CN110850519B - 适用7.5-12μm波段的高效金反射膜及其制备方法 - Google Patents

适用7.5-12μm波段的高效金反射膜及其制备方法 Download PDF

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CN110850519B
CN110850519B CN201911106006.6A CN201911106006A CN110850519B CN 110850519 B CN110850519 B CN 110850519B CN 201911106006 A CN201911106006 A CN 201911106006A CN 110850519 B CN110850519 B CN 110850519B
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李刚
杨伟声
张友良
田湫
董力
吴栋才
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Yunnan North Optical Technology Co ltd
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Abstract

本发明公开了适用7.5‑12μm波段的高效金反射膜及其制备方法，涉及红外镀膜技术领域，为解决现有技术中，金反射膜存在的在7.5‑12μm波段的平均反射率为98.5％，无法很好地满足新型光学仪器的使用要求的技术问题，本发明的技术方案如下：包括从下至上的微晶玻璃基底层和空气层，还包括设置于微晶玻璃基底层和空气层之间的膜层结构，所述膜层结构为从下至上依次连接的Cr层、Au层、Y2O3层、ZnSe层、YbF3层、Ge层、ZnSe层、Ge层、ZnSe层。

Description

适用7.5-12μm波段的高效金反射膜及其制备方法
技术领域
本发明涉及红外镀膜技术领域，尤其涉及适用7.5-12μm波段的高效金反射膜及其制备方法。
背景技术
金反射膜，在近红外、中红外和远红外都有很高的反射率，其镀制方式相对简单，与铝、银反射膜相比，它在大气中更不易污染，因而被广泛使用。但随着现代光学仪器设备的发展，对金反射膜的要求越来越高，特别是反射率要求。单独一层金膜已经无法满足使用要求。现有技术的金反射膜，包括微晶玻璃基底层和空气层在内的膜层数目为5层，膜层结构为：微晶玻璃︱Cr、Au、Al2O3︱空气。虽然膜层层数不多，易于镀制，但其在7.5-12μm波段的平均反射率为98.5％，无法很好地满足新型光学仪器的使用要求，限制了高质量红外光学元件的发展。
发明内容
为解决现有技术中，金反射膜存在的在7.5-12μm波段的平均反射率为98.5％，无法很好地满足新型光学仪器的使用要求的技术问题，本发明的技术方案如下：
本发明中的适用7.5-12μm波段的高效金反射膜，包括从下至上的微晶玻璃基底层和空气层，还包括设置于微晶玻璃基底层和空气层之间的膜层结构，所述膜层结构为从下至上依次连接的Cr层、Au层、Y2O3层、ZnSe层、YbF3层、Ge层、ZnSe层、Ge层、ZnSe层。所述膜层结构，既满足高、低折射率材料交替的薄膜结构，又实现了7.5-12μm特定波段反射率的提升，而且还保证了膜层与基底、膜层与膜层之间较好的结合能力。
本发明中的适用7.5-12μm波段的高效金反射膜的制作方法，包括如下步骤：
步骤S1，在微晶玻璃基底层表面依次镀制Cr层和Au层，采用电子束加热蒸发方式镀制Cr层，蒸发速率控制在1-3nm/s，采用电阻加热蒸发方式镀制Au层，蒸发速率控制在3-5nm/s；
步骤S2，采用考夫曼离子源辅助沉积方式，镀制剩余的Y2O3层、ZnSe层、YbF3层、Ge层、ZnSe层、Ge层、ZnSe层。
进一步，步骤S1中，镀制温度控制在90-110℃。
进一步，步骤S2中，镀制温度控制在150-170℃。
进一步，步骤S2中，考夫曼离子源辅助沉积方式中的控制参数为：充入气体为氩气，气体流量2.8-3.2sccm，阳极电压70-80V，阴极电压9-10V，阴极电流保持在10-14A。
本发明中的适用7.5-12μm波段的高效金反射膜及其制备方法，与现有技术相比，其有益效果为：
本发明中的适用7.5-12μm波段的高效金反射膜及其制备方法，通过在金膜层表面设计镀制多层红外介质材料膜层，提升了反射膜的反射率；利用Y2O3材料膜层连接，提升多层红外介质材料膜层与金膜的匹配结合能力，保证了膜层的牢固性，在实际生产过程中可有效避免膜层出现脱膜而导致废品率高的情况。
附图说明
图1是本发明中适用7.5-12μm波段的高效金反射膜的断面图；
图2是本发明实例2制备所得高效金反射膜的反射率光谱曲线图。
具体实施方式
下面将结合本发明的附图，对本发明的技术方案进行清楚、完整地描述。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
如图1所示，本发明的适用7.5-12μm波段的高效金反射膜，所述金反射膜包括微晶玻璃基底层和空气层在内的膜层数目为11层，膜层结构为从下至上依次连接的Cr层、Au层、Y2O3层、ZnSe层、YbF3层、Ge层、ZnSe层、Ge层、ZnSe层。
在微晶玻璃基底层表面依次镀制Cr和Au膜层的过程中，镀制温度控制在100±10℃，不采用考夫曼离子源辅助沉积；
在Au膜层表面依次镀制多层红外介质材料膜层的过程中，镀制温度控制在160±10℃，采用考夫曼离子源辅助沉积，充入气体为氩气，气体流量3.0±0.2sccm，阳极电压70-80V，阴极电压9-10V，阴极电流保持在10-14A。
实施例1
选用Φ25.4×3mm的平面微晶玻璃基底材料，在波段为7.5-12μm的范围内对基底一个表面的表层，在100℃下，首先镀制Cr膜层和Au膜层，再在165℃下，采用考夫曼离子源辅助沉积方式，充入氩气气体流量3.0sccm，阳极电压75V，阴极电压9V，阴极电流10A，镀制剩余7层红外介质材料膜层，得到本发明的所述适用7.5-12μm波段的高效金反射膜。
对所述微晶玻璃基底高效金反射膜进行反射率测量，测得微晶玻璃高效金反射膜的平均反射率为99.32％。
将该零件按照国军标GJB2485-1995标准，对所述微晶玻璃高效金反射膜进行附着力、湿热测定试验，试验后，无脱膜现象。
实施例2
选用Φ50×5mm的平面微晶玻璃基底材料，在波段为7.5-12μm的范围内对基底一个表面的表层，在105℃下，首先镀制Cr膜层和Au膜层，再在165℃下，采用考夫曼离子源辅助沉积方式，充入氩气气体流量3.0sccm，阳极电压70V，阴极电压10V，阴极电流12A，镀制剩余7层红外介质材料膜层，得到本发明的所述适用7.5-12μm波段的高效金反射膜。
如图2所示，对所述微晶玻璃基底高效金反射膜进行反射率测量，测得微晶玻璃高效金反射膜的平均反射率为99.50％。
将该零件按照国军标GJB2485-1995标准，对所述微晶玻璃高效金反射膜进行附着力、湿热测定试验，试验后，无脱膜现象。
实施例3
选用30×30mm的平面微晶玻璃基底材料，在波段为7.5-12μm的范围内对基底一个表面的表层，在100℃下，首先镀制Cr膜层和Au膜层，再在160℃下，采用考夫曼离子源辅助沉积方式，充入氩气气体流量3.0sccm，阳极电压70V，阴极电压9.5V，阴极电流11A，镀制剩余7层红外介质材料膜层，得到本发明的所述适用7.5-12μm波段的高效金反射膜。
对所述微晶玻璃基底高效金反射膜进行反射率测量，测得微晶玻璃高效金反射膜的平均反射率为99.45％。
将该零件按照国军标GJB2485-1995标准，对所述微晶玻璃高效金反射膜进行附着力、湿热测定试验，试验后，无脱膜现象。
实施例4
选用50×50mm的平面微晶玻璃基底材料，在波段为7.5-12μm的范围内对基底一个表面的表层，在110℃下，首先镀制Cr膜层和Au膜层，再在170℃下，采用考夫曼离子源辅助沉积方式，充入氩气气体流量3.0sccm，阳极电压80V，阴极电压10V，阴极电流14A，镀制剩余7层红外介质材料膜层，得到本发明的所述适用7.5-12μm波段的高效金反射膜。
对所述微晶玻璃基底高效金反射膜进行反射率测量，测得微晶玻璃高效金反射膜的平均反射率为99.37％。
将该零件按照国军标GJB2485-1995标准，对所述微晶玻璃高效金反射膜进行附着力、湿热测定试验，试验后，无脱膜现象。
以上所述，仅为本发明的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应以所述权利要求的保护范围为准。

Claims (5)

1.适用7.5-12μm波段的高效金反射膜，包括从下至上的微晶玻璃基底层和空气层，其特征在于，还包括设置于微晶玻璃基底层和空气层之间的膜层结构，所述膜层结构为从下至上依次连接的Cr层、Au层、Y2O3层、ZnSe层、YbF3层、Ge层、ZnSe层、Ge层、ZnSe层。
2.适用7.5-12μm波段的高效金反射膜的制作方法，其特征在于，包括如下步骤：
步骤S1，在微晶玻璃基底层表面依次镀制Cr层和Au层；
步骤S2，采用考夫曼离子源辅助沉积方式，镀制剩余的Y2O3层、ZnSe层、YbF3层、Ge层、ZnSe层、Ge层、ZnSe层。
3.根据权利要求2所述的适用7.5-12μm波段的高效金反射膜的制备方法，其特征在于，步骤S1中，镀制温度控制在90-110℃。
4.根据权利要求2所述的适用7.5-12μm波段的高效金反射膜的制备方法，其特征在于，步骤S2中，镀制温度控制在150-170℃。
5.根据权利要求2所述的适用7.5-12μm波段的高效金反射膜的制备方法，其特征在于，步骤S2中，考夫曼离子源辅助沉积方式中的控制参数为：充入气体为氩气，气体流量2.8-3.2sccm，阳极电压70-80V，阴极电压9-10V，阴极电流保持在10-14A。
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1420367A (zh) * 2001-11-21 2003-05-28 中国科学院光电技术研究所 金属增强反射膜及其制作方法
JP2003302520A (ja) * 2002-04-10 2003-10-24 Sumitomo Electric Ind Ltd 赤外レーザ用反射ミラーとその製造方法
JP2013041124A (ja) * 2011-08-17 2013-02-28 Mitsubishi Electric Corp 赤外光学膜、スキャンミラーおよびレーザ加工機
CN103412350A (zh) * 2013-08-16 2013-11-27 中国船舶重工集团公司第七一七研究所 一种多波段增强型金属反射膜及其制备方法
JP2014228611A (ja) * 2013-05-21 2014-12-08 三菱電機株式会社 赤外光学膜、円偏光ミラー、円偏光ミラーを備えたレーザ加工機、および赤外光学膜の製造方法
CN105143930A (zh) * 2013-02-28 2015-12-09 康宁股份有限公司 用于高反射镜子的增强、耐用银涂层堆叠
JP2016136167A (ja) * 2013-05-21 2016-07-28 三菱電機株式会社 赤外光学膜、円偏光ミラー、円偏光ミラーを備えたレーザ加工機、および赤外光学膜の製造方法
CN108032145A (zh) * 2017-12-01 2018-05-15 中国科学院长春光学精密机械与物理研究所 射频离子源工作参数优化方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1420367A (zh) * 2001-11-21 2003-05-28 中国科学院光电技术研究所 金属增强反射膜及其制作方法
JP2003302520A (ja) * 2002-04-10 2003-10-24 Sumitomo Electric Ind Ltd 赤外レーザ用反射ミラーとその製造方法
JP2013041124A (ja) * 2011-08-17 2013-02-28 Mitsubishi Electric Corp 赤外光学膜、スキャンミラーおよびレーザ加工機
CN105143930A (zh) * 2013-02-28 2015-12-09 康宁股份有限公司 用于高反射镜子的增强、耐用银涂层堆叠
JP2014228611A (ja) * 2013-05-21 2014-12-08 三菱電機株式会社 赤外光学膜、円偏光ミラー、円偏光ミラーを備えたレーザ加工機、および赤外光学膜の製造方法
JP2016136167A (ja) * 2013-05-21 2016-07-28 三菱電機株式会社 赤外光学膜、円偏光ミラー、円偏光ミラーを備えたレーザ加工機、および赤外光学膜の製造方法
CN103412350A (zh) * 2013-08-16 2013-11-27 中国船舶重工集团公司第七一七研究所 一种多波段增强型金属反射膜及其制备方法
CN108032145A (zh) * 2017-12-01 2018-05-15 中国科学院长春光学精密机械与物理研究所 射频离子源工作参数优化方法

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