CN112518256A - Processing method of annular back plate - Google Patents
Processing method of annular back plate Download PDFInfo
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- CN112518256A CN112518256A CN202011384826.4A CN202011384826A CN112518256A CN 112518256 A CN112518256 A CN 112518256A CN 202011384826 A CN202011384826 A CN 202011384826A CN 112518256 A CN112518256 A CN 112518256A
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- 238000003672 processing method Methods 0.000 title claims abstract description 17
- 238000011282 treatment Methods 0.000 claims abstract description 55
- 238000005520 cutting process Methods 0.000 claims abstract description 44
- 238000000034 method Methods 0.000 claims abstract description 40
- 239000011162 core material Substances 0.000 claims abstract description 28
- 238000003754 machining Methods 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 26
- 238000012545 processing Methods 0.000 claims description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 4
- 238000009499 grossing Methods 0.000 claims description 2
- 239000002699 waste material Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000002360 preparation method Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention provides a processing method of an annular back plate, which comprises the following steps: boring the ingot to obtain a core material and a hollow ingot; and cutting the obtained hollow ingot, and then performing finish machining to obtain the annular back plate with the specified size. According to the method, the large-size core material can be obtained by boring the whole ingot, so that the method is convenient to further use, avoids material waste, reduces the cost and has high material utilization rate; according to the method, the boring treatment is carried out firstly, so that the boring treatment times can be reduced, the problem of uneven size easily caused by multiple boring treatments is avoided, and the product yield is effectively improved; the method has less cutting amount during cutting treatment, and can effectively improve the production efficiency of products.
Description
Technical Field
The invention belongs to the technical field of target preparation, and relates to a processing method of an annular back plate.
Background
With the rapid development of the semiconductor industry, the demand of coating materials as important materials for manufacturing semiconductor electronic devices is increasing. The target material is used as an important coating material and has wide application in the fields of integrated circuits, flat panel displays, solar energy, optical devices and the like. The target assembly is used as a basic structural unit for coating production and consists of a target and a back plate, the back plate mainly plays a role in fixing a sputtering target, and needs to have good electric conduction and heat conduction properties, and the structure and the performance of the back plate also have important influence on the coating performance, so that the processing and the preparation of the back plate are also important components for the application of the target.
The structure of the back plate is an important structural form except for a common structural form with a groove, the annular back plate with a hollow structure is also an important structural form, at present, the whole ingot is usually cut off for preparing the annular back plate, then the central area is turned to remove, the turned material is relatively small in volume and difficult to be reused as the back plate structure, the material is usually treated as waste, the material waste of the whole ingot is more, and the processing cost is increased.
CN 207642214U discloses a target backboard rapid forming device, which comprises an outer ring and a stamping head, wherein a heated blank is placed in the outer ring of the forming device, and the stamping head is pressed into the surface of the blank by a forging hammer to fill the blank in the forming device; the outer circular ring is of a step annular structure, the stamping head is of a frustum structure, and the step is designed to be an oblique angle; the device adopts a die forging method to realize the molding of the back plate, but the structure of the die is fixed, so that the product has single size, and the purpose of rapid deformation can be achieved only when the blank reaches higher temperature; the prepared back plate is of a groove structure, namely, the method is not suitable for preparing the back plate with the annular through hole.
CN 103464785a discloses a turning and cutting method of a rod-shaped workpiece, which comprises the following steps: feeding, wherein one end of a workpiece to be cut is a finished product end, the other end of the workpiece to be cut is a residual material end, the finished product end of the workpiece to be cut is clamped at a chuck of a machine tool, and the residual material end of the workpiece is positioned outside the chuck; cutting off, namely rotating a chuck of the machine tool, cutting off the workpiece to be cut by adopting a common turning method, clamping a finished workpiece obtained after cutting off on the chuck of the machine tool, dropping the residual end of the workpiece to be cut, continuously feeding a cutter, and turning burrs on the cut surface of the finished workpiece. The method focuses on cutting off and deburring of the workpiece, and does not relate to whether the workpiece is a hollow structure or not and the processing process of the hollow structure.
In summary, for the processing and preparation of the annular back plate, a proper process method needs to be selected, so that not only can materials be saved and waste be avoided, but also the back plate with the surface free of burrs and the size meeting the requirements can be quickly obtained, and the process method is simple and low in process cost.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a processing method of an annular back plate, which can obtain a large-size core material by boring the whole ingot material, is convenient to further use, avoids material waste, reduces the number of boring treatment, is beneficial to obtaining products with uniform size, reduces the cutting amount of cutting treatment and improves the production efficiency of the products.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a processing method of an annular back plate, which comprises the following steps:
(1) boring the ingot to obtain a core material and a hollow ingot;
(2) and (2) cutting the hollow ingot obtained in the step (1), and then performing finish machining to obtain an annular back plate with specified size.
In the preparation process of the annular back plate, firstly, the ingot raw material is subjected to boring treatment, so that the obtained core material still has a larger size, products with other sizes can be further prepared, the waste of materials is effectively avoided, the boring treatment is firstly carried out, the perforation of a plurality of cut-off pieces can be realized at one time, the problem of nonuniform size easily caused by the subsequent boring treatment of each cut-off piece is avoided, and the number of boring treatment is reduced; and the boring treatment is carried out firstly, the area of the annular section is smaller during the subsequent cutting, the cutting amount is reduced, and the production efficiency of the back plate product is improved.
The following technical solutions are preferred technical solutions of the present invention, but not limited to the technical solutions provided by the present invention, and technical objects and advantageous effects of the present invention can be better achieved and achieved by the following technical solutions.
As a preferable technical scheme of the invention, the ingot material in the step (1) is a cylindrical ingot material.
Preferably, the cylindrical ingot comprises a cylindrical ingot or a prismatic ingot.
In the invention, in order to facilitate the preparation of the annular back plate, the ingot material is usually required to be in a regular structure, the size of the ingot material is required to be close in one dimension, a columnar structure is preferably selected so as to facilitate the convenient and rapid preparation of products with equal size, and different columnar structures can be selected according to the requirements of the back plate structure and the shape; if the ingot is irregular, the ingot can be processed and formed into a required structure, and then the subsequent treatment is carried out.
As a preferred technical scheme of the invention, the material of the ingot material in the step (1) comprises any one or a combination of at least two of aluminum, aluminum alloy, copper or copper alloy, and typical but non-limiting examples of the combination include: combinations of aluminum and aluminum alloys, combinations of aluminum and copper, combinations of aluminum, aluminum alloys, copper and copper alloys, and the like.
As a preferable embodiment of the present invention, before the boring treatment in step (1), the ingot is roughly processed.
Preferably, the rough machining comprises turning, and the ingot is machined into a cylinder with the same cross section size.
According to the structure of the ingot, rough machining is sometimes needed to be carried out firstly, the same dimension in a certain dimension is realized, and meanwhile, the dimension of the section perpendicular to the dimension is not smaller than the outer diameter of the needed back plate, so that the dimension requirement of subsequent products is met.
As a preferable technical scheme of the invention, the boring treatment in the step (1) is carried out by a boring machine.
Preferably, the boring treatment in the step (1) is as follows: through holes are formed along the axial direction of the ingot.
Preferably, the through-hole is located in a middle position of the ingot, and a central axis of the through-hole coincides with a central axis of the ingot.
In the invention, the boring treatment is carried out on a whole ingot, and the completeness of a whole core material is required, so that the requirement that the total length of a cutter bar in a boring machine is greater than the length of the ingot is met.
In a preferred embodiment of the present invention, the cross-sectional dimension of the through-holes in the hollow ingot in step (1) is 50 to 75%, for example, 50%, 55%, 60%, 65%, 70%, or 75% of the total cross-sectional dimension of the ingot, but the cross-sectional dimension is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable.
Preferably, the cross-sectional shape of the through-hole is circular.
In the invention, the size and the shape of the through hole meet the requirements of the final annular back plate, and the size of the through hole is not larger than the hollow size of the annular back plate so as to leave an operation space for subsequent finish machining.
As a preferable technical scheme of the invention, the core material in the step (1) is further used for preparing annular back plates with other sizes.
In the invention, the core material obtained by boring treatment is also a complete ingot and can be used for preparing the back plate, and the prepared back plate is a relatively small-sized back plate because the size of the core material is smaller than that of the initial ingot.
As a preferable embodiment of the present invention, the cutting treatment in the step (2) is: the hollow ingot is cut radially into annular pieces of equal thickness.
Preferably, the cutting process is performed using a high-speed sawing machine.
In the invention, the ingot material after boring is cut off, the cutting position is selected according to the thickness of the annular back plate, and the thickness of the annular piece after cutting off is not less than the thickness of the annular back plate, thus facilitating the subsequent finish machining treatment.
As a preferred technical scheme of the invention, the finish machining in the step (2) comprises a primary turning treatment and a secondary turning treatment.
Preferably, the primary turning process is as follows: and (4) smoothing the end face and the inner wall face of the annular piece to remove burrs.
Preferably, the secondary turning process is: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
In the invention, the finish machining is necessary operation for preparing the annular back plate from the annular piece, and the surface of the annular piece subjected to boring treatment and cutting treatment inevitably has burrs, so that the burrs are turned and removed during the finish machining, the thickness of the annular piece is generally small, and the inner wall surface is easy to operate; after the burrs are removed, the size can be further adjusted to meet the specified size requirement.
As a preferable technical scheme of the invention, the processing method comprises the following steps:
(1) firstly, roughly processing a cylindrical ingot, processing the ingot into a cylinder with the same cross section size, then boring by using a boring machine, forming a through hole along the axial direction of the ingot, wherein the through hole is positioned in the middle of the ingot, the central axis of the through hole is overlapped with the central axis of the ingot, so as to obtain a core material and a hollow ingot, the cross section of the through hole in the hollow ingot is circular, the cross section size of the through hole is 50-75% of the total size of the section of the ingot, and the core material is further used for preparing annular back plates with other sizes;
(2) cutting the hollow ingot obtained in the step (1) by using a sawing machine, cutting the hollow ingot into annular pieces with equal thickness along the radial direction, and then performing finish machining, wherein the finish machining comprises primary turning and secondary turning, and the primary turning comprises the following steps: and (3) carrying out smooth treatment on the end surface and the inner wall surface of the annular part to remove burrs, wherein the secondary turning treatment comprises the following steps: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the method, the large-size core material can be obtained by boring the whole ingot, so that the method is convenient to further use, avoids material waste, reduces the cost, and can achieve the material utilization rate of more than 85%;
(2) according to the method, the boring treatment is carried out firstly, so that the boring treatment times can be reduced, the problem of nonuniform size easily caused by multiple boring treatments is avoided, the product yield is effectively improved and can reach more than 99.3%;
(3) the method of the invention has less cutting amount during cutting treatment, and can effectively improve the production efficiency of products.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the present invention is further described in detail below. However, the following examples are only simple examples of the present invention and do not represent or limit the scope of the present invention, which is defined by the claims.
The specific embodiment of the invention provides a processing method of an annular back plate, which comprises the following steps:
(1) boring the ingot to obtain a core material and a hollow ingot;
(2) and (2) cutting the hollow ingot obtained in the step (1), and then performing finish machining to obtain an annular back plate with specified size.
The following are typical but non-limiting examples of the invention:
example 1:
the embodiment provides a processing method of an annular back plate, which comprises the following steps:
(1) firstly, roughly processing a cylindrical aluminum ingot, processing the ingot into a cylinder with the same cross section size, then boring by using a boring machine, forming a through hole along the axial direction of the ingot, wherein the through hole is positioned in the middle of the ingot, the central axis of the through hole is superposed with the central axis of the ingot, so as to obtain a core material and a hollow ingot, the cross section of the through hole in the hollow ingot is circular, the diameter size of the cross section of the through hole is 50% of the total size of the section of the ingot, and the core material is further used for preparing annular back plates with other sizes;
(2) cutting the hollow ingot obtained in the step (1) by using a sawing machine, cutting the hollow ingot into annular pieces with equal thickness along the radial direction, and then performing finish machining, wherein the finish machining comprises primary turning and secondary turning, and the primary turning comprises the following steps: and (3) carrying out smooth treatment on the end surface and the inner wall surface of the annular part to remove burrs, wherein the secondary turning treatment comprises the following steps: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
Example 2:
the embodiment provides a processing method of an annular back plate, which comprises the following steps:
(1) carrying out boring treatment on a cylindrical aluminum alloy ingot by using a boring machine, forming a through hole along the axial direction of the ingot, wherein the through hole is positioned in the middle of the ingot, the central axis of the through hole is superposed with the central axis of the ingot, so as to obtain a core material and a hollow ingot, the cross section of the through hole in the hollow ingot is circular, the diameter of the cross section of the through hole is 65% of the total size of the section of the ingot, and the core material is further used for preparing annular back plates with other sizes;
(2) cutting the hollow ingot obtained in the step (1) by using a sawing machine, cutting the hollow ingot into annular pieces with equal thickness along the radial direction, and then performing finish machining, wherein the finish machining comprises primary turning and secondary turning, and the primary turning comprises the following steps: and (3) carrying out smooth treatment on the end surface and the inner wall surface of the annular part to remove burrs, wherein the secondary turning treatment comprises the following steps: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
Example 3:
the embodiment provides a processing method of an annular back plate, which comprises the following steps:
(1) firstly, roughly processing a regular quadrangular prism-shaped aluminum ingot, processing the ingot into a cylinder with the same cross section size, then boring by using a boring machine, forming a through hole along the axial direction of the ingot, wherein the through hole is positioned in the middle of the ingot, the central axis of the through hole is superposed with the central axis of the ingot to obtain a core material and a hollow ingot, the cross section of the through hole in the hollow ingot is circular, the diameter size of the cross section of the through hole is 60% of the diameter size of a circumscribed circle of the section of the ingot, and the core material is further used for preparing annular back plates with other sizes;
(2) cutting the hollow ingot obtained in the step (1) by using a sawing machine, cutting the hollow ingot into annular pieces with equal thickness along the radial direction, and then performing finish machining, wherein the finish machining comprises primary turning and secondary turning, and the primary turning comprises the following steps: and (3) carrying out smooth treatment on the end surface and the inner wall surface of the annular part to remove burrs, wherein the secondary turning treatment comprises the following steps: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
Example 4:
the embodiment provides a processing method of an annular back plate, which comprises the following steps:
(1) boring a cylindrical copper ingot by using a boring machine, forming a through hole along the axial direction of the ingot, wherein the through hole is positioned in the middle of the ingot, the central axis of the through hole is superposed with the central axis of the ingot, so that a core material and a hollow ingot are obtained, the cross section of the through hole in the hollow ingot is circular, the diameter of the cross section of the through hole is 75% of the total size of the section of the ingot, and the core material is further used for preparing annular back plates with other sizes;
(2) cutting the hollow ingot obtained in the step (1) by using a sawing machine, cutting the hollow ingot into annular pieces with equal thickness along the radial direction, and then performing finish machining, wherein the finish machining comprises primary turning and secondary turning, and the primary turning comprises the following steps: and (3) carrying out smooth treatment on the end surface and the inner wall surface of the annular part to remove burrs, wherein the secondary turning treatment comprises the following steps: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
Example 5:
the embodiment provides a processing method of an annular back plate, which comprises the following steps:
(1) firstly, roughly processing a regular hexagonal prism-shaped copper alloy ingot, processing the ingot into a cylinder with the same cross section size, then boring by using a boring machine, forming a through hole along the axial direction of the ingot, wherein the through hole is positioned in the middle of the ingot, the central axis of the through hole is superposed with the central axis of the ingot to obtain a core material and a hollow ingot, the cross section of the through hole in the hollow ingot is circular, the diameter size of the cross section of the through hole is 55% of the diameter size of an outer circle of the section of the ingot, and the core material is further used for preparing annular back plates with other sizes;
(2) cutting the hollow ingot obtained in the step (1) by using a sawing machine, cutting the hollow ingot into annular pieces with equal thickness along the radial direction, and then performing finish machining, wherein the finish machining comprises primary turning and secondary turning, and the primary turning comprises the following steps: and (3) carrying out smooth treatment on the end surface and the inner wall surface of the annular part to remove burrs, wherein the secondary turning treatment comprises the following steps: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
Comparative example 1:
this comparative example provides a method of processing an annular back sheet, which is referenced to the method of example 1, except that: and (3) adjusting the operation sequence of the boring treatment in the step (1) and the cutting treatment in the step (2), wherein the cutting treatment is firstly carried out, and then the boring treatment is carried out.
The annular back plate is prepared by the processing method in the embodiment 1-5, the utilization rate of the ingot is high and can reach more than 85%, the processing efficiency is high, the boring processing is used for finishing the perforation of the whole ingot at one time, the size of the through holes of each cut part is uniform, and the product qualification rate is more than 99.3%; in the comparative example 1, a plurality of cut parts need to be bored, raw materials of the middle part after boring are difficult to utilize, the whole raw material utilization rate is only 51.5%, multiple boring causes uneven product size, the qualification rate is relatively low and is only 96%, the cutting amount in the comparative example 1 is large, and the processing efficiency of the product is obviously lower than that of the working example.
It can be seen from the above examples and comparative examples that the method of the present invention can obtain a large-sized core material by boring the whole ingot, which is convenient for further use, avoids material waste, reduces cost, and has a material utilization rate of over 85%; according to the method, the boring treatment is carried out firstly, so that the boring treatment times can be reduced, the problem of uneven size easily caused by multiple boring treatments is avoided, the product yield is effectively improved and can reach more than 99.3%; the method has less cutting amount during cutting treatment, and can effectively improve the production efficiency of products.
The applicant states that the present invention is illustrated in detail by the above examples, but the present invention is not limited to the above detailed methods, i.e. it is not meant that the present invention must rely on the above detailed methods for its implementation. It will be apparent to those skilled in the art that any modification, equivalent substitution of the process of the invention and addition of ancillary operations, selection of specific means, etc., of the present invention are within the scope and disclosure of the invention.
Claims (10)
1. The processing method of the annular back plate is characterized by comprising the following steps:
(1) boring the ingot to obtain a core material and a hollow ingot;
(2) and (2) cutting the hollow ingot obtained in the step (1), and then performing finish machining to obtain an annular back plate with specified size.
2. The process of claim 1, wherein said ingot of step (1) is a cylindrical ingot;
preferably, the cylindrical ingot comprises a cylindrical ingot or a prismatic ingot.
3. The process of claim 1 or 2, wherein the material of the ingot of step (1) comprises any one or a combination of at least two of aluminum, an aluminum alloy, copper or a copper alloy.
4. A method according to any one of claims 1 to 3, wherein prior to said boring treatment in step (1), said ingot is subjected to rough machining;
preferably, the rough machining comprises turning, and the ingot is machined into a cylinder with the same cross section size.
5. The processing method according to any one of claims 1 to 4, wherein the boring treatment of step (1) is performed using a boring machine;
preferably, the boring treatment in the step (1) is as follows: forming a through hole along the axial direction of the ingot;
preferably, the through-hole is located in a middle position of the ingot, and a central axis of the through-hole coincides with a central axis of the ingot.
6. The processing method according to any one of claims 1 to 5, wherein the cross-sectional dimension of the through-holes in the hollow ingot of step (1) is 50 to 75% of the total dimension of the ingot section;
preferably, the cross-sectional shape of the through-hole is circular.
7. The process of any one of claims 1 to 6, wherein the core material of step (1) is further used for preparing annular back sheets of other sizes.
8. The process according to any one of claims 1 to 7, wherein the cutting treatment of step (2) is: cutting the hollow ingot into annular pieces with equal thickness along the radial direction;
preferably, the cutting process is performed using a sawing machine.
9. The machining method according to any one of claims 1 to 8, wherein the finishing of step (2) includes a primary turning process and a secondary turning process;
preferably, the primary turning process is as follows: the end face and the inner wall face of the annular piece are subjected to smoothing treatment to remove burrs;
preferably, the secondary turning process is: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
10. The process according to any one of claims 1 to 9, characterized in that it comprises the following steps:
(1) firstly, roughly processing a cylindrical ingot, processing the ingot into a cylinder with the same cross section size, then boring by using a boring machine, forming a through hole along the axial direction of the ingot, wherein the through hole is positioned in the middle of the ingot, the central axis of the through hole is overlapped with the central axis of the ingot, so as to obtain a core material and a hollow ingot, the cross section of the through hole in the hollow ingot is circular, the cross section size of the through hole is 50-75% of the total size of the section of the ingot, and the core material is further used for preparing annular back plates with other sizes;
(2) cutting the hollow ingot obtained in the step (1) by using a sawing machine, cutting the hollow ingot into annular pieces with equal thickness along the radial direction, and then performing finish machining, wherein the finish machining comprises primary turning and secondary turning, and the primary turning comprises the following steps: and (3) carrying out smooth treatment on the end surface and the inner wall surface of the annular part to remove burrs, wherein the secondary turning treatment comprises the following steps: and adjusting the size of the annular piece to obtain an annular back plate with specified size.
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| CN105408514A (en) * | 2013-08-14 | 2016-03-16 | 应用材料公司 | Sputtering target with backside cooling grooves |
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| CN110524194A (en) * | 2019-08-30 | 2019-12-03 | 中国航发动力股份有限公司 | A kind of processing method of thin slice annular class part |
| CN110871234A (en) * | 2019-11-22 | 2020-03-10 | 宁波江丰电子材料股份有限公司 | Machining and forming method of annular back plate |
| US20200276627A1 (en) * | 2019-03-01 | 2020-09-03 | Bhaven Chakravarti | Systems and methods for production of metallurgically bonded clad billet and products thereof, and metallurgically bonded clad billet |
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2020
- 2020-11-30 CN CN202011384826.4A patent/CN112518256A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105408514A (en) * | 2013-08-14 | 2016-03-16 | 应用材料公司 | Sputtering target with backside cooling grooves |
| CN107052833A (en) * | 2017-04-24 | 2017-08-18 | 苏州工业职业技术学院 | A kind of collar turnery processing special fixture and its processing method |
| CN107378051A (en) * | 2017-07-21 | 2017-11-24 | 重庆浩珑机械有限公司 | A kind of processing method of deep via |
| US20200276627A1 (en) * | 2019-03-01 | 2020-09-03 | Bhaven Chakravarti | Systems and methods for production of metallurgically bonded clad billet and products thereof, and metallurgically bonded clad billet |
| CN110524194A (en) * | 2019-08-30 | 2019-12-03 | 中国航发动力股份有限公司 | A kind of processing method of thin slice annular class part |
| CN110871234A (en) * | 2019-11-22 | 2020-03-10 | 宁波江丰电子材料股份有限公司 | Machining and forming method of annular back plate |
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Application publication date: 20210319 |