CN110797243B - An Electron Optical System with Nested Coaxial Launch Asynchronous Electron Beam - Google Patents
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Abstract
Description
技术领域technical field
本发明属于真空电子技术领域,特别涉及一种嵌套式同轴发射的异步电子注电子光学系统。The invention belongs to the technical field of vacuum electronics, in particular to a nested coaxial emission asynchronous electron injection electron optical system.
背景技术Background technique
随着太赫兹技术在超高速通信、超高分辨率雷达、安全检查等民用和军事领域的应用,对W级功率的太赫兹源的需求越来越大。目前太赫兹源的产生方式主要是基于固态器件、光学器件以及真空电子器件。其中,真空电子器件的太赫兹源因其高功率、高效率、稳定性强等优点是目前最具潜力的太赫兹源。然而,在太赫兹波段,互作用电路也面临着这尺寸减小的问题,对当前的加工工艺也具有较大的挑战,尤其是随着频段的升高,小几何尺寸的互作用电路造成电子注传输的困难,对大电流密度的产生和聚焦有一定的挑战。With the application of terahertz technology in civil and military fields such as ultra-high-speed communication, ultra-high-resolution radar, and security inspection, the demand for terahertz sources with W-level power is increasing. The current generation methods of terahertz sources are mainly based on solid-state devices, optical devices and vacuum electronic devices. Among them, the terahertz source of vacuum electronic devices is currently the most potential terahertz source due to its advantages of high power, high efficiency, and strong stability. However, in the terahertz band, the interaction circuit also faces the problem of reducing the size, and it also poses a great challenge to the current processing technology, especially as the frequency band increases, the interaction circuit with small geometric size causes electronic The difficulty of injection transport poses certain challenges to the generation and focusing of large current densities.
为了降低加工难度并产生大功率太赫兹源,能够产生大电流、并在小尺寸的太赫兹器件中传输的大电流密度的阴极,新型太赫兹慢波结构,以及基于皮尔斯注波互作用的理论创新是当前真空太赫兹源的研究重点。其中专利“一种双电子注太赫兹折叠式行-返波放大器”就是对注波互作用的理论创新,提供了一种新型的注波互作用理论,双电子注太赫兹折叠式行-返波放大理论中两个异步的电子注分别与前向波和反向波进行注波互作用。构建反馈式注波互作用回路,与传统的注波互作用相比提高了输出功率、增益、电子效率,从而获得大功率太赫兹源。同时,通过反馈回路的建立,能够缩短互作用长度,大大的降低互作用长度带来的电子注通道一致性的问题,降低了对当前加工工艺的挑战。因此产生异步电子注的电子光学系统迫在眉睫。传统的多注太赫兹电子枪由于不能产生异步电子注,同时由于工艺以及材料的限制,电子注之间的距离过大,对太赫兹源的小型化以及多电子注通道的加工装配具有一定的挑战,因此不再满足发展的需求。In order to reduce the processing difficulty and generate high-power terahertz sources, cathodes capable of generating large currents and transporting large current densities in small-sized terahertz devices, novel terahertz slow-wave structures, and theory based on Pierce's Note-Wave Interaction Innovation is the current research focus of vacuum terahertz sources. Among them, the patent "a dual-electron injection terahertz folded line-return amplifier" is a theoretical innovation of injection-wave interaction, providing a new type of injection-wave interaction theory. In the wave amplification theory, two asynchronous electron beams interact with the forward wave and the backward wave, respectively. A feedback injection-wave interaction loop is constructed, which improves the output power, gain, and electronic efficiency compared with the traditional injection-wave interaction, thereby obtaining a high-power terahertz source. At the same time, through the establishment of a feedback loop, the interaction length can be shortened, the problem of the consistency of the electron injection channel caused by the interaction length can be greatly reduced, and the challenge to the current processing technology is reduced. Therefore, an electron optical system for generating asynchronous electron beams is imminent. The traditional multi-beam terahertz electron gun cannot generate asynchronous electron beams, and the distance between electron beams is too large due to the limitations of technology and materials, which poses certain challenges to the miniaturization of terahertz sources and the processing and assembly of multiple electron beam channels. , and therefore no longer meet the needs of development.
发明内容SUMMARY OF THE INVENTION
为解决上述技术问题,本发明提出一种嵌套式同轴发射异步电子注的电子光学系统,在产生异步电子注的同时,能够实现电子注的同轴发射,缩短电子注轴心之间的距离有利于器件的小型化、集成化等特点。In order to solve the above technical problems, the present invention proposes a nested electron optical system for coaxially emitting asynchronous electron beams, which can realize coaxial emission of electron beams while generating asynchronous electron beams, and shorten the distance between the electron beams. The distance is conducive to the miniaturization and integration of the device.
本发明采用的技术方案为:一种嵌套式同轴发射异步电子注的电子光学系统,包括:电子枪,磁聚焦系统以及收集极结构,所述电子枪依次包括:圆形电子注阴极发射面、过渡结构以及阳极,所述过渡结构至少包括:环形电子注阴极发射面。The technical scheme adopted in the present invention is as follows: a nested electron optical system for coaxially emitting asynchronous electron injection, comprising: an electron gun, a magnetic focusing system and a collector structure, the electron gun sequentially comprises: a circular electron injection cathode emitting surface, A transition structure and an anode, the transition structure at least includes: an annular electron injection cathode emitting surface.
进一步地,所述阳极电势为0,过渡结构电势为-V1,圆形电子注阴极发射面电势为-V2,且V2>V1。Further, the anode potential is 0, the transition structure potential is -V1, the circular electron injection cathode emission surface potential is -V2, and V2>V1.
进一步地,还包括:第一聚焦极,所述第一聚焦极设于圆形电子注阴极发射面处,第一聚焦极电势为-V2。Further, it also includes: a first focusing electrode, the first focusing electrode is arranged at the emission surface of the circular electron injection cathode, and the potential of the first focusing electrode is -V2.
更进一步地,还包括第二聚焦极,所述第二聚焦极为环形电子注阴极发射面位置设置的嵌套式聚焦极。Further, it also includes a second focusing electrode, the second focusing electrode is a nested focusing electrode arranged at the position of the emission surface of the annular electron injection cathode.
进一步地,所述圆形电子注与环形电子注在电子注通道的横截面上呈嵌套且同轴分布。Further, the circular electron injector and the annular electron injector are nested and coaxially distributed on the cross section of the electron injector channel.
进一步地,所述过渡结构与圆形电子注阴极发射面之间还包括保护电极。Further, a protection electrode is further included between the transition structure and the circular electron injection cathode emitting surface.
本发明的有益效果:本发明的嵌套式同轴发射异步电子注的电子光学系统,实现了高质量的圆形电子注和环形电子注的嵌套同轴发射,具备以下优点:Beneficial effects of the present invention: The electronic optical system of the present invention for nested coaxial emission of asynchronous electron beams realizes the nested coaxial emission of high-quality circular electron beams and annular electron beams, and has the following advantages:
1、相较于多电子注电子枪中多个阴极发射面的并行排列或者其他非嵌套排列方式,本发明采用阴极发射面嵌套的方法,缩短电子注轴心之间的距离,减少阴极发射面的横向尺寸,有利于电子枪的小型化、集成化;1. Compared with the parallel arrangement or other non-nested arrangement of multiple cathode emitting surfaces in the multi-electron electron injection gun, the present invention adopts the method of nesting the cathode emitting surfaces to shorten the distance between the electron injection axes and reduce the cathode emission. The lateral size of the surface is conducive to the miniaturization and integration of the electron gun;
2、本发明实现了两个异步电子注的发射;2. The present invention realizes the launch of two asynchronous electronic injections;
3、本发明采用嵌套式的阴极发射面的布置,能够降低热丝的安装难度,降低电子枪的加工、装配的难度;3. The present invention adopts the arrangement of nested cathode emission surfaces, which can reduce the difficulty of installation of the hot wire and the difficulty of processing and assembly of the electron gun;
4、本发明嵌套式同轴发射异步电子注的电子光学系统,能够嵌套发射两个同轴的电子注,两个电子注可以在一个电子注通道中传输,降低慢波结构中电子注通道的加工难度;4. The electronic optical system of the present invention for the nested coaxial emission of asynchronous electron beams can be nested to emit two coaxial electron beams, and the two electron beams can be transmitted in one electron beam channel, thereby reducing the electron beam injection in the slow wave structure The processing difficulty of the channel;
5、本发明能够产生两个不同工作电压的电子注(即异步电子注);5. The present invention can generate two electron beams with different working voltages (ie asynchronous electron beams);
6、本发明通过过渡结构使得圆形电子注的二次加速。6. The present invention enables the secondary acceleration of the circular electron injection through the transition structure.
附图说明Description of drawings
图1是本发明嵌套式同轴发射异步电子注的电子光学系统示意图;Fig. 1 is the electron optical system schematic diagram of the nested coaxial emission asynchronous electron injection of the present invention;
图2是本发明实施例圆形和环形电子注中在电子注通道的横截面上的分布示意图;Fig. 2 is the distribution schematic diagram of the cross section of electron injection channel in circular and annular electron injection channel according to the embodiment of the present invention;
图3是本发明实施例电子枪、磁聚焦系统结构示意图;3 is a schematic structural diagram of an electron gun and a magnetic focusing system according to an embodiment of the present invention;
图4为图3中过渡结构的放大示意图;Fig. 4 is the enlarged schematic diagram of the transition structure in Fig. 3;
图5是本发明实施例中磁场沿着电子注传输方向上的分布;Fig. 5 is the distribution of the magnetic field along the electron injection transport direction in the embodiment of the present invention;
图6是本发明实施例中电子注轨迹图以及电势分布图;6 is an electron injection trajectory diagram and a potential distribution diagram in an embodiment of the present invention;
图7是本发明实施例中电子注在慢波结构中的横向分布图;Fig. 7 is the lateral distribution diagram of electron injection in the slow-wave structure in the embodiment of the present invention;
图8是本发明实施例中电子注电流;Fig. 8 is the electron injection current in the embodiment of the present invention;
附图标记:1为电子枪,2为磁聚焦系统,3为收集极,11为圆形电子注阴极发射面,12为过渡结构,13为阳极,14为第一聚焦极,15为圆形电子注,16为环形电子注,17为电子注通道,18保护电极,121为环形电子注阴极发射面,122为第二聚焦极(本发明实施例中也称嵌套式聚焦极),170为电子注通道壁。Reference sign: 1 is an electron gun, 2 is a magnetic focusing system, 3 is a collector, 11 is a circular electron injection cathode emitting surface, 12 is a transition structure, 13 is an anode, 14 is a first focusing pole, and 15 is a circular electron Note, 16 is a ring electron injection, 17 is an electron injection channel, 18 is a protection electrode, 121 is a ring-shaped electron injection cathode emitting surface, 122 is a second focusing electrode (also called a nested focusing electrode in the embodiment of the present invention), 170 is a Electron injection channel wall.
具体实施方式Detailed ways
为便于本领域技术人员理解本发明的技术内容,下面结合附图1-6对本发明内容进一步阐释。In order to facilitate those skilled in the art to understand the technical content of the present invention, the content of the present invention will be further explained below with reference to the accompanying drawings 1-6.
如图1所示嵌套式发射异步电子注的电子光学系统包括:电子枪1,磁聚焦系统2以及收集极结构3;电子枪1依次包括:圆形电子注阴极发射面11、过渡结构12以及阳极13,所述过渡结构12至少包括:环形电子注阴极发射面121;圆形电子注阴极发射面11发射的圆形电子注15,先经阴极11与过渡结构2之间的电压差进行第一次加速,然后经过渡结构2与阳极13之间的电压差进行第二次加速;由环形电子注阴极发射面121发射的环形电子注16经过渡结构2与阳极13之间的电压差进行加速后,与经两次加速后的圆形电子注15进入高频系统与电磁波进行注波互作用后被收集极3收集。As shown in FIG. 1, the electron optical system for the nested emission of asynchronous electron beams includes: an
如图1所示还包括两个聚焦极结构,其中第一聚焦极14仅对圆形电子注15进行聚焦;所述过渡结构2中除了有环形电子注阴极发射面121还包括嵌套式聚焦极122,嵌套式聚焦极122对圆形电子注15和环形电子注16进行聚焦,并实现高质量的电子注发射。As shown in FIG. 1 , it also includes two focusing electrode structures, wherein the first focusing
如图2所示,所述的圆形和环形电子注中在电子注通道的横截面上呈嵌套且同轴分布,电子注通道17的电子注通道壁记为170。As shown in FIG. 2 , the circular and annular electron injection channels are nested and coaxially distributed in the cross section of the electron injection channel, and the electron injection channel wall of the
所述的圆形电子注15和环形电子注16经由同一个电子注通道进入高频系统.The
本实施例中发射圆形电子注的阴极电势为-V2,过渡结构电势为-V1,阳极电势为0;In this embodiment, the cathode potential of emitting circular electrons is -V2, the transition structure potential is -V1, and the anode potential is 0;
过渡结构作为本发明异速电子注电子枪的部件之一,是构成嵌套发射同轴电子注的重要构成部分,具备阳极的高电势功能,通过与发射圆形电子注的阴极的压差(V2-V1),对圆形电子注进行第一次加速;同时具备阴极的发射电子注的功能,实现环形电子注的发射,同时又兼具聚焦极的功能,通过嵌套式聚焦极的设计,实现圆形和环形电子注的传输。在结构设计和几何尺寸的优化下实现高质量的圆形电子注和环形电子注的嵌套同轴发射。The transition structure, as one of the components of the different velocity electron injection gun of the present invention, is an important part of the nested coaxial electron injection gun, and has the high potential function of the anode. -V1), to accelerate the circular electron injection for the first time; at the same time, it has the function of emitting electron injection of the cathode to realize the emission of annular electron injection, and also has the function of focusing pole. Through the design of the nested focusing pole, Realize the transmission of circular and annular electron beams. The nested coaxial emission of high-quality circular electron beams and annular electron beams is realized under the optimization of structural design and geometric dimensions.
本发明中磁聚焦系统对电子注的嵌套式同轴稳定传输,具有重要作用。为了防止磁场过大过小对电子注造成影响,在注波互作用电子注的选取中要注意通过调整电子注电压、电流以及半径,使环形电子注和圆形电子注的布里渊磁场近似相等。从而选取合适的磁场进行电子注的聚束,实现电子注的稳定传输,并与电磁波进行注波互作用,到达能量转移的目的。The magnetic focusing system in the present invention plays an important role in the nested coaxial stable transmission of electron injection. In order to prevent the magnetic field from being too large or too small to affect the electron beam, attention should be paid to the adjustment of the electron beam voltage, current and radius in the selection of the beam interaction electron beam so that the Brillouin magnetic fields of the ring electron beam and the circular electron beam are approximated. equal. Therefore, a suitable magnetic field is selected to carry out the bunching of the electron beam, realize the stable transmission of the electron beam, and carry out the beam interaction with the electromagnetic wave to achieve the purpose of energy transfer.
本领域技术人员应注意,在实际应用时阴极、过渡结构、阳极之间的距离、电势、发射面的大小、形状,聚焦极的形状等,可根据具体的电子注的形状以及大小来进行调整;如图3所示,本实施例给出一种结构尺寸的嵌套式同轴发射异步电子注的电子光学系统为例进行说明,具体参数如下:Those skilled in the art should note that in practical applications, the cathode, the transition structure, the distance between anodes, the potential, the size and shape of the emitting surface, the shape of the focusing electrode, etc., can be adjusted according to the shape and size of the specific electron beam. ; As shown in Figure 3, the present embodiment provides an example of an electron optical system with a nested coaxial emission asynchronous electron injection of structural dimensions, and the specific parameters are as follows:
本实施例中圆形电子注的电压为16380V,电流为0.013A,电子注半径0.05mm;环形电子注的电压为5500V,电流为0.013A,电子注的内半径为0.09mm,外半径为0.12mm。In this embodiment, the voltage of the circular electron bead is 16380V, the current is 0.013A, and the radius of the electron bead is 0.05mm; the voltage of the ring electron bezel is 5500V, the current is 0.013A, the inner radius of the electron bead is 0.09mm, and the outer radius is 0.12 mm.
如图3所示,为本实施例中给出的电子枪结构:As shown in Figure 3, the electron gun structure provided in this embodiment:
为了避免圆形电子注阴极与过渡结构之间压差过大,造成电子注对过渡结构的轰击,本发明还在过渡结构与圆形电子注阴极之间加一个保护电极18电势为-12680V。如图4所示为图3中过渡结构12的放大示意图,如图4所示在使用软件仿真时第二聚焦极与发射环形电子注的阴极为一个整体,不再像图1的示意图聚焦极和阴极中有间隙。其中圆形电子注阴极电势V2=16380,过渡结构的电势V1=5500V,阳极结构电势为零。In order to avoid excessive voltage difference between the circular electron injection cathode and the transition structure, resulting in bombardment of the transition structure by electron injection, the present invention also adds a
磁聚焦系统中磁场采用均匀磁场,并通过线圈绕制从过渡结构的位置开始绕制,经过尺寸优化,在70mm的范围内,实现0.2T的均匀磁场如图5所示;The magnetic field in the magnetic focusing system adopts a uniform magnetic field, and is wound from the position of the transition structure through coil winding. After size optimization, a uniform magnetic field of 0.2T is achieved within the range of 70mm, as shown in Figure 5;
最终发射出稳定传输70mm的高质量同轴异步电子注,其电势分布以及电子轨迹如图6所示,电子注在电子注通道上的分布如图7所示为在z=72.43mm处的电子注形态,且电子注电流为0.013A如图8所示,因此该电子光学系统能够实现两个同轴异步的电子注(圆形电压为16380V,电流为0.013A,电子注半径0.05mm;环形电压为5500V,电流为0.013A,电子注的内半径为0.09mm,外半径为0.12mm)满足设计要求。z表示电子注通道位置。Finally, a high-quality coaxial asynchronous electron beam with a stable transmission of 70mm is emitted. Its potential distribution and electron trajectory are shown in Figure 6. The distribution of the electron beam on the electron beam channel is shown in Figure 7. The electron at z=72.43mm is shown in Figure 7. Note shape, and the electron injection current is 0.013A as shown in Figure 8, so the electron optical system can realize two coaxial asynchronous electron beams (circular voltage is 16380V, current is 0.013A, electron beam radius is 0.05mm; annular The voltage is 5500V, the current is 0.013A, the inner radius of the electronic injection is 0.09mm, and the outer radius is 0.12mm) to meet the design requirements. z represents the electron injection channel position.
本领域的普通技术人员将会意识到,这里所述的实施例是为了帮助读者理解本发明的原理,应被理解为本发明的保护范围并不局限于这样的特别陈述和实施例。对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的权利要求范围之内。Those of ordinary skill in the art will appreciate that the embodiments described herein are intended to assist readers in understanding the principles of the present invention, and it should be understood that the scope of the present invention is not limited to such specific statements and embodiments. Various modifications and variations of the present invention are possible for those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the scope of the claims of the present invention.
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