CN110777326B - Preparation method of semi-gold-plated high-reflection infrared heating hollow pipe - Google Patents
Preparation method of semi-gold-plated high-reflection infrared heating hollow pipe Download PDFInfo
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- CN110777326B CN110777326B CN201910396686.3A CN201910396686A CN110777326B CN 110777326 B CN110777326 B CN 110777326B CN 201910396686 A CN201910396686 A CN 201910396686A CN 110777326 B CN110777326 B CN 110777326B
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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Abstract
The invention provides a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube, which comprises the following steps: s1: cleaning a hollow transparent glass tube; s2: clamping two ends of the hollow transparent glass tube by using a clamp, putting the hollow transparent glass tube into a vacuum system of a coating device, vacuumizing the coating device, and simultaneously starting a heating device in the vacuum system; s3: filling high-purity oxygen and high-purity argon into the coating equipment, and then starting an ion source in the coating equipment to treat the surface of the hollow transparent glass tube; s4: evaporating and coating a film material, wherein the film material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, and after the film coating is finished, the surface of the hollow transparent glass tube is treated to ensure that only half of the surface of the hollow transparent glass tube along the center line of the section of the hollow transparent glass tube is provided with a reflection film layer; s5: and (4) putting the hollow pipe plated with the film into a high-temperature furnace for high-temperature aging. The infrared heating tube has high reflectivity and good firmness of the film layer.
Description
Technical Field
The invention relates to the technical field of infrared heating pipes, in particular to a preparation method of a semi-gold-plated high-reflection infrared heating hollow pipe.
Background
Heating devices used in daily life are mostly heated by infrared heating lamps. The infrared heating lamp tube is a device which adopts a heat radiation mode to enable a heated substance to absorb energy so as to intensify molecular motion and further raise the temperature. At present, a plurality of infrared heating lamp tubes adopt 360-degree infrared heating, and heat in the direction not needing heating, so that objects not needing heating are damaged by infrared radiation, and energy waste is caused. If the infrared reflecting cover is arranged on the side which does not need to be heated, the occupied space of the device is increased, the cost is increased, the radiated infrared heat energy cannot be reflected by the reflecting cover, and partial heat energy bypasses the reflecting cover and acts outside the reflecting cover.
The reflecting layer of the infrared heating tube is obtained by spraying an oxide layer on the surface of the heating tube, so that the infrared heating tube has the following problems: firstly, the reflectivity of the reflecting layer on the surface of the existing common infrared heating pipe is lower, less than 50%, and the reflecting layer can be gradually attenuated along with the increase of the service time; and secondly, the sprayed oxide layer has poor adhesive force and is easy to fall off, and the aging and falling of the oxide layer are accelerated because the infrared heating pipe works at high temperature for a long time, so that the service life of the infrared heating pipe is shortened.
Disclosure of Invention
In view of the above problems, the present invention provides a method for preparing a semi-gold plated high-reflection infrared heating hollow tube, so as to solve the problems of energy waste caused by the infrared heating lamp tube in the prior art, as well as low reflectivity and poor adhesion of the coating of the infrared heating lamp tube.
The invention is realized by the following technical scheme:
a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube is characterized by comprising the following steps:
s1: selecting a hollow transparent glass tube with a proper specification, and cleaning the surface of the hollow transparent glass tube;
s2: clamping two ends of the cleaned hollow transparent glass tube with a clamp, placing the glass tube on a heating device of a coating device, vacuumizing the coating device, and simultaneously starting the heating device in a vacuum system to ensure that the vacuum degree in the vacuum system is 7.0-8.0 multiplied by 10-3MPa, the temperature reaches 170-180 ℃;
s3: filling high-purity oxygen and high-purity argon into the coating equipment, wherein the filling amount of the high-purity oxygen is 10-20cc, and the filling amount of the high-purity argon is 10-20cc, starting an ion source in the coating equipment to carry out bombardment treatment on the surface of the hollow transparent glass tube, and the ion beam current of the ion source is 100-150 mA;
s4: evaporating and coating a film material, wherein the film material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated in a reciprocating and alternating manner, the central wavelength of the film system is 450-550nm, 12-15 layers of films are coated in a reciprocating and alternating manner, and after the film coating is finished, the surface of the hollow transparent glass tube is treated so that only half of the surface of the hollow transparent glass tube along the central line of the section of the hollow transparent glass tube is provided with an infrared reflection film layer;
s5: and (3) placing the coated hollow transparent glass tube into a high-temperature furnace for high-temperature aging, wherein the temperature in the high-temperature furnace is maintained at 450-500 ℃, and the aging time is 25-35 min.
Further, in step S1, the surface of the hollow transparent glass tube is cleaned by a hydrofluoric acid solution with a concentration of 3-4% or by an ultrasonic cleaning machine.
Further, after the hollow transparent glass tube is cleaned, covering half of the surface of the hollow transparent glass tube along the center line of the section of the hollow transparent glass tube, then performing the film coating operations from step S2 to step S4, after the film coating in step S4 is completed, removing the covering of the surface of the hollow transparent glass tube, and then performing the operation of step S5, so that only half of the surface of the hollow transparent glass tube has the infrared reflection film layer.
Further, after the hollow transparent glass tube is cleaned, the whole hollow transparent glass tube is put into coating equipment to be coated with a film on the whole surface, after the coating in the step S4 is completed, half of the film layer on the surface of the hollow transparent glass tube is covered along the center line of the section of the coated hollow transparent glass tube, then the hollow transparent glass tube is put into hydrofluoric acid solution to etch the uncovered film layer on the hollow transparent glass tube, so that only half of the surface of the hollow transparent glass tube is provided with the reflection film layer, the hollow transparent glass tube is taken out after being corroded and washed clean, the covering is removed, and then the high-temperature aging in the step S5 is carried out.
Furthermore, a heating device in the vacuum system is provided with a turntable, the hollow transparent glass tube clamped by the clamp is placed on the turntable, and the turntable rotates to drive the hollow transparent glass tube to rotate in the film coating process.
Furthermore, as for the cylindrical hollow transparent glass tube, the cylindrical hollow transparent glass tube does revolution on the turntable and is driven by the clamp to rotate; and for the hollow transparent glass tube in a circular ring shape or other special shapes, the glass tube only revolves along with the turntable.
Further, in step S4, the center wavelength of the film system is 500nm, and 15 layers of film are alternately coated back and forth.
Further, the film system of the coating film is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H.
Compared with the prior art, the invention has at least the following beneficial effects:
1) after the coating of the hollow transparent glass tube is finished, only half of the surface of the center line of the section of the hollow transparent glass tube is provided with the infrared reflection film layer, the working space is only required to be heated in one direction, the half of the tube which is not coated with the infrared reflection film is arranged towards the direction which is required to be heated, when the tube is started for heating, the heat irradiated to the infrared reflection layer in the tube is reflected by the infrared reflection layer and then is transmitted to an object which is required to be heated in the working space from the surface of the tube which is not coated with the infrared reflection film, so that the heat transmitted from the part of the tube which is not coated with the infrared reflection film is twice as that of the common tube, the heating efficiency is greatly improved, and the waste of energy is reduced; compared with the common lamp tube, the infrared ray lamp tube can prevent objects in the direction which does not need to be heated from being damaged by infrared radiation, and an infrared ray reflecting cover is omitted, so that the occupied space of the device is reduced, and the production cost is reduced;
2) the reflecting film plating is carried out in a vacuum environment with the vacuum degree of 7.0-8.0 multiplied by 10-3The film coating temperature reaches 170-180 ℃, the ion source is started to carry out bombardment treatment on the surface of the tube to be coated during film coating, and the ion beam current of the ion source is 100-150mA, so that the evaporation speed of the film material is increased, the density and the adhesion fastness of the infrared reflection film layer are greatly improved, and the film layer is prevented from being easily cracked and falling off in subsequent use; the reflecting layer of the invention has 15 layers of alternate coating layers, the coating film systems are sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, the film layers and the film systems are the best film layers and film systems determined by the inventor through a plurality of tests, the spectral interference between the film layers under the film layers and the film systems is optimal, so that the reflectivity of the prepared infrared heating tube reaches the maximum, the hollow tube of the invention finds that the reflectivity of the hollow tube is more than 90% for infrared light with the wavelength of 750-1550nm, and under the reflectivity, the infrared heating tube can reflect the heat of the lamp tube to the other half of the lamp tube to the maximum extent, so that the heat transmitted from the lamp tube reaches the maximum heating efficiency; in addition, tests show that the reflecting layer on the infrared heating pipe prepared by the method can resist the high temperature of 750 ℃ without falling off, so that the preparation method of the invention ensures that the firmness of the film layer is obtainedThe service life of the infrared heating pipe is greatly prolonged;
3) in the process of coating, the hollow transparent glass tube is in a rotating state in the process of coating, so that the coating layer of the coating is very uniform.
To the accomplishment of the foregoing and related ends, one or more aspects of the invention comprise the features hereinafter fully described. The following description details certain exemplary aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Further, the present invention is intended to include all such aspects and their equivalents.
Detailed Description
Specific examples of the present invention are described in detail below.
Example 1:
a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube comprises the following steps:
s1: selecting a circular hollow transparent glass tube with proper specification, putting the circular hollow transparent glass tube into an ultrasonic cleaning agent to clean the surface of the circular hollow transparent glass tube, taking out the circular hollow transparent glass tube, and removing water on the circular hollow transparent glass tube for later use;
s2: putting the annular hollow transparent glass tube into a matched mould so that the surface of one half of the annular hollow transparent glass tube along the center line of the section of the annular hollow transparent glass tube is covered by the mould and the surface of the other half is exposed outside the mould, and then fixing the annular hollow transparent glass tube in the mould by using a clamp;
s3: a turntable is arranged in a heating device of a vacuum system in the vacuum coating machine, and a mould which is clamped by a clamp in the step S2 and is accommodated with the circular hollow transparent glass tube is placed on the turntable;
s4: vacuumizing the vacuum coating machine to ensure that the vacuum degree in the vacuum coating machine is about 7.0 multiplied by 10-3MPa, simultaneously starting a heating device in the coating equipment for heating, so that the temperature in the oven reaches about 175 ℃, and the turntable is always in a rotating state in the heating process of the heating device so as to drive the circleRotating the annular hollow transparent glass tube;
s5: continuously filling high-purity oxygen and high-purity argon into a vacuum coating machine, wherein the filling amount of the high-purity oxygen is 20cc, and the filling amount of the high-purity argon is 20cc, and then starting an ion source in the vacuum coating machine to carry out bombardment treatment on the surface of the circular hollow transparent glass tube, wherein the ion beam current of the ion source is 150 mA;
s6: performing evaporation coating on a film material, wherein the film coating material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, 15 layers of films are coated in total, the film system is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, and reverse coating is performed according to the film system during film coating, wherein H represents ferric oxide, and L represents silicon dioxide; the center wavelength of the film system is 500nm, according to the formula nd ═ 1/4 × λ, where n is the refractive index of the film material, the refractive index n of ferric oxide is 2.6, the refractive index n of silicon dioxide is 1.46, λ is 500nm, and the physical thickness d of each film is 10 × λ/4n, so that the physical thicknesses of each film from bottom to top are in sequence:
the film system and the thickness are determined by a plurality of tests performed by the inventor, and the spectral interference between film layers at each time can be optimized, so that the reflectivity of the infrared heating tube is maximized;
s7: and taking out the mold from the vacuum coating machine, then taking out the annular hollow transparent glass tube from the mold, scrubbing the surface of the annular hollow transparent glass tube by using alcohol, then placing the annular hollow transparent glass tube into a high-temperature furnace at the temperature of 450 ℃ for high-temperature aging for 35min, and taking out the annular hollow transparent glass tube to obtain the semi-gold-plated high-reflection infrared heating hollow tube.
Example 2:
a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube comprises the following steps:
s1: selecting a cylindrical hollow transparent glass tube with a proper specification, putting the cylindrical hollow transparent glass tube into a hydrofluoric acid solution with the concentration of 3% for cleaning, so as to clean the surface of the cylindrical hollow transparent glass tube, taking out the cylindrical hollow transparent glass tube, and removing water on the cylindrical hollow transparent glass tube for later use;
s2: a turntable is arranged in a heating device of a vacuum system in the vacuum coating machine, two ends of a cleaned cylindrical hollow transparent glass tube are clamped by a clamp and then placed on the turntable;
s3: vacuumizing the vacuum coating machine to make the vacuum degree in the vacuum coating machine be 8.0 x 10-3Simultaneously starting a heating device in the coating equipment to heat under MPa, so that the temperature in the oven reaches 180 ℃, starting a turntable in the heating device to enable the turntable to be in a rotating state, and enabling a clamp for clamping the cylindrical hollow transparent glass tube to rotate around the clamp so that the cylindrical hollow transparent glass tube revolves under the drive of the turntable and also rotates around the axis of the clamp under the drive of the clamp;
s4: continuously filling high-purity oxygen and high-purity argon into a vacuum coating machine, wherein the filling amount of the high-purity oxygen is 16cc, and the filling amount of the high-purity argon is 15cc, and then starting an ion source in the vacuum coating machine to carry out bombardment treatment on the surface of the cylindrical hollow transparent glass tube, wherein the ion beam current of the ion source is 120 mA;
s5: performing evaporation coating on a film material, wherein the film coating material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, 15 layers of films are coated in total, the film system is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, and reverse coating is performed according to the film system during film coating, wherein H represents ferric oxide, and L represents silicon dioxide; the center wavelength of the film system is 500nm, according to the formula nd ═ 1/4 × λ, where n is the refractive index of the film material, the refractive index n of ferric oxide is 2.6, the refractive index n of silicon dioxide is 1.46, λ is 500nm, and the physical thickness d of each film is 10 × λ/4n, so that the physical thicknesses of each film from bottom to top are in sequence:
s6: taking out the cylindrical hollow transparent glass tube from the vacuum coating machine, covering half of the film layer on the surface of the cylindrical hollow transparent glass tube along the center line of the section of the cylindrical hollow transparent glass tube coated with the film by using an adhesive tape, then putting the cylindrical hollow transparent glass tube into a hydrofluoric acid solution to corrode the uncovered film layer, taking out the cylindrical hollow transparent glass tube after corrosion, washing the cylindrical hollow transparent glass tube, removing the adhesive tape, and scrubbing the surface of the cylindrical hollow transparent glass tube by using alcohol;
s7: and (3) putting the cleaned cylindrical hollow transparent glass tube into a high-temperature furnace at the temperature of 500 ℃ for high-temperature aging for 30min, and taking out the cylindrical hollow transparent glass tube to obtain the semi-gold-plated high-reflection infrared heating hollow tube.
Example 3:
a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube comprises the following steps:
s1: selecting a U-shaped hollow transparent glass tube with a proper specification, putting the U-shaped hollow transparent glass tube into a hydrofluoric acid solution with the concentration of 4% for cleaning, so as to clean the surface of the U-shaped hollow transparent glass tube, taking out the U-shaped hollow transparent glass tube, and removing water on the U-shaped hollow transparent glass tube for later use;
s2: putting the U-shaped hollow transparent glass tube into a matched mould so that the surface of one half of the U-shaped hollow transparent glass tube along the center line of the section of the U-shaped hollow transparent glass tube is covered by the mould and the surface of the other half is exposed outside the mould, and then fixing the U-shaped hollow transparent glass tube in the mould by using a clamp;
s3: a turntable is arranged in a heating device of a vacuum system in the vacuum coating machine, and a mold which is clamped by a clamp in the step S2 and is accommodated with a U-shaped hollow transparent glass tube is placed on the turntable;
s4: vacuumizing the vacuum coating machine to ensure that the vacuum degree in the vacuum coating machine is 7.8 multiplied by 10-3Simultaneously starting a heating device in the coating equipment to heat under MPa, so that the temperature in the oven reaches 170 ℃, and the turntable is always in a rotating state in the heating process of the heating device to drive the heating deviceThe U-shaped hollow transparent glass tube rotates along with the turntable;
s5: continuously filling high-purity oxygen and high-purity argon into a vacuum coating machine, wherein the filling amount of the high-purity oxygen is 10cc, and the filling amount of the high-purity argon is 10cc, and then starting an ion source in the vacuum coating machine to carry out bombardment treatment on the surface of the U-shaped hollow transparent glass tube, wherein the ion beam current of the ion source is 100 mA;
s6: performing evaporation coating on a film material, wherein the film coating material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, 15 layers of films are coated in total, the film system is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, and reverse coating is performed according to the film system during film coating, wherein H represents ferric oxide, and L represents silicon dioxide; the center wavelength of the film system is 500nm, according to the formula nd ═ 1/4 × λ, where n is the refractive index of the film material, the refractive index n of ferric oxide is 2.6, the refractive index n of silicon dioxide is 1.46, λ is 500nm, and the physical thickness d of each film is 10 × λ/4n, so that the physical thicknesses of each film from bottom to top are in sequence:
s7: and taking out the mold from the vacuum coating machine, taking out the U-shaped hollow glass tube from the mold, scrubbing the surface of the U-shaped hollow glass tube by using alcohol, placing the U-shaped hollow glass tube into a high-temperature furnace at the temperature of 450 ℃ for high-temperature aging for 25min, and taking out the U-shaped hollow glass tube to obtain the semi-gold-plated high-reflection infrared heating hollow tube.
The semi-gold plated infrared heating hollow tubes prepared in example 1, example 2 and example 3 were used to test the reflectivity of the film coating to infrared light with wavelength of 750-:
as can be seen from the above table, the reflectivity of the infrared reflecting layer prepared by the invention reaches about 90%, so that most of heat on the lamp tube can be reflected and utilized, and the infrared heating tube prepared by the invention has a good heating effect; in addition, as can be seen from the above table, the film firmness of the infrared heating tube of the present invention is significantly increased relative to the control group, thereby increasing the service life of the infrared heating tube.
The method for producing the semi-gold plated high reflection infrared heating hollow tube according to the present invention is described above with reference to examples. However, it should be understood by those skilled in the art that various modifications can be made to the above-mentioned method for preparing a semi-gold plated high-reflectivity infrared heating hollow tube without departing from the scope of the present invention. Therefore, the scope of the present invention should be determined by the contents of the appended claims.
Claims (6)
1. A preparation method of a semi-gold-plated high-reflection infrared heating hollow tube is characterized by comprising the following steps:
s1: selecting a hollow transparent glass tube with a proper specification, and cleaning the surface of the hollow transparent glass tube;
s2: clamping two ends of the cleaned hollow transparent glass tube by using a clamp, putting the glass tube on a heating device of a coating device, vacuumizing the coating device, and simultaneously starting the heating device in a vacuum system to ensure that the vacuum degree in the vacuum system is 7.0-8.0 multiplied by 10-3MPa, the temperature reaches 170-180 ℃;
s3: filling high-purity oxygen and high-purity argon into the coating equipment, wherein the filling amount of the high-purity oxygen is 10-20cc, and the filling amount of the high-purity argon is 10-20cc, starting an ion source in the coating equipment to carry out bombardment treatment on the surface of the hollow transparent glass tube, and the ion beam current of the ion source is 100-150 mA;
s4: carrying out evaporation coating on a film material, wherein the film coating material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are alternately coated back and forth, the central wavelength of a film system is 500nm, 15 layers of films are alternately coated back and forth, the film system to be coated is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, reverse coating is carried out according to the film system during coating, wherein H represents ferric oxide, L represents silicon dioxide, and after coating is finished, the surface of the hollow transparent glass tube is treated to enable only half of the surface of the hollow transparent glass tube at the center line of the section of the hollow transparent glass tube to be provided with an infrared reflection film layer;
s5: and (3) placing the coated hollow transparent glass tube into a high-temperature furnace for high-temperature aging, wherein the temperature in the high-temperature furnace is maintained at 450-500 ℃, and the aging time is 25-35 min.
2. The method of claim 1, wherein the step S1 is performed by cleaning the surface of the transparent glass tube with 3-4% hydrofluoric acid solution or with an ultrasonic cleaner.
3. The method of claim 1, wherein after cleaning the hollow transparent glass tube, covering a half of the surface of the hollow transparent glass tube along the center line of the cross-section of the hollow transparent glass tube, and then performing the steps S2 to S4, after the step S4 of coating is completed, removing the covering of the surface of the hollow transparent glass tube, and then performing the step S5, so that only a half of the surface of the hollow transparent glass tube has the infrared reflective coating.
4. The method of claim 1, wherein the transparent hollow glass tube is cleaned, the entire transparent hollow glass tube is placed in a coating apparatus to coat the entire surface of the transparent hollow glass tube, after the step S4, a half of the surface film layer of the transparent hollow glass tube is covered along the center line of the cross section of the coated transparent hollow glass tube, then the uncovered film layer of the transparent hollow glass tube is etched away by placing in a hydrofluoric acid solution, so that only a half of the surface of the transparent hollow glass tube has the reflective film layer, the reflective film layer is removed after etching, the transparent hollow glass tube is washed clean, and then the high temperature aging step S5 is performed.
5. The method of claim 1, wherein a turntable is disposed on a heating device in the vacuum system, the transparent glass tube held by the fixture is placed on the turntable, and the turntable rotates to rotate the transparent glass tube during the coating process.
6. The method of claim 5, wherein the cylindrical hollow glass tube revolves on the turntable and rotates by the clamp; and for the hollow transparent glass tube in a circular ring shape or other special shapes, the glass tube only revolves along with the turntable.
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