CN110823286A - Crystal column comprehensive detection equipment - Google Patents
Crystal column comprehensive detection equipment Download PDFInfo
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- CN110823286A CN110823286A CN201911103629.8A CN201911103629A CN110823286A CN 110823286 A CN110823286 A CN 110823286A CN 201911103629 A CN201911103629 A CN 201911103629A CN 110823286 A CN110823286 A CN 110823286A
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- 238000001514 detection method Methods 0.000 title claims abstract description 107
- 239000013078 crystal Substances 0.000 title claims abstract description 36
- 230000007246 mechanism Effects 0.000 claims abstract description 135
- 239000000463 material Substances 0.000 claims abstract description 36
- 238000003860 storage Methods 0.000 claims abstract description 21
- 238000007599 discharging Methods 0.000 claims abstract description 7
- 238000012360 testing method Methods 0.000 claims abstract description 7
- 210000001503 joint Anatomy 0.000 claims description 15
- 238000005303 weighing Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 abstract description 18
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000926 separation method Methods 0.000 abstract description 3
- 238000003032 molecular docking Methods 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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Abstract
The invention discloses a comprehensive detection device for a crystal column, which comprises a rack, a material storage rack, a feeding and discharging device, a front lifting device, a rear lifting device, a first detection device, a second detection device, a third detection device and a fourth detection device, wherein the material storage rack is arranged on the rack; the machine frame is sequentially provided with a first detection station, a second detection station, a third detection station and a fourth detection station from front to back, an upper conveying groove and a lower conveying groove are formed in the machine frame, an upper conveying mechanism is arranged in the upper conveying groove, the lower conveying groove is positioned right below the upper conveying groove, and a lower conveying mechanism is arranged in the lower conveying groove; utilize each device through the cooperation for this equipment can carry out height, inside flaw, depth of parallelism, straightness and the straightness that hangs down and width, weight to the crystal pillar and carry out automated inspection, and beat mark and separation according to the testing result, replaced traditional mode that relies on artifical the completion, effectively improved detection efficiency, and can guarantee detection quality, brought the facility for the production operation.
Description
Technical Field
The invention relates to the technical field of semiconductor detection, in particular to comprehensive detection equipment for a crystal column.
Background
Silicon materials are currently an important semiconductor material in the electronics industry. Silicon is one of the most abundant elements on the earth, occupies one fourth of the earth crust, exists in the forms of silicate and oxide, and common sand and sandstone are silicon dioxide, but have different purities, and the purity of quartz is the highest. The silicon wafer for manufacturing the semiconductor chip is firstly reduced to prepare high-purity simple substance silicon. As a semiconductor chip material, in addition to high purity, uniform, complete, defect-free crystals need to be grown. At present, a small single crystal silicon is commonly used for growing crystals. This single crystal silicon acts like a "seed" around which the surrounding silicon atoms grow in the same order as it does, resulting in a highly pure, uniform crystal. The grown crystal is generally cylindrical, also referred to as a seed pillar. After the crystal pillar is grown, it is cut into a sheet shape and polished to make a silicon wafer.
However, in the process of generating the columns, due to various factors, such as parameter control, etc., the height, weight, parallelism, width, etc. of each column are inconsistent, and some columns may have defects formed therein, so that the columns need to be tested for various indexes after being generated and before being shipped, so as to ensure the quality of the shipped products; at present, the detection of each index of the crystal column is mainly completed manually, the efficiency is low, and the detection quality is difficult to ensure. Therefore, there is a need to develop a solution to the above problems.
Disclosure of Invention
In view of the above, the present invention is directed to a comprehensive testing apparatus for a column, which can comprehensively test various indexes of the column and ensure the testing quality.
In order to achieve the purpose, the invention adopts the following technical scheme:
a comprehensive detection device for a crystal column comprises a rack, a storage rack, a feeding and discharging device, a front lifting device, a rear lifting device, a first detection device, a second detection device, a third detection device and a fourth detection device; the machine frame is sequentially provided with a first detection station, a second detection station, a third detection station and a fourth detection station from front to back, an upper conveying groove and a lower conveying groove are arranged on the machine frame, the upper conveying groove and the lower conveying groove penetrate through the first detection station, the second detection station, the third detection station and the fourth detection station, an upper conveying mechanism is arranged in the upper conveying groove, the lower conveying groove is positioned under the upper conveying groove, and a lower conveying mechanism is arranged in the lower conveying groove; the material storage rack is arranged on the front side of the rack; the feeding and discharging device is arranged on the rack and positioned beside the material storage rack; the front lifting device is arranged between the input end of the upper conveying groove and the output end of the lower conveying groove; the rear lifting device is arranged between the output end of the upper output groove and the input end of the lower conveying groove; the first detection device is arranged in the first detection work station and comprises a distance measurement sensor which is positioned right above the upper conveying groove; the second detection device is arranged in the second detection station and comprises a first lifting and rotating module, an IR light source and an image capturing module, wherein the first lifting and rotating module is positioned right below the upper conveying groove, and the IR light source and the image capturing module are respectively positioned at two sides above the upper conveying groove; the third detection device is arranged in a third detection station and comprises a second lifting and rotating module and two groups of photoelectric sensors, the second lifting and rotating module is positioned right below the upper conveying groove, and the two groups of photoelectric sensors are positioned on two sides above the upper conveying groove and are opposite to each other; the fourth detection device is arranged in the fourth detection work station and comprises a lifting module, a weighing sensor and a marking mechanism, wherein the lifting module is positioned under the upper conveying groove, the weighing sensor is arranged on the lifting module, and the marking mechanism is positioned on one side of the upper conveying groove.
As an optimal scheme, the material storage rack is a multi-layer material storage rack, each layer is provided with a conveying device, the material storage rack is provided with a lifting mechanism, and the lifting mechanism is located beside the material loading and unloading device.
As a preferred scheme, the loading and unloading device is a multi-shaft type manipulator.
As a preferred scheme, the inner walls of the two sides of the upper conveying groove are respectively provided with a pulley convenient for conveying the tray, the upper conveying mechanism is a belt type conveying mechanism, and the upper conveying mechanism is a plurality of pulleys arranged side by side along the extending direction of the upper conveying groove.
As a preferred scheme, the inner walls of the two sides of the lower conveying groove are provided with pulleys facilitating conveying of the trays, the lower conveying mechanism is a belt type conveying mechanism, and the lower conveying mechanism is a plurality of lower conveying mechanisms arranged side by side along the extending direction of the lower conveying groove.
As a preferred scheme, the front lifting device comprises a first lifting frame and a first driving mechanism, the first lifting frame can be movably arranged between the input end of the upper conveying groove and the output end of the lower conveying groove up and down, the first lifting frame is provided with a first material groove, and a first conveying mechanism is arranged in the first material groove; the first driving mechanism is arranged on the rack and drives the first lifting frame to move up and down.
As a preferred scheme, the rear lifting device comprises a second lifting frame and a second driving mechanism, the second lifting frame can be movably arranged between the output end of the upper conveying groove and the input end of the lower conveying groove up and down, the second lifting frame is provided with a second material groove, and a second conveying mechanism is arranged in the second material groove; the second driving mechanism is arranged on the rack and drives the second lifting frame to move up and down.
As a preferred scheme, the first lifting and rotating module comprises a first lifting platform, a first butt-joint platform, a first lifting and driving mechanism and a first rotating and driving mechanism; the first lifting platform can be movably arranged on the rack up and down, the first butt joint platform can be rotatably arranged on the first lifting platform and can move up and down along with the first lifting platform, the first lifting driving mechanism is arranged on the rack and drives the first lifting platform to move up and down, and the first rotary driving mechanism is arranged on the first lifting platform and drives the first butt joint platform to rotate.
As a preferred scheme, the second lifting and rotating module comprises a second lifting platform, a second docking platform, a second lifting and driving mechanism and a second rotating and driving mechanism; the second lifting platform can be movably arranged on the rack up and down, the second butt joint platform can be rotatably arranged on the second lifting platform and can move up and down along with the second lifting platform, the second lifting driving mechanism is arranged on the rack and drives the second lifting platform to move up and down, and the second rotary driving mechanism is arranged on the second lifting platform and drives the second butt joint platform to rotate.
As a preferable scheme, the lifting module comprises a third lifting platform, a third butt-joint platform and a third lifting driving mechanism; the third lifting platform can be movably arranged on the rack up and down, the third butt joint platform can be movably arranged on the third lifting platform up and down and can move up and down along with the third lifting platform, the weighing sensor is clamped between the third butt joint platform and the third lifting platform, and the third lifting driving mechanism is arranged on the rack and drives the third lifting platform to move up and down.
Compared with the prior art, the invention has obvious advantages and beneficial effects, and specifically, the technical scheme includes that:
utilize each device through the cooperation for this equipment can carry out height, inside flaw, depth of parallelism, straightness and the straightness that hangs down and width, weight to the crystal pillar and carry out automated inspection, and beat mark and separation according to the testing result, replaced traditional mode that relies on artifical the completion, effectively improved detection efficiency, and can guarantee detection quality, brought the facility for the production operation.
To more clearly illustrate the structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Drawings
FIG. 1 is a perspective view of a preferred embodiment of the present invention;
FIG. 2 is a perspective view of another angle of the preferred embodiment of the present invention;
FIG. 3 is a cross-sectional view of a preferred embodiment of the present invention;
FIG. 4 is a cross-sectional view of another aspect of the preferred embodiment of the present invention;
FIG. 5 is a partial enlarged view of the preferred embodiment of the present invention;
FIG. 6 is another angular schematic of FIG. 5;
FIG. 7 is a cross-sectional view of FIG. 5;
FIG. 8 is a cross-sectional view in another direction of FIG. 5;
FIG. 9 is an enlarged schematic view of a first inspection station in accordance with a preferred embodiment of the present invention;
FIG. 10 is an enlarged schematic view of a second inspection station in accordance with the preferred embodiment of the present invention;
FIG. 11 is an enlarged view of a third inspection station in accordance with the preferred embodiment of the present invention;
FIG. 12 is an enlarged view of a fourth inspection station in accordance with the preferred embodiment of the present invention;
FIG. 13 is a perspective view of the inspection of the wafer level in the preferred embodiment of the present invention;
FIG. 14 is a front view of the inspection of the plane of the wafer column in the preferred embodiment of the present invention;
FIG. 15 is a schematic diagram of a lattice diagram illustrating the detection of the plane of the crystal pillars in the preferred embodiment of the present invention.
The attached drawings indicate the following:
10. frame 11, first detection station
12. Second detection station 13 and third detection station
14. Fourth detection station 15 and upper conveying mechanism
16. Lower conveying mechanism 101 and upper conveying trough
102. Lower conveying trough 103, pulley
104. Pulley 20, deposit work or material rest
21. Conveying device 22 and lifting mechanism
30. Loading and unloading device 40 and front lifting device
41. First lifting frame 42 and first driving mechanism
43. First conveying mechanism 401 and first trough
50. Rear lifting device 51 and second lifting frame
52. Second drive mechanism 53 and second conveyance mechanism
501. Second trough 60 and first detection device
61. Distance measuring sensor 70 and second detecting device
71. First lifting and rotating module 711 and first lifting platform
712. First docking station 713 and first lifting drive mechanism
714. First rotary drive mechanism 72, IR light source
73. Image capturing module 74 and first driving mechanism
75. Second drive mechanism 80 and third detection device
81. Second lifting and rotating module 811 and second lifting platform
812. Second docking station 813 and second lifting driving mechanism
814. Second rotation driving mechanism 82 and photoelectric sensor
83. Third drive mechanism 90 and fourth detection device
91. Lifting module 911, third lifting platform
912. Third docking station 913 and third lifting drive mechanism
92. Weighing sensor 93 and marking mechanism
94. Fourth driving mechanism a and tray
b. Crystal column c and supporting plate.
Detailed Description
Referring to fig. 1 to 12, a specific structure of a preferred embodiment of the present invention is shown, which includes a frame 10, a material storage rack 20, a loading and unloading device 30, a front lifting device 40, a rear lifting device 50, a first detection device 60, a second detection device 70, a third detection device 80, and a fourth detection device 90.
The frame 10 is provided with a first detection station 11, a second detection station 12, a third detection station 13 and a fourth detection station 14 in sequence from front to back, the frame 10 is provided with an upper conveying groove 101 and a lower conveying groove 102, the upper conveying groove 101 and the lower conveying groove 102 all penetrate through the first detection station 11, the second detection station 12, the third detection station 13 and the fourth detection station 14, the upper conveying groove 101 is provided with an upper conveying mechanism 15, the lower conveying groove 102 is located under the upper conveying groove 101, and the lower conveying groove 102 is provided with a lower conveying mechanism 16. In this embodiment, pulleys 103 for facilitating the transportation of the tray a are disposed on inner walls of two sides of the upper conveying trough 101, the upper conveying mechanism 15 is a belt type conveying mechanism, and the upper conveying mechanisms 15 are disposed side by side along an extending direction of the upper conveying trough 101; and pulleys 104 for facilitating the transportation of the tray a are disposed on inner walls of two sides of the lower conveying trough 102, the lower conveying mechanism 16 is a belt type conveying mechanism, and the lower conveying mechanism 16 is a plurality of lower conveying mechanisms arranged side by side along the extending direction of the lower conveying trough 102, in this embodiment, the number of the lower conveying mechanisms 16 is five, which is not limited.
The material storage rack 20 is arranged on the front side of the rack 10; the loading and unloading device 30 is arranged on the frame 10 and is positioned beside the material storage rack 20; in this embodiment, the material storage rack 20 is a multi-layer material storage rack, each layer is provided with a conveying device 21, the material storage rack 20 is provided with a lifting mechanism 22, the lifting mechanism 22 is located beside the material loading and unloading device 30, and the material loading and unloading device 30 is a multi-shaft manipulator.
The front lifting device 40 is arranged between the input end of the upper conveying groove 101 and the output end of the lower conveying groove 102; specifically, the front lifting device 40 includes a first lifting frame 41 and a first driving mechanism 42, the first lifting frame 41 is movably disposed between the input end of the upper conveying trough 101 and the output end of the lower conveying trough 102, the first lifting frame 41 has a first trough 401, and a first conveying mechanism 43 is disposed in the first trough 401; the first driving mechanism 42 is disposed on the frame 10 and drives the first lifting frame 41 to move up and down. In the present embodiment, the first driving mechanism 42 is a screw pair structure driven by a motor, and the first conveying mechanism 43 is a belt type conveying mechanism.
The rear lifting device 50 is arranged between the output end of the upper output groove 101 and the input end of the lower conveying groove 102; specifically, the rear lifting device 50 comprises a second lifting frame 51 and a second driving mechanism 52, the second lifting frame 51 is movably arranged between the output end of the upper conveying trough 101 and the input end of the lower conveying trough 102 up and down, the second lifting frame 51 is provided with a second trough 501, and a second conveying mechanism 53 is arranged in the second trough 501; the second driving mechanism 52 is disposed on the frame 10 and drives the second lifting frame 51 to move up and down. In this embodiment, the second driving mechanism 52 is a screw pair structure driven by a motor, and the second conveying mechanism 53 is a belt type conveying mechanism.
The first detection device 60 is disposed in the first detection station 11, the first detection device 60 includes a distance measurement sensor 61, the distance measurement sensor 61 is located right above the upper conveying trough 101, and the distance measurement sensor 61 is used for measuring the height of the crystal column b.
The second detecting device 70 is disposed in the second detecting station 12, the second detecting device 70 includes a first lifting and rotating module 71, an IR light source 72 and an image capturing module 73, the first lifting and rotating module 71 is located right below the upper conveying trough 101, and the IR light source 72 and the image capturing module 73 are respectively located at two sides above the upper conveying trough 101; specifically, the first lifting/lowering rotation module 71 includes a first lifting/lowering table 711, a first docking table 712, a first lifting/lowering driving mechanism 713, and a first rotation driving mechanism 714; the first lifting platform 711 is movably disposed on the rack 10 up and down, the first docking platform 712 is rotatably disposed on the first lifting platform 711 and moves up and down along with the first lifting platform 711, the first docking platform 712 is used for docking with the tray a, the first lifting driving mechanism 713 is disposed on the rack 10 and drives the first lifting platform 711 to move up and down, the first lifting driving mechanism 713 is a cylinder, the first rotating driving mechanism 714 is disposed on the first lifting platform 711 and drives the first docking platform 712 to rotate, and the first rotating driving mechanism 714 is a mode that a motor drives a speed reducer; the IR light source 72 is disposed movably up and down, and the IR light source 72 is driven by the first driving mechanism 74 to move up and down; the image capturing module 73 is a camera, the image capturing module 73 can be movably disposed back and forth in the horizontal and vertical directions, and the image capturing module 73 is driven by the second driving mechanism 75 to move up and down.
The third detection device 80 is disposed in the third detection station 13, the third detection device 80 includes a second lifting and rotating module 81 and two sets of photoelectric sensors 82, the second lifting and rotating module 81 is located right below the upper conveying trough 101, and the two sets of photoelectric sensors 82 are located on two sides above the upper conveying trough 101 and are opposite to each other; specifically, the second elevation/rotation module 81 includes a second elevation table 811, a second docking table 812, a second elevation driving mechanism 813, and a second rotation driving mechanism 814; the second lifting table 811 is movably disposed on the rack 10 up and down, the second docking table 812 is rotatably disposed on the second lifting table 811 and moves up and down along with the second lifting table 811, the second docking table 812 is used for docking with the tray a, the second lifting driving mechanism 813 is disposed on the rack 10 and drives the second lifting table 811 to move up and down, the second lifting driving mechanism 813 is a cylinder, the second rotation driving mechanism 814 is disposed on the second lifting table 811 and drives the second docking table 812 to rotate, and the second rotation driving mechanism 814 is a mode that a motor drives a speed reducer; and, two sets of photoelectric sensors 82 can be set up movably from top to bottom respectively, and two sets of photoelectric sensors 82 are driven by third actuating mechanism 83 and move from top to bottom respectively to, every set of photoelectric sensor 82 comprises at least three photoelectric sensors 82 that set up at interval side by side.
The fourth detecting device 90 is disposed in the fourth detecting station 14, the fourth detecting device 90 includes a lifting module 91, a weighing sensor 92 and a marking mechanism 93, the lifting module 91 is located under the upper conveying trough 101, the weighing sensor 92 is disposed on the lifting module 91, and the marking mechanism 93 is located on one side of the upper conveying trough 101. Specifically, the lifting module 91 includes a third lifting platform 911, a third docking platform 912 and a third lifting driving mechanism 913; the third lifting platform 911 is movably disposed on the frame 10, the third docking platform 912 is movably disposed on the third lifting platform 911 and moves up and down along with the third lifting platform 911, the third docking platform 912 is configured to dock with the tray a, the weighing sensor 92 is sandwiched between the third docking platform 912 and the third lifting platform 911, and the third lifting driving mechanism 913 is disposed on the frame 10 and drives the third lifting platform 911 to move up and down. In this embodiment, the third lifting driving mechanism 913 is an air cylinder, the marking mechanism 93 is a laser head, the marking mechanism 93 can be disposed to move back and forth horizontally and vertically, and the marking mechanism 93 is driven by the fourth driving mechanism 94 to move back and forth horizontally and vertically.
Detailed description the working principle of the present embodiment is as follows:
during operation, a crystal column b to be detected is vertically placed on a supporting plate c, the supporting plate c is placed on the material storage rack 20, a plurality of trays a are placed in the upper conveying groove 101 and the lower conveying groove 102, and a control system of the equipment performs logic control on the devices and mechanisms of the feeding and discharging device 30, the front lifting device 40, the rear lifting device 50, the first detection device 60, the second detection device 70, the third detection device 80, the fourth detection device 90 and the like.
First, the conveyor 21 delivers the pallet c to the lifting mechanism 22, the lifting mechanism 22 lifts or lowers the pallet c to a suitable height, then the loading and unloading device 30 works to vertically place the columns b on the pallet c one by one on the pallet a of the upper conveyor chute 101, and then the upper conveyor 15 works to convey the pallet a sequentially through the first inspection station 11, the second inspection station 12, the third inspection station 13 and the fourth inspection station 14.
In the first inspection station 11, a barcode reader (not shown) first reads the barcode on the column b to be inspected, and then the distance measuring sensor 61 operates to detect the height of the column b, and the obtained height data is stored in the database of the control system.
In the second inspection station 12, firstly, a barcode reader (not shown) reads a barcode on a wafer b to be inspected, then the first lifting and rotating module 71 supports and rotates the tray a, the wafer b rotates along with the tray a, during the rotation, the IR light source 72 and the image capturing module 73 are both turned on, the infrared light generated by the IR light source 72 is emitted to the wafer b, the image capturing module 73 captures an image of the wafer b, during the capturing, the control system retrieves corresponding height data in the database, according to the acquired height data, the first driving mechanism 74 controls the height position of the IR light source 72, and the second driving mechanism 75 controls the height position of the module 73, so as to capture images of positions of the wafer b from bottom to top, image data obtained after the capturing is stored in the database and analyzed by the control system, thus, whether a defect exists in the wafer b or not is detected, and obtaining the position coordinates of the flaws, and storing the generated position coordinate data into a database for subsequent retrieval.
In the third inspection station 13, firstly, the bar code on the wafer b to be inspected is read by a bar code reader (not shown), then the second lifting and rotating module 81 supports and rotates the tray a, the wafer b rotates along with the tray a, in the rotating process, the two groups of photoelectric sensors 82 are both opened to inspect the parallelism, verticality and width of each side surface of the wafer b, in the inspecting process, the control system calls the corresponding height data in the database, according to the acquired height data, the third driving mechanism 83 controls the height positions of the two groups of photoelectric sensors 82 to inspect each position of the wafer b from bottom to top, the data obtained after inspection is stored in the database and analyzed by the control system to obtain the parallelism, standard reaching and width of each position of the wafer b, if a certain position is inspected, the control system records the corresponding position coordinate and stores in the database, for subsequent retrieval, the specific detection method is as follows:
as shown in fig. 13, the four planes are defined as E, W, S, N, and the measurement principle of two sets of photosensors 82 built on the mechanism is as follows:
as shown in fig. 14, W is a known distance (distance of two sets of photosensors),
∴w＝W-(m+m′)
measuring N on each plane2Dot, N is more than or equal to 2
As shown in fig. 15, illustrated as 3x3 sets of dot matrices:
before measurement, each measurement point is calibrated and zeroed, and the obtained three-dimensional coordinates are defined as:
take A1 as an example (X)a1o，Ya1o，Za1o)；
B1 is an example (X)b1o，Yb1o，Zb1o)；
(the zero-returning parameter is used in-after the mechanism is calibrated, a correction tool is placed, a software correction parameter is established according to the formula explained below for correction in actual operation)
1. Firstly, according to the relative positions of the points and the points, the following three formulas are applied:
the coordinate of A1 is (X)a1，Ya1，Za1)
The coordinate of B1 is (X)b1，Yb1，Zb1)
D1 has the coordinate of (X)d1，Yd1，Zd1)
The coordinate of E1 is (X)e1，Ye1，Ze1)
The slope of the height line between points A1 and B1 is:
coordinate point A1 (X)a1，Ya1，Za1) And B1 (X)b1，Yb1，Zb1)
Due to Ya1＝Yb1Can be regarded as follows: plane coordinate point A1 (X)a1，Zα1) And B1 (X)b1，Zb1)：
The formula I is as follows: thread
Slope of
The slope of the height line between points A1 and D1 is: coordinate point A1 (X)a1，Ya1，Za1) And B1 (X)d1，Yd1，Zd1)
Due to Xa1＝Xd1Can be regarded as follows: plane coordinate point Al (Y)a1，Zα1) And D1 (Y)d1，Zd1)
Equation two: thread
Slope of
The slope of the height line between points A1 and E1 is: coordinate point A1 (X)a1，Ya1，Za1) And E1 (X)e1，Ye1，Ze1)，
Firstly, calculating the plane distance
Then, substituting the slope formula:
equation three: threadSlope of
2. Calculating the flatness of the polished surface, namely E, W, S, N flatness of each surface:
checking whether the slope of the single height line connected by each point on the plane is consistent or within a set tolerance range, namely:
thread
Slope of
And line
Slope of
Workshop
Or less than or equal to +/-tolerance
Thread
Slope of
And line
Slope of
Workshop
Or less than or equal to +/-tolerance.
：
：
And so on.
3. And (3) calculating the perpendicularity of the adjacent surfaces:
calculating the slope of a single height line formed by connecting related corresponding points on adjacent surfaces;
threadSlope of
And line
Slope ofThe relationship between them;
a.
the two lines are vertical;
b.
the included angle of the two lines is obtuse angle (more than 90');
c.
the angle between the two lines is obtuse (< 9)0°)。
4. Calculating the parallelism of the opposite surfaces:
calculate the slope of the single height line connected by the associated corresponding points on the opposite side:
thread
Slope of
And lineSlope of
The relationship between the two or more of the components,
In the fourth inspection station 14, a barcode reader (not shown) reads a barcode on the wafer column b to be inspected, the lifting module 91 lifts the tray a, the weighing sensor 92 senses the weight of the wafer column b, the weight of the wafer column b can be detected, and the obtained weight data is stored in the database of the control system.
Thus, item detection is completed, then the crystal column b is moved to the marking mechanism 93, the control system calls all relevant detection data corresponding to the crystal column b in the database, the marking mechanism 93 works according to the detection data, and the fourth driving mechanism 94 drives the crystal column b to move back and forth horizontally and vertically, so that corresponding marks are marked on the position where the crystal column b has problems in detection.
Then, the detected crystal column b is conveyed to the rear lifting device 50 along with the corresponding tray a, the rear lifting device 50 drives the crystal column b to descend and convey the crystal column b to the lower conveying groove 102, the lower conveying mechanism 16 conveys the tray a to the front lifting device 40 in the lower conveying groove 102, then the front lifting device 40 drives the tray a to ascend, the loading and unloading device 30 works to place the detected crystal column b on the corresponding supporting plate c, and the empty tray a is conveyed to the upper conveying groove 101 again for recycling. The devices in the detection work stations can work independently at the same time, so that the detection efficiency is improved.
The design of the invention is characterized in that: utilize each device through the cooperation for this equipment can carry out height, inside flaw, depth of parallelism, straightness and the straightness that hangs down and width, weight to the crystal pillar and carry out automated inspection, and beat mark and separation according to the testing result, replaced traditional mode that relies on artifical the completion, effectively improved detection efficiency, and can guarantee detection quality, brought the facility for the production operation.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that any minor modifications, equivalent changes and modifications made to the above embodiment according to the technical spirit of the present invention are within the technical scope of the present invention.
Claims (10)
1. The utility model provides a crystal column comprehensive testing equipment which characterized in that: the automatic feeding and discharging device comprises a rack, a material storage rack, a material loading and discharging device, a front lifting device, a rear lifting device, a first detection device, a second detection device, a third detection device and a fourth detection device; the machine frame is sequentially provided with a first detection station, a second detection station, a third detection station and a fourth detection station from front to back, an upper conveying groove and a lower conveying groove are arranged on the machine frame, the upper conveying groove and the lower conveying groove penetrate through the first detection station, the second detection station, the third detection station and the fourth detection station, an upper conveying mechanism is arranged in the upper conveying groove, the lower conveying groove is positioned under the upper conveying groove, and a lower conveying mechanism is arranged in the lower conveying groove; the material storage rack is arranged on the front side of the rack; the feeding and discharging device is arranged on the rack and positioned beside the material storage rack; the front lifting device is arranged between the input end of the upper conveying groove and the output end of the lower conveying groove; the rear lifting device is arranged between the output end of the upper output groove and the input end of the lower conveying groove; the first detection device is arranged in the first detection work station and comprises a distance measurement sensor which is positioned right above the upper conveying groove; the second detection device is arranged in the second detection station and comprises a first lifting and rotating module, an IR light source and an image capturing module, wherein the first lifting and rotating module is positioned right below the upper conveying groove, and the IR light source and the image capturing module are respectively positioned at two sides above the upper conveying groove; the third detection device is arranged in a third detection station and comprises a second lifting and rotating module and two groups of photoelectric sensors, the second lifting and rotating module is positioned right below the upper conveying groove, and the two groups of photoelectric sensors are positioned on two sides above the upper conveying groove and are opposite to each other; the fourth detection device is arranged in the fourth detection work station and comprises a lifting module, a weighing sensor and a marking mechanism, wherein the lifting module is positioned under the upper conveying groove, the weighing sensor is arranged on the lifting module, and the marking mechanism is positioned on one side of the upper conveying groove.
2. The integrated detection device for the crystal column according to claim 1, wherein: the material storage rack is a multi-layer material storage rack, each layer is provided with a conveying device, and the material storage rack is provided with a lifting mechanism which is positioned beside the material loading and unloading device.
3. The integrated detection device for the crystal column according to claim 1, wherein: the loading and unloading device is a multi-shaft mechanical arm.
4. The integrated detection device for the crystal column according to claim 1, wherein: the inner walls of the two sides of the upper conveying groove are provided with pulleys facilitating conveying of trays, the upper conveying mechanism is a belt type conveying mechanism, and the upper conveying mechanism is a plurality of upper conveying grooves arranged side by side in the extending direction of the upper conveying groove.
5. The integrated detection device for the crystal column according to claim 1, wherein: the inner walls of the two sides of the lower conveying groove are provided with pulleys facilitating conveying of trays, the lower conveying mechanism is a belt type conveying mechanism, and the lower conveying mechanism is a plurality of lower conveying grooves arranged side by side in the extending direction.
6. The integrated detection device for the crystal column according to claim 1, wherein: the front lifting device comprises a first lifting frame and a first driving mechanism, the first lifting frame can be movably arranged between the input end of the upper conveying groove and the output end of the lower conveying groove up and down, the first lifting frame is provided with a first material groove, and a first conveying mechanism is arranged in the first material groove; the first driving mechanism is arranged on the rack and drives the first lifting frame to move up and down.
7. The integrated detection device for the crystal column according to claim 1, wherein: the rear lifting device comprises a second lifting frame and a second driving mechanism, the second lifting frame can be movably arranged between the output end of the upper conveying groove and the input end of the lower conveying groove up and down, the second lifting frame is provided with a second material groove, and a second conveying mechanism is arranged in the second material groove; the second driving mechanism is arranged on the rack and drives the second lifting frame to move up and down.
8. The integrated detection device for the crystal column according to claim 1, wherein: the first lifting and rotating module comprises a first lifting platform, a first butt joint platform, a first lifting driving mechanism and a first rotating driving mechanism; the first lifting platform can be movably arranged on the rack up and down, the first butt joint platform can be rotatably arranged on the first lifting platform and can move up and down along with the first lifting platform, the first lifting driving mechanism is arranged on the rack and drives the first lifting platform to move up and down, and the first rotary driving mechanism is arranged on the first lifting platform and drives the first butt joint platform to rotate.
9. The integrated detection device for the crystal column according to claim 1, wherein: the second lifting and rotating module comprises a second lifting platform, a second butt joint platform, a second lifting driving mechanism and a second rotating driving mechanism; the second lifting platform can be movably arranged on the rack up and down, the second butt joint platform can be rotatably arranged on the second lifting platform and can move up and down along with the second lifting platform, the second lifting driving mechanism is arranged on the rack and drives the second lifting platform to move up and down, and the second rotary driving mechanism is arranged on the second lifting platform and drives the second butt joint platform to rotate.
10. The integrated detection device for the crystal column according to claim 1, wherein: the lifting module comprises a third lifting platform, a third butt joint platform and a third lifting driving mechanism; the third lifting platform can be movably arranged on the rack up and down, the third butt joint platform can be movably arranged on the third lifting platform up and down and can move up and down along with the third lifting platform, the weighing sensor is clamped between the third butt joint platform and the third lifting platform, and the third lifting driving mechanism is arranged on the rack and drives the third lifting platform to move up and down.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911103629.8A CN110823286A (en) | 2019-11-12 | 2019-11-12 | Crystal column comprehensive detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911103629.8A CN110823286A (en) | 2019-11-12 | 2019-11-12 | Crystal column comprehensive detection equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN203991331U (en) * | 2014-06-30 | 2014-12-10 | 东莞市顺如电子科技有限公司 | Detection machine and detection robot thereof |
| CN207385960U (en) * | 2017-06-14 | 2018-05-22 | 顾耿纶 | Height detection apparatus |
| CN208514323U (en) * | 2018-05-28 | 2019-02-19 | 丹东新东方晶体仪器有限公司 | Sapphire crystal column positions end face detection fixture |
| CN211824522U (en) * | 2019-11-12 | 2020-10-30 | 东莞市庆颖智能自动化科技有限公司 | Crystal column comprehensive detection equipment |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203991331U (en) * | 2014-06-30 | 2014-12-10 | 东莞市顺如电子科技有限公司 | Detection machine and detection robot thereof |
| CN207385960U (en) * | 2017-06-14 | 2018-05-22 | 顾耿纶 | Height detection apparatus |
| CN208514323U (en) * | 2018-05-28 | 2019-02-19 | 丹东新东方晶体仪器有限公司 | Sapphire crystal column positions end face detection fixture |
| CN211824522U (en) * | 2019-11-12 | 2020-10-30 | 东莞市庆颖智能自动化科技有限公司 | Crystal column comprehensive detection equipment |
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Effective date of registration: 20240618 Address after: Room 101, Building 1, No. 15 Gaoli Fifth Road, Tangxia Town, Dongguan City, Guangdong Province, 523000 Applicant after: Dongguan Huashengxin Precision Manufacturing Co.,Ltd. Country or region after: China Address before: Building B, Building 1, No. 15 Gaoli Fifth Road, Qinghutou Community, Tangxia Town, Dongguan City, Guangdong Province, 523000 Applicant before: DONGGUAN QINGYING INTELLIGENT AUTOMATION TECHNOLOGY Co.,Ltd. Country or region before: China |