CN110709982A - 对位装置和测试设备 - Google Patents
对位装置和测试设备 Download PDFInfo
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- CN110709982A CN110709982A CN201780091706.5A CN201780091706A CN110709982A CN 110709982 A CN110709982 A CN 110709982A CN 201780091706 A CN201780091706 A CN 201780091706A CN 110709982 A CN110709982 A CN 110709982A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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Abstract
一种对位装置(100)及具有该对位装置(100)的测试设备(1000)。对位装置用于对准显示面板(200)及压头(300)。显示面板(200)设置有对位标识(202),压头(300)设置有与对位标识(202)对应的对准标识(302)。对位装置(100)包括反射组件(10)和图像获取装置(30)。反射组件(10)用于反射对位标识(202)和对准标识(302);图像获取装置(30)与对位标识(202)及对准标识(302)对应。图像获取装置(30)用于拍摄反射组件(10)反射的对位标识(202)和对准标识(302)以得到对位标识图像和对准标识图像,对位标识图像和对准标识图像用于辅助调整显示面板(200)和压头(300)处于对准状态。
Description
PCT国内申请,说明书已公开。
Claims (15)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2017/100496 WO2019047005A1 (zh) | 2017-09-05 | 2017-09-05 | 对位装置和测试设备 |
Publications (1)
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CN110709982A true CN110709982A (zh) | 2020-01-17 |
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CN201780091706.5A Pending CN110709982A (zh) | 2017-09-05 | 2017-09-05 | 对位装置和测试设备 |
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CN (1) | CN110709982A (zh) |
WO (1) | WO2019047005A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113115517A (zh) * | 2021-04-09 | 2021-07-13 | 武汉先河激光技术有限公司 | 一种基于机器视觉的套准方法 |
CN113329147A (zh) * | 2021-04-29 | 2021-08-31 | 苏州科韵激光科技有限公司 | 一种图像获取装置以及显示面板的修复设备 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050219492A1 (en) * | 2001-06-27 | 2005-10-06 | Canon Kabushiki Kaisha | Alignment method, exposure apparatus and device fabrication method |
CN101083904A (zh) * | 2006-05-29 | 2007-12-05 | 东捷科技股份有限公司 | 使用双摄影机定位使二物件结合的方法 |
CN101192361A (zh) * | 2006-11-21 | 2008-06-04 | 胜华科技股份有限公司 | 应用于平面显示面板的高定位精准度影像检测装置及其方法 |
CN204086815U (zh) * | 2014-07-03 | 2015-01-07 | 浙江金指科技有限公司 | 一种改进的曝光机靶标识别对准装置 |
CN104698660A (zh) * | 2015-03-20 | 2015-06-10 | 昆山龙腾光电有限公司 | 基板标记位置的抓取装置与抓取方法 |
CN206401288U (zh) * | 2017-01-19 | 2017-08-11 | 合肥鑫晟光电科技有限公司 | 一种绑定对位装置 |
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2017
- 2017-09-05 CN CN201780091706.5A patent/CN110709982A/zh active Pending
- 2017-09-05 WO PCT/CN2017/100496 patent/WO2019047005A1/zh active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050219492A1 (en) * | 2001-06-27 | 2005-10-06 | Canon Kabushiki Kaisha | Alignment method, exposure apparatus and device fabrication method |
CN101083904A (zh) * | 2006-05-29 | 2007-12-05 | 东捷科技股份有限公司 | 使用双摄影机定位使二物件结合的方法 |
CN101192361A (zh) * | 2006-11-21 | 2008-06-04 | 胜华科技股份有限公司 | 应用于平面显示面板的高定位精准度影像检测装置及其方法 |
CN204086815U (zh) * | 2014-07-03 | 2015-01-07 | 浙江金指科技有限公司 | 一种改进的曝光机靶标识别对准装置 |
CN104698660A (zh) * | 2015-03-20 | 2015-06-10 | 昆山龙腾光电有限公司 | 基板标记位置的抓取装置与抓取方法 |
CN206401288U (zh) * | 2017-01-19 | 2017-08-11 | 合肥鑫晟光电科技有限公司 | 一种绑定对位装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113115517A (zh) * | 2021-04-09 | 2021-07-13 | 武汉先河激光技术有限公司 | 一种基于机器视觉的套准方法 |
CN113329147A (zh) * | 2021-04-29 | 2021-08-31 | 苏州科韵激光科技有限公司 | 一种图像获取装置以及显示面板的修复设备 |
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WO2019047005A1 (zh) | 2019-03-14 |
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Address after: 518052 43 Universiade Software Town, 8288 Longgang Avenue, Henggang Street, Longgang District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Ruoyu Technology Co.,Ltd. Address before: 518052 43 Universiade Software Town, 8288 Longgang Avenue, Henggang Street, Longgang District, Shenzhen City, Guangdong Province Applicant before: SHENZHEN ROYOLE TECHNOLOGIES Co.,Ltd. |
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Application publication date: 20200117 |