CN110836852B - Industrial OCT detection device and method - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
The application discloses an industrial OCT detection device and method. The device includes a sample arm; the sample arm includes a probe assembly; the probe assembly comprises a beam shaping unit, a scanning mechanism and a plurality of aplanatic light propagation units; the aplanatic light propagation unit is used for irradiating light to a sample to be measured; the aplanatic light propagation unit comprises a first reflecting mirror and a tail reflecting mirror which are sequentially arranged along the incidence direction of light; each first reflecting mirror is positioned on the same first virtual curved surface, and the first virtual curved surface is provided with a first fixed point; the positions and angles of the first reflecting mirror and the tail reflecting mirror in the space can make the optical path of a sample arm for measuring each sample to be measured equal. The method employs the device. The method and the device can realize rapid detection, improve accuracy and facilitate control.
Description
Technical Field
The application relates to the technical field of optical coherence tomography (OCT, optical Coherence Tomography), in particular to an industrial OCT detection device and method.
Background
Quality control has become one of the most important tasks in the manufacturing industry, and improving the efficiency and quality of quality control work is an important grip for improving the quality of products and thus expanding the market share of the products.
Industrial inspection is typically performed manually, for example, by detecting glue residues in screw holes in the rim of the mobile phone or machining residual metal chips. And (5) placing the mobile phone frame edge under a high-power microscope by a quality control personnel, and observing each screw hole with naked eyes and judging whether glue remains. For the detection of the screw holes in the mobile phone frame, the number of the screw holes is large, the holes are small and the depth is deep, the common industrial detection mode is seriously dependent on manpower, a large amount of manpower is required to be consumed, a long time is required to be spent, the detection speed is low, the accuracy rate depends on the responsibility of quality control personnel, and the error rate is high.
The foregoing background is only for the purpose of facilitating an understanding of the inventive concepts and technical aspects of the present application and is not necessarily prior art to the present application, but is not intended to be used to evaluate the novelty and creativity of the present application in the event that no clear evidence indicates that such is already disclosed at the filing date of the present application.
Disclosure of Invention
The application provides an industrial OCT detection device and method, which can realize rapid detection and improve accuracy.
In a first aspect, embodiments of the present application provide an industrial OCT detection device, comprising a sample arm; the sample arm includes a probe assembly; the probe assembly comprises a beam shaping unit, a scanning mechanism and a plurality of aplanatic light propagation units;
the beam shaping unit and the scanning mechanism are arranged along the incidence direction of light; the scanning mechanism can enable light to be incident to any one of the aplanatic light propagation units; the aplanatic light propagation unit is used for irradiating light to a sample to be measured;
the aplanatic light propagation unit comprises a first reflecting mirror and a tail reflecting mirror which are sequentially arranged along the incidence direction of light;
each first reflecting mirror is positioned on the same first virtual curved surface, and the first virtual curved surface is provided with a first fixed point;
the positions and angles of the first reflecting mirror and the tail reflecting mirror in the space can make the optical path of a sample arm for measuring each sample to be measured equal.
In one possible implementation, the aplanatic light propagation unit further comprises a second mirror; the second mirror is arranged between the scanning mechanism and the first mirror;
the positions and angles of the first reflecting mirror, the second reflecting mirror and the tail reflecting mirror in the space can make the optical path of a sample arm for measuring each sample to be measured equal.
In one possible implementation, the scanning mechanism is centered at the first point; alternatively, the light emitted from the scanning mechanism passes through the first fixed point.
In one possible implementation, each of the end mirrors is located in the same plane.
In one possible implementation, the first virtual curved surface is a paraboloid; each of the end mirrors is located in the same plane, which is perpendicular to the axis of symmetry of the paraboloid and parallel or coincident with the directrix of the paraboloid.
In one possible implementation, the second reflecting mirror is located on the same second virtual curved surface, and the second virtual curved surface has a second fixed point and a third fixed point;
the first fixed point coincides with the third fixed point;
the center of the scanning mechanism is positioned at the second fixed point, or the measuring light emitted from the scanning mechanism passes through the second fixed point.
In one possible implementation, the second virtual curved surface is an ellipsoid.
In one possible implementation, the optical paths of light reflected from the scanning mechanism through the respective second mirrors to the third spot are all equal.
In one possible implementation, the beam shaping unit includes a fiber collimator lens and an objective lens disposed in sequence along an incident direction of light.
In one possible implementation manner, the number of the first reflecting mirrors and the number of the end reflecting mirrors are m, and the number of the samples to be tested is n, and m is less than or equal to n.
In one possible implementation, the end mirror is located below the first mirror.
In one possible implementation, the end mirror is a right angle prism or a planar mirror.
In one possible implementation, the reflective surfaces of the first and end mirrors are in the form of flat surfaces and curved surfaces.
In one possible implementation, the specific form of the scanning mechanism includes a one-dimensional scanning mechanism, a two-dimensional scanning mechanism, and a three-dimensional scanning mechanism.
In a second aspect, an embodiment of the present application provides an industrial detection method, where the industrial OCT detection device is used to obtain an OCT image of a sample to be detected and detect the sample to be detected based on the OCT image of the sample to be detected.
In a third aspect, embodiments of the present application provide a computer-readable storage medium having stored therein program instructions that, when executed by a processor of a computer, cause the processor to perform the above-described method.
Compared with the prior art, the beneficial effects of this application are:
the scanning mechanism can rotate within a set angle range, so that the measuring light can be incident to any one of the aplanatic light propagation units. The first reflectors of all the aplanatic light propagation units are distributed on the first virtual curved surface, the positions of the scanning mechanisms are set, the scanning mechanisms irradiate measuring light to the first reflectors on the first virtual curved surface at the designated positions, then the positions and angles of the tail reflectors are set according to the positions of all the samples to be measured, and all the aplanatic light propagation units can form a folded light path. Therefore, the optical paths of all the samples to be detected can be equal, and all the samples to be detected distributed at different positions can be detected by the single OCT equipment, so that the effect of rapidly scanning all the samples to be detected is achieved. In addition, the embodiment of the application can realize simplification of the optical path and is convenient to control.
Drawings
In order to more clearly describe the technical solutions in the embodiments or the background of the present application, the following description will describe the drawings that are required to be used in the embodiments or the background of the present application.
Fig. 1 is a schematic structural diagram of an industrial OCT detection device according to a first embodiment of the present application;
FIG. 2 shows a portion of the optical path of an industrial OCT detection device of a first embodiment of the present application from an angle;
FIG. 3 shows a portion of the optical path of an industrial OCT detection device of a first embodiment of the present application from another perspective;
fig. 4 is a schematic structural diagram of an industrial OCT detection device according to a second embodiment of the present application;
FIG. 5 shows a portion of the optical path of an industrial OCT detection device of a second embodiment of the present application from an angle;
FIG. 6 shows a portion of the optical path of an industrial OCT detection device of a second embodiment of the present application from another perspective;
fig. 7 is a schematic structural diagram of a mobile phone frame according to a first embodiment of the present application;
FIG. 8 shows the relative positions of the end mirror and the cell phone frame of the first embodiment of the present application;
fig. 9 shows the geometrical relationship of a part of the optical path of the first embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be described in further detail with reference to fig. 1 to 9.
The terms first and second and the like in the description, in the claims and in the drawings, are used for distinguishing between different objects and not for describing a particular sequential order. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus.
First embodiment
Optical coherence tomography (OCT, optical Coherence Tomography) is an emerging optical imaging technology, and has the advantages of high resolution, high imaging speed, no radiation damage, moderate price, compact structure and the like compared with the traditional clinical imaging means, thus being an important potential tool for basic medical research and clinical diagnosis application. Based on the characteristics of high resolution and high-speed imaging of optical coherence tomography, the method has good application prospect in the field of industrial detection.
The embodiment provides an industrial OCT detection device, which adopts an Optical Coherence Tomography (OCT) technology, scans an industrial product to be detected by using measuring light, receives a returned measuring light signal, and processes the received measuring light signal so as to detect whether the industrial product to be detected meets the requirements. Referring to fig. 7, the present embodiment is described by taking the example of detecting whether glue remains in the screw hole 31 of the mobile phone frame 30. In other embodiments, the industrial OCT detection device is a detection of a hole in a housing, circuit board, or panel.
Referring to fig. 1, the industrial OCT detection device of the present embodiment includes a light source 101, a coupler 102, a reference arm 200, a detector 106, a computer 107, and a sample arm 300.
In this embodiment, the light source 101 is a weak coherent OCT light source; the coupler 102 is a fiber optic coupler.
Referring to fig. 1, the reference arm 200 includes a reference arm optical path lens 104 and a reference arm mirror 105, which are sequentially disposed along the incident direction of light, i.e., reference light.
Referring to fig. 1, in this embodiment, a sample arm 300 includes a probe assembly 20 and a polarization controller 103. Wherein the polarization controller 103 is optional.
Referring to fig. 1, light output from a light source 101 provides measurement light and reference light to a sample arm 300 and a reference arm 200, respectively, through a coupler 102. The reference arm 200 has a known length and reflects the reference light back into the coupler 102 by the reference arm mirror 105. The probe assembly 20 of the sample arm 300 provides measurement light to the sample to be measured; the sample to be measured is a screw hole 31 of the mobile phone frame 30. The measurement light scattered back from the sample to be measured passes through the sample arm 300, interferes with the reference light reflected back from the reference arm 200 in the coupler 102, the interference light is detected by the detector 106, and then is processed by the computer 107, and finally, the OCT image of the sample to be measured is displayed.
Referring to fig. 1, the probe assembly 20 includes a beam shaping unit 210, a scanning mechanism, and a plurality of aplanatic light propagation units 220. In this embodiment, the scanning mechanism is a two-dimensional scanning mechanism 202. In other embodiments, the scanning mechanism may also be a one-dimensional scanning mechanism, a three-dimensional scanning mechanism, or other scanning mechanism, depending on the physical needs, such as the nature of the sample to be measured.
Referring to fig. 1, in the present embodiment, for the sample arm 300, the polarization controller 103, the beam shaping unit 210, and the two-dimensional scanning mechanism 202 are disposed in order along the incident direction of light, that is, measurement light.
The beam shaping unit 210 is configured to shape the light from the polarization controller 103 so that the light is irradiated to the two-dimensional scanning mechanism 202. Referring to fig. 1, in the present embodiment, a beam shaping unit 210 includes an optical fiber head 108 and two lenses, an optical fiber collimator lens 109 and an objective lens 201, which are disposed in order along the incident direction of measurement light; in other embodiments, the beam shaping unit 210 includes the fiber head 108 and one lens, or includes the fiber head 108 and three or more lenses.
The two-dimensional scanning mechanism 202 has a certain rotation angle range, can switch light paths and can perform two-dimensional scanning, and can enable light to be incident to any one aplanatic light propagation unit 220, so that detection of each sample to be detected can be realized; the sample to be measured is a screw hole 31 of the mobile phone frame 30.
The aplanatic light propagation unit 220 is used for irradiating light to the sample to be measured. The optical paths of the respective aplanatic light propagation units 220 are staggered. The aplanatic light propagation unit 220 includes a first mirror 70 and an end mirror 60 disposed in order along the incident direction of light, that is, measurement light; the reflective surfaces of the first mirror 70 and the end mirror 60 may be planar or curved, i.e., the first mirror 70 and the end mirror 60 may be planar or curved. In this embodiment, the end mirror 60 is a right angle prism.
Referring to fig. 1 to 3, each first mirror 70 is located on the same first virtual curved surface 701 and the first virtual curved surface 701 has a first fixed point O1. The two-dimensional scanning mechanism 202 is rotatable, which allows light to be incident on any one of the first mirrors 70. Setting the position of the two-dimensional scanning mechanism 202 such that the two-dimensional scanning mechanism 202 irradiates the measurement light to the first mirror 70 located on the first virtual curved surface 701 at a specified position; the specific implementation method comprises the following steps: the center of the two-dimensional scanning mechanism 202 is positioned at a first fixed point O1 of the first virtual curved surface 701, that is, the light emitted from the two-dimensional scanning mechanism 202 is irradiated to each first reflecting mirror 70 from the first fixed point O1; alternatively, the measurement light emitted from the two-dimensional scanning mechanism 202 is caused to pass through the first fixed point O1 of the first virtual curved surface 701.
The first virtual curved surface 701 is a designed virtual surface, that is, each first mirror 70 is distributed on the first virtual curved surface 701.
In this embodiment, the first virtual curved surface 701 is a paraboloid, that is, each first reflecting mirror 70 is distributed on the paraboloid; the first reflector 70 is a parabolic distribution reflector; the first setpoint O1 is the focal point of the paraboloid.
The parabola has a plurality of parabolas thereon. Parabolic refers to the locus of points in a plane that are equidistant from a fixed point (focal point) and a straight line (directrix).
By utilizing the characteristics of the paraboloid, from the focus O1 of the paraboloid, the aplanatic plane after being reflected by the paraboloid is a plane, and the plane is perpendicular to the symmetry axis L2 of the paraboloid and is parallel to the quasi-line L1 of the paraboloid. The center of the two-dimensional scanning mechanism 202 is located at the focal point O1 of the paraboloid or the measurement light emitted from the two-dimensional scanning mechanism 202 is made to pass through the focal point O1 of the paraboloid; referring to fig. 2, the mobile phone bezel 30 is perpendicular to the parabola symmetry axis L2. Each first reflector 70 is distributed on the paraboloid and distributed correspondingly to the screw holes 31 at different positions, specifically, the reflection points of each first reflector 70 are distributed on the paraboloid. The end mirrors 60 are located on the same plane or on the same straight line, specifically, on an aplanatic plane P1 after being reflected by the parabola, wherein the aplanatic plane P1 is perpendicular to the symmetry axis of the parabola and is parallel to the directrix L1 of the parabola. Referring to fig. 9, distances from each point on the guideline L1 to the aplanatic plane P1 are equal, and are L1P1; for point a (the reflection point of a certain first mirror 70) on the parabola, the distance AL1 from point a to the quasi-line L1 is equal to the distance AO1 from point a to the focal point O1, the sum of the distance AO1 from point a to the focal point O1 and the distance AP1 from point a to the aplanatic plane P1 is the distance O1AP1, and the distance O1AP1 is equal to the distance L1P1; for other points on the paraboloid, such as B and C, also distance O1BP1 is equal to distance L1P1 and distance O1CP1 is equal to distance L1P1; that is, the distance O1AP1, the distance O1BP1, and the distance O1CP1 are equal. In this way, the optical paths of the measurement light from the two-dimensional scanning mechanism 202 through each first mirror 70 and then to the corresponding end mirror 60 of each first mirror 70 are equal, so that the optical paths incident on each screw hole 30 are substantially equal.
In other embodiments, the aplanatic plane P1 is perpendicular to the symmetry axis L2 of the parabola and coincides with the directrix L1 of the parabola, so that the optical paths of the measurement light from the two-dimensional scanning mechanism 202 through each first mirror 70 and then to the corresponding end mirror 60 of each first mirror 70 are equal.
For the n screw holes 31, m aplanatic light propagation units 220 are provided. Then, the number of the first reflecting mirrors 70 and the end reflecting mirrors 60 is m. An aplanatic light propagation unit 220 may detect one or more screw holes 31, and thus have m.ltoreq.n. By matching the position and angle of the first mirror 70 with the position and angle of the end mirror 60, that is, setting the position and angle of the first mirror 70 and setting the position and angle of the end mirror 60, it is possible to satisfy that the sample arm optical paths for measuring the n screw holes 31 are substantially equal.
When OCT imaging is performed, measurement light is supplied to the probe optical path via the coupler 102. The measuring light firstly passes through the polarization controller 103, then passes through the optical fiber head 108, sequentially passes through the optical fiber collimating mirror 109 and the objective lens 201, selects the light path of the screw hole 31 with the corresponding number through the two-dimensional scanning mechanism 202, strikes the detecting light on the corresponding first reflecting mirror 70, reflects through the terminal reflecting mirror 60, and finally enters the sample. And the light from the sample reflected and scattered light source 101 is returned to the coupler 102 via the probe assembly 20 and interferes with the reference light. The interference light in the coupler 102 is detected by the detector 106, and then processed by the computer 107, and finally the OCT images of the respective screw holes 31 are displayed, so that the OCT images of the respective screw holes 31 can be obtained.
Correspondingly, the embodiment also provides an industrial detection method. The method adopts the industrial OCT detection device of the embodiment to obtain the OCT image of the screw hole 31, and then detects the screw hole 31 based on the OCT image of the screw hole 31; specifically, all the screw holes 31 on the mobile phone frame 30 are scanned and detected, and then the detected signals are subjected to data processing, so as to determine whether glue residues or processing metal scraps residues exist in the screw holes 31 of the mobile phone frame 30.
As described above, the two-dimensional scanning mechanism 202 can be rotated within a set angle range, so that the measurement light can be incident on any one of the aplanatic light propagation units 220. The first reflectors 70 of the aplanatic light propagation units 220 are distributed on the first virtual curved surface 701, the first virtual curved surface 701 has a first fixed point O1, the position of the two-dimensional scanning mechanism 202 is set, the two-dimensional scanning mechanism 202 irradiates measuring light on the first reflectors 70 positioned on the first virtual curved surface 701 at a specified position, then the positions and angles of the end reflectors 60 are set according to the positions of the samples to be measured, and the aplanatic light propagation units 220 can form a folded light path. Therefore, the optical paths of all samples to be tested in the mobile phone frame 30, namely the screw holes 31, can be equal, and all the screw holes 31 distributed at different positions can be detected by the single OCT equipment, so that the function of rapidly scanning all the screw holes 31 in the mobile phone frame 30 is achieved. The present embodiment can achieve simplification of the optical path, facilitate arrangement of the distribution of the first reflecting mirror 70, and facilitate design and processing of the mechanical structure.
According to the collected two-dimensional scanning OCT image in the screw hole 31, whether impurities, glue residues or metal processing residues exist on the bottom or the side wall of the screw hole 31 can be identified, and the detection accuracy can be improved. Based on the optical devices which are freely distributed in space, different light paths can be staggered, and the phenomenon of light blocking of the optical devices can be avoided.
Fig. 8 shows the distribution of the end mirror 60 and the screw holes 31. The end mirror 60 reflects the measurement light and makes the measurement light incident on the sample to be measured, that is, the screw hole 31. A simpler arrangement is: after being reflected by the first reflecting mirror 70, the measuring light is emitted perpendicularly to the plane where the mobile phone frame 30 is located, and then is reflected by the terminal reflecting mirror 60 and is perpendicularly incident to the end face of the screw hole 31; specifically, the first reflecting mirror 70 is located above the end reflecting mirror 60 in a direction perpendicular to the mobile phone frame 30. This allows the first mirror 70 and the end mirror 60 to be conveniently arranged.
In other embodiments, the first virtual curved surface 701 is an ellipsoid, that is, the incident point of each first mirror 70 is located on the ellipsoid; the first mirror 70 is an elliptical distribution mirror. The center of the two-dimensional scanning mechanism 202 is located at one focal point of the elliptical surface or the measuring light emitted from the two-dimensional scanning mechanism 202 is made to pass through one focal point of the elliptical surface, and an optical element for irradiating the measuring light to each end mirror 60 is provided at the other focal point of the elliptical surface, so that the optical paths of the sample arms for measuring each sample to be measured can be made equal.
In embodiments where the beam shaping unit 210 comprises a plurality of lenses, the two-dimensional scanning mechanism 202 is located between the two lenses, illustratively, the two-dimensional scanning mechanism 202 is located between the fiber collimator 109 and the objective 201; the light emitted from the optical fiber collimating mirror 109 is collimated and incident on the two-dimensional scanning mechanism 202, and then sequentially passes through the objective lens 201 and the aplanatic light propagation unit 220, and finally is focused on the screw hole, namely, the light beam is focused on the sample to be detected for detection.
In other embodiments, at least a portion of the end mirrors 60 are positioned in different planes, and the position and angle of the end mirrors 60 are adjusted so that the optical paths of the measurement light from the two-dimensional scanning mechanism 202 through each first mirror 70 and then to the corresponding end mirror 60 of each first mirror 70 are equal.
Second embodiment
Referring to fig. 4, this embodiment differs from the first embodiment in that: the aplanatic light propagation unit 220 of the present embodiment further includes a second mirror 80; the second mirror 80 is disposed between the two-dimensional scanning mechanism 202 and the first mirror 70. The reflecting surface of the second reflecting mirror 80 may be a plane or a curved surface, that is, the second reflecting mirror 80 may be a plane reflecting mirror or a curved reflecting mirror.
For the n screw holes 31, m aplanatic light propagation units 220 are provided. Then, the number of the second mirror 80, the first mirror 70, and the end mirror 60 is m.
Referring to fig. 4 to 6, each of the second reflecting mirrors 80 is located on the same second virtual curved surface 802 and the second virtual curved surface 802 has a second fixed point O2 and a third fixed point O3. The second virtual surface 802 is a designed virtual surface. The reflection points of each second mirror 80 are distributed on the second virtual curved surface 802.
The first fixed point O1 of the first virtual surface 701 coincides with the third fixed point O3 of the second virtual surface 802.
The two-dimensional scanning mechanism 202 is rotatable and can cause light to be incident on any one of the second mirrors 80. The center of the two-dimensional scanning mechanism 202 is located at a second fixed point O2 of the second virtual curved surface 802. The two-dimensional scanning mechanism 202 irradiates the measuring light to the second mirror 80 located on the second virtual curved surface 802 at the second fixed point O2. The second mirror 80 reflects the measurement light to the first mirror 70 located at the first virtual curved surface 701 and the measurement light passes through the first fixed point O1 of the first virtual curved surface 701 or the third fixed point O3 of the second virtual curved surface 802. The optical paths of the measurement light from the two-dimensional scanning mechanism 202 through the respective second mirrors 80 to the third fixed point O3 are all equal. The position and angle of the end mirror 60 are set according to the position of each sample to be measured. In this manner, the positions and angles of the first mirror 70, the second mirror 80, and the end mirror 60 in space can equalize the sample arm optical paths for measuring the respective samples to be measured.
When OCT imaging is performed, measurement light is supplied to the probe optical path via the coupler 102. The measuring light firstly passes through the polarization controller 103, then passes through the optical fiber head 108, passes through the optical fiber collimating mirror 109 and the objective lens 201 in sequence, selects the light path of the screw hole 31 with the corresponding number through the two-dimensional scanning mechanism 202, strikes the measuring light on the corresponding second reflecting mirror 80, reflects the measuring light through the first reflecting mirror 70 and the tail reflecting mirror 60, and finally enters the sample. While the sample reflects and scatters the OCT light from the source back through probe assembly 20 to coupler 102.
In this embodiment, the second virtual curved surface 802 is an ellipsoid, that is, each second reflecting mirror 80 is distributed on the ellipsoid; the second reflector 80 is an ellipsoidal distributed reflector; the second fixed point O2 is the upper focus of the ellipsoid; the third fixed point 03 is the lower focus of the ellipsoid. Then, the center of the two-dimensional scanning mechanism 202 is located at the upper focal point of the ellipsoid (i.e., the second fixed point O2); the lower focus of the ellipsoid coincides with the focus of the paraboloid, i.e. the first virtual plane; the major (or minor) axis of the ellipsoid coincides with the axis of symmetry L2 of the paraboloid.
After the measurement light emitted from the two-dimensional scanning mechanism 202 is reflected by each second mirror 80 located on the ellipsoid, the main optical axis of the light beam reflected by each second mirror 80 converges on the lower focal point of the ellipsoid, that is, the third fixed point 03. The beam is then reflected by the first mirror 70, which is located on the parabola, reflected by the end mirror 60 and finally incident on the sample. The ellipsoid has a plurality of ellipses thereon. The ellipse is a locus of a moving point where the sum of distances from two fixed points in a plane is equal to a constant, and thus the optical paths of the measurement light from the two-dimensional scanning mechanism 202 through the respective second mirrors 80 to the third fixed point 03 are equal.
The measuring light starts from the upper focal point (i.e. the second fixed point O2) of the ellipsoid, and after being reflected by the second reflecting mirror 80 on the ellipsoid, the light beam passes through the lower focal point (i.e. the third fixed point O3) of the ellipsoid, and the optical path passed through the light beam is a fixed value related to the parameters of the ellipsoid. The measurement light starts from the focal point of the parabola, and the aplanatic surface after being reflected by the first reflecting mirror 70 on the parabola is a plane. Referring to fig. 5 and 6, the center of the two-dimensional scanning mechanism 202 is set at the upper focal point (i.e., the second fixed point O2) of the ellipsoid, the lower focal point (i.e., the third fixed point O3) of the ellipsoid is set to coincide with the focal point of the paraboloid, and the major axis (or minor axis) of the ellipsoid coincides with the symmetry axis L2 of the paraboloid. The cell phone case 30 is perpendicular to the paraboloid symmetry axis L2. The first reflecting mirrors 70 are correspondingly distributed for the screw holes 31 at different positions; each end reflector 60 is located on the same plane, specifically on the aplanatic plane P1 after being reflected by the paraboloid; the optical path of the measuring light from the third setpoint 03 through the respective first mirror 70 on the parabola to the corresponding end mirror 60 is then also equal. The second mirror 80 and the first mirror 70 are arranged such that the optical paths incident on each of the screw holes 31 are substantially equal, and the optical paths of the sample arm optical paths reaching all of the screw holes 31 are equal.
In this embodiment, the end mirror 60 is located below the first mirror 70; specifically, the first reflecting mirror 70 is located above the end reflecting mirror 60 in a direction perpendicular to the mobile phone frame 30. This facilitates the setting of the light path.
For the mobile phone frame 30, some screw holes are through holes, and some screw holes are blind holes, so that the probe assembly 20 scans the screw holes from the inside of the mobile phone frame 30.
In other embodiments, the optical path length of the measurement light emitted from the two-dimensional scanning mechanism 202 passing through the second fixed point O2, the optical path length of the measurement light passing through each second mirror 80 from the second fixed point O2 (upper focal point of the ellipsoid) to the third fixed point 03 is also equal, and the optical path length of the measurement light passing through each first mirror 70 on the paraboloid from the third fixed point 03 to the corresponding end mirror 60 is also equal, so that the optical path length of the sample arm optical paths reaching all the screw holes 31 is equal.
In other embodiments, at least a portion of end mirror 60 is located in a different plane, and the position and angle of end mirror 60 is adjusted so that the optical paths of the sample arm paths to all of screw holes 31 are equal.
The industrial OCT detection apparatus of the present embodiment further includes a pipeline (not shown) and a positioning device (not shown). The pipeline is used for rapidly switching the mobile phone frames 30 so that different mobile phone frames 30 are alternately detected by the industrial OCT detection device. The positioning device is used to position each of the mobile phone frames 30 to the same position.
In the embodiment of the application, the two-dimensional scanning mechanism is matched with the reflector array and the reflectors which are spatially distributed to turn the light path, so that the light paths of all screw holes in the incident mobile phone frame 30 have equal optical paths, and all the screw holes which are distributed at different positions can be detected by single OCT equipment; because the switching time is short, the signal-free area has short duty ratio time, the effective sampling rate can be improved, and the detection speed can be improved; the rapid detection of the parts with different directions or different angles on the sample can be realized, so that the processing quality of industrial products can be rapidly detected; the industrial detection automation can be realized, the control is convenient, the manpower and time are saved, and the unification of the industrial detection judgment standards can be realized, so that the accuracy of the industrial detection can be improved.
Those skilled in the art will appreciate that all or part of the processes in implementing the methods of the embodiments may be implemented by a computer program to instruct the relevant hardware, the program may be stored in a computer readable storage medium, and the program may include processes as in the embodiments of the methods when executed. And the aforementioned storage medium includes: ROM or random access memory RAM, magnetic or optical disk, etc.
The foregoing is a further detailed description of the present application in connection with specific/preferred embodiments, and it is not intended that the practice of the present application be limited to such descriptions. It will be apparent to those skilled in the art to which the present application pertains that several alternatives or modifications can be made to these described embodiments without departing from the spirit of the invention, and that these alternatives or modifications should be considered to be within the scope of the present application.
Claims (9)
1. An industrial OCT detection device, characterized in that: comprising a sample arm; the sample arm includes a probe assembly; the probe assembly comprises a beam shaping unit, a scanning mechanism and a plurality of aplanatic light propagation units;
the beam shaping unit and the scanning mechanism are arranged along the incidence direction of light; the scanning mechanism can enable light to be incident to any one of the aplanatic light propagation units; the aplanatic light propagation unit is used for irradiating light to a sample to be measured;
the aplanatic light propagation unit comprises a first reflecting mirror and a tail reflecting mirror which are sequentially arranged along the incidence direction of light;
each first reflecting mirror is positioned on the same first virtual curved surface, the first virtual curved surface is provided with a first fixed point, and the center of the scanning mechanism is positioned at the first fixed point; alternatively, the light emitted from the scanning mechanism passes through the first fixed point;
the positions and angles of the first reflecting mirror and the tail reflecting mirror in the space can make the optical path of a sample arm for measuring each sample to be measured equal;
therefore, the rapid scanning detection of a plurality of samples to be detected distributed at different positions can be realized through a single industrial OCT device.
2. The industrial OCT detection device of claim 1, wherein: the aplanatic light propagation unit further comprises a second reflecting mirror; the second mirror is arranged between the scanning mechanism and the first mirror;
the positions and angles of the first reflecting mirror, the second reflecting mirror and the tail reflecting mirror in the space can make the optical path of a sample arm for measuring each sample to be measured equal.
3. The industrial OCT detection device of claim 1, wherein: the first virtual curved surface is a paraboloid; each of the end mirrors is located in the same plane, which is perpendicular to the axis of symmetry of the paraboloid and parallel or coincident with the directrix of the paraboloid.
4. The industrial OCT detection device of claim 2, wherein:
the second reflecting mirror is positioned on the same second virtual curved surface, and the second virtual curved surface is provided with a second fixed point and a third fixed point;
the first fixed point coincides with the third fixed point;
the center of the scanning mechanism is positioned at the second fixed point, or the measuring light emitted from the scanning mechanism passes through the second fixed point.
5. The industrial OCT detection device of claim 4, wherein: the optical paths of the light reflected from the scanning mechanism to the third fixed point through the second reflectors are equal; the second virtual curved surface is an ellipsoid.
6. The industrial OCT detection device of claim 2, wherein: the end mirror is located below the first mirror.
7. The industrial OCT detection device of claim 1, wherein: each of the end mirrors is located in the same plane; the number of the first reflecting mirrors and the number of the tail reflecting mirrors are m, and the number of the samples to be detected is n, wherein m is less than or equal to n; the form of the reflecting surfaces of the first reflecting mirror and the end reflecting mirror comprises a plane surface and a curved surface; the terminal reflector is a right-angle prism or a plane reflector; the beam shaping unit comprises an optical fiber collimating mirror and an objective lens which are sequentially arranged along the incidence direction of light; specific forms of the scanning mechanism include a one-dimensional scanning mechanism, a two-dimensional scanning mechanism and a three-dimensional scanning mechanism.
8. An industrial detection method is characterized in that: obtaining an OCT image of a sample to be tested using the industrial OCT detection device according to any one of claims 1 to 7; and detecting the sample to be detected based on the OCT image of the sample to be detected.
9. A computer readable storage medium having stored therein program instructions which, when executed by a processor of a computer, cause the processor to perform the method of claim 8.
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