CN110726380A - Multispectral microscopic three-dimensional morphology detection device and method - Google Patents

Multispectral microscopic three-dimensional morphology detection device and method Download PDF

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CN110726380A
CN110726380A CN201911151138.0A CN201911151138A CN110726380A CN 110726380 A CN110726380 A CN 110726380A CN 201911151138 A CN201911151138 A CN 201911151138A CN 110726380 A CN110726380 A CN 110726380A
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longitudinal
multispectral
gray
equal
spectral
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易定容
叶一青
孔令华
蒋威
朱星星
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Ningbo 5-D Inspection Technology Co Ltd
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Ningbo 5-D Inspection Technology Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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Abstract

The invention relates to a multispectral microscopic three-dimensional shape detection device and a method, wherein the device comprises: polychromatic light illumination module, vertical dispersion enhancement mode optical imaging module, polychromatic light illumination module has set gradually according to light path propagation direction: the device comprises a polychromatic light source, a condenser, a uniform collimating light lens group, a semi-reflecting and semi-transmitting spectroscope and an objective lens with longitudinal dispersion; the longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a sample stage with adjustable longitudinal height, an objective lens with longitudinal dispersion, a semi-reflecting semi-permeable spectroscope, a tube lens with longitudinal dispersion, a multispectral image sensor and an image display and analysis module. The method can realize the microscopic three-dimensional morphology detection with high transverse resolution, submicron level high longitudinal measurement precision and millimeter level large longitudinal measurement range by one-time imaging under the condition of no mechanical motion, and has high measurement efficiency and high measurement precision.

Description

Multispectral microscopic three-dimensional morphology detection device and method
Technical Field
The invention belongs to the field of optical microscopic imaging, relates to a microscopic surface topography detection device and method, and particularly relates to a multispectral-based microscopic three-dimensional topography detection device and method.
Background
The existing microscopic three-dimensional shape detection technology has a plurality of defects, such as small observation range of scanning type microscopic detection and low environment anti-interference capability; the interferometric method requires a large number of axial scans, which limits the measurement efficiency of the method; the traditional confocal microscopic measurement single-point mechanical scanning is difficult to realize real-time and rapid three-dimensional detection; although the parallel confocal detection technology realizes simultaneous detection of sampling points on the same confocal section, longitudinal scanning or mechanical scanning of auxiliary equipment is still required, and the measurement efficiency and the measurement accuracy are limited to a certain extent by starting and stopping the scanning process for many times and vibration of the mechanical scanning. For example, the conventional application No. cn201510922156.x solves the problem of layer-by-layer longitudinal scanning in the conventional parallel confocal detection technology, but still needs to acquire sample gray level images before and after the focal plane is focused, and there is mechanical start-stop motion. Therefore, there is a need for an optical detection method to solve the above problems and achieve high-precision and high-efficiency detection of microscopic three-dimensional features.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a multispectral microscopic three-dimensional shape detection device and a microscopic three-dimensional shape detection method. The device and the multispectral microscopic three-dimensional morphology detection method implemented on the device can realize the microscopic three-dimensional morphology measurement with high transverse resolution, submicron scale high longitudinal measurement precision and millimeter scale large longitudinal measurement range by one-time imaging under the condition of no mechanical motion, and have high measurement efficiency and measurement precision.
The purpose of the invention is realized as follows:
the multispectral microscopic three-dimensional morphology detection device comprises a polychromatic light illumination module and a longitudinal dispersion enhanced optical imaging module.
The compound color light illumination module is sequentially provided with the following components in the light path propagation direction: the device comprises a polychromatic light source, a condenser, a uniform collimating light lens group, a semi-reflecting and semi-transmitting spectroscope and an objective lens with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a sample stage with adjustable longitudinal height, an objective lens with longitudinal dispersion, a semi-reflecting semi-permeable spectroscope, a tube lens with longitudinal dispersion, a multispectral image sensor and an image display and analysis module.
The polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share a semi-reflecting semi-transparent spectroscope and an objective lens with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module comprises at least one objective lens with longitudinal dispersion, or comprises at least one tube lens with longitudinal dispersion, or other beneficial combinations.
The longitudinal dispersion enhanced optical imaging module has different focal lengths or image distances for optical signals of different wave bands, namely, under the same object distance, the object clear imaging axial positions of different wave bands are different, and the object surface height can be reversely deduced according to the clear imaging wave bands of the multispectral image sensor.
The longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
The multispectral image sensor can simultaneously acquire N (N is more than or equal to 2) sample gray level images I with different central wavelength spectral bands at zero time differencen(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image.
The multispectral microscopic three-dimensional shape detection method realized on the multispectral microscopic three-dimensional shape detection device comprises the following operation steps:
step 1, placing a sample to be detected on a sample table with adjustable longitudinal height;
step 2, adjusting the longitudinal height adjustable sample stage to enable a certain imaging spectral band of the multispectral imaging sensor to clearly image the sample;
step 3, acquiring N (N is more than or equal to 2) samples in the spectral band gray level image I with different central wavelengths by the multispectral image sensorn(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total row number of the spectrum band gray level images, and Y is the total column number of the spectrum band gray level images;
step 4, doing the gray level image per point (x, y) under the adjacent spectral wave bandsDifference processing, multispectral image gray-scale difference ID(x,y)＝In(x,y)-In-1(x,y)；
Step 5, through the pre-calibrated multispectral gray difference IDAnd a longitudinal height ZnAnd (4) calculating a reduction sample surface topography Z (x, y) according to the relation curve.
The multispectral microscopic three-dimensional morphology detection method also comprises a multispectral gray difference ID(x, y) and a longitudinal height ZnThe relation curve calibration method comprises the following operation steps:
step 5.1, adjusting the sample stage with the adjustable longitudinal height, and simultaneously obtaining axial characteristic curves I of axial light intensity and defocusing amount of different central wavelength spectrum bandsλn，1≤n≤N；
Step 5.2, carrying out axial characteristic curve I on axial light intensity and defocusing amount of different central wavelength spectrum wave bandsλnCarrying out normalization processing;
step 5.3, with wave band lambda1，λ2For example, the actual operation is not limited to λ1，λ2Performing difference processing I on gray level images of different center wavelength spectrum wave bands lambda 1 and lambda 2λ1-Iλ2To obtain different spectral bands lambda1，λ2Differential curve ID；
Step 5.4, to differential curve IDPerforming linear function fitting in the linear region to obtain multispectral gray difference IDAnd a longitudinal height ZnCalibration curve of the relationship.
The multispectral microscopic three-dimensional morphology detection method also comprises the step of correcting the illumination unevenness of the optical imaging system, wherein the correction processing mode is mainly realized by dividing the obtained gray difference or differential curve by the sum of the gray values of the corresponding points of the two-waveband gray image.
The multispectral microscopic three-dimensional morphology detection method can also comprise the step of correcting the uneven reflectivity of the samples, wherein the correction processing mode is mainly realized by multiplying the gray values of the gray images of the spectral bands with different central wavelengths obtained in the step by a relative reflection coefficient. The relative reflection coefficient is set to 1 based on the substance with the largest surface reflectivity, and the relative reflection coefficient of other substances is the substance highest reflectivity divided by the substance reflectivity. The gray value of the gray image of the substances with the same height and different reflectivity under the same wave band can be equal through the correction processing mode.
The multispectral microscopic three-dimensional morphology detection method can also comprise the step of compensating the gray level of images in different spectral bands of the multispectral imaging system due to the fact that the transmittance of a filter changes with the band, the intensity of illumination light changes with the band, or the quantum effect of a multispectral camera changes with the band, wherein the compensation processing mode is mainly realized by multiplying the gray level of the gray level images in the spectral bands with different central wavelengths obtained in the step by a band adjusting coefficient. The band adjustment coefficient obtaining mode is as follows: under the illumination of a uniform multi-color light source in a specific given space, a multi-spectral camera is adopted to obtain N spectral images from a surface-flattened sample with uniform reflectivity for different wave bands, the gray scale adjustment coefficient of the maximum gray scale image is 1, and the gray scale adjustment coefficients of other N-1 wave band images are the gray scale mean value of the maximum gray scale image divided by the gray scale mean value of the wave band image.
Compared with the existing microscopic three-dimensional shape detection technology, the invention adopts non-contact scanning, non-single-point scanning or layer-by-layer scanning, can realize the acquisition of the microscopic three-dimensional shape measurement with high transverse resolution, submicron scale high longitudinal measurement precision and millimeter scale large longitudinal measurement range by one-time imaging under the condition of no mechanical motion, and has high measurement efficiency and measurement precision.
Drawings
FIG. 1 is a schematic structural diagram of a multispectral microscopic three-dimensional topography detection device.
In the figure: the device comprises a 1-polychromatic light source, a 2-condenser, a 3-uniform collimating light lens group, a 4-semi-reflecting and semi-transmitting spectroscope, a 5-objective lens with longitudinal dispersion, a 6-longitudinal height-adjustable sample stage, a 7-tube lens with longitudinal dispersion, an 8-multispectral image sensor and a 9-image display and analysis module.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Example one
The present embodiment is an apparatus embodiment.
The multispectral microscopic three-dimensional morphology detection device in the embodiment is shown in the attached drawing 1 in the specification, and comprises a polychromatic light illumination module and a longitudinal dispersion enhanced optical imaging module.
The compound color light illumination module is sequentially provided with the following components in the light path propagation direction: the device comprises a polychromatic light source 1, a condenser 2, a uniform collimating light lens group 3, a semi-reflecting and semi-transmitting spectroscope 4 and an objective lens 5 with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a sample stage 6 with adjustable longitudinal height, an objective 5 with longitudinal dispersion, a semi-reflecting semi-transmitting spectroscope 4, a tube lens 7 with longitudinal dispersion, a multispectral image sensor 8 and an image display and analysis module 9.
The polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share a semi-reflecting semi-transparent spectroscope 4 and an objective lens 5 with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module comprises at least one objective lens 5 with longitudinal dispersion, or comprises at least one tube mirror 7 with longitudinal dispersion, or other beneficial combinations.
The longitudinal dispersion enhanced optical imaging module has different focal lengths or image distances for optical signals of different wave bands, namely, under the same object distance, the object clear imaging axial positions of different wave bands are different, and the object surface height can be reversely deduced according to the clear imaging wave bands of the multispectral image sensor.
The longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
The multispectral image sensor 8 can simultaneously acquire N (N is more than or equal to 2) sample gray level images I of different central wavelength spectral bands with zero time differencen(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total number of rows of the spectrum gray level image, and Y is the spectrum grayThe total number of columns of the image.
Example two
This embodiment is an embodiment of a method implemented on the apparatus described in the first embodiment.
The multispectral microscopic three-dimensional morphology detection method comprises the following operation steps:
step 1, placing a sample to be detected on a sample table 6 with adjustable longitudinal height;
step 2, adjusting the longitudinal height adjustable sample stage 6 to enable a certain imaging spectral band of the multispectral imaging sensor 8 to clearly image the sample;
step 3, acquiring N (N is more than or equal to 2) samples in different central wavelength spectral band gray level images I through the multispectral image sensor 8n(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total row number of the spectrum band gray level images, and Y is the total column number of the spectrum band gray level images;
step 4, performing difference processing on each point (x, y) of the gray level image under the adjacent spectral wave bands, and performing multispectral image gray level difference ID(x,y)＝In(x,y)-In-1(x,y)；
Step 5, through the pre-calibrated multispectral gray difference IDAnd a longitudinal height ZnAnd (4) calculating a reduction sample surface topography Z (x, y) according to the relation curve.
The multispectral microscopic three-dimensional morphology detection method of the embodiment further comprises a multispectral gray-scale difference ID(x, y) and a longitudinal height ZnThe relation curve calibration method comprises the following operation steps:
step 5.1, adjusting the longitudinal height adjustable object stage 6, and simultaneously obtaining axial characteristic curves I of axial light intensity and defocusing amount of different central wavelength spectrum wave bandsλn，1≤n≤N；
Step 5.2, carrying out axial characteristic curve I on axial light intensity and defocusing amount of different central wavelength spectrum wave bandsλnCarrying out normalization processing;
step 5.3, with wave band lambda1，λ2For example, the actual operation is not limited to λ1，λ2The spectral bands λ of different central wavelengths1, lambda 2 gray level image difference processing Iλ1-Iλ2Obtaining the wave band lambda1，λ2Differential curve ID；
Step 5.4, to differential curve IDPerforming linear function fitting in the linear region to obtain multispectral gray difference IDAnd a longitudinal height ZnCalibration curve of the relationship.
The multispectral microscopic three-dimensional morphology detection method further comprises the step of correcting uneven illumination light of the optical imaging system, wherein the correction processing mode is mainly realized by dividing the obtained gray difference or differential curve by the sum of gray values of corresponding points of the two-waveband gray image.
The multispectral microscopic three-dimensional morphology detection method of the embodiment can further comprise the step of correcting the uneven reflectivity of the samples, wherein the correction processing mode is mainly realized by multiplying the gray values of the gray images of the spectral bands with different central wavelengths obtained in the steps by a relative reflection coefficient. The relative reflection coefficient is set to 1 based on the substance with the largest surface reflectivity, and the relative reflection coefficient of other substances is the substance highest reflectivity divided by the substance reflectivity. The gray value of the gray image of the substances with the same height and different reflectivity under the same wave band can be equal through the correction processing mode.
The multispectral microscopic three-dimensional morphology detection method of the embodiment may further include performing compensation processing on the gray levels of the images of different spectral bands of the multispectral imaging system due to the fact that the transmittance of a filter changes with the band, or the intensity of illumination light changes with the band, or the quantum effect of a multispectral camera changes with the band, wherein the compensation processing mode is mainly realized by multiplying the gray values of the gray levels of the images of the spectral bands of different central wavelengths obtained in the above steps by a band adjustment coefficient. The band adjustment coefficient obtaining mode is as follows: under the illumination of a uniform multi-color light source in a specific given space, a multi-spectral camera is adopted to obtain N spectral images from a surface-flattened sample with uniform reflectivity for different wave bands, the gray scale adjustment coefficient of the maximum gray scale image is 1, and the gray scale adjustment coefficients of other N-1 wave band images are the gray scale mean value of the maximum gray scale image divided by the gray scale mean value of the wave band image.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (9)

1. A multispectral microscopic three-dimensional shape detection device is characterized in that: comprises a polychromatic light illumination module and a longitudinal dispersion enhanced optical imaging module,
the compound color light illumination module is sequentially provided with the following components in the light path propagation direction: the device comprises a polychromatic light source (1), a condenser (2), a uniform collimating light lens group (3), a semi-reflecting and semi-transmitting spectroscope (4) and an objective lens (5) with longitudinal dispersion;
the longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a longitudinal height adjustable sample stage (6), an objective lens (5) with longitudinal dispersion, a semi-reflecting and semi-transmitting spectroscope (4), a tube lens (7) with longitudinal dispersion, a multispectral image sensor (8) and an image display and analysis module (9);
the polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share the semi-reflecting semi-transparent spectroscope (4) and the objective lens (5) with longitudinal dispersion.
2. The multi-spectral microscopic three-dimensional topography detection device according to claim 1, wherein: the longitudinal dispersion enhanced optical imaging module comprises at least one objective lens (5) with longitudinal dispersion or at least one tube lens (7) with longitudinal dispersion.
3. The multi-spectral microscopic three-dimensional topography detection device according to claim 1, wherein: the longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
4. The multi-spectral microscopic three-dimensional topography detection device according to claim 1, wherein: the multispectral image sensor (8) can simultaneously acquire N sample gray level images I with different central wavelength spectral bands at zero time differencen(X, Y), wherein N is more than or equal to 2, X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image.
5. A method for multi-spectral micro-three-dimensional topography detection using the multi-spectral micro-three-dimensional topography detection device according to any one of claims 1 to 4, comprising the following steps:
step 1, a sample to be detected is placed on a sample table (6) with adjustable longitudinal height;
step 2, adjusting the longitudinal height adjustable sample stage (6) to enable a certain imaging spectral wave band of the multispectral imaging sensor (8) to clearly image the sample;
step 3, obtaining the gray level image I of N samples in different central wavelength spectral bands through the multispectral image sensor (8)n(X, Y), wherein N is more than or equal to 2, X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image;
step 4, carrying out difference processing on each point of the gray level image under the adjacent spectral wave bands to obtain the gray level difference I of the multispectral imageD(x,y)＝In(x,y)-In-1(x,y)；
Step 5, through the pre-calibrated multispectral gray difference IDAnd a longitudinal height ZnAnd (4) calculating a reduction sample surface topography Z (x, y) according to the relation curve.
6. The method for multi-spectral microscopic three-dimensional topography detection according to claim 5, wherein: the method further comprises multispectral gray scale differences ID(x, y) and a longitudinal height ZnThe calibration method of the relation curve comprises the following operation steps:
step 5.1, adjusting the sample stage (6) with adjustable longitudinal height and simultaneously obtaining light with different central wavelengthsAxial characteristic curve I of axial light intensity and defocusing amount of spectral bandλn，1≤n≤N；
Step 5.2, carrying out axial characteristic curve I on axial light intensity and defocusing amount of different central wavelength spectrum wave bandsλnCarrying out normalization processing;
step 5.3, different center wavelength spectrum wave bands lambda are processed1，λ2The gray level image is subjected to difference processing Iλ1-Iλ2Obtaining the wave band lambda1，λ2Differential curve ID；
Step 5.4, to differential curve IDPerforming linear function fitting in the linear region to obtain multispectral gray difference IDAnd a longitudinal height ZnCalibration curve of the relationship.
7. The method for multi-spectral microscopic three-dimensional topography detection according to claim 5 or 6, wherein: and the correction processing mode is realized by dividing the obtained gray difference or differential curve by the sum of the gray values of the corresponding points of the gray images of the two wave bands.
8. The method for multi-spectral microscopic three-dimensional topography detection according to claim 5 or 6, wherein: and correcting the uneven reflectivity of the samples in a manner of multiplying the gray values of the obtained gray images of different central wavelength spectral bands by a relative reflection coefficient.
9. The method for multi-spectral microscopic three-dimensional topography detection according to claim 5 or 6, wherein: the method also comprises the step of compensating the gray level of the images of different spectral bands of the multispectral imaging system due to the fact that the transmittance of a filter changes with the band, the intensity of illumination light changes with the band, or the quantum effect of a multispectral camera changes with the band, wherein the compensation processing mode is realized by multiplying the gray level of the obtained gray level images of different spectral bands of different central wavelengths by a band adjusting coefficient.
CN201911151138.0A 2019-11-21 2019-11-21 Multispectral microscopic three-dimensional morphology detection device and method Pending CN110726380A (en)

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