsorbed object 2 adsorbed on the electrostatic chuck 1;
step 2: opening a vacuum pump, and vacuumizing the vacuum chamber 5 (the vacuum degree in the vacuum chamber 5 after vacuumizing is consistent with the vacuum environment of the coating process of the ultrathin material), so that the vacuum environment monitoring condition is achieved;
and step 3: after the value of the gas mass flowmeter 8 is set, the first valve body 7 and the second valve body 9 are opened;
and 4, step 4: introducing a gas mass flow value within a reasonable range, if the back blowing gas pressure value can be maintained in a certain stable state for a certain time, determining that the electrostatic adsorption performance of the tested electrostatic chuck 1 is qualified, and if the back blowing gas pressure value between the electrostatic chuck 1 and the adsorbed object 2 is too low due to overlarge leakage of the back blowing gas, determining that the electrostatic adsorption performance of the tested electrostatic chuck 1 is unqualified;
and 5: after the test is finished, the gas mass flowmeter 8, the first valve body 7 and the second valve body 9 are closed in sequence, and the vacuum chamber 5 is broken to be vacuum.
The detection method of the electrostatic chuck performance detection device, namely the back blowing gas detection method, comprises the steps of introducing back blowing gas between the electrostatic chuck 1 and the adsorbed object 2, controlling a gas flow value through the gas mass flowmeter 8, and measuring a back blowing gas pressure value in a test gas path through the vacuum gauge 12, wherein the value can be used for evaluating an electrostatic adsorption force value which can be provided by the tested electrostatic chuck 1. In addition, if the introduced gas flow value, the back blowing gas pressure value and the back blowing gas leakage value can reach the stable state and can be maintained for a certain time, the electrostatic adsorption effect of the tested electrostatic chuck 1 can be judged to be qualified. On the contrary, if the electrostatic chuck 1 has poor self-adsorption performance, or a large amount of dust and particles exist between the electrostatic chuck 1 and the adsorbed object 2, or even ultra-thin glass fragment residues exist, the adsorption gap between the electrostatic chuck 1 and the adsorbed object is large, so that the leakage amount of the back blowing gas is increased, and the back blowing gas pressure value measured and tested by the vacuum gauge 12 is low, so that the electrostatic chuck 1 can be judged to have unqualified adsorption performance or abnormal use working condition. Specific test criteria should be set forth by the product user of the electrostatic chuck 1. The detection method of the electrostatic chuck performance detection device can ensure that the detection environment is consistent with the coating process environment of the ultrathin material, and the adsorbed object is stressed at the center of the device during detection, and the electrostatic chuck adsorption performance judged by the method is accurate.
The invention can not only realize the vacuum test environment by building the chamber, but also simulate the actual working condition; moreover, the position of the central stress point of the adsorbed object can be accurately found through the special structural design of the test object; visual and stable back blowing air pressure measurement data values can be output, so that operators can conveniently and quickly judge and record detection results; and the method can be expanded to record and graphically analyze the collected test data through a computer and programming software.
Further, the detection method of the present invention is such that the needle 10 is normally open during the entire test. The needle valve 10 is connected in parallel with the third valve body 11, and the function of the needle valve is to prevent the air pipe from being blocked due to instantaneous excess of the back blowing gas in the test gas circuit 13 in the test process and to prevent the adsorbate 2 from being blown off and damaged, so that the needle valve 10 is in a normally open state in the test process.
The invention tests and measures the performance detection effect of the electrostatic chuck 1 by the back blowing gas pressure value which can be reached and maintained by the back blowing gas on the adsorbed object 2 and the electrostatic chuck 1, and concretely comprises the following steps: in the step 4, for a certain type of electrostatic chuck, the mass flow value of the introduced gas ranges from 3 sccm to 4sccm, and when the back blowing gas pressure value can be maintained within 1 torr to 7torr for 2 min to 3min, the electrostatic adsorption performance of the tested electrostatic chuck can be judged to be qualified.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (5)
1. The electrostatic chuck performance detection device is characterized by comprising a vacuum chamber and a test gas path connected with the vacuum chamber, wherein:
the vacuum chamber is connected with a vacuum pump, an adapter plate is arranged in the vacuum chamber, an electrostatic chuck is arranged above the adapter plate, the upper surface of the electrostatic chuck is used for placing an adsorbed object, an adsorption gap exists between the electrostatic chuck and the adsorbed object, and an air hole communicated with the test air channel is formed in the centers of the electrostatic chuck and the adapter plate;
a back blowing gas source, a gas mass flowmeter and a vacuum gauge are sequentially arranged on the test gas path along the gas path direction, a first valve body is arranged between the back blowing gas source and the gas mass flowmeter, and a second valve body is arranged between the gas mass flowmeter and the vacuum gauge;
an air path branch is also arranged between the vacuum chamber and the vacuum gauge, and a third valve body is arranged on the air path branch;
and the gas path branch and the third valve body are connected in parallel and provided with needle valves.
2. The electrostatic chuck performance testing apparatus of claim 1, wherein the vacuum chamber and the adapter plate are both made of stainless steel.
3. The method of claim 1 or 2, comprising:
step 1: starting the electrostatic adsorption function of the electrostatic chuck to make the adsorbed object adsorbed on the electrostatic chuck;
step 2: opening the vacuum pump, and vacuumizing the vacuum chamber to reach a vacuum environment monitoring condition;
and step 3: after the numerical value of the gas mass flowmeter is set, opening the first valve body and the second valve body;
and 4, step 4: introducing a gas mass flow value within a reasonable range, if the back blowing gas pressure value can be maintained in a certain stable state for a certain time, judging that the electrostatic adsorption performance of the tested electrostatic chuck is qualified, and if the back blowing gas leakage between the electrostatic chuck and the adsorbed object is too large to cause that the measured back blowing gas pressure value is lower, judging that the electrostatic adsorption performance of the tested electrostatic chuck is unqualified;
and 5: and after the test is finished, closing the gas mass flowmeter, the first valve body and the second valve body in sequence, and breaking the vacuum cavity.
4. The method of claim 3, wherein the needle valve is normally open during the entire testing process.
5. The method as claimed in claim 4, wherein in the step 4, the mass flow of the gas is 3-4 sccm, and the back-blowing gas pressure is maintained at 1-7 torr for 2-3 min, so as to determine that the electrostatic chuck is qualified in electrostatic adsorption performance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810916692.2A CN110873640B (en) | 2018-08-13 | 2018-08-13 | Electrostatic chuck performance detection device and detection method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810916692.2A CN110873640B (en) | 2018-08-13 | 2018-08-13 | Electrostatic chuck performance detection device and detection method |
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| CN110873640A CN110873640A (en) | 2020-03-10 |
| CN110873640B true CN110873640B (en) | 2021-10-01 |
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| TWI803809B (en) * | 2021-01-18 | 2023-06-01 | 得立亞科技有限公司 | Parametric Analysis Method for Electrostatic Chuck |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2648766B2 (en) * | 1989-03-23 | 1997-09-03 | 東陶機器株式会社 | Method and apparatus for evaluating chucking force of electrostatic chuck |
| JPH04359539A (en) * | 1991-06-06 | 1992-12-11 | Fujitsu Ltd | Electrostatic attraction apparatus |
| JP3966931B2 (en) * | 1996-10-22 | 2007-08-29 | 株式会社アルバック | Electrostatic adsorption device, electrostatic adsorption force measuring method, recording medium |
| CN2807475Y (en) * | 2005-03-29 | 2006-08-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Electrostatic chuck function testing device |
| US20080108154A1 (en) * | 2006-11-03 | 2008-05-08 | Hyoung Kyu Son | Apparatus and method for measuring chuck attachment force |
| CN101226871B (en) * | 2007-01-15 | 2010-07-21 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for desorption of silicon slice |
| CN103376176B (en) * | 2013-06-21 | 2015-10-28 | 清华大学 | The device of the electrostatic force of measurement of electrostatic chuck |
| CN103698068B (en) * | 2013-12-06 | 2014-11-12 | 清华大学 | Electrostatic chuck basic performance detection device and detection method thereof |
| CN103698070A (en) * | 2013-12-17 | 2014-04-02 | 北京华卓精科科技有限公司 | Device for measuring electrostatic adsorption force and desorption time of electrostatic chuck |
| CN105241599B (en) * | 2015-11-05 | 2017-09-22 | 清华大学 | The detecting system and detection method of electrostatic chuck electrostatic force |
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