CN110871234A - Machining and forming method of annular back plate - Google Patents
Machining and forming method of annular back plate Download PDFInfo
- Publication number
- CN110871234A CN110871234A CN201911156544.6A CN201911156544A CN110871234A CN 110871234 A CN110871234 A CN 110871234A CN 201911156544 A CN201911156544 A CN 201911156544A CN 110871234 A CN110871234 A CN 110871234A
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- ingot
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D28/00—Shaping by press-cutting; Perforating
- B21D28/24—Perforating, i.e. punching holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D37/00—Tools as parts of machines covered by this subclass
- B21D37/16—Heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21H—MAKING PARTICULAR METAL OBJECTS BY ROLLING, e.g. SCREWS, WHEELS, RINGS, BARRELS, BALLS
- B21H1/00—Making articles shaped as bodies of revolution
- B21H1/06—Making articles shaped as bodies of revolution rings of restricted axial length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Punching Or Piercing (AREA)
Abstract
The invention provides a processing and forming method of an annular back plate, which comprises the following steps: and (3) performing cogging treatment on the cylindrical ingot after heating treatment to enable the formed cylindrical ingot to meet the preparation requirement, and then sequentially performing punching and ring rolling treatment to form an annular back plate. According to the invention, the ingot is subjected to punching and ring rolling treatment, so that a novel method for preparing the annular back plate is provided, the raw material waste caused by cutting a large amount of materials in the traditional method is greatly reduced, the material utilization rate is improved and can reach over 75%; the method has the advantages of high adjustability, simple and convenient operation, suitability for preparing back plates of various types and sizes and wide application range.
Description
Technical Field
The invention belongs to the technical field of metal processing, and relates to a processing and forming method of an annular back plate.
Background
The target material is an important sputtering coating raw material in electronic product manufacturing, the sputtering target material generally mainly comprises a target blank, a back plate and the like, the target blank is a target material bombarded by high-speed ion beams and belongs to the core part of the sputtering target material, and the back plate mainly plays a role in fixing the sputtering target material and needs to have good electric conduction and heat conduction properties. The target material back plate is particularly important because the target material needs to bear the cooling water pressure on the back and the vacuum negative pressure on the front simultaneously in the magnetron sputtering coating process.
The target material back plate material usually comprises aluminum alloy, copper and copper alloy, has high strength and good heat-conducting property, and can meet the requirements of the semiconductor industry. The annular back plate is of a commonly used back plate structure because the palladium blank is usually circular, and the processing method of the annular back plate generally comprises the steps of directly turning or cutting by a water jet cutter a cut cylindrical cast ingot or an upset cylindrical blank to empty the middle redundant part of material, leaving a circle of annular material on the outer circle, and then machining to manufacture the annular back plate for forming the semiconductor sputtering target.
CN 207642214U discloses a target backboard rapid forming device, which comprises an outer ring and a stamping head, wherein a heated blank is placed in the outer ring of the forming device, and the stamping head is pressed into the surface of the blank by a forging hammer to fill the blank in the forming device; the outer circular ring is of a step annular structure, the stamping head is of a frustum structure, and the step is designed to be an oblique angle; the device adopts the mould forging method to realize the backplate shaping, but the fixed structure of mould for the product size is single, and if the backplate of different sizes then needs multiple moulds, makes the cost higher equally.
CN 105408514a discloses a sputtering target having a backside cooling groove, comprising a sputtering plate having a backside surface with radially inner, middle and outer regions, and an annular backing plate mounted to the sputtering plate, the backside surface having a plurality of circular grooves spaced apart from each other and at least one arcuate channel cut through the circular grooves and extending from the radially inner region to the radially outer region of the sputtering plate; the annular backing plate defines a split ring that exposes the back surface of the sputtering plate. The sputtering target is characterized in that the circular groove is arranged on the back surface of the sputtering plate to improve the cooling effect of the sputtering plate, and the processing and the preparation of the annular back plate are not involved.
Therefore, a new method is required for the processing and preparation of the annular back plate, so that the annular back plate can adapt to palladium blanks with different sizes and types, the utilization rate of the back plate material can be improved, and the processing cost is reduced.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a processing and forming method of an annular back plate, which forms the annular back plate by punching and ring rolling the ingot, greatly reduces the raw material waste caused by cutting a large amount of materials in the traditional method, improves the material utilization rate, has high adjustability and simple and convenient operation method, and is suitable for preparing back plates of various types and sizes.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a processing and forming method of an annular back plate, which comprises the following steps:
and (3) punching the cylindrical ingot after heating treatment, and then performing ring rolling to form an annular back plate.
According to the method, the ingot is heated and then subjected to punching and ring rolling to form the annular back plate, the back plate is an important component of the target assembly, the annular back plate can be rapidly prepared by the method, raw material loss is low, the utilization rate is high, parameters can be flexibly adjusted according to different requirements, and the annular back plates with different sizes and types can be prepared.
The following technical solutions are preferred technical solutions of the present invention, but not limited to the technical solutions provided by the present invention, and technical objects and advantageous effects of the present invention can be better achieved and achieved by the following technical solutions.
As a preferred embodiment of the present invention, the ingot comprises a cylindrical ingot or a prismatic ingot.
Preferably, when the ingot is a prismatic ingot, the ingot is heated and then cogging is performed to form a cylindrical ingot.
In the invention, in order to facilitate the operation of the subsequent process and the preparation of the annular back plate, the ingot needs to be adjusted into a cylindrical shape, and the ingot is usually in a plate shape and needs to be adjusted into a shape through cogging treatment.
In a preferred embodiment of the present invention, the diameter of the ingot is 3/8 to 3/4, such as 3/8, 2/5, 1/2, 3/5, 5/8, 7/10, or 3/4, which is equal to the outer diameter of the finished annular back plate.
Preferably, the weight of the ingot is 1.1 to 1.3 times, for example, 1.1 times, 1.15 times, 1.2 times, 1.25 times or 1.3 times, etc., of the weight of the finished annular back plate, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
In the invention, in the cogging process, the shape of the ingot can be adjusted, and meanwhile, the ingot is required to be divided into small ingots suitable for preparing final products, so that the diameter and the weight of the small ingots meet the requirements, therefore, the length required to meet the requirements can be calculated, and the short ingots are cut and formed.
In a preferred embodiment of the present invention, the ingot material includes any one of aluminum alloy, copper and copper alloy.
In a preferred embodiment of the present invention, the temperature of the heat treatment is 200 to 300 ℃ lower than the melting point of the ingot, for example, 200 ℃, 220 ℃, 240 ℃, 260 ℃, 280 ℃, or 300 ℃, but the heat treatment is not limited to the above-mentioned values, and other values not shown in the above-mentioned range of values are also applicable.
In a preferred embodiment of the present invention, the diameter of the hole formed after the punching process is 10 to 20%, for example, 10%, 12%, 14%, 16%, 18%, or 20% of the diameter of the ingot, but the diameter is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable.
In the invention, because the ring rolling treatment is carried out, the loss of materials is less, and the hole formed by the punching treatment only needs to be capable of carrying out the ring rolling treatment, the diameter of the hole after the punching treatment is generally smaller.
In a preferred embodiment of the present invention, the punching process is classified into piercing or non-piercing of the ingot.
As a preferred technical solution of the present invention, the punching of the ingot includes one-way punching or two-way punching.
As a preferred embodiment of the present invention, when the ingot punch hole is not penetrated, an annular back plate with a bottom plate is formed, and the depth of the punch hole is adjusted according to actual needs.
In the invention, the central axis of the punched hole is superposed with the central axis of the ingot, the ingot is generally penetrated, when the thickness is smaller, the punching can be carried out from one direction, and when the thickness is larger, one surface can be punched firstly and the other surface can be punched again until the punching is carried out; if the ingot does not need to penetrate through, a hole is formed in the ingot to form an annular back plate with a bottom plate, and the palladium blank can be arranged in the annular space without influencing heat transfer in the sputtering process.
In a preferred embodiment of the present invention, the punched ingot is subjected to ring rolling in a ring rolling mill.
In the present invention, the temperature of the ingot is maintained at a temperature substantially equal to that of the heating and punching processes in order to facilitate deformation of the ingot during the ring rolling process.
Preferably, the radial crushing force of the ring rolling process is 700-1100 kN, such as 700kN, 750kN, 800kN, 850kN, 900kN, 950kN, 1000kN, 1050kN or 1100kN, but not limited to the recited values, and other values not recited in the range of values are also applicable.
In the invention, the selection of the rolling force is related to the selection of the ingot material, for commonly used aluminum alloy, copper and copper alloy, the aluminum alloy material is generally selected to be 700-800 kN, while the rolling force of the copper and copper alloy material is relatively high, generally selected to be 900-1100 kN.
Preferably, the linear velocity of the ring rolling treatment is 1.0 to 1.3m/s, such as 1.0m/s, 1.05m/s, 1.1m/s, 1.15m/s, 1.2m/s, 1.25m/s, or 1.3m/s, but not limited to the recited values, and other values not recited in the range of values are also applicable.
In the invention, the selection of the ring rolling processing parameters is related to the type of the material, and the rolling force, the linear speed and the like are adjusted according to the factors of the hardness, the ductility and the like of the material.
As a preferred technical scheme of the invention, the method comprises the following steps:
(1) heating a cylindrical or prismatic ingot, and cogging to enable the diameter of the formed cylindrical ingot to be 1/2-5/8 of the outer diameter of the finished annular back plate, wherein the weight of the formed cylindrical ingot is 1.1-1.3 times of the weight of the finished annular back plate, the ingot comprises any one of aluminum alloy, copper or copper alloy, and the heating temperature is 200-300 ℃ lower than the melting point of the ingot;
(2) performing punching treatment on the ingot subjected to cogging in the step (1), wherein the diameter of a hole formed after the punching treatment is 10-20% of the diameter of the ingot, the punching treatment comprises the two situations of penetrating or not penetrating the ingot, the penetrating of the punching comprises unidirectional punching or bidirectional punching, and when the punching is not penetrated, an annular back plate with a bottom plate is formed;
(3) and (3) carrying out ring rolling treatment on the ingot punched in the step (2) on a ring rolling machine, wherein the radial rolling force of the ring rolling treatment is 700-1100 kN, and the linear speed of the ring rolling treatment is 1.0-1.3 m/s, so as to obtain the annular back plate.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the invention, the ingot is subjected to punching and ring rolling treatment, so that a novel method for preparing the annular back plate is provided, the raw material waste caused by cutting a large amount of materials in the traditional method is greatly reduced, the material utilization rate is improved and can reach over 75%;
(2) the method has high adjustability and simple and convenient operation, and is suitable for preparing the back plates with various types and sizes.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the following embodiments are only simple examples of the present invention and do not represent or limit the scope of the present invention, which is defined by the claims.
The specific embodiment of the invention provides a processing and forming method of an annular back plate, which comprises the following steps:
and (3) punching the cylindrical ingot after heating treatment, and then performing ring rolling to form an annular back plate.
The following are typical but non-limiting examples of the invention:
example 1:
the embodiment provides a processing and forming method of an annular back plate, which comprises the following steps:
(1) heating a cylindrical aluminum alloy ingot to 400 ℃, wherein the aluminum alloy is Al-4% Si, and then cogging to ensure that the diameter of a single cylindrical ingot is 1/2 of the outer diameter of the finished annular back plate and the weight of the single cylindrical ingot is 1.2 times of the weight of the finished annular back plate;
(2) performing punching treatment on the ingot blanked in the step (1), wherein the diameter of a hole formed after the punching treatment is 15% of the diameter of the ingot, and the punching treatment is to perform bidirectional punching on the ingot until the ingot penetrates through the hole;
(3) and (3) carrying out ring rolling treatment on the ingot punched in the step (2) on a ring rolling machine, wherein the radial rolling force of the ring rolling treatment is 750kN, and the linear speed of the ring rolling treatment is 1.2m/s, so as to obtain the annular aluminum alloy backboard.
Example 2:
the embodiment provides a processing and forming method of an annular back plate, which comprises the following steps:
(1) heating the plate-shaped aluminum alloy ingot to 450 ℃, wherein the aluminum alloy is A5083, then cogging the ingot to form a cylinder, and cutting the ingot to ensure that the single cylinder ingot has the diameter of 3/4 which is the outer diameter of the finished annular back plate and the weight of 1.1 times of the weight of the finished annular back plate;
(2) carrying out punching treatment on the ingot blanked in the step (1), wherein the diameter of a hole formed after the punching treatment is 10% of the diameter of the ingot, and the punching treatment is to pass the ingot through by one-way punching;
(3) and (3) carrying out ring rolling treatment on the ingot punched in the step (2) on a ring rolling machine, wherein the radial rolling force of the ring rolling treatment is 700kN, and the linear speed of the ring rolling treatment is 1.0m/s, so as to obtain the annular aluminum alloy backboard.
Example 3:
the embodiment provides a processing and forming method of an annular back plate, which comprises the following steps:
(1) heating the cylindrical copper ingot to 880 ℃, and then cogging to ensure that the diameter of a single cylindrical ingot is 3/8 of the outer diameter of the finished annular back plate, and the weight of the single cylindrical ingot is 1.3 times of the weight of the finished annular back plate;
(2) performing punching treatment on the ingot blanked in the step (1), wherein the diameter of a hole formed after the punching treatment is 20% of the diameter of the ingot, and the punching treatment is to perform bidirectional punching on the ingot until the ingot penetrates through the hole;
(3) and (3) carrying out ring rolling treatment on the ingot punched in the step (2) on a ring rolling machine, wherein the radial rolling force of the ring rolling treatment is 900kN, and the linear speed of the ring rolling treatment is 1.3m/s, so as to obtain the annular copper back plate.
Example 4:
the embodiment provides a processing and forming method of an annular back plate, which comprises the following steps:
(1) heating a cylindrical copper alloy ingot to 850 ℃, wherein the grade of the copper alloy is C18150, and then cogging to ensure that the diameter of a single cylindrical ingot is 5/8 of the outer diameter of the finished annular back plate, and the weight of the single cylindrical ingot is 1.15 times of the weight of the finished annular back plate;
(2) performing punching treatment on the ingot blanked in the step (1), wherein the diameter of a hole formed after the punching treatment is 12% of the diameter of the ingot, the punching treatment is to perform unidirectional punching on the ingot but not penetrate the ingot, and the depth of the punching is 50% of the height of the ingot;
(3) and (3) carrying out ring rolling treatment on the ingot punched in the step (2) on a ring rolling machine, wherein the radial rolling force of the ring rolling treatment is 1000kN, and the linear speed of the ring rolling treatment is 1.1m/s, so as to obtain the annular copper back plate.
Example 5:
the embodiment provides a processing and forming method of an annular back plate, which comprises the following steps:
(1) heating the plate-shaped aluminum alloy ingot to 350 ℃, wherein the aluminum alloy is A6061, cogging the aluminum alloy ingot to form a cylinder, and cutting the single cylinder-shaped ingot to ensure that the diameter of the single cylinder-shaped ingot is 1/2 of the outer diameter of the finished annular back plate and the weight of the single cylinder-shaped ingot is 1.25 times of the weight of the finished annular back plate;
(2) carrying out punching treatment on the ingot blanked in the step (1), wherein the diameter of a hole formed after the punching treatment is 18% of the diameter of the ingot, the punching treatment is to unidirectionally punch the ingot but not penetrate the ingot, and the depth of the punched hole is 70% of the height of the ingot;
(3) and (3) carrying out ring rolling treatment on the ingot punched in the step (2) on a ring rolling machine, wherein the radial rolling force of the ring rolling treatment is 800kN, and the linear speed of the ring rolling treatment is 1.15m/s, so as to obtain the annular aluminum alloy backboard.
In the embodiment, the annular back plate is prepared by the method, and the back plates with various types and sizes can be quickly prepared from metal materials by controlling the technological parameters of cogging, punching and ring rolling, so that the applicability is wide; meanwhile, the method greatly reduces the raw material waste caused by cutting a large amount of materials in the traditional method, improves the material utilization rate and can reach more than 75 percent.
The applicant states that the present invention is illustrated in detail by the above examples, but the present invention is not limited to the above detailed methods, i.e. it does not mean that the present invention must rely on the above methods for its implementation. It will be apparent to those skilled in the art that any modifications to the invention, equivalents of the materials used, additions of auxiliary materials, and operations, and selection of particular means, are within the scope and disclosure of the invention.
Claims (11)
1. The processing and forming method of the annular back plate is characterized by comprising the following steps:
and (3) punching the cylindrical ingot after heating treatment, and then performing ring rolling to form an annular back plate.
2. The method according to claim 1, wherein the ingot comprises a cylindrical or prismatic ingot;
preferably, when the ingot is a prismatic ingot, the ingot is heated and then cogging is performed to form a cylindrical ingot.
3. The method of claim 1 or 2, wherein the diameter of the ingot is 3/8-3/4 of the outer diameter of the finished annular back plate;
preferably, the weight of the ingot is 1.1-1.3 times of that of the finished annular back plate.
4. A method according to any one of claims 1 to 3, wherein the material of the ingot comprises any one of an aluminium alloy, copper or a copper alloy.
5. A method according to any one of claims 1 to 4, wherein the temperature of the heat treatment is 200 to 300 ℃ lower than the melting point of the ingot.
6. A method according to any one of claims 1 to 5, wherein the diameter of the holes formed after the punching process is 10 to 20% of the diameter of the ingot.
7. A method according to any one of claims 1 to 6, wherein the punching process is divided into either perforating or not perforating the ingot.
8. A method according to claim 7, wherein the punching through of the ingot comprises one-way punching or two-way punching.
9. The method of claim 7, wherein the ingot punches, when blind, form an annular backing plate with a bottom plate.
10. A method according to any one of claims 1 to 9, wherein the punched ingot is ring rolled on a ring rolling mill;
preferably, the radial rolling force of the ring rolling treatment is 700-1100 kN;
preferably, the linear speed of the ring rolling treatment is 1.0-1.3 m/s.
11. Method according to any of claims 1-10, characterized in that the method comprises the steps of:
(1) heating a cylindrical or prismatic ingot, and cogging to enable the diameter of the formed cylindrical ingot to be 1/2-5/8 of the outer diameter of the finished annular back plate, wherein the weight of the formed cylindrical ingot is 1.1-1.3 times of the weight of the finished annular back plate, the ingot comprises any one of aluminum alloy, copper or copper alloy, and the heating temperature is 200-300 ℃ lower than the melting point of the ingot;
(2) performing punching treatment on the ingot subjected to cogging in the step (1), wherein the diameter of a hole formed after the punching treatment is 10-20% of the diameter of the ingot, the punching treatment comprises the two situations of penetrating or not penetrating the ingot, the penetrating of the punching comprises unidirectional punching or bidirectional punching, and when the punching is not penetrated, an annular back plate with a bottom plate is formed;
(3) and (3) carrying out ring rolling treatment on the ingot punched in the step (2) on a ring rolling machine, wherein the radial rolling force of the ring rolling treatment is 700-1100 kN, and the linear speed of the ring rolling treatment is 1.0-1.3 m/s, so as to obtain the annular back plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201911156544.6A CN110871234A (en) | 2019-11-22 | 2019-11-22 | Machining and forming method of annular back plate |
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| CN201911156544.6A CN110871234A (en) | 2019-11-22 | 2019-11-22 | Machining and forming method of annular back plate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112518256A (en) * | 2020-11-30 | 2021-03-19 | 宁波江丰电子材料股份有限公司 | Processing method of annular back plate |
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| CN109822021A (en) * | 2018-09-10 | 2019-05-31 | 贵州航天新力铸锻有限责任公司 | Rolloff forming method of C-shaped section forging |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2012040587A (en) * | 2010-08-19 | 2012-03-01 | Kurimoto Ltd | Ring rolling mill |
| CN107876672A (en) * | 2017-11-21 | 2018-04-06 | 四川凯茨阀门制造有限公司 | A kind of flanged ball valve end cap rolling ring manufacturing process |
| CN109822021A (en) * | 2018-09-10 | 2019-05-31 | 贵州航天新力铸锻有限责任公司 | Rolloff forming method of C-shaped section forging |
| CN109261864A (en) * | 2018-09-29 | 2019-01-25 | 中国航发哈尔滨轴承有限公司 | A kind of Cronidur30 high nitrogen stainless steel bearing ring blank forging manufacturing process |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112518256A (en) * | 2020-11-30 | 2021-03-19 | 宁波江丰电子材料股份有限公司 | Processing method of annular back plate |
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