CN110753454B - 一种用于精细线路的成型及修复方法 - Google Patents
一种用于精细线路的成型及修复方法 Download PDFInfo
- Publication number
- CN110753454B CN110753454B CN201911229212.6A CN201911229212A CN110753454B CN 110753454 B CN110753454 B CN 110753454B CN 201911229212 A CN201911229212 A CN 201911229212A CN 110753454 B CN110753454 B CN 110753454B
- Authority
- CN
- China
- Prior art keywords
- light
- thin copper
- laser
- copper layer
- transmitting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 42
- 239000010949 copper Substances 0.000 claims abstract description 118
- 229910052802 copper Inorganic materials 0.000 claims abstract description 115
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 113
- 238000004140 cleaning Methods 0.000 claims abstract description 14
- 238000009713 electroplating Methods 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 14
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims abstract description 12
- 238000005253 cladding Methods 0.000 claims abstract description 9
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 238000000465 moulding Methods 0.000 claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 230000007547 defect Effects 0.000 claims description 20
- 230000008439 repair process Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 10
- 239000003989 dielectric material Substances 0.000 claims description 6
- 238000002834 transmittance Methods 0.000 claims description 6
- 150000002632 lipids Chemical class 0.000 claims description 5
- 239000003921 oil Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000008901 benefit Effects 0.000 abstract description 2
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000008719 thickening Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/225—Correcting or repairing of printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Nanotechnology (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911229212.6A CN110753454B (zh) | 2019-12-04 | 2019-12-04 | 一种用于精细线路的成型及修复方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911229212.6A CN110753454B (zh) | 2019-12-04 | 2019-12-04 | 一种用于精细线路的成型及修复方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110753454A CN110753454A (zh) | 2020-02-04 |
CN110753454B true CN110753454B (zh) | 2020-08-18 |
Family
ID=69285521
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911229212.6A Active CN110753454B (zh) | 2019-12-04 | 2019-12-04 | 一种用于精细线路的成型及修复方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110753454B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112399724B (zh) * | 2020-11-04 | 2022-03-22 | 广东佛智芯微电子技术研究有限公司 | 一种基于键合丝的精细线路修复方法 |
CN113286441A (zh) * | 2021-03-23 | 2021-08-20 | 广东工业大学 | 一种三明治结构式金属线路成型方法和金属线路清洗方法 |
CN113275567B (zh) * | 2021-04-30 | 2022-04-05 | 广东工业大学 | 一种激光烧结成型方法 |
CN113597107B (zh) * | 2021-07-28 | 2022-08-05 | 广东工业大学 | 一种微小液滴辅助式纳米金属精细线路的加工方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4970196A (en) * | 1987-01-15 | 1990-11-13 | The Johns Hopkins University | Method and apparatus for the thin film deposition of materials with a high power pulsed laser |
WO2007071985A1 (en) * | 2005-12-20 | 2007-06-28 | The University Of Bristol | Method of and apparatus for transferring material from a carrier to a substrate by laser irradiation |
CN104797087A (zh) * | 2013-12-15 | 2015-07-22 | 奥宝科技有限公司 | 修复印刷电路迹线的方法和设备 |
CN106575077A (zh) * | 2014-08-07 | 2017-04-19 | 奥宝科技有限公司 | Lift印刷系统 |
CN107846784A (zh) * | 2017-10-19 | 2018-03-27 | 广东工业大学 | 一种高密度嵌入式线路的制作方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008157666A1 (en) * | 2007-06-19 | 2008-12-24 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Sub-micron laser direct write |
US10252507B2 (en) * | 2013-11-19 | 2019-04-09 | Rofin-Sinar Technologies Llc | Method and apparatus for forward deposition of material onto a substrate using burst ultrafast laser pulse energy |
-
2019
- 2019-12-04 CN CN201911229212.6A patent/CN110753454B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4970196A (en) * | 1987-01-15 | 1990-11-13 | The Johns Hopkins University | Method and apparatus for the thin film deposition of materials with a high power pulsed laser |
WO2007071985A1 (en) * | 2005-12-20 | 2007-06-28 | The University Of Bristol | Method of and apparatus for transferring material from a carrier to a substrate by laser irradiation |
CN104797087A (zh) * | 2013-12-15 | 2015-07-22 | 奥宝科技有限公司 | 修复印刷电路迹线的方法和设备 |
CN106575077A (zh) * | 2014-08-07 | 2017-04-19 | 奥宝科技有限公司 | Lift印刷系统 |
CN107846784A (zh) * | 2017-10-19 | 2018-03-27 | 广东工业大学 | 一种高密度嵌入式线路的制作方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110753454A (zh) | 2020-02-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110753454B (zh) | 一种用于精细线路的成型及修复方法 | |
US11212921B2 (en) | Method for repairing a fine line | |
JP2008166736A (ja) | プリント基板の製造方法およびプリント基板加工機 | |
JPH11266084A (ja) | 多層印刷回路基板の製造方法 | |
CN104093279A (zh) | 一种基于激光凹槽加工工艺的印制电路板制作方法 | |
CN111356296A (zh) | 电路板精密线路的制备方法、电路板精密线路及电路板 | |
WO2024045411A1 (zh) | 激光制导电图案并电气互连不同面的制造多层电路板方法 | |
JPH0936522A (ja) | プリント配線板における回路形成方法 | |
JPH10513314A (ja) | 金属層を非金属基板から選択的に除去する方法 | |
CN113709986A (zh) | 只电镀孔后激光制抗镀图案和导电图案的制电路板方法 | |
CN113709984A (zh) | 一种用激光加工电镀孔、焊盘抗镀及抗蚀图案的制电路板方法 | |
CN113710011A (zh) | 一种只电镀加厚并可焊性处理孔后激光制蚀刻图案的制造电路板方法 | |
KR100661108B1 (ko) | 레이저 가공방법 | |
CN113727537A (zh) | 一种用激光分别加工电镀孔、线路掩膜,蚀刻制电路板方法 | |
CN113747673A (zh) | 一种用激光分别加工电镀孔、线路掩膜和导电图案的制电路板方法 | |
CN113692131A (zh) | 一种用激光加工电镀孔抗镀及导电图案的制电路板方法 | |
CN111132475B (zh) | 一种埋孔制作方法 | |
CN115460773A (zh) | 用激光制造开口转移物料制电路板的方法、软件及设备 | |
CN113727541A (zh) | 一种选择性电镀孔,激光制导电图案的电路板生产方法 | |
JP2009239215A (ja) | 銅張積層板およびこれを用いた配線基板の製造方法ならびに銅張積層板の端面処理方法およびこれに用いる端面処理装置 | |
CN113727540A (zh) | 选择性电镀孔、焊盘,激光制导电图案的制造电路板方法 | |
CN113709985A (zh) | 选择性电镀孔、焊盘,激光制抗蚀图案,化学蚀刻制导电图案的制造电路板方法 | |
CN113709983B (zh) | 一种用激光加工电镀孔、焊盘抗镀及导电图案的制电路板方法 | |
US20240049397A1 (en) | Methods to fill through-holes of a substrate with metal paste | |
JP2017034151A (ja) | 回路基板とその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240206 Address after: Room A107, Research Building A, Neifo High tech Think Tank Center, Nanhai Software Technology Park, Shishan Town, Nanhai District, Foshan City, Guangdong Province, 528000 Patentee after: Guangdong fozhixin microelectronics technology research Co.,Ltd. Country or region after: China Address before: 510006 Dongfeng East Road, Yuexiu District, Guangzhou, Guangdong 729 Patentee before: GUANGDONG University OF TECHNOLOGY Country or region before: China |