CN110860950B - Manufacturing method based on aluminum nitride ceramic front side metallization for 5G optical module - Google Patents
Manufacturing method based on aluminum nitride ceramic front side metallization for 5G optical module Download PDFInfo
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- CN110860950B CN110860950B CN201911187844.0A CN201911187844A CN110860950B CN 110860950 B CN110860950 B CN 110860950B CN 201911187844 A CN201911187844 A CN 201911187844A CN 110860950 B CN110860950 B CN 110860950B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
Abstract
The invention relates to a manufacturing method based on aluminum nitride ceramic front side metallization for a 5G optical module, which is characterized in that a side surface is clamped into a plane by designing a tool clamp, and then the problem of side surface roughness is solved by grinding and polishing, so that the problem of surface smoothness during side surface photoetching is firstly ensured, the side surface image precision is greatly improved and ensured, and meanwhile, the firmness of side surface metallization is ensured by solving the roughness problem; the problem of cutting in batches can be solved through wax cutting, has guaranteed the straightness that hangs down of product simultaneously.
Description
Technical Field
The invention relates to the field of miniature ceramic products, in particular to a manufacturing method based on aluminum nitride ceramic front side metallization in a 5G optical module.
Background
In the field of miniature ceramic products, the front surface of the product needs a metallized pattern, and the side surface of the product also needs a metallized pattern and needs to be connected with the front surface. Generally, after the aluminum nitride ceramic sheet is cut into strips, the cut side particles become large and rough, and if the side is not treated, the firmness of the gold layer metalized on the side cannot be guaranteed, and the aluminum nitride ceramic sheet is easy to fall off. After the ceramic wafer is cut into strips, the side surfaces of the ceramic wafer are directly mounted and erected into a plane through a clamp and then photoetching is carried out. At present, most of aluminum nitride cutting is still cut in a physical cutting mode, the process of large-scale cutting is mature and long, the aluminum nitride cutting can be directly pasted on a UV film or a blue film for cutting, but for the cut ceramic rod, after the side surface metallization is finished, the uniform cutting becomes a great difficult problem, and the problem of batch cutting cannot be solved due to the fact that the width of the cut ceramic rod basically belongs to the micron-sized single UV film and the blue film, and the problem of cutting angle inclination is easily caused due to the fact that the pasting is not firm. Therefore, a manufacturing method based on aluminum nitride ceramic front side metallization for a 5G optical module, which can ensure the roughness of the side ceramic rod and solve the problem of uneven surface after side assembly, is needed.
Disclosure of Invention
The invention aims to provide a manufacturing method for metallization of the front side of aluminum nitride ceramic based in a 5G optical module, which ensures the roughness of a side ceramic rod and solves the problem of uneven surface after side assembly.
In order to realize the technical purpose, the technical scheme of the invention is as follows: the invention relates to a manufacturing method based on aluminum nitride ceramic front side metallization in a 5G optical module, which comprises the following steps:
s1, cutting the product into strips, and placing the products into a clamp in sequence with the side faces upwards;
s2, placing the side surfaces of all cut products into a plane, and limiting the position of the side surfaces to the left and the right and the up and down;
s3: polishing the product, and carrying out ultrasonic cleaning on the surface of the product after polishing;
s4: after cleaning, photoresist is further subjected to photoresist uniformizing and photoetching, and then the photoresist is removed through gold plating treatment, so that the ceramic rod with the plated side face is obtained;
and S5, clamping and cutting the ceramic rod which is plated with gold, and then putting the ceramic rod into NMP solution at the temperature of 30 ℃ for dewaxing within 45 seconds after cutting to obtain the final finished product.
The invention has the beneficial effects that the side surface is clamped into a plane by designing the tool clamp, and then the roughness problem of the side surface is solved by grinding and polishing, so that the surface smoothness problem during side surface photoetching is ensured, the side surface image precision is greatly improved and ensured, and meanwhile, the firmness of side surface metallization is ensured by solving the roughness problem; the problem of cutting in batches can be solved through wax cutting, has guaranteed the straightness that hangs down of product simultaneously.
Further, the step S3 further includes the following steps:
a1, grinding the paper by using grinding polishing paper with the granularity of 200 meshes for 30 min;
a2, polishing the surface with polishing paper with the granularity of 300 meshes for 60 min;
a3, after polishing, removing the dust ground by the clamp through ultrasonic cleaning, and cleaning the side surface;
a4, finally, soaking the substrate in 12.5 percent hydrochloric acid for 40min to remove the oil stain possibly existing on the surface.
In actual operation, the flatness of the whole assembled body is close to the front surface through a side surface grinding and polishing process, and then the side surface glue spreading is used for photoetching a pattern by using a soft plate.
Further, the step S4 includes the following steps:
and B1, attaching the mask plate to the side surface through the side positioning hole during the photoresist refining photoetching, vacuumizing and exposing, and then performing gold plating treatment.
Further, the step S5 further includes the following steps:
c1, clamping the ceramic rod plated with gold on a plane through a clamp, and aligning the cutting lines;
and C2, directly pressing the mixture on the evenly-distributed ceramic plate by using a clamp, heating, cooling and curing, and directly cutting once.
Further, the step C2 further includes the following steps:
d1, melting the wax at high temperature, cooling and solidifying to make the surface of the wax uniform;
d2, placing the spliced ceramic rods on a ceramic sheet with evenly distributed wax for curing, and directly cutting once again.
In actual operation, because the problem of batch cutting can be caused after the metallization of the side surface is finished, the ceramic rod after splicing is placed on a ceramic sheet with uniform wax for solidification by utilizing the characteristics that the wax is solidified after being cooled at high temperature and is easy to melt in NMP solution, and the cutting quality is ensured by directly cutting once again.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a flow chart of a manufacturing method based on metallization of the front side of aluminum nitride ceramic used in a 5G optical module.
Detailed Description
The present invention will be further described in detail with reference to the following specific examples:
the invention aims to provide a manufacturing method for metallization of the front side of aluminum nitride ceramic based in a 5G optical module, which ensures the roughness of a side ceramic rod and solves the problem of uneven surface after side assembly.
As shown in fig. 1, to achieve the technical purpose, the technical solution of the present invention is: the invention relates to a manufacturing method based on aluminum nitride ceramic front side metallization in a 5G optical module, which comprises the following steps:
s1, cutting the product into strips, and placing the products into a clamp in sequence with the side faces upwards;
s2, placing the side surfaces of all cut products into a plane, and limiting the position of the side surfaces to the left and the right and the up and down;
s3: polishing the product, and carrying out ultrasonic cleaning on the surface of the product after polishing;
s4: after cleaning, photoresist is further subjected to photoresist uniformizing and photoetching, and then the photoresist is removed through gold plating treatment, so that the ceramic rod with the plated side face is obtained;
and S5, clamping and cutting the ceramic rod which is plated with gold, and then putting the ceramic rod into NMP solution at the temperature of 30 ℃ for dewaxing within 45 seconds after cutting to obtain the final finished product.
The invention has the beneficial effects that the side surface is clamped into a plane by designing the tool clamp, and then the roughness problem of the side surface is solved by grinding and polishing, so that the surface smoothness problem during side surface photoetching is ensured, the side surface image precision is greatly improved and ensured, and meanwhile, the firmness of side surface metallization is ensured by solving the roughness problem; the problem of cutting in batches can be solved through wax cutting, has guaranteed the straightness that hangs down of product simultaneously.
Further, the step S3 further includes the following steps:
a1, grinding the paper by using grinding polishing paper with the granularity of 200 meshes for 30 min;
a2, polishing the surface with polishing paper with the granularity of 300 meshes for 60 min;
a3, after polishing, removing the dust ground by the clamp through ultrasonic cleaning, and cleaning the side surface;
a4, finally, soaking the substrate in 12.5 percent hydrochloric acid for 40min to remove the oil stain possibly existing on the surface.
In actual operation, the flatness of the whole assembled body is close to the front surface through a side surface grinding and polishing process, and then the side surface glue spreading is used for photoetching a pattern by using a soft plate.
In actual operation, a ceramic rod is clamped into a plane by designing a tool clamp, the spliced plane is ground and polished, a cut aluminum nitride side crystal is damaged and suspended on the surface of a substrate, and if direct gold plating is not carried out, the phenomenon that a gold layer is not firm is caused; when getting rid of the big granule behind the cutting of side surface, because the side must exist through assembling the surface again and be less than unevenness's the condition, also let the concatenation back plane directly be close to a plane through the mode of polishing, also will suspend simultaneously and get rid of at the large granule on surface, guaranteed the gold layer firmness of side.
Further, the step S4 includes the following steps:
and B1, attaching the mask plate to the side surface through the side positioning hole during the photoresist refining photoetching, vacuumizing and exposing, and then performing gold plating treatment.
Further, the step S5 further includes the following steps:
c1, clamping the ceramic rod plated with gold on a plane through a clamp, and aligning the cutting lines;
and C2, directly pressing the mixture on the evenly-distributed ceramic plate by using a clamp, heating, cooling and curing, and directly cutting once.
Further, the step C2 further includes the following steps:
d1, melting the wax at high temperature, cooling and solidifying to make the surface of the wax uniform;
d2, placing the spliced ceramic rods on a ceramic sheet with evenly distributed wax for curing, and directly cutting once again.
In actual operation, because the problem of batch cutting can be caused after the metallization of the side surface is finished, the ceramic rod after splicing is placed on a ceramic sheet with uniform wax for solidification by utilizing the characteristics that the wax is solidified after being cooled at high temperature and is easy to melt in NMP solution, and the cutting quality is ensured by directly cutting once again.
In the actual operation, a product integrated on a large sheet is cut into strips, the product is placed in a clamp with the side faces of the product standing up and the side faces of the product facing upwards in sequence, all the side faces are placed into a plane, the left side and the right side and the upper side and the lower side are limited, the surface of the product is ground and polished by polishing paper with the granularity of 200 meshes for 30min and the granularity of 300 meshes for 60min, dust ground by the clamp is removed by ultrasonic cleaning, the side surface is cleaned, oil stain (which can be determined as protection content) possibly existing on the surface is removed by soaking the product in 12.5% hydrochloric acid, glue leveling and photoetching are carried out, a mask plate is attached to the side faces through side face positioning holes, vacuum exposure is carried out, gold plating is carried out again, photoresist is removed, a ceramic rod with the side faces plated is obtained, finally, the ceramic rod with gold plating is clamped on a plane through the clamp, a cutting line is aligned, and is directly pressed on the ceramic rod with wax leveling by the clamp, heating, cooling and solidifying, directly cutting once again, cutting the ceramic rods spliced together in batches, and then putting the ceramic rods into NMP solution (30 ℃) to remove wax within 45 seconds after cutting to obtain the final finished product.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (2)
1. A manufacturing method based on aluminum nitride ceramic front side metallization for a 5G optical module is characterized by comprising the following steps:
s1, cutting the product into strips, and placing the products into a clamp in sequence with the side faces upwards;
s2, placing the side surfaces of all cut products into a plane, and limiting the position of the side surfaces to the left and the right and the up and down;
s3: polishing the product, performing ultrasonic cleaning on the surface of the product after polishing, grinding the product for 30min by using grinding polishing paper with the granularity of 200 meshes, then polishing the surface by using polishing paper with the granularity of 300 meshes for 60min, removing dust ground by a clamp by ultrasonic cleaning after polishing, cleaning the surface of the side, and finally removing possible oil stains on the surface by soaking the product in 12.5% hydrochloric acid for 40 min;
s4: after cleaning, photoresist is homogenized and photoetched, then gold plating treatment is carried out again, a ceramic rod with a plated side face is obtained after photoresist is removed, and during photoresist homogenizing and photoetching, a mask plate is attached to the side face through a side face positioning hole, vacuum pumping exposure is carried out, and then gold plating treatment is carried out;
and S5, clamping and cutting the ceramic rod which is plated with gold, putting the ceramic rod into NMP solution after cutting, removing wax in 45 seconds at the temperature of 30 ℃ to obtain a final finished product, clamping the ceramic rod which is plated with gold on a plane through a clamp, aligning cutting lines, directly pressing the ceramic rod on a uniformly-cured ceramic sheet through the clamp, heating, cooling and curing, and directly cutting at one time.
2. The method as claimed in claim 1, wherein the step S5 further comprises the following steps:
d1, melting the wax at high temperature, cooling and solidifying to make the surface of the wax uniform;
d2, placing the spliced ceramic rods on a ceramic sheet with evenly distributed wax for curing, and directly cutting once again.
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| DE10260233B4 (en) * | 2002-12-20 | 2016-05-19 | Infineon Technologies Ag | Method of attaching a workpiece to a solid on a workpiece carrier and workpiece carrier |
| CN101131937A (en) * | 2006-08-25 | 2008-02-27 | 重庆卓为电子技术有限公司 | Manufacturing technique for three-dimensional structure carrier of ceramic metal membrane |
| CN108381379B (en) * | 2018-04-13 | 2019-05-24 | 中国电子科技集团公司第四十六研究所 | The polishing method that aluminum-nitride single crystal piece electrobrightening and chemically mechanical polishing combine |
| CN108624851A (en) * | 2018-04-25 | 2018-10-09 | 中国振华集团云科电子有限公司 | A kind of special ceramics surface metal-layer exterior appearance changes method and new ceramics substrate |
| CN109483752A (en) * | 2018-11-19 | 2019-03-19 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of method for processing forming of loose state ceramic part |
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Address after: 215122 2-1-b, 2-2-b, phase III, Zhongxin science and technology industrial workshop, No. 6, Louyang Road, Suzhou Industrial Park, Suzhou, Jiangsu Patentee after: Suzhou Houpu Sensing Technology Co.,Ltd. Address before: 215122 2-1-b, 2-2-b, phase III, Zhongxin science and technology industrial workshop, No. 6, Louyang Road, Suzhou Industrial Park, Suzhou, Jiangsu Patentee before: SUZHOU JINGXING PHOTOELECTRIC TECHNOLOGY CO.,LTD. |