CN110846620A - Surface metallization method for flexible antenna made of resin-based carbon fiber composite material - Google Patents
Surface metallization method for flexible antenna made of resin-based carbon fiber composite material Download PDFInfo
- Publication number
- CN110846620A CN110846620A CN201911107874.6A CN201911107874A CN110846620A CN 110846620 A CN110846620 A CN 110846620A CN 201911107874 A CN201911107874 A CN 201911107874A CN 110846620 A CN110846620 A CN 110846620A
- Authority
- CN
- China
- Prior art keywords
- flexible antenna
- resin
- carbon fiber
- fiber composite
- based carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a surface metallization method of a flexible antenna made of a resin-based carbon fiber composite material, which comprises the following steps: cleaning the surface of the flexible antenna; putting the cleaned flexible antenna into a vacuum chamber of high-power magnetron sputtering equipment; vacuumizing the vacuum chamber, and establishing background vacuum; introducing argon; forming radio frequency gas plasma in the vacuum chamber, and removing impurities on the surface of the flexible antenna by sputtering and cleaning; depositing metal ions on the surface of the resin-based carbon fiber composite material to form a flexible antenna surface metallized film layer; stopping introducing the argon; deflating the vacuum chamber; and taking out the flexible antenna. The method has the advantages that the high-bonding-force metallized film layer on the surface of the resin-based carbon fiber composite flexible antenna is prepared by utilizing a twin-target symmetric bipolar high-power pulse magnetron sputtering technology, the metallized film layer can be prevented from falling off or being damaged locally to lose efficacy under the condition that the flexible antenna is repeatedly curled, and the reliability of the curled flexible antenna is improved.
Description
Technical Field
The invention relates to the technical field of surface treatment, in particular to a surface metallization method for a flexible antenna made of a resin-based carbon fiber composite material.
Background
High resolution remote sensing places demands on ultra-large reflector antennas. In order to realize light weight, resin-based carbon fiber composite materials are generally adopted to manufacture antennas; due to envelope limitations of the launch vehicle, a rollable flexible antenna needs to be employed; in order to meet the thermal control requirement and prolong the service life of the antenna, the surface of the antenna needs to be metallized. The resin-based carbon fiber composite material surface metallization layer prepared by adopting traditional processes such as spraying, evaporation and the like can basically meet the use requirements of a conventional solid-surface antenna with a shape which is not changed, but for a flexible antenna which needs to be repeatedly curled, the metallization film layer can fall off or be locally damaged, rapidly fails under the action of thermal stress formed by space alternating temperature, and cannot meet the use requirements. Therefore, a method for metalizing the surface of the flexible antenna made of the resin-based carbon fiber composite material is needed, and the preparation of the metalized film layer with high bonding force on the surface of the flexible antenna is realized.
In the prior art, patent CN110289487A discloses a method for manufacturing an antenna by using vacuum plating and laser process, which discloses performing vapor deposition or vacuum sputtering on a metal layer on a substrate surface to metallize the surface of the substrate to obtain an antenna blank, wherein the metal layer is a copper layer and a protective layer covering the copper layer, but the substrate is a solid surface which is not deformable, and therefore, the method is not suitable for a flexible antenna which needs to be repeatedly curled.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a surface metallization method of a resin-based carbon fiber composite flexible antenna, which utilizes a twin target symmetric bipolar high-power pulse magnetron sputtering technology to realize the preparation of a high-bonding-force metallization film layer on the surface of the resin-based carbon fiber composite flexible antenna and can realize the preparation of the high-bonding-force metallization film layer on the surface of the resin-based carbon fiber composite flexible antenna.
The purpose of the invention is realized by the following technical scheme:
the invention provides a surface metallization method for a flexible antenna made of a resin-based carbon fiber composite material, which comprises the following steps:
step 1, cleaning the surface of a resin-based carbon fiber composite flexible antenna;
step 2, putting the cleaned resin-based carbon fiber composite flexible antenna into a vacuum chamber of high-power magnetron sputtering equipment, and installing and fixing the antenna on a workbench;
step 3, vacuumizing a vacuum chamber of the high-power magnetron sputtering equipment, and establishing background vacuum;
step 4, opening a gas valve and introducing argon;
step 5, turning on a radio frequency power supply, forming radio frequency gas plasma in the vacuum chamber, simultaneously turning on a bias power supply, and carrying out sputtering cleaning to remove impurities on the surface of the resin-based carbon fiber composite flexible antenna;
step 6, turning on a high-power pulse magnetron sputtering power supply and a bias power supply, and depositing metal ions on the surface of the resin-based carbon fiber composite material to form a flexible antenna surface metallized film layer;
step 7, closing the gas valve and stopping introducing argon;
step 8, exhausting the vacuum chamber of the high-power magnetron sputtering equipment;
and 9, taking out the resin-based carbon fiber composite flexible antenna.
Preferably, the resin-based carbon fiber composite flexible antenna prepared in the step 1 is prepared by an autoclave curing process by using an M55J/AG80 composite material, has a thickness of 0.24-0.4 mm, and is also applicable to other flexible non-metallic materials.
Preferably, the high-power magnetron sputtering device in the step 2 is a symmetric bipolar high-power pulse magnetron sputtering device adopting twin targets, and other devices cannot realize the high-power magnetron sputtering device because plasmas with high ionization rates cannot be generated.
Preferably, the background vacuum of the step 3 is 1-5 multiplied by 10-3Pa。
Preferably, the argon flow in step 4 is 50. + -.1 sccm.
Preferably, the working power of the radio frequency power supply in the step 5 is 300 +/-50W, the working amplitude of the bias power supply is 5 +/-1 kV, and the working frequency is 100 +/-5 Hz.
Preferably, the working power of the magnetron sputtering power supply in the step 6 is 400 +/-50W, the working frequency is 2000 +/-5 Hz, and the working amplitude of the bias power supply is 100 +/-10V. The parameters are summarized through a process parameter optimization test, and have influence on the film bonding force, uniformity, efficiency and the like, and improper process parameters can cause negative influences such as reduction of the film bonding force, poor uniformity and the like, and seriously affect the product quality.
Preferably, the metal ions deposited on the surface of the flexible antenna in the step 6 are silver ions or aluminum ions.
Preferably, the thickness of the metallized film layer on the surface of the flexible antenna in the step 6 is 1-6 um, and the bonding force of the film layer is more than or equal to 5N/cm.
Compared with the prior art, the invention has the following beneficial effects:
the surface metallization method for the resin-based carbon fiber composite flexible antenna provided by the invention can realize the preparation of the high-bonding-force metallized film layer on the surface of the resin-based carbon fiber composite flexible antenna, and prevent the metallized film layer from falling off or being damaged locally to lose efficacy under the condition that the flexible antenna is repeatedly curled.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of a high power magnetron sputtering apparatus; wherein 101 is a vacuum chamber; 102 is a twin target; 103 is an air valve; 104 is a resin-based carbon fiber composite flexible antenna; 105 is a workbench; 106 is a bias power supply; 107 is a vacuum pump; 108 is a high-power pulse magnetron sputtering power supply;
fig. 2 is a flowchart of a surface metallization method of a resin-based carbon fiber composite flexible antenna.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
Example 1
The embodiment provides a method for metalizing the surface of a flexible antenna made of a resin-based carbon fiber composite material, the flow of which is shown in fig. 2, and the method comprises the following steps:
step 1, cleaning the surface of a resin-based carbon fiber composite flexible antenna 104;
step 2, placing the resin-based carbon fiber composite flexible antenna 104 into a vacuum chamber 101 of high-power magnetron sputtering equipment (shown in figure 1), and installing and fixing the antenna on a workbench 105; the high-power magnetron sputtering device is provided with a twin target 102;
step 3, vacuumizing a vacuum chamber 101 of the high-power magnetron sputtering equipment by using a vacuum pump 107, and establishing background vacuum;
step 4, opening the gas valve 103 and introducing argon;
step 5, turning on a radio frequency power supply, forming radio frequency gas plasma in the vacuum chamber 101, turning on a bias power supply 106, and removing impurities on the surface of the resin-based carbon fiber composite flexible antenna 104 by sputtering cleaning;
step 6, turning on a high-power pulse magnetron sputtering power supply 108 and a bias power supply 106, and depositing metal ions on the surface of the resin-based carbon fiber composite material to realize surface metallization of the flexible antenna;
step 7, closing the gas valve 103 and stopping introducing the argon gas;
step 8, exhausting the vacuum chamber 101 of the high-power magnetron sputtering equipment;
and 9, taking out the resin-based carbon fiber composite flexible antenna 104.
The resin-based carbon fiber composite flexible antenna prepared in the step 1 is prepared by an autoclave curing process by using an M55J/AG80 composite material, and the thickness of the antenna is 0.3 mm;
the high-power magnetron sputtering equipment in the step 2 is symmetrical bipolar high-power pulse magnetron sputtering equipment adopting twin targets;
the background vacuum of the step 3 is 3 multiplied by 10-3Pa；
The argon flow in the step 4 is 50 sccm;
the working power of the radio frequency power supply in the step 5 is 300W, the working amplitude of the bias power supply is 5kV, and the working frequency is 100 Hz;
the working power of the magnetron sputtering power supply in the step 6 is 400W, the working frequency is 2000Hz, the working amplitude of the bias power supply is 100V, and the metal ions deposited on the surface of the flexible antenna are silver ions.
The thickness of the obtained flexible antenna surface metallized film layer is 2um, and the bonding force of the film layer is not less than 5N/cm and is 5.5N/cm.
Through the use test, the metallized film layer does not fall off or be locally damaged under the condition that the flexible antenna is repeatedly curled for 15 times.
Example 2
This embodiment provides a method for metallizing a surface of a flexible antenna made of a resin-based carbon fiber composite material, which is substantially the same as in embodiment 1, except that:
the resin-based carbon fiber composite flexible antenna prepared in the step 1 is prepared by an autoclave curing process by using an M55J/AG80 composite material, and the thickness of the antenna is 0.24 mm;
the high-power magnetron sputtering equipment in the step 2 is symmetrical bipolar high-power pulse magnetron sputtering equipment adopting twin targets;
the background vacuum of the step 3 is 1 multiplied by 10-3Pa；
The working power of the radio frequency power supply in the step 5 is 350W, the working amplitude of the bias power supply is 6kV, and the working frequency is 105 Hz;
the working power of the magnetron sputtering power supply in the step 6 is 450W, the working frequency is 2000Hz, the working amplitude of the bias power supply is 90V, and the metal ions deposited on the surface of the flexible antenna are silver ions.
The thickness of the obtained flexible antenna surface metallized film layer is 6um, and the bonding force of the film layer is not less than 5N/cm and is 5.1N/cm.
Through the use test, the metallized film layer does not fall off or be locally damaged under the condition that the flexible antenna is repeatedly curled for 15 times.
Example 3
This embodiment provides a method for metallizing a surface of a flexible antenna made of a resin-based carbon fiber composite material, which is substantially the same as in embodiment 1, except that:
the resin-based carbon fiber composite flexible antenna prepared in the step 1 is prepared by an autoclave curing process by using an M55J/AG80 composite material, and the thickness of the antenna is 0.4 mm;
the high-power magnetron sputtering equipment in the step 2 is symmetrical bipolar high-power pulse magnetron sputtering equipment adopting twin targets;
the background vacuum of the step 3 is 5 multiplied by 10-3Pa；
The working power of the radio frequency power supply in the step 5 is 250W, the working amplitude of the bias power supply is 5kV, and the working frequency is 100 Hz;
the working power of the magnetron sputtering power supply in the step 6 is 350W, the working frequency is 2000Hz, the working amplitude of the bias power supply is 110V, and the metal ions deposited on the surface of the flexible antenna are aluminum ions.
The thickness of the obtained flexible antenna surface metallized film layer is 1um, and the bonding force of the film layer is not less than 5N/cm and is 5.2N/cm.
Through the use test, the metallized film layer does not fall off or be locally damaged under the condition that the flexible antenna is repeatedly curled for 15 times.
In summary, the invention provides a surface metallization method for a flexible antenna made of a resin-based carbon fiber composite material, which utilizes a twin target symmetric bipolar high-power pulse magnetron sputtering technology to realize the preparation of a high-bonding-force metallization film layer on the surface of the flexible antenna made of the resin-based carbon fiber composite material, can prevent the metallization film layer from falling off or being damaged locally to fail under the condition that the flexible antenna is repeatedly curled, and improves the reliability of the curled flexible antenna.
The invention has many applications, and the above description is only a preferred embodiment of the invention. It should be noted that the above examples are only for illustrating the present invention, and are not intended to limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications can be made without departing from the principles of the invention and these modifications are to be considered within the scope of the invention.
Claims (9)
1. A surface metallization method for a flexible antenna made of a resin-based carbon fiber composite material is characterized by comprising the following steps:
step 1, cleaning the surface of a resin-based carbon fiber composite flexible antenna;
step 2, putting the cleaned resin-based carbon fiber composite flexible antenna into a vacuum chamber of high-power magnetron sputtering equipment, and installing and fixing the antenna on a workbench;
step 3, vacuumizing a vacuum chamber of the high-power magnetron sputtering equipment, and establishing background vacuum;
step 4, opening a gas valve and introducing argon;
step 5, turning on a radio frequency power supply, forming radio frequency gas plasma in the vacuum chamber, simultaneously turning on a bias power supply, and carrying out sputtering cleaning to remove impurities on the surface of the resin-based carbon fiber composite flexible antenna;
step 6, turning on a high-power pulse magnetron sputtering power supply and a bias power supply, and depositing metal ions on the surface of the resin-based carbon fiber composite material to form a flexible antenna surface metallized film layer;
step 7, closing the gas valve and stopping introducing argon;
step 8, exhausting the vacuum chamber of the high-power magnetron sputtering equipment;
and 9, taking out the resin-based carbon fiber composite flexible antenna.
2. The surface metallization method of the resin-based carbon fiber composite flexible antenna in the claim 1, wherein the resin-based carbon fiber composite flexible antenna in the step 1 is prepared by an autoclave curing process by using M55J/AG80 composite materials, and the thickness of the antenna is 0.24-0.4 mm.
3. The method for metalizing the surface of the resin-based carbon fiber composite flexible antenna according to claim 1, wherein the high-power magnetron sputtering device in the step 2 is a symmetric bipolar high-power pulse magnetron sputtering device adopting a twin target.
4. The method for metalizing the surface of the resin-based carbon fiber composite flexible antenna according to claim 1, wherein the background vacuum of the step 3 is 1-5 x 10-3Pa。
5. The method for metallizing the surface of a resin-based carbon fiber composite flexible antenna according to claim 1, wherein the argon flow in step 4 is 50 ± 1 sccm.
6. The method for metalizing the surface of the resin-based carbon fiber composite flexible antenna according to claim 1, wherein the radio frequency power supply in the step 5 has an operating power of 300 +/-50W, a bias power supply has an operating amplitude of 5 +/-1 kV, and an operating frequency of 100 +/-5 Hz.
7. The method for metalizing the surface of the resin-based carbon fiber composite flexible antenna according to claim 1, wherein the magnetron sputtering power supply in the step 6 has a working power of 400 +/-50W, a working frequency of 2000 +/-5 Hz, and a bias power supply working amplitude of 100 +/-10V.
8. The method for metalizing the surface of the flexible antenna made of the resin-based carbon fiber composite material according to claim 1, wherein the metal ions deposited on the surface of the flexible antenna in the step 6 are silver ions or aluminum ions.
9. The surface metallization method of the resin-based carbon fiber composite flexible antenna, according to claim 1, wherein the thickness of the metallized film layer on the surface of the flexible antenna in the step 6 is 1-6 um, and the bonding force of the film layer is not less than 5N/cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911107874.6A CN110846620A (en) | 2019-11-13 | 2019-11-13 | Surface metallization method for flexible antenna made of resin-based carbon fiber composite material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911107874.6A CN110846620A (en) | 2019-11-13 | 2019-11-13 | Surface metallization method for flexible antenna made of resin-based carbon fiber composite material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110846620A true CN110846620A (en) | 2020-02-28 |
Family
ID=69600201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911107874.6A Pending CN110846620A (en) | 2019-11-13 | 2019-11-13 | Surface metallization method for flexible antenna made of resin-based carbon fiber composite material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110846620A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114075657A (en) * | 2021-11-04 | 2022-02-22 | 核工业西南物理研究院 | Method for improving air tightness of resin-based composite material forming member |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017211419A1 (en) * | 2016-06-09 | 2017-12-14 | Zanini Auto Grup, S.A. | Radome for vehicles |
| CN108315692A (en) * | 2017-12-22 | 2018-07-24 | 兰州空间技术物理研究所 | A method of preparing metal film on polyimide substrate |
| CN108565546A (en) * | 2016-12-09 | 2018-09-21 | 蓝思科技（长沙）有限公司 | The method of antenna and the glass back cover with antenna are made in glass back cover |
| CN109881154A (en) * | 2019-04-25 | 2019-06-14 | 北京洁尔爽高科技有限公司 | A kind of product for the technique and preparation forming metal composite layer on fiber or fabric |
-
2019
- 2019-11-13 CN CN201911107874.6A patent/CN110846620A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017211419A1 (en) * | 2016-06-09 | 2017-12-14 | Zanini Auto Grup, S.A. | Radome for vehicles |
| CN108565546A (en) * | 2016-12-09 | 2018-09-21 | 蓝思科技（长沙）有限公司 | The method of antenna and the glass back cover with antenna are made in glass back cover |
| CN108315692A (en) * | 2017-12-22 | 2018-07-24 | 兰州空间技术物理研究所 | A method of preparing metal film on polyimide substrate |
| CN109881154A (en) * | 2019-04-25 | 2019-06-14 | 北京洁尔爽高科技有限公司 | A kind of product for the technique and preparation forming metal composite layer on fiber or fabric |
Non-Patent Citations (2)
| Title |
|---|
| 倪新亮: "碳纤维增强树脂基复合材料表面功能涂层制备研究", 《中国优秀硕士学位论文全文数据库 工程科技Ⅰ辑》 * |
| 周书助: "《硬质材料与工具》", 31 August 2015, 冶金工业出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114075657A (en) * | 2021-11-04 | 2022-02-22 | 核工业西南物理研究院 | Method for improving air tightness of resin-based composite material forming member |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3711078B1 (en) | Linearized energetic radio-frequency plasma ion source | |
| US7405415B2 (en) | Ion source with particular grid assembly | |
| US20150311043A1 (en) | Chamber component with fluorinated thin film coating | |
| US9666416B2 (en) | Apparatus and method for depositing electronically conductive pasting material | |
| US20060196766A1 (en) | Plasma deposition apparatus and method | |
| JPH0254429B2 (en) | ||
| CN107615888A (en) | The method for reducing the plasma source of coating using grand particle and plasma source being used for depositing thin film coatings and surface modification | |
| CN108570651A (en) | A kind of horizontal magnetron sputtering film production line of multi-chamber and its film plating process | |
| CN105632863A (en) | Plasma etching apparatus | |
| JPH10229058A (en) | Deposition chamber device with coating | |
| CN102179970B (en) | Heat conducting material, preparation process thereof and LED (light-emitting diode) circuit board using heat conducting material | |
| CN102917534A (en) | DLC (Diamond like Carbon) thin film coating-based ceramic substrate | |
| GB2083841A (en) | Glow discharge coating | |
| CN110846620A (en) | Surface metallization method for flexible antenna made of resin-based carbon fiber composite material | |
| WO2016099804A1 (en) | Particle reduction in a deposition chamber using thermal expansion coefficient compatible coating | |
| US5631050A (en) | Process of depositing thin film coatings | |
| JP2001140066A (en) | Thin film deposition method and deposition system | |
| Felmetsger et al. | Dual cathode DC–RF and MF–RF coupled S-Guns for reactive sputtering | |
| CN105543736A (en) | Plasma surface treatment method of ruthenium-plated molybdenum plate | |
| JP3874607B2 (en) | Thin film formation method | |
| JP2007186772A (en) | Film-forming method by gas-flow sputtering | |
| US20120164480A1 (en) | Coated article and method for making the same | |
| CN111020481B (en) | Magnetic conductive coating for electromagnetic cooker and preparation method thereof | |
| CN102732889A (en) | Method and apparatus for removing metal on wafer clamp | |
| JPS6350473A (en) | Continuous multistage ion plating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200228 |