CN115094388B - Heating pipe coating method and rose gold pipe prepared by heating pipe coating method - Google Patents

Heating pipe coating method and rose gold pipe prepared by heating pipe coating method Download PDF

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Publication number
CN115094388B
CN115094388B CN202210801926.5A CN202210801926A CN115094388B CN 115094388 B CN115094388 B CN 115094388B CN 202210801926 A CN202210801926 A CN 202210801926A CN 115094388 B CN115094388 B CN 115094388B
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coating
quartz glass
glass tube
tube
layer
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CN115094388A (en
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叶伟洋
钱伟
叶智龙
叶超祺
唐烽
陈炯锋
谢房安
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Guangdong Xinda Technology Co ltd
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Guangdong Xinda Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/085Oxides of iron group metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/40Heating elements having the shape of rods or tubes
    • H05B3/42Heating elements having the shape of rods or tubes non-flexible

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The invention relates to a heating pipe film plating method and a rose gold pipe and a gold pipe prepared by the heating pipe film plating method, wherein the heating pipe film plating method comprises the following steps: providing a quartz glass tube, siO 2 The content is more than 99.5 percent; polishing and cleaning respectively; feeding the material to a coating material frame of coating equipment; introducing oxygen and argon at 125-135 ℃ in a vacuum environment of 0.4-0.6MPa, and starting an ion source in a coating device to bombard the surface of the quartz glass tube, wherein the total amount of the introduced oxygen and argon is 20-32cc; and (3) evaporating and coating the coating material by adopting an electron gun of a coating device, and heating the pipe wall by adopting the electron gun for 160-200 seconds before coating the first layer. The adhesive force of the surface of the quartz glass tube to the coating layer is improved, atoms separated out by a heating source are better adsorbed, the first layer of the coating layer is tightly combined, and the thermal efficiency is further improved.

Description

Heating pipe coating method and rose gold pipe prepared by heating pipe coating method
Technical Field
The invention relates to the technical field of heating pipe preparation, in particular to a heating pipe film plating method, a rose gold pipe prepared by the heating pipe film plating method and a gold pipe.
Background
The far infrared heating tube adopts quartz glass tube processed by special technology and is matched with resistance composite material as a heater, and the heating tube can absorb almost all visible light and near infrared light radiated by the heating wire and can convert the visible light and near infrared light into far infrared radiation, so that the far infrared heating tube has a larger application scene.
The heating tube usually adopts a coating process to form an oxide layer on the outer layer of the quartz tube so as to improve the thermal efficiency. However, the current coating process of the heating pipe is prone to the following problems: firstly, the uniformity of the film layer is relatively poor, the performance and quality of the whole product are affected, and secondly, the thermal efficiency of the existing coating is relatively low, and the coating has a great room for improvement. Furthermore, the heating pipe with the traditional coating is relatively glaring in use, and eyes are easy to blur after long-time watching.
Disclosure of Invention
Based on this, there is a need for a heating pipe coating method, and a rose gold pipe and a gold pipe prepared by the same, which provide relatively good uniformity of the film layer, can improve the thermal efficiency and can improve the dazzling problem during use.
A heating pipe film coating method comprises the following steps:
providing a quartz glass tube, wherein the quartz glass tube is made of SiO 2 A transparent quartz glass tube having a content of 99.5% or more;
polishing and cleaning the quartz glass tube respectively;
feeding the quartz glass tube to a coating material frame of coating equipment;
introducing oxygen and argon at 125-135 ℃ in a vacuum environment of 0.4-0.6MPa, and starting an ion source in a coating device to bombard the surface of the quartz glass tube, wherein the re-entry amount of the oxygen is 10-20cc; argon is introduced into the reactor in an amount of 10-30cc; and the total amount of the oxygen and the argon is 20-32cc;
and (3) evaporating and coating a coating material by adopting an electron gun of a coating device, wherein the coating material is silicon dioxide and ferric oxide, the silicon dioxide and the ferric oxide are alternately coated back and forth, a coating layer is formed on the surface of the quartz glass tube, wherein the first layer is the silicon dioxide coating layer, and the tube wall of the quartz glass tube is heated by adopting the electron gun for 160-200 seconds before the first layer is coated.
In one embodiment, the quartz glass tube is made of SiO 2 A transparent quartz glass tube with a content of 99.8%.
In one embodiment, the wall of the quartz glass tube is heated for 180 seconds using an electron gun prior to coating the first layer.
In one embodiment, the velocity of the electron gun is 15A/s when the electron gun heats the wall of the quartz glass tube.
In one embodiment, the electron gun is operated at a rate of 25A/s for each of the silicon dioxide coating layers of the coating layer.
In one embodiment, the electron gun is operated at a rate of 5A/s when forming each of the iron oxide films of the coating layer.
In one embodiment, after forming the coating layer, the heating pipe coating method further includes:
and (3) automatically placing the quartz glass tube with the coating layer in the coating equipment for 7min, and then opening a chamber door for blanking.
In one embodiment, when the tube wall of the quartz glass tube is heated by an electron gun for 160 seconds to 200 seconds, only 30cc of argon gas is introduced, and no oxygen gas is introduced.
In one embodiment, the number of the alternate coating layers is 8-10.
The application also provides a heating pipe, which is prepared by adopting the heating pipe coating method in any embodiment.
The application also provides a rose gold tube which is prepared by adopting the heating tube film plating method in any embodiment, wherein the heating tube is a rose gold tube, and the number of alternating film plating layers is 10.
The application also provides a gold tube, which is prepared by the heating tube coating method in any embodiment, wherein the heating tube is a gold tube, and the number of alternating coating layers is 8.
The heating pipe coating method is applied to a quartz glass pipe used as a heating pipe for coating a film to form an oxide layer, firstly, the quartz glass pipe is polished to remove surface impurities, so that defects such as scratches or abrasion are overcome, the transparency and the refractive index of the quartz glass pipe are improved, the thermal efficiency is improved, the coating surface of the film layer is relatively uniform, the film coating layer is formed relatively uniformly, and the optical performance is improved. Before the first layer is coated, the tube wall of the quartz glass tube is heated for 160-200 seconds by adopting an electron gun, so that the adhesion force of the surface of the quartz glass tube to the coating layer is improved, atoms separated out by a heating source are better adsorbed, the first layer of the coating layer is more tightly combined, and the thermal efficiency is further improved. The coating material is selected to be silicon dioxide and ferric oxide, and the silicon dioxide and the ferric oxide are alternately coated back and forth, so that a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and most of the ultraviolet light is converted into far infrared rays, so that the ultraviolet system is not so glaring; and the heat efficiency can be further improved by about 3% by heating the wall of the quartz glass tube by an electron gun before forming the first layer. In addition, in the coating process, the coating efficiency can be improved by combining the speed of an electron gun of 15-25A/s under the vacuum environment of 0.4-0.6MPa and the temperature of 125-135 ℃, and the whole coating time can be finished within 60-70min, so that compared with the traditional process, the coating time and the coating temperature are reduced, and the production efficiency can be improved and the energy consumption can be reduced.
Drawings
Fig. 1 is a step diagram of a heating pipe coating method according to an embodiment of the invention.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, and the preferred embodiments of the present invention are presented in the accompanying drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, so that the invention is not limited to the specific embodiments disclosed below.
In one embodiment, referring to fig. 1, a heating pipe coating method includes the following steps:
s100: providing a quartz glass tube, wherein the quartz glass tube is made of SiO 2 A transparent quartz glass tube having a content of 99.5% or more;
in the present embodiment, the quartz glass tube is used as SiO material 2 A transparent quartz glass tube having a content of 99.5% or more; the thermal efficiency can be improved. Specifically, the quartz glass tube uses SiO as a material 2 The content is 99.5% or 99.8%. Preferably, the quartz glass tube uses SiO as a material 2 The content is 99.8%. More preferably, the quartz glass tube uses SiO as a material 2 The content is more than 99.8 percent. In this embodiment, siO is selected 2 The quartz glass tube with the content of 99.8 percent can further improve the thermal efficiency of the heating tube.
For example, quartz glass tubesIs a round tube. For another example, the wall thickness of the quartz glass tube is 0.98mm to 1.2mm. For example, the tube diameter of the quartz glass tube isThe applicant found that the above pipe wall thickness and pipe diameter are adopted, and the material SiO is used in combination with the quartz glass pipe 2 The content is 99.8%, the light transmittance is better, the heat efficiency of the heating pipe can be further improved, and the heat loss is reduced.
S200: polishing and cleaning the quartz glass tube respectively;
in this embodiment, by polishing the quartz glass tube, some defects, such as scratches or abrasion, can be overcome, the transparency and refractive index of the quartz glass tube are improved, so as to improve the thermal efficiency, and the coating surface of the film layer is relatively uniform, so that the coating layer is relatively uniform in molding, and the optical performance is improved. Specifically, polishing powder can be used for polishing, and polishing powder is used for polishing a quartz glass tube, so that scratches or abrasion on the surface can be removed by high-speed friction, and the light transmittance and refraction effects can be improved to a large extent. For example, the polishing powder is rare earth polishing powder, and the main component is cerium oxide. Of course, the form of polishing is not limited thereto, and other polishing means known in the art may be used.
In this embodiment, the quartz glass tube is cleaned after polishing to remove impurities and dirt on the surface of the quartz glass tube, so that the light transmittance of the glass tube is further improved, and the thermal efficiency is higher. Specifically, an ultrasonic cleaning mode can be adopted. The ultrasonic cleaning can be combined with a commercial ultrasonic cleaning agent for cleaning. And removing water on the water after cleaning for standby. Of course, the form of cleaning is not limited thereto, and other cleaning methods known in the art may be used.
In this application, through carrying out polishing treatment to quartz glass tube, get rid of surface impurity, compensate some defects, say the scratch or the circumstances of wearing and tearing, improve quartz glass tube's transparency and refracting index to improve thermal efficiency, and make the cladding material face of rete comparatively more even, and then make the coating layer shaping comparatively more even, improved optical property.
S300: feeding the quartz glass tube to a coating material frame of coating equipment;
the cleaned quartz glass tube is fed to a coating material frame of coating equipment after the moisture on the quartz glass tube is removed, and is used for coating preparation in the coating equipment. The coating material rack is used for installing the quartz glass tube. In one embodiment, the coating apparatus is a vacuum coater, model BLL-1500F, manufactured by Baoli vacuum Co., ltd.
Specifically, after being placed on a coating material rack, the coating material rack is placed in a vacuum coating machine, then the cold water machine is started, the air pressure is controlled to be the coating environment, for example, 0.4-0.6MPa, and the temperature is controlled to be 125-135 ℃.
S400: introducing oxygen and argon at 125-135 ℃ in a vacuum environment of 0.4-0.6MPa, and starting an ion source in a coating device to bombard the surface of the quartz glass tube, wherein the re-entry amount of the oxygen is 10-20cc; argon is introduced into the reactor in an amount of 10-30cc; and the total amount of the oxygen and the argon is 20-32cc; the method comprises the steps of carrying out a first treatment on the surface of the
In the application, oxygen and argon are introduced under the condition that the air pressure is 0.4-0.6MPa and the temperature is 125-135 ℃. Wherein the total flow is controlled to be 20-32cc. Specifically, in practical application, argon is introduced first and then oxygen is fused, more specifically, when an ion source in a coating device is started to perform first bombardment treatment on the surface of the quartz glass tube, the heating source is used for heating the tube wall of the quartz glass tube for 160 seconds to 200 seconds without heating materials, only 30cc of argon is introduced in the process, the glass tube is heated first under the protection of the argon, the adhesive force of the surface of the subsequent quartz glass tube to the coating layer is improved, atoms isolated from the heating source are better adsorbed, and then the first layer of the coating layer is tightly combined, so that the thermal efficiency is further improved. The coating material is selected to be silicon dioxide and ferric oxide, and the silicon dioxide and the ferric oxide are alternately coated back and forth, so that a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and most of the ultraviolet light is converted into far infrared rays, so that the ultraviolet system is not so glaring; and the wall of the quartz glass tube is heated by an electron gun before the first layer is formed, so that the heat efficiency is greatly improved. Preferably, the tube wall of the quartz glass tube is heated for 180 seconds by an electron gun, and preferably, the velocity of the electron gun is 15A/s when the electron gun heats the tube wall of the quartz glass tube. Thus, the applicant researches show that the adhesive force effect is best, the optical performance after coating is better, compared with the traditional thermal efficiency, the thermal efficiency can be greatly improved, and the heating effect is better.
S500: and (3) evaporating and coating a coating material by adopting an electron gun of a coating device, wherein the coating material is silicon dioxide and ferric oxide, the silicon dioxide and the ferric oxide are alternately coated back and forth, a coating layer is formed on the surface of the quartz glass tube, wherein the first layer is the silicon dioxide coating layer, and the tube wall of the quartz glass tube is heated by adopting the electron gun for 160-200 seconds before the first layer is coated.
In the application, the coating materials are silicon dioxide and ferric oxide, which are alternately coated back and forth, so that a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and most of the ultraviolet light is converted into far infrared rays, so that the ultraviolet system is not so glaring; and the heat efficiency can be further improved by about 3% by heating the wall of the quartz glass tube by an electron gun before forming the first layer. In addition, in the coating process, the coating efficiency can be improved by combining the speed of an electron gun of 15-25A/s under the vacuum environment of 0.4-0.6MPa and the temperature of 125-135 ℃, and the whole coating time can be finished within 60-70min, so that compared with the traditional process, the coating time and the coating temperature are reduced, and the production efficiency and the energy consumption can be improved.
In one embodiment, the electron gun is operated at a rate of 25A/s for each of the silicon dioxide coating layers of the coating layer. For another example, the velocity of the electron gun is 5A/s when forming each ferric oxide film layer of the film coating layer. Thus, the formed film has good adhesive force and high film forming efficiency.
In one embodiment, the number of the alternate coating layers is 8-10. A first partIn a specific embodiment, when the coating layer is 10 layers, starting from the innermost layer of the quartz glass tube, the coating layer is sequentially as follows: siO (SiO) 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 The method comprises the steps of carrying out a first treatment on the surface of the The thickness of each layer is as follows: 2280 A\8411 A\2280A\1682A\2280 A\8411A, the thickness unit A is angstrom, thus, the generated heating pipe is a rose gold pipe, the appearance is beautiful, the grade is high, a large amount of ultraviolet light is shielded, most of ultraviolet light is converted into far infrared rays, the thermal efficiency is improved by about 3 percent, and meanwhile, the ultraviolet light is not dazzling; avoiding people from blurring after long-time watching.
In another specific embodiment, when the coating layer is 8 layers, starting from the innermost layer of the quartz glass tube, the coating layers are in sequence: siO (SiO) 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 The thickness of each layer is as follows: 2337A/505A/2337A/1009A/heating pipe is formed by the method. Therefore, the generated heating pipe is a gold pipe, has attractive appearance and high grade, shields a large amount of ultraviolet light, converts most of the ultraviolet light into far infrared rays, improves the thermal efficiency by about 3%, and simultaneously makes the ultraviolet light system less glaring; avoiding people from blurring after long-time watching.
In an alternative embodiment, the rose gold tube is produced using the following technical parameters of the vacuum coater of table 1, and the rose gold tube is produced using the following materials of table 2. Alternatively, the gold tube was produced using the following parameters of the vacuum coater of table 3 and the materials of table 4.
TABLE 1 Rose gold tube coating parameters
TABLE 2 Rose gold tube coating film Using Material
Table 3 gold tube coating parameters
Table 4 gold tube coating film uses material
In Table 1, the coating parameters of the rose gold tube are that the coating temperature is 130 ℃, the gassing temperature of oxygen and argon is 300 ℃, the material names and the crucible numbers are selected from corresponding materials, and the corresponding materials are filled in the crucible. Wherein the coating speed of the electron gun of the first layer is 15A/s, the time is 180 seconds, and the thickness is 0A, which shows that the 1 st layer is that the tube wall of the quartz glass tube is heated for 180 seconds by the electron gun before the first layer of coating is carried out on the quartz glass tube, so as to improve the adhesive force, the heating source does not heat the material, no atoms are separated, namely, the 1 st layer is not actually present, and the actual coating layer starts from the 2 nd layer. The rear coating layer with the thickness value is corresponding to the thickness generated by adopting the corresponding electron gun speed, and the other time is 0 but the thickness is not limited in the coating process, and the next layer is directly jumped after the thickness of one layer is coated. In the source number, 1 is a cave gun and is blocked, and 2 is a ring gun. In the mode (18) (0: constant current) (1: constant voltage), the constant current and constant voltage are record numbers, so that a selection mode in the following process is facilitated, the mode 18 is a pre-stored record label, the specific constant current and constant voltage are matched with a model, for example, a vacuum coating machine BLL-1500F adopted in the embodiment is produced by Baoli vacuum machine Limited of Denyang, and the parameters are optimized and prepared on the model. In Table 1, the total flow rates of oxygen and argon are controlled, and the previous definition of this application is 20-32cc, layer 3, oxygenate 2:20cc, argon filling 12, and total flow of 32cc.
In Table 2, the density of the silicon dioxide is 2.648g/cm3, the density of Fe2O3 is 5.24g/cm3, the material information corresponds to the purchased material, corresponding parameters can be found out from the film coating material manufacturer, the electron gun control, the pre-storing setting, the adjusting control loop and the main tool are matched with the corresponding film coating machine, for example, the adopted vacuum film coating machine BLL-1500F in the embodiment is produced by Baoli vacuum machine Co., ltd. In Danyang, and the parameters are obtained by optimizing the parameters. Table 3, table 4, the technical parameters and process types of the production of the gold tube, which are the same as those described above, are also optimized by the applicant.
In the embodiment, the rose gold tube and the gold tube are based on the heating tube coating method of the application, and meanwhile, the above coating technical parameters and the coating materials are combined, so that the rose gold tube and the gold tube which are respectively prepared have the following remarkable advantages: 1. the effect of the coating is mainly to shield a large amount of ultraviolet light, and convert most of the ultraviolet light into far infrared rays, so that the ultraviolet system is not so glaring; 2, the thickness is controlled by the instrument crystal control in the equipment, but the whole thickness is relatively uniform; 3. the appearance is attractive, the grade is high, a large amount of ultraviolet light is shielded, most of ultraviolet light is converted into far infrared rays, the thermal efficiency is improved by about 3%, and meanwhile, the ultraviolet system is not so glaring; avoiding people from blurring after long-time watching. It should be noted that the properties of the rose gold tube and the gold tube are not greatly affected, the ultraviolet coefficients of the rose gold and the ordinary gold are the same, and only the red light of the rose gold is not so much.
Of course, the specific coating parameters and materials used above in connection with the rose gold tube and the gold tube are merely an optional illustration of the present application and should be understood as not limiting the entirety of the present application.
In yet another embodiment, after forming the coating layer, the heating pipe coating method further includes:
and (3) automatically placing the quartz glass tube with the coating layer in the coating equipment for 7min, and then opening a chamber door for blanking.
The heating pipe coating method is applied to a quartz glass pipe used as a heating pipe for coating a film to form an oxide layer, firstly, the quartz glass pipe is polished and cleaned to remove surface impurities, so that defects such as scratches or abrasion are overcome, the transparency and the refractive index of the quartz glass pipe are improved, the thermal efficiency is improved, the coating surface of the film layer is relatively uniform, the film coating layer is formed relatively uniform, and the optical performance is improved. Before the first layer is coated, the tube wall of the quartz glass tube is heated for 160-200 seconds by adopting an electron gun, so that the adhesion force of the surface of the quartz glass tube to the coating layer is improved, atoms separated out by a heating source are better adsorbed, the first layer of the coating layer is more tightly combined, and the thermal efficiency is further improved. The coating material is selected to be silicon dioxide and ferric oxide, and the silicon dioxide and the ferric oxide are alternately coated back and forth, so that a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and most of the ultraviolet light is converted into far infrared rays, so that the ultraviolet system is not so glaring; and the heat efficiency can be further improved by about 3% by heating the wall of the quartz glass tube by an electron gun before forming the first layer. In addition, in the coating process, the coating efficiency can be improved by combining the speed of an electron gun of 15-25A/s under the vacuum environment of 0.4-0.6MPa and the temperature of 125-135 ℃, and the whole coating time can be finished within 60-70min, so that compared with the traditional process, the coating time and the coating temperature are reduced, and the production efficiency and the energy consumption can be improved.
The application also provides a heating pipe, which is prepared by adopting the heating pipe coating method in any embodiment.
The application also provides a rose gold tube which is prepared by adopting the heating tube film plating method in any embodiment, wherein the heating tube is a rose gold tube, and the number of alternating film plating layers is 10.
The application also provides a gold tube, which is prepared by the heating tube coating method in any embodiment, wherein the heating tube is a gold tube, and the number of alternating coating layers is 8.
The heating pipe coating method is applied to a quartz glass pipe used as a heating pipe for coating a film to form an oxide layer, firstly, the quartz glass pipe is polished and cleaned to remove surface impurities, so that defects such as scratches or abrasion are overcome, the transparency and the refractive index of the quartz glass pipe are improved, the thermal efficiency is improved, the coating surface of the film layer is relatively uniform, the film coating layer is formed relatively uniform, and the optical performance is improved. Before the first layer is coated, the tube wall of the quartz glass tube is heated for 160-200 seconds by adopting an electron gun, so that the adhesion force of the surface of the quartz glass tube to the coating layer is improved, atoms separated out by a heating source are better adsorbed, the first layer of the coating layer is more tightly combined, and the thermal efficiency is further improved. The coating material is selected to be silicon dioxide and ferric oxide, and the silicon dioxide and the ferric oxide are alternately coated back and forth, so that a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and most of the ultraviolet light is converted into far infrared rays, so that the ultraviolet system is not so glaring; and the heat efficiency can be further improved by about 3% by heating the wall of the quartz glass tube by an electron gun before forming the first layer. In addition, in the coating process, the coating efficiency can be improved by combining the speed of a 15-25 electron gun of 25A/s under the vacuum environment of 0.4-0.6MPa and the temperature of 125-135 ℃, and the whole coating time can be finished within 60-70min, so that compared with the traditional process, the coating time and the coating temperature are reduced, and the production efficiency and the energy consumption can be improved.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims (5)

1. The heating pipe film plating method is characterized by comprising the following steps:
providing a quartz glass tube, wherein the quartz glass tube is made of SiO 2 A transparent quartz glass tube having a content of 99.8% or more; the quartz glass tube is a circular tube, the wall thickness of the quartz glass tube is 0.98 mm-1.2 mm, and the tube diameter of the quartz glass tube is 8 mm-12 mm;
polishing and cleaning the quartz glass tube respectively; the method comprises the steps of polishing a quartz glass tube by using polishing powder, wherein the polishing powder is rare earth polishing powder; adopting an ultrasonic cleaning mode, and cleaning by combining an ultrasonic cleaning agent during ultrasonic cleaning;
feeding the quartz glass tube to a coating material frame of coating equipment; wherein the coating equipment is a vacuum coating machine; placing the quartz glass tube on a coating material frame, loading the quartz glass tube into a vacuum coating machine, and then starting a cold water machine, controlling the air pressure to be 0.4-0.6MPa and the temperature to be 125-135 ℃;
introducing oxygen and argon at 125-135 ℃ in a vacuum environment of 0.4-0.6MPa, and starting an ion source in a coating device to bombard the surface of the quartz glass tube, wherein the re-entry amount of the oxygen is 10-20cc; argon is introduced into the reactor in an amount of 10-30cc; and the total amount of the oxygen and the argon is 20-32cc; argon is firstly introduced and then oxygen is introduced; when an ion source in a coating device is started to perform primary bombardment treatment on the surface of the quartz glass tube, the heating source does not heat materials, an electron gun is adopted to heat the tube wall of the quartz glass tube for 180 seconds, only 30cc of argon is introduced in the process, and the glass tube is heated firstly under the protection of the argon; when the electron gun heats the wall of the quartz glass tube, the speed of the electron gun is 15A/s;
evaporating and coating a coating material by adopting an electron gun of coating equipment, wherein the coating material is silicon dioxide and ferric oxide, the silicon dioxide and the ferric oxide are alternately coated back and forth, a coating layer is formed on the surface of the quartz glass tube, the first layer is a silicon dioxide coating layer, and the speed of the electron gun when each silicon dioxide coating layer of the coating layer is formed is 25A/s; the speed of the electron gun when each ferric oxide film layer of the film coating layer is formed is 5A/s, and the whole time of the evaporation film coating is 60-70min; wherein the number of the alternating coating layers is 8-10;
when the number of the alternating coating layers is 10, the coating layers start from the innermost layer of the quartz glass tube, and the coating layers start from the innermost layer of the quartz glass tube and are sequentially as follows:
SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 the method comprises the steps of carrying out a first treatment on the surface of the The thickness of each layer is as follows: 2280 A\8411 A\2280A\1682A\2280 A\8411A;
when the number of the alternating coating layers is 8, the coating layers are sequentially from the innermost layer of the quartz glass tube: siO (SiO) 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 The thickness of each layer is as follows: 2337A/505A/2337A/1009A.
2. The heating pipe plating method according to claim 1, characterized in that after forming the plating layer, the heating pipe plating method further comprises:
and (3) automatically placing the quartz glass tube with the coating layer in the coating equipment for 7min, and then opening a chamber door for blanking.
3. A heating tube, characterized in that it is prepared by the heating tube coating method as claimed in claim 1 or 2.
4. A rose gold tube, which is prepared by the heating tube film plating method as claimed in claim 1 or 2, wherein the heating tube is a rose gold tube, and the number of alternating film plating layers is 10.
5. A gold tube prepared by the heating tube coating method as claimed in claim 1 or 2, wherein the heating tube is a gold tube, and the number of alternating coating layers is 8.
CN202210801926.5A 2022-07-08 2022-07-08 Heating pipe coating method and rose gold pipe prepared by heating pipe coating method Active CN115094388B (en)

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Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984349A (en) * 1982-11-08 1984-05-16 Sekisui Chem Co Ltd Magnetic tape
JPS59128234A (en) * 1983-01-11 1984-07-24 Toyota Motor Corp Formation of multilayered film on surface of substrate
JPS60189704A (en) * 1984-03-09 1985-09-27 Univ Kyoto Multi-layered oxide film having periodicity
CN101478109A (en) * 2009-01-09 2009-07-08 中国科学院上海硅酸盐研究所 Optical thin-film structure used for laser crystal and preparation thereof
CN101493534A (en) * 2008-12-16 2009-07-29 芜湖长信科技股份有限公司 Dereflection screen of display and method for making same
DE102010040049A1 (en) * 2010-08-31 2012-03-01 Von Ardenne Anlagentechnik Gmbh Electron beam evaporation device for depositing ferromagnetic coating material on substrate, comprises electron gun with drivable deflection system, external magnetic deflecting system, and evaporation source with coating material
CN102573150A (en) * 2012-02-06 2012-07-11 常州亮迪电子光源有限公司 Preparation process of coated and infrared transmitting halogen heating tube with low brightness
CN103469163A (en) * 2013-09-22 2013-12-25 无锡启晖光电科技有限公司 Vacuum coating machine
CN103668067A (en) * 2013-12-09 2014-03-26 西南技术物理研究所 Preparation method of wide-angle multiband infrared high-reflective film system
CN103710669A (en) * 2013-12-23 2014-04-09 大连理工大学 Preparation method of alloy 740 surface antioxidation coating
CN203559116U (en) * 2013-09-22 2014-04-23 无锡启晖光电科技有限公司 Vacuum coating machine
CN103949640A (en) * 2014-05-19 2014-07-30 北京航空航天大学 Method for preparing NbSi-base ultrahigh-temperature alloy through EBM (Electron Beam Melting)
CN104357799A (en) * 2014-11-11 2015-02-18 大连理工大学 Evaporation device with double-e type electron guns and evaporating method by using same
EP3012347A2 (en) * 2014-10-24 2016-04-27 United Technologies Corporation Nanoparticle formation mitigation in a deposition process
CN105568229A (en) * 2016-03-09 2016-05-11 无锡南理工科技发展有限公司 Preparation method of nitrogen-doped titanium dioxide film
CN105607159A (en) * 2016-01-12 2016-05-25 西南技术物理研究所 Preparation method for large-angle multiband infrared high antireflection film system
CN106242313A (en) * 2016-07-21 2016-12-21 浙江鼎梓塑胶科技有限公司 A kind of film plating process of Wear-resistant, high-temperature resistant low radiation coated glass
CN106521429A (en) * 2016-11-15 2017-03-22 中国航空工业集团公司北京航空制造工程研究所 Production method of layered structured thermal barrier coating
CN106756811A (en) * 2015-11-19 2017-05-31 中国航空工业集团公司北京航空制造工程研究所 A kind of preparation method of alloy coating at high temperature
CN107267929A (en) * 2017-07-21 2017-10-20 张治国 A kind of ZnO high transmittance high conductivity method for manufacturing thin film based on electron beam evaporation technique
CN109202081A (en) * 2018-10-24 2019-01-15 中国人民解放军陆军装甲兵学院 Copper alloy based on the forming of electron beam powdering increases the preparation method of material
CN109536885A (en) * 2018-12-27 2019-03-29 广州海鸥住宅工业股份有限公司 A kind of method of electron beam evaporation titanizing
CN109666900A (en) * 2018-12-10 2019-04-23 中国船舶重工集团公司第十二研究所 A kind of electro beam physics vapour deposition micron multilayer complex films and preparation method thereof
CN110055491A (en) * 2019-05-14 2019-07-26 淮安亮谷光电科技有限公司 The preparation method of complete gold-plated high reflection infrared heating hollow pipe
CN110777326A (en) * 2019-05-14 2020-02-11 淮安亮谷光电科技有限公司 Preparation method of semi-gold-plated high-reflection infrared heating hollow pipe
CN111041413A (en) * 2019-12-11 2020-04-21 中国工程物理研究院激光聚变研究中心 Method for improving surface shape precision of large-aperture reflector coating film
CN112065507A (en) * 2020-08-31 2020-12-11 长沙新材料产业研究院有限公司 Aero-engine single-alloy dual-performance turbine disc and preparation method thereof
CN112408810A (en) * 2020-11-24 2021-02-26 中国电子科技集团公司第十八研究所 Laser protection glass cover plate for space solar cell and preparation method thereof
CN112831756A (en) * 2020-12-31 2021-05-25 苏州佑伦真空设备科技有限公司 Automatic vacuum evaporation method
CN114133226A (en) * 2021-12-30 2022-03-04 苏州晶生新材料有限公司 Optical coating substrate and using method thereof
CN114133145A (en) * 2021-12-10 2022-03-04 河南康耀电子股份有限公司 High-transmittance electromagnetic shielding coated glass and production and preparation method thereof
CN114609702A (en) * 2022-03-21 2022-06-10 李昊宇 Short-wave near-infrared broadband antireflection film and preparation method thereof

Patent Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984349A (en) * 1982-11-08 1984-05-16 Sekisui Chem Co Ltd Magnetic tape
JPS59128234A (en) * 1983-01-11 1984-07-24 Toyota Motor Corp Formation of multilayered film on surface of substrate
JPS60189704A (en) * 1984-03-09 1985-09-27 Univ Kyoto Multi-layered oxide film having periodicity
CN101493534A (en) * 2008-12-16 2009-07-29 芜湖长信科技股份有限公司 Dereflection screen of display and method for making same
CN101478109A (en) * 2009-01-09 2009-07-08 中国科学院上海硅酸盐研究所 Optical thin-film structure used for laser crystal and preparation thereof
DE102010040049A1 (en) * 2010-08-31 2012-03-01 Von Ardenne Anlagentechnik Gmbh Electron beam evaporation device for depositing ferromagnetic coating material on substrate, comprises electron gun with drivable deflection system, external magnetic deflecting system, and evaporation source with coating material
CN102573150A (en) * 2012-02-06 2012-07-11 常州亮迪电子光源有限公司 Preparation process of coated and infrared transmitting halogen heating tube with low brightness
CN203559116U (en) * 2013-09-22 2014-04-23 无锡启晖光电科技有限公司 Vacuum coating machine
CN103469163A (en) * 2013-09-22 2013-12-25 无锡启晖光电科技有限公司 Vacuum coating machine
CN103668067A (en) * 2013-12-09 2014-03-26 西南技术物理研究所 Preparation method of wide-angle multiband infrared high-reflective film system
CN103710669A (en) * 2013-12-23 2014-04-09 大连理工大学 Preparation method of alloy 740 surface antioxidation coating
CN103949640A (en) * 2014-05-19 2014-07-30 北京航空航天大学 Method for preparing NbSi-base ultrahigh-temperature alloy through EBM (Electron Beam Melting)
EP3012347A2 (en) * 2014-10-24 2016-04-27 United Technologies Corporation Nanoparticle formation mitigation in a deposition process
CN104357799A (en) * 2014-11-11 2015-02-18 大连理工大学 Evaporation device with double-e type electron guns and evaporating method by using same
CN106756811A (en) * 2015-11-19 2017-05-31 中国航空工业集团公司北京航空制造工程研究所 A kind of preparation method of alloy coating at high temperature
CN105607159A (en) * 2016-01-12 2016-05-25 西南技术物理研究所 Preparation method for large-angle multiband infrared high antireflection film system
CN105568229A (en) * 2016-03-09 2016-05-11 无锡南理工科技发展有限公司 Preparation method of nitrogen-doped titanium dioxide film
CN106242313A (en) * 2016-07-21 2016-12-21 浙江鼎梓塑胶科技有限公司 A kind of film plating process of Wear-resistant, high-temperature resistant low radiation coated glass
CN106521429A (en) * 2016-11-15 2017-03-22 中国航空工业集团公司北京航空制造工程研究所 Production method of layered structured thermal barrier coating
CN107267929A (en) * 2017-07-21 2017-10-20 张治国 A kind of ZnO high transmittance high conductivity method for manufacturing thin film based on electron beam evaporation technique
CN109202081A (en) * 2018-10-24 2019-01-15 中国人民解放军陆军装甲兵学院 Copper alloy based on the forming of electron beam powdering increases the preparation method of material
CN109666900A (en) * 2018-12-10 2019-04-23 中国船舶重工集团公司第十二研究所 A kind of electro beam physics vapour deposition micron multilayer complex films and preparation method thereof
CN109536885A (en) * 2018-12-27 2019-03-29 广州海鸥住宅工业股份有限公司 A kind of method of electron beam evaporation titanizing
CN110777326A (en) * 2019-05-14 2020-02-11 淮安亮谷光电科技有限公司 Preparation method of semi-gold-plated high-reflection infrared heating hollow pipe
CN110055491A (en) * 2019-05-14 2019-07-26 淮安亮谷光电科技有限公司 The preparation method of complete gold-plated high reflection infrared heating hollow pipe
CN111041413A (en) * 2019-12-11 2020-04-21 中国工程物理研究院激光聚变研究中心 Method for improving surface shape precision of large-aperture reflector coating film
CN112065507A (en) * 2020-08-31 2020-12-11 长沙新材料产业研究院有限公司 Aero-engine single-alloy dual-performance turbine disc and preparation method thereof
CN112408810A (en) * 2020-11-24 2021-02-26 中国电子科技集团公司第十八研究所 Laser protection glass cover plate for space solar cell and preparation method thereof
CN112831756A (en) * 2020-12-31 2021-05-25 苏州佑伦真空设备科技有限公司 Automatic vacuum evaporation method
CN114133145A (en) * 2021-12-10 2022-03-04 河南康耀电子股份有限公司 High-transmittance electromagnetic shielding coated glass and production and preparation method thereof
CN114133226A (en) * 2021-12-30 2022-03-04 苏州晶生新材料有限公司 Optical coating substrate and using method thereof
CN114609702A (en) * 2022-03-21 2022-06-10 李昊宇 Short-wave near-infrared broadband antireflection film and preparation method thereof

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